KR970025847U - 웨이퍼 케리어 센서 핀 - Google Patents
웨이퍼 케리어 센서 핀Info
- Publication number
- KR970025847U KR970025847U KR2019950036246U KR19950036246U KR970025847U KR 970025847 U KR970025847 U KR 970025847U KR 2019950036246 U KR2019950036246 U KR 2019950036246U KR 19950036246 U KR19950036246 U KR 19950036246U KR 970025847 U KR970025847 U KR 970025847U
- Authority
- KR
- South Korea
- Prior art keywords
- wafer carrier
- sensor pins
- carrier sensor
- pins
- wafer
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950036246U KR200202977Y1 (ko) | 1995-11-28 | 1995-11-28 | 웨이퍼 케리어 센서핀 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950036246U KR200202977Y1 (ko) | 1995-11-28 | 1995-11-28 | 웨이퍼 케리어 센서핀 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970025847U true KR970025847U (ko) | 1997-06-20 |
KR200202977Y1 KR200202977Y1 (ko) | 2001-01-15 |
Family
ID=60904268
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950036246U KR200202977Y1 (ko) | 1995-11-28 | 1995-11-28 | 웨이퍼 케리어 센서핀 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200202977Y1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101131147B1 (ko) * | 2011-04-25 | 2012-03-28 | (주)이노시티 | 웨이퍼 저장 장치 |
-
1995
- 1995-11-28 KR KR2019950036246U patent/KR200202977Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR200202977Y1 (ko) | 2001-01-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20060830 Year of fee payment: 7 |
|
LAPS | Lapse due to unpaid annual fee |