KR970025847U - 웨이퍼 케리어 센서 핀 - Google Patents

웨이퍼 케리어 센서 핀

Info

Publication number
KR970025847U
KR970025847U KR2019950036246U KR19950036246U KR970025847U KR 970025847 U KR970025847 U KR 970025847U KR 2019950036246 U KR2019950036246 U KR 2019950036246U KR 19950036246 U KR19950036246 U KR 19950036246U KR 970025847 U KR970025847 U KR 970025847U
Authority
KR
South Korea
Prior art keywords
wafer carrier
sensor pins
carrier sensor
pins
wafer
Prior art date
Application number
KR2019950036246U
Other languages
English (en)
Other versions
KR200202977Y1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950036246U priority Critical patent/KR200202977Y1/ko
Publication of KR970025847U publication Critical patent/KR970025847U/ko
Application granted granted Critical
Publication of KR200202977Y1 publication Critical patent/KR200202977Y1/ko

Links

KR2019950036246U 1995-11-28 1995-11-28 웨이퍼 케리어 센서핀 KR200202977Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950036246U KR200202977Y1 (ko) 1995-11-28 1995-11-28 웨이퍼 케리어 센서핀

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950036246U KR200202977Y1 (ko) 1995-11-28 1995-11-28 웨이퍼 케리어 센서핀

Publications (2)

Publication Number Publication Date
KR970025847U true KR970025847U (ko) 1997-06-20
KR200202977Y1 KR200202977Y1 (ko) 2001-01-15

Family

ID=60904268

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950036246U KR200202977Y1 (ko) 1995-11-28 1995-11-28 웨이퍼 케리어 센서핀

Country Status (1)

Country Link
KR (1) KR200202977Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101131147B1 (ko) * 2011-04-25 2012-03-28 (주)이노시티 웨이퍼 저장 장치

Also Published As

Publication number Publication date
KR200202977Y1 (ko) 2001-01-15

Similar Documents

Publication Publication Date Title
DE69500752T2 (de) Wafer Träger
DE69610457D1 (de) Halbleitervorrichtung
KR970004020A (ko) 반도체장치
KR970005998A (ko) 반도체 장치
DE69631940D1 (de) Halbleitervorrichtung
DE29519530U1 (de) Babyrückentrage
FR2732204B1 (fr) Porte-bebe
DE59603222D1 (de) Sensorträger
DE59603147D1 (de) Trägeranordnung
DE29608667U1 (de) Sondenträger
KR970025847U (ko) 웨이퍼 케리어 센서 핀
DE69635334D1 (de) Halbleiteranordnung
KR970025846U (ko) 웨이퍼 운반구
DE29514410U1 (de) Tragbehälter
KR970046835U (ko) 웨이퍼 캐리어
KR970046596U (ko) 웨이퍼 캐리어
KR970046587U (ko) 웨이퍼 캐리어
KR970025773U (ko) 반도체 장치
KR960025434U (ko) 웨이퍼 캐리어
KR970019763U (ko) 웨이퍼 캐리어박스
FI101615B1 (fi) Kuljetusalus
KR970046876U (ko) 웨이퍼 로딩장치
KR970011212U (ko) 웨이퍼 적재장치
KR960027785U (ko) 웨이퍼 핸들링 장치
KR970046599U (ko) 웨이퍼척

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20060830

Year of fee payment: 7

LAPS Lapse due to unpaid annual fee