KR970011212U - 웨이퍼 적재장치 - Google Patents
웨이퍼 적재장치Info
- Publication number
- KR970011212U KR970011212U KR2019950021655U KR19950021655U KR970011212U KR 970011212 U KR970011212 U KR 970011212U KR 2019950021655 U KR2019950021655 U KR 2019950021655U KR 19950021655 U KR19950021655 U KR 19950021655U KR 970011212 U KR970011212 U KR 970011212U
- Authority
- KR
- South Korea
- Prior art keywords
- loading device
- wafer loading
- wafer
- loading
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950021655U KR970011212U (ko) | 1995-08-22 | 1995-08-22 | 웨이퍼 적재장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950021655U KR970011212U (ko) | 1995-08-22 | 1995-08-22 | 웨이퍼 적재장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970011212U true KR970011212U (ko) | 1997-03-29 |
Family
ID=60895499
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950021655U KR970011212U (ko) | 1995-08-22 | 1995-08-22 | 웨이퍼 적재장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970011212U (ko) |
-
1995
- 1995-08-22 KR KR2019950021655U patent/KR970011212U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |