KR980005433U - 반도체 웨이퍼 정렬 장치 - Google Patents

반도체 웨이퍼 정렬 장치

Info

Publication number
KR980005433U
KR980005433U KR2019960016031U KR19960016031U KR980005433U KR 980005433 U KR980005433 U KR 980005433U KR 2019960016031 U KR2019960016031 U KR 2019960016031U KR 19960016031 U KR19960016031 U KR 19960016031U KR 980005433 U KR980005433 U KR 980005433U
Authority
KR
South Korea
Prior art keywords
semiconductor wafer
wafer sorter
sorter
semiconductor
wafer
Prior art date
Application number
KR2019960016031U
Other languages
English (en)
Other versions
KR200262137Y1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960016031U priority Critical patent/KR200262137Y1/ko
Publication of KR980005433U publication Critical patent/KR980005433U/ko
Application granted granted Critical
Publication of KR200262137Y1 publication Critical patent/KR200262137Y1/ko

Links

KR2019960016031U 1996-06-17 1996-06-17 반도체 웨이퍼 정렬 장치 KR200262137Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960016031U KR200262137Y1 (ko) 1996-06-17 1996-06-17 반도체 웨이퍼 정렬 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960016031U KR200262137Y1 (ko) 1996-06-17 1996-06-17 반도체 웨이퍼 정렬 장치

Publications (2)

Publication Number Publication Date
KR980005433U true KR980005433U (ko) 1998-03-30
KR200262137Y1 KR200262137Y1 (ko) 2002-07-02

Family

ID=60925510

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960016031U KR200262137Y1 (ko) 1996-06-17 1996-06-17 반도체 웨이퍼 정렬 장치

Country Status (1)

Country Link
KR (1) KR200262137Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100369398B1 (ko) * 2000-12-30 2003-01-24 아이티에스테크놀러지 주식회사 기판 프리얼라인 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100369398B1 (ko) * 2000-12-30 2003-01-24 아이티에스테크놀러지 주식회사 기판 프리얼라인 장치

Also Published As

Publication number Publication date
KR200262137Y1 (ko) 2002-07-02

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