KR920013731U - 웨이퍼의 이송장치 - Google Patents

웨이퍼의 이송장치

Info

Publication number
KR920013731U
KR920013731U KR2019900019797U KR900019797U KR920013731U KR 920013731 U KR920013731 U KR 920013731U KR 2019900019797 U KR2019900019797 U KR 2019900019797U KR 900019797 U KR900019797 U KR 900019797U KR 920013731 U KR920013731 U KR 920013731U
Authority
KR
South Korea
Prior art keywords
transfer device
wafer transfer
wafer
transfer
Prior art date
Application number
KR2019900019797U
Other languages
English (en)
Other versions
KR930007703Y1 (ko
Inventor
박노명
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR2019900019797U priority Critical patent/KR930007703Y1/ko
Publication of KR920013731U publication Critical patent/KR920013731U/ko
Application granted granted Critical
Publication of KR930007703Y1 publication Critical patent/KR930007703Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019900019797U 1990-12-14 1990-12-14 웨이퍼의 이송장치 KR930007703Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019900019797U KR930007703Y1 (ko) 1990-12-14 1990-12-14 웨이퍼의 이송장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019900019797U KR930007703Y1 (ko) 1990-12-14 1990-12-14 웨이퍼의 이송장치

Publications (2)

Publication Number Publication Date
KR920013731U true KR920013731U (ko) 1992-07-27
KR930007703Y1 KR930007703Y1 (ko) 1993-11-12

Family

ID=19306974

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019900019797U KR930007703Y1 (ko) 1990-12-14 1990-12-14 웨이퍼의 이송장치

Country Status (1)

Country Link
KR (1) KR930007703Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100863564B1 (ko) * 2008-03-26 2008-10-15 주식회사 텔론텍 암 장치

Also Published As

Publication number Publication date
KR930007703Y1 (ko) 1993-11-12

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
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Payment date: 20021018

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