KR980005422U - 반도체 웨이퍼 캐리어 - Google Patents

반도체 웨이퍼 캐리어

Info

Publication number
KR980005422U
KR980005422U KR2019960014867U KR19960014867U KR980005422U KR 980005422 U KR980005422 U KR 980005422U KR 2019960014867 U KR2019960014867 U KR 2019960014867U KR 19960014867 U KR19960014867 U KR 19960014867U KR 980005422 U KR980005422 U KR 980005422U
Authority
KR
South Korea
Prior art keywords
semiconductor wafer
wafer carrier
carrier
semiconductor
wafer
Prior art date
Application number
KR2019960014867U
Other languages
English (en)
Other versions
KR200148627Y1 (ko
Inventor
문성렬
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019960014867U priority Critical patent/KR200148627Y1/ko
Publication of KR980005422U publication Critical patent/KR980005422U/ko
Application granted granted Critical
Publication of KR200148627Y1 publication Critical patent/KR200148627Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
    • H01L21/67316—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements characterized by a material, a roughness, a coating or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR2019960014867U 1996-06-04 1996-06-04 반도체 웨이퍼 캐리어 KR200148627Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960014867U KR200148627Y1 (ko) 1996-06-04 1996-06-04 반도체 웨이퍼 캐리어

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960014867U KR200148627Y1 (ko) 1996-06-04 1996-06-04 반도체 웨이퍼 캐리어

Publications (2)

Publication Number Publication Date
KR980005422U true KR980005422U (ko) 1998-03-30
KR200148627Y1 KR200148627Y1 (ko) 1999-06-15

Family

ID=19457947

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960014867U KR200148627Y1 (ko) 1996-06-04 1996-06-04 반도체 웨이퍼 캐리어

Country Status (1)

Country Link
KR (1) KR200148627Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030048682A (ko) * 2001-12-12 2003-06-25 삼성전자주식회사 반도체 웨이퍼 가이드 및 이를 구비한 반도체 습식세정장치

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100487541B1 (ko) * 2002-09-06 2005-05-03 삼성전자주식회사 반도체기판의 세정/건조 공정에 사용되는 웨이퍼 가이드들

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030048682A (ko) * 2001-12-12 2003-06-25 삼성전자주식회사 반도체 웨이퍼 가이드 및 이를 구비한 반도체 습식세정장치

Also Published As

Publication number Publication date
KR200148627Y1 (ko) 1999-06-15

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