DE69527132T2 - Behälter für Halbleiterplättchen - Google Patents
Behälter für HalbleiterplättchenInfo
- Publication number
- DE69527132T2 DE69527132T2 DE1995627132 DE69527132T DE69527132T2 DE 69527132 T2 DE69527132 T2 DE 69527132T2 DE 1995627132 DE1995627132 DE 1995627132 DE 69527132 T DE69527132 T DE 69527132T DE 69527132 T2 DE69527132 T2 DE 69527132T2
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor wafer
- wafer containers
- containers
- semiconductor
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67383—Closed carriers characterised by substrate supports
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Suspension Of Electric Lines Or Cables (AREA)
- Load-Engaging Elements For Cranes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP19950400683 EP0735572B1 (de) | 1995-03-28 | 1995-03-28 | Behälter für Halbleiterplättchen |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69527132D1 DE69527132D1 (de) | 2002-07-25 |
DE69527132T2 true DE69527132T2 (de) | 2003-02-06 |
Family
ID=8221473
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1995627132 Expired - Fee Related DE69527132T2 (de) | 1995-03-28 | 1995-03-28 | Behälter für Halbleiterplättchen |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0735572B1 (de) |
DE (1) | DE69527132T2 (de) |
ES (1) | ES2177616T3 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10021666A1 (de) * | 2000-05-04 | 2001-11-08 | Atmel Germany Gmbh | Träger für zu bearbeitende Halbleiterscheiben |
US7100772B2 (en) | 2003-11-16 | 2006-09-05 | Entegris, Inc. | Wafer container with door actuated wafer restraint |
CN102844249B (zh) * | 2010-04-20 | 2014-09-10 | 未来儿株式会社 | 基板收纳容器 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3577795D1 (de) * | 1985-12-23 | 1990-06-21 | Asyst Technologies | Durch eine behaeltertuer betaetigter halter. |
JP3250628B2 (ja) * | 1992-12-17 | 2002-01-28 | 東芝セラミックス株式会社 | 縦型半導体熱処理用治具 |
-
1995
- 1995-03-28 DE DE1995627132 patent/DE69527132T2/de not_active Expired - Fee Related
- 1995-03-28 EP EP19950400683 patent/EP0735572B1/de not_active Expired - Lifetime
- 1995-03-28 ES ES95400683T patent/ES2177616T3/es not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0735572B1 (de) | 2002-06-19 |
ES2177616T3 (es) | 2002-12-16 |
EP0735572A1 (de) | 1996-10-02 |
DE69527132D1 (de) | 2002-07-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |