KR970011211U - 웨이퍼 척 - Google Patents
웨이퍼 척Info
- Publication number
- KR970011211U KR970011211U KR2019950021346U KR19950021346U KR970011211U KR 970011211 U KR970011211 U KR 970011211U KR 2019950021346 U KR2019950021346 U KR 2019950021346U KR 19950021346 U KR19950021346 U KR 19950021346U KR 970011211 U KR970011211 U KR 970011211U
- Authority
- KR
- South Korea
- Prior art keywords
- wafer chuck
- chuck
- wafer
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950021346U KR970011211U (ko) | 1995-08-18 | 1995-08-18 | 웨이퍼 척 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950021346U KR970011211U (ko) | 1995-08-18 | 1995-08-18 | 웨이퍼 척 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970011211U true KR970011211U (ko) | 1997-03-29 |
Family
ID=60895412
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950021346U KR970011211U (ko) | 1995-08-18 | 1995-08-18 | 웨이퍼 척 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970011211U (ko) |
-
1995
- 1995-08-18 KR KR2019950021346U patent/KR970011211U/ko not_active Application Discontinuation
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE59510981D1 (de) | Bohrfutter | |
DE69612854T2 (de) | Spannfutter | |
DE59510926D1 (de) | Bohrfutter | |
DE19581725T1 (de) | Spannfutter | |
DE69500752D1 (de) | Wafer Träger | |
DE69528980D1 (de) | Bohrfutter | |
DE69514175D1 (de) | Spannfutter | |
DE29612743U1 (de) | Spannfutter | |
DE29521475U1 (de) | Spannfutter | |
KR960015613U (ko) | 웨이퍼 척 | |
KR970046599U (ko) | 웨이퍼척 | |
DE9405935U1 (de) | Spannfutter | |
KR960035622U (ko) | 웨이퍼 척 | |
KR970003265U (ko) | 웨이퍼 척 | |
KR970011211U (ko) | 웨이퍼 척 | |
KR960006359U (ko) | 웨이퍼 홀딩 척 | |
KR960012675U (ko) | 웨이퍼 척 | |
KR960019141U (ko) | 파티클 방지용 웨이퍼 척 | |
KR940023533U (ko) | 웨이퍼 척의 구조 | |
KR970064208U (ko) | 웨이퍼 척 | |
KR970025846U (ko) | 웨이퍼 운반구 | |
KR950015663U (ko) | 웨이퍼 척 | |
KR940023573U (ko) | 웨이퍼 척 | |
DE29615682U1 (de) | Spannfutter | |
KR970046959U (ko) | 웨이퍼 구조 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |