DE29508062U1 - Meßgerät für Überdeckungsmessungen von beidseitig strukturierten Substraten, insbesondere Wafern - Google Patents

Meßgerät für Überdeckungsmessungen von beidseitig strukturierten Substraten, insbesondere Wafern

Info

Publication number
DE29508062U1
DE29508062U1 DE29508062U DE29508062U DE29508062U1 DE 29508062 U1 DE29508062 U1 DE 29508062U1 DE 29508062 U DE29508062 U DE 29508062U DE 29508062 U DE29508062 U DE 29508062U DE 29508062 U1 DE29508062 U1 DE 29508062U1
Authority
DE
Germany
Prior art keywords
sides
measuring device
particular wafers
coverage measurements
structured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29508062U
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fabmatics GmbH
Original Assignee
HAP Handhabungs Automatisierungs und Prazisionstechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HAP Handhabungs Automatisierungs und Prazisionstechnik GmbH filed Critical HAP Handhabungs Automatisierungs und Prazisionstechnik GmbH
Priority to DE29508062U priority Critical patent/DE29508062U1/de
Publication of DE29508062U1 publication Critical patent/DE29508062U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/265—Contactless testing
    • G01R31/2656—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
DE29508062U 1995-05-16 1995-05-16 Meßgerät für Überdeckungsmessungen von beidseitig strukturierten Substraten, insbesondere Wafern Expired - Lifetime DE29508062U1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE29508062U DE29508062U1 (de) 1995-05-16 1995-05-16 Meßgerät für Überdeckungsmessungen von beidseitig strukturierten Substraten, insbesondere Wafern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE29508062U DE29508062U1 (de) 1995-05-16 1995-05-16 Meßgerät für Überdeckungsmessungen von beidseitig strukturierten Substraten, insbesondere Wafern

Publications (1)

Publication Number Publication Date
DE29508062U1 true DE29508062U1 (de) 1995-08-03

Family

ID=8008084

Family Applications (1)

Application Number Title Priority Date Filing Date
DE29508062U Expired - Lifetime DE29508062U1 (de) 1995-05-16 1995-05-16 Meßgerät für Überdeckungsmessungen von beidseitig strukturierten Substraten, insbesondere Wafern

Country Status (1)

Country Link
DE (1) DE29508062U1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021101439A1 (de) 2021-01-22 2022-07-28 Carl Zeiss Microscopy Gmbh Mikroskopiesystem und verfahren zur rotationsüberprüfung einer mikroskopkamera

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021101439A1 (de) 2021-01-22 2022-07-28 Carl Zeiss Microscopy Gmbh Mikroskopiesystem und verfahren zur rotationsüberprüfung einer mikroskopkamera

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 19950914

R156 Lapse of ip right after 3 years

Effective date: 19990302