KR950031480U - 웨이퍼 이동구 - Google Patents

웨이퍼 이동구

Info

Publication number
KR950031480U
KR950031480U KR2019940008134U KR19940008134U KR950031480U KR 950031480 U KR950031480 U KR 950031480U KR 2019940008134 U KR2019940008134 U KR 2019940008134U KR 19940008134 U KR19940008134 U KR 19940008134U KR 950031480 U KR950031480 U KR 950031480U
Authority
KR
South Korea
Prior art keywords
wafer transfer
wafer
transfer
Prior art date
Application number
KR2019940008134U
Other languages
English (en)
Other versions
KR0110464Y1 (ko
Inventor
유영헌
Original Assignee
엘지반도체 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체 주식회사 filed Critical 엘지반도체 주식회사
Priority to KR2019940008134U priority Critical patent/KR0110464Y1/ko
Publication of KR950031480U publication Critical patent/KR950031480U/ko
Application granted granted Critical
Publication of KR0110464Y1 publication Critical patent/KR0110464Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940008134U 1994-04-18 1994-04-18 웨이퍼 이동구 KR0110464Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940008134U KR0110464Y1 (ko) 1994-04-18 1994-04-18 웨이퍼 이동구

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940008134U KR0110464Y1 (ko) 1994-04-18 1994-04-18 웨이퍼 이동구

Publications (2)

Publication Number Publication Date
KR950031480U true KR950031480U (ko) 1995-11-22
KR0110464Y1 KR0110464Y1 (ko) 1998-04-06

Family

ID=19381255

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940008134U KR0110464Y1 (ko) 1994-04-18 1994-04-18 웨이퍼 이동구

Country Status (1)

Country Link
KR (1) KR0110464Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101416591B1 (ko) * 2012-12-20 2014-07-08 주식회사 선익시스템 기판의 수동 이동 장치

Also Published As

Publication number Publication date
KR0110464Y1 (ko) 1998-04-06

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Legal Events

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