KR980005433U - 반도체 웨이퍼 정렬 장치 - Google Patents
반도체 웨이퍼 정렬 장치Info
- Publication number
- KR980005433U KR980005433U KR2019960016031U KR19960016031U KR980005433U KR 980005433 U KR980005433 U KR 980005433U KR 2019960016031 U KR2019960016031 U KR 2019960016031U KR 19960016031 U KR19960016031 U KR 19960016031U KR 980005433 U KR980005433 U KR 980005433U
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor wafer
- wafer sorter
- sorter
- semiconductor
- wafer
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960016031U KR200262137Y1 (ko) | 1996-06-17 | 1996-06-17 | 반도체 웨이퍼 정렬 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960016031U KR200262137Y1 (ko) | 1996-06-17 | 1996-06-17 | 반도체 웨이퍼 정렬 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR980005433U true KR980005433U (ko) | 1998-03-30 |
KR200262137Y1 KR200262137Y1 (ko) | 2002-07-02 |
Family
ID=60925510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019960016031U KR200262137Y1 (ko) | 1996-06-17 | 1996-06-17 | 반도체 웨이퍼 정렬 장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200262137Y1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100369398B1 (ko) * | 2000-12-30 | 2003-01-24 | 아이티에스테크놀러지 주식회사 | 기판 프리얼라인 장치 |
-
1996
- 1996-06-17 KR KR2019960016031U patent/KR200262137Y1/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100369398B1 (ko) * | 2000-12-30 | 2003-01-24 | 아이티에스테크놀러지 주식회사 | 기판 프리얼라인 장치 |
Also Published As
Publication number | Publication date |
---|---|
KR200262137Y1 (ko) | 2002-07-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69717238D1 (de) | Wafer-Haltevorrichtung | |
DE19732625B4 (de) | Halbleiter-Kleinpackung | |
DE59706321D1 (de) | Integrierte halbleiterschaltung | |
KR980005433U (ko) | 반도체 웨이퍼 정렬 장치 | |
KR970056082U (ko) | 반도체 웨이퍼 자동반송용 캐리어 | |
KR980005422U (ko) | 반도체 웨이퍼 캐리어 | |
KR960015613U (ko) | 웨이퍼 척 | |
KR970046599U (ko) | 웨이퍼척 | |
KR970064208U (ko) | 웨이퍼 척 | |
KR980005338U (ko) | 반도체 웨이퍼 냉각장치 | |
KR970064174U (ko) | 웨이퍼 냉각장치 | |
KR960032723U (ko) | 휴대용 웨이퍼 정렬기 | |
KR970059871U (ko) | 반도체 패키지 | |
KR980005467U (ko) | 반도체 패키지 | |
KR980005432U (ko) | 웨이퍼캐리어 | |
KR970064212U (ko) | 웨이퍼캐리어 | |
KR970052856U (ko) | 웨이퍼 운반용 캐리어 | |
KR960035622U (ko) | 웨이퍼 척 | |
KR970003265U (ko) | 웨이퍼 척 | |
KR970011211U (ko) | 웨이퍼 척 | |
KR960019141U (ko) | 파티클 방지용 웨이퍼 척 | |
KR960012675U (ko) | 웨이퍼 척 | |
KR970052867U (ko) | 반도체 제조용 스테이지 | |
KR980005399U (ko) | 반도체 장치 | |
KR970064213U (ko) | 큐에프피용 반도체 칩_ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
N231 | Notification of change of applicant | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20061211 Year of fee payment: 6 |
|
LAPS | Lapse due to unpaid annual fee |