KR960015613U - 웨이퍼 척 - Google Patents

웨이퍼 척

Info

Publication number
KR960015613U
KR960015613U KR2019940026166U KR19940026166U KR960015613U KR 960015613 U KR960015613 U KR 960015613U KR 2019940026166 U KR2019940026166 U KR 2019940026166U KR 19940026166 U KR19940026166 U KR 19940026166U KR 960015613 U KR960015613 U KR 960015613U
Authority
KR
South Korea
Prior art keywords
wafer chuck
chuck
wafer
Prior art date
Application number
KR2019940026166U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940026166U priority Critical patent/KR960015613U/ko
Publication of KR960015613U publication Critical patent/KR960015613U/ko

Links

KR2019940026166U 1994-10-07 1994-10-07 웨이퍼 척 KR960015613U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940026166U KR960015613U (ko) 1994-10-07 1994-10-07 웨이퍼 척

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940026166U KR960015613U (ko) 1994-10-07 1994-10-07 웨이퍼 척

Publications (1)

Publication Number Publication Date
KR960015613U true KR960015613U (ko) 1996-05-17

Family

ID=60846468

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940026166U KR960015613U (ko) 1994-10-07 1994-10-07 웨이퍼 척

Country Status (1)

Country Link
KR (1) KR960015613U (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010018837A (ko) * 1999-08-23 2001-03-15 김영환 반도체 식각장비의 정전척
KR100528265B1 (ko) * 1998-03-31 2005-11-15 에이에스엠엘 네델란즈 비.브이. 개선된 기판홀더를 갖는 리소그래피 투영장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100528265B1 (ko) * 1998-03-31 2005-11-15 에이에스엠엘 네델란즈 비.브이. 개선된 기판홀더를 갖는 리소그래피 투영장치
KR20010018837A (ko) * 1999-08-23 2001-03-15 김영환 반도체 식각장비의 정전척

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination