DE69527132D1 - Behälter für Halbleiterplättchen - Google Patents

Behälter für Halbleiterplättchen

Info

Publication number
DE69527132D1
DE69527132D1 DE69527132T DE69527132T DE69527132D1 DE 69527132 D1 DE69527132 D1 DE 69527132D1 DE 69527132 T DE69527132 T DE 69527132T DE 69527132 T DE69527132 T DE 69527132T DE 69527132 D1 DE69527132 D1 DE 69527132D1
Authority
DE
Germany
Prior art keywords
containers
semiconductor wafers
wafers
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69527132T
Other languages
English (en)
Other versions
DE69527132T2 (de
Inventor
David J Ring
Randall S Williams
Richard P Shindley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fluoroware Inc
Original Assignee
Fluoroware Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fluoroware Inc filed Critical Fluoroware Inc
Publication of DE69527132D1 publication Critical patent/DE69527132D1/de
Application granted granted Critical
Publication of DE69527132T2 publication Critical patent/DE69527132T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Load-Engaging Elements For Cranes (AREA)
  • Suspension Of Electric Lines Or Cables (AREA)
DE1995627132 1995-03-28 1995-03-28 Behälter für Halbleiterplättchen Expired - Fee Related DE69527132T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19950400683 EP0735572B1 (de) 1995-03-28 1995-03-28 Behälter für Halbleiterplättchen

Publications (2)

Publication Number Publication Date
DE69527132D1 true DE69527132D1 (de) 2002-07-25
DE69527132T2 DE69527132T2 (de) 2003-02-06

Family

ID=8221473

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1995627132 Expired - Fee Related DE69527132T2 (de) 1995-03-28 1995-03-28 Behälter für Halbleiterplättchen

Country Status (3)

Country Link
EP (1) EP0735572B1 (de)
DE (1) DE69527132T2 (de)
ES (1) ES2177616T3 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10021666A1 (de) * 2000-05-04 2001-11-08 Atmel Germany Gmbh Träger für zu bearbeitende Halbleiterscheiben
US7100772B2 (en) 2003-11-16 2006-09-05 Entegris, Inc. Wafer container with door actuated wafer restraint
JP5374640B2 (ja) * 2010-04-20 2013-12-25 ミライアル株式会社 基板収納容器

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3577795D1 (de) * 1985-12-23 1990-06-21 Asyst Technologies Durch eine behaeltertuer betaetigter halter.
JP3250628B2 (ja) * 1992-12-17 2002-01-28 東芝セラミックス株式会社 縦型半導体熱処理用治具

Also Published As

Publication number Publication date
EP0735572A1 (de) 1996-10-02
EP0735572B1 (de) 2002-06-19
ES2177616T3 (es) 2002-12-16
DE69527132T2 (de) 2003-02-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee