KR940004356U - 웨이퍼 이동구 - Google Patents

웨이퍼 이동구

Info

Publication number
KR940004356U
KR940004356U KR2019920013088U KR920013088U KR940004356U KR 940004356 U KR940004356 U KR 940004356U KR 2019920013088 U KR2019920013088 U KR 2019920013088U KR 920013088 U KR920013088 U KR 920013088U KR 940004356 U KR940004356 U KR 940004356U
Authority
KR
South Korea
Prior art keywords
wafer transfer
wafer
transfer
Prior art date
Application number
KR2019920013088U
Other languages
English (en)
Other versions
KR950010440Y1 (ko
Inventor
신병철
Original Assignee
Lg 일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lg 일렉트론 주식회사 filed Critical Lg 일렉트론 주식회사
Priority to KR92013088U priority Critical patent/KR950010440Y1/ko
Publication of KR940004356U publication Critical patent/KR940004356U/ko
Application granted granted Critical
Publication of KR950010440Y1 publication Critical patent/KR950010440Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
KR92013088U 1992-07-15 1992-07-15 웨이퍼 이동구 KR950010440Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR92013088U KR950010440Y1 (ko) 1992-07-15 1992-07-15 웨이퍼 이동구

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR92013088U KR950010440Y1 (ko) 1992-07-15 1992-07-15 웨이퍼 이동구

Publications (2)

Publication Number Publication Date
KR940004356U true KR940004356U (ko) 1994-02-24
KR950010440Y1 KR950010440Y1 (ko) 1995-12-13

Family

ID=19336790

Family Applications (1)

Application Number Title Priority Date Filing Date
KR92013088U KR950010440Y1 (ko) 1992-07-15 1992-07-15 웨이퍼 이동구

Country Status (1)

Country Link
KR (1) KR950010440Y1 (ko)

Also Published As

Publication number Publication date
KR950010440Y1 (ko) 1995-12-13

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