KR960035622U - 웨이퍼 척 - Google Patents

웨이퍼 척

Info

Publication number
KR960035622U
KR960035622U KR2019950007500U KR19950007500U KR960035622U KR 960035622 U KR960035622 U KR 960035622U KR 2019950007500 U KR2019950007500 U KR 2019950007500U KR 19950007500 U KR19950007500 U KR 19950007500U KR 960035622 U KR960035622 U KR 960035622U
Authority
KR
South Korea
Prior art keywords
wafer chuck
chuck
wafer
Prior art date
Application number
KR2019950007500U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950007500U priority Critical patent/KR960035622U/ko
Publication of KR960035622U publication Critical patent/KR960035622U/ko

Links

KR2019950007500U 1995-04-14 1995-04-14 웨이퍼 척 KR960035622U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950007500U KR960035622U (ko) 1995-04-14 1995-04-14 웨이퍼 척

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950007500U KR960035622U (ko) 1995-04-14 1995-04-14 웨이퍼 척

Publications (1)

Publication Number Publication Date
KR960035622U true KR960035622U (ko) 1996-11-21

Family

ID=60867641

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950007500U KR960035622U (ko) 1995-04-14 1995-04-14 웨이퍼 척

Country Status (1)

Country Link
KR (1) KR960035622U (ko)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination