KR970011212U - 웨이퍼 적재장치 - Google Patents

웨이퍼 적재장치

Info

Publication number
KR970011212U
KR970011212U KR2019950021655U KR19950021655U KR970011212U KR 970011212 U KR970011212 U KR 970011212U KR 2019950021655 U KR2019950021655 U KR 2019950021655U KR 19950021655 U KR19950021655 U KR 19950021655U KR 970011212 U KR970011212 U KR 970011212U
Authority
KR
South Korea
Prior art keywords
loading device
wafer loading
wafer
loading
Prior art date
Application number
KR2019950021655U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950021655U priority Critical patent/KR970011212U/ko
Publication of KR970011212U publication Critical patent/KR970011212U/ko

Links

KR2019950021655U 1995-08-22 1995-08-22 웨이퍼 적재장치 KR970011212U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950021655U KR970011212U (ko) 1995-08-22 1995-08-22 웨이퍼 적재장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950021655U KR970011212U (ko) 1995-08-22 1995-08-22 웨이퍼 적재장치

Publications (1)

Publication Number Publication Date
KR970011212U true KR970011212U (ko) 1997-03-29

Family

ID=60895499

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950021655U KR970011212U (ko) 1995-08-22 1995-08-22 웨이퍼 적재장치

Country Status (1)

Country Link
KR (1) KR970011212U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application