KR960019141U - 파티클 방지용 웨이퍼 척 - Google Patents

파티클 방지용 웨이퍼 척

Info

Publication number
KR960019141U
KR960019141U KR2019940029817U KR19940029817U KR960019141U KR 960019141 U KR960019141 U KR 960019141U KR 2019940029817 U KR2019940029817 U KR 2019940029817U KR 19940029817 U KR19940029817 U KR 19940029817U KR 960019141 U KR960019141 U KR 960019141U
Authority
KR
South Korea
Prior art keywords
particle
wafer chuck
proof wafer
proof
chuck
Prior art date
Application number
KR2019940029817U
Other languages
English (en)
Other versions
KR0117496Y1 (ko
Inventor
문현명
유순포
황두환
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940029817U priority Critical patent/KR0117496Y1/ko
Publication of KR960019141U publication Critical patent/KR960019141U/ko
Application granted granted Critical
Publication of KR0117496Y1 publication Critical patent/KR0117496Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940029817U 1994-11-10 1994-11-10 파티클 방지용 웨이퍼 척 KR0117496Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940029817U KR0117496Y1 (ko) 1994-11-10 1994-11-10 파티클 방지용 웨이퍼 척

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940029817U KR0117496Y1 (ko) 1994-11-10 1994-11-10 파티클 방지용 웨이퍼 척

Publications (2)

Publication Number Publication Date
KR960019141U true KR960019141U (ko) 1996-06-19
KR0117496Y1 KR0117496Y1 (ko) 1998-06-01

Family

ID=19397856

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940029817U KR0117496Y1 (ko) 1994-11-10 1994-11-10 파티클 방지용 웨이퍼 척

Country Status (1)

Country Link
KR (1) KR0117496Y1 (ko)

Also Published As

Publication number Publication date
KR0117496Y1 (ko) 1998-06-01

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