DE10392404T5 - Messkopfausrichtungsvorrichtung - Google Patents

Messkopfausrichtungsvorrichtung Download PDF

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Publication number
DE10392404T5
DE10392404T5 DE10392404T DE10392404T DE10392404T5 DE 10392404 T5 DE10392404 T5 DE 10392404T5 DE 10392404 T DE10392404 T DE 10392404T DE 10392404 T DE10392404 T DE 10392404T DE 10392404 T5 DE10392404 T5 DE 10392404T5
Authority
DE
Germany
Prior art keywords
stage
alignment device
drehpositionierstufe
movement
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE10392404T
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German (de)
English (en)
Inventor
Kyung Y. Portland Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electro Scientific Industries Inc
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Electro Scientific Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electro Scientific Industries Inc filed Critical Electro Scientific Industries Inc
Publication of DE10392404T5 publication Critical patent/DE10392404T5/de
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
DE10392404T 2002-03-22 2003-03-21 Messkopfausrichtungsvorrichtung Withdrawn DE10392404T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US36691202P 2002-03-22 2002-03-22
US60/366,912 2002-03-22
PCT/US2003/008913 WO2003083494A1 (en) 2002-03-22 2003-03-21 Test probe alignment apparatus

Publications (1)

Publication Number Publication Date
DE10392404T5 true DE10392404T5 (de) 2005-04-14

Family

ID=28675301

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10392404T Withdrawn DE10392404T5 (de) 2002-03-22 2003-03-21 Messkopfausrichtungsvorrichtung

Country Status (10)

Country Link
US (1) US7119566B2 (enExample)
JP (1) JP4803959B2 (enExample)
KR (1) KR101163972B1 (enExample)
CN (1) CN100430735C (enExample)
AU (1) AU2003218348A1 (enExample)
CA (1) CA2476389A1 (enExample)
DE (1) DE10392404T5 (enExample)
GB (1) GB2400447B (enExample)
TW (1) TWI272392B (enExample)
WO (1) WO2003083494A1 (enExample)

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US7119566B2 (en) 2006-10-10
GB2400447A (en) 2004-10-13
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GB0416819D0 (en) 2004-09-01
GB2400447B (en) 2005-10-12
TWI272392B (en) 2007-02-01
CN1639577A (zh) 2005-07-13
TW200304545A (en) 2003-10-01
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CN100430735C (zh) 2008-11-05
JP2005521066A (ja) 2005-07-14

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