KR960027794U - 웨이퍼 이송장치 - Google Patents

웨이퍼 이송장치

Info

Publication number
KR960027794U
KR960027794U KR2019950000343U KR19950000343U KR960027794U KR 960027794 U KR960027794 U KR 960027794U KR 2019950000343 U KR2019950000343 U KR 2019950000343U KR 19950000343 U KR19950000343 U KR 19950000343U KR 960027794 U KR960027794 U KR 960027794U
Authority
KR
South Korea
Prior art keywords
transfer device
wafer transfer
wafer
transfer
Prior art date
Application number
KR2019950000343U
Other languages
English (en)
Other versions
KR0125850Y1 (ko
Inventor
염시춘
오형관
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950000343U priority Critical patent/KR0125850Y1/ko
Publication of KR960027794U publication Critical patent/KR960027794U/ko
Application granted granted Critical
Publication of KR0125850Y1 publication Critical patent/KR0125850Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
KR2019950000343U 1995-01-11 1995-01-11 웨이퍼 이송장치 KR0125850Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950000343U KR0125850Y1 (ko) 1995-01-11 1995-01-11 웨이퍼 이송장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950000343U KR0125850Y1 (ko) 1995-01-11 1995-01-11 웨이퍼 이송장치

Publications (2)

Publication Number Publication Date
KR960027794U true KR960027794U (ko) 1996-08-17
KR0125850Y1 KR0125850Y1 (ko) 1998-11-02

Family

ID=19406576

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950000343U KR0125850Y1 (ko) 1995-01-11 1995-01-11 웨이퍼 이송장치

Country Status (1)

Country Link
KR (1) KR0125850Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100316535B1 (ko) * 1999-12-31 2001-12-12 박종섭 웨이퍼 정전 리프팅 장치

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990049103A (ko) * 1997-12-11 1999-07-05 윤종용 반도체 설비의 정전기방지 절연방법 및 이를 적용한 절연척
KR101317333B1 (ko) * 2009-06-19 2013-10-11 주식회사 테라세미콘 기판 변형 방지용 보트

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100316535B1 (ko) * 1999-12-31 2001-12-12 박종섭 웨이퍼 정전 리프팅 장치

Also Published As

Publication number Publication date
KR0125850Y1 (ko) 1998-11-02

Similar Documents

Publication Publication Date Title
DE69610457D1 (de) Halbleitervorrichtung
KR970004020A (ko) 반도체장치
KR970005998A (ko) 반도체 장치
DE69631940D1 (de) Halbleitervorrichtung
DE59602432D1 (de) Übergabevorrichtung
DE59607521D1 (de) Halbleiter-Bauelement-Konfiguration
DE19681689T1 (de) Gesichertes Halbleiterbauelement
DE69628482D1 (de) Plattentransportvorrichtung
DE69623375D1 (de) Plattenübertragungsgerät
DE69716544D1 (de) Übertragungsvorrichtung
KR970003259U (ko) 웨이퍼 이송 장치
DE69613028D1 (de) Plattenübertragungsvorrichtung
KR960027794U (ko) 웨이퍼 이송장치
FI954477A0 (fi) Siirtolaite
DE69613032D1 (de) Plattenübertragungsvorrichtung
DE69635334D1 (de) Halbleiteranordnung
KR970046845U (ko) 웨이퍼 이송장치
DE69613027D1 (de) Plattenübertragungsvorrichtung
KR970025773U (ko) 반도체 장치
DE59602448D1 (de) Übergabevorrichtung
DE69625112D1 (de) Plattenübertragungsvorrichtung
KR960032734U (ko) 웨이퍼 세정장치
KR970016477U (ko) 칩 이송장치
KR970003228U (ko) 반도체 장치
KR950031480U (ko) 웨이퍼 이동구

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20090526

Year of fee payment: 12

EXPY Expiration of term