KR940023573U - 웨이퍼 척 - Google Patents

웨이퍼 척

Info

Publication number
KR940023573U
KR940023573U KR2019930004368U KR930004368U KR940023573U KR 940023573 U KR940023573 U KR 940023573U KR 2019930004368 U KR2019930004368 U KR 2019930004368U KR 930004368 U KR930004368 U KR 930004368U KR 940023573 U KR940023573 U KR 940023573U
Authority
KR
South Korea
Prior art keywords
wafer chuck
chuck
wafer
Prior art date
Application number
KR2019930004368U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019930004368U priority Critical patent/KR940023573U/ko
Publication of KR940023573U publication Critical patent/KR940023573U/ko

Links

KR2019930004368U 1993-03-23 1993-03-23 웨이퍼 척 KR940023573U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930004368U KR940023573U (ko) 1993-03-23 1993-03-23 웨이퍼 척

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930004368U KR940023573U (ko) 1993-03-23 1993-03-23 웨이퍼 척

Publications (1)

Publication Number Publication Date
KR940023573U true KR940023573U (ko) 1994-10-22

Family

ID=60856239

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930004368U KR940023573U (ko) 1993-03-23 1993-03-23 웨이퍼 척

Country Status (1)

Country Link
KR (1) KR940023573U (ko)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination