KR970056082U - 반도체 웨이퍼 자동반송용 캐리어 - Google Patents

반도체 웨이퍼 자동반송용 캐리어

Info

Publication number
KR970056082U
KR970056082U KR2019960004325U KR19960004325U KR970056082U KR 970056082 U KR970056082 U KR 970056082U KR 2019960004325 U KR2019960004325 U KR 2019960004325U KR 19960004325 U KR19960004325 U KR 19960004325U KR 970056082 U KR970056082 U KR 970056082U
Authority
KR
South Korea
Prior art keywords
semiconductor wafer
wafer carrier
carrier
semiconductor
wafer
Prior art date
Application number
KR2019960004325U
Other languages
English (en)
Other versions
KR200155617Y1 (ko
Inventor
노주석
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR2019960004325U priority Critical patent/KR200155617Y1/ko
Publication of KR970056082U publication Critical patent/KR970056082U/ko
Application granted granted Critical
Publication of KR200155617Y1 publication Critical patent/KR200155617Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
KR2019960004325U 1996-03-08 1996-03-08 반도체 웨이퍼 자동반송용 캐리어 KR200155617Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960004325U KR200155617Y1 (ko) 1996-03-08 1996-03-08 반도체 웨이퍼 자동반송용 캐리어

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960004325U KR200155617Y1 (ko) 1996-03-08 1996-03-08 반도체 웨이퍼 자동반송용 캐리어

Publications (2)

Publication Number Publication Date
KR970056082U true KR970056082U (ko) 1997-10-13
KR200155617Y1 KR200155617Y1 (ko) 1999-09-01

Family

ID=19451645

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960004325U KR200155617Y1 (ko) 1996-03-08 1996-03-08 반도체 웨이퍼 자동반송용 캐리어

Country Status (1)

Country Link
KR (1) KR200155617Y1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100552282B1 (ko) * 1997-12-31 2006-05-11 삼성전자주식회사 유리 기판의 자동 투입 장치 및 그 사용 방법
KR100745969B1 (ko) * 2001-05-18 2007-08-02 동부일렉트로닉스 주식회사 반도체 웨이퍼 수납용 캐리어의 보관용기

Also Published As

Publication number Publication date
KR200155617Y1 (ko) 1999-09-01

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