KR970025846U - 웨이퍼 운반구 - Google Patents

웨이퍼 운반구

Info

Publication number
KR970025846U
KR970025846U KR2019950035951U KR19950035951U KR970025846U KR 970025846 U KR970025846 U KR 970025846U KR 2019950035951 U KR2019950035951 U KR 2019950035951U KR 19950035951 U KR19950035951 U KR 19950035951U KR 970025846 U KR970025846 U KR 970025846U
Authority
KR
South Korea
Prior art keywords
wafer carrier
wafer
carrier
Prior art date
Application number
KR2019950035951U
Other languages
English (en)
Other versions
KR0128756Y1 (ko
Inventor
김문관
박동명
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR2019950035951U priority Critical patent/KR0128756Y1/ko
Publication of KR970025846U publication Critical patent/KR970025846U/ko
Application granted granted Critical
Publication of KR0128756Y1 publication Critical patent/KR0128756Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
    • H01L21/67316—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements characterized by a material, a roughness, a coating or the like
KR2019950035951U 1995-11-27 1995-11-27 웨이퍼 운반구 KR0128756Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950035951U KR0128756Y1 (ko) 1995-11-27 1995-11-27 웨이퍼 운반구

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950035951U KR0128756Y1 (ko) 1995-11-27 1995-11-27 웨이퍼 운반구

Publications (2)

Publication Number Publication Date
KR970025846U true KR970025846U (ko) 1997-06-20
KR0128756Y1 KR0128756Y1 (ko) 1998-12-01

Family

ID=19430517

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950035951U KR0128756Y1 (ko) 1995-11-27 1995-11-27 웨이퍼 운반구

Country Status (1)

Country Link
KR (1) KR0128756Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100479302B1 (ko) * 1997-10-23 2005-07-05 삼성전자주식회사 반도체장치이송용캐리어

Also Published As

Publication number Publication date
KR0128756Y1 (ko) 1998-12-01

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Legal Events

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