KR920015762U - 웨이퍼의 정렬 장치 - Google Patents

웨이퍼의 정렬 장치

Info

Publication number
KR920015762U
KR920015762U KR2019910000471U KR910000471U KR920015762U KR 920015762 U KR920015762 U KR 920015762U KR 2019910000471 U KR2019910000471 U KR 2019910000471U KR 910000471 U KR910000471 U KR 910000471U KR 920015762 U KR920015762 U KR 920015762U
Authority
KR
South Korea
Prior art keywords
alignment device
wafer alignment
wafer
alignment
Prior art date
Application number
KR2019910000471U
Other languages
English (en)
Other versions
KR0113167Y1 (ko
Inventor
안만호
Original Assignee
엘지반도체 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체 주식회사 filed Critical 엘지반도체 주식회사
Priority to KR2019910000471U priority Critical patent/KR0113167Y1/ko
Publication of KR920015762U publication Critical patent/KR920015762U/ko
Application granted granted Critical
Publication of KR0113167Y1 publication Critical patent/KR0113167Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019910000471U 1991-01-14 1991-01-14 웨이퍼의 정렬 장치 KR0113167Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019910000471U KR0113167Y1 (ko) 1991-01-14 1991-01-14 웨이퍼의 정렬 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019910000471U KR0113167Y1 (ko) 1991-01-14 1991-01-14 웨이퍼의 정렬 장치

Publications (2)

Publication Number Publication Date
KR920015762U true KR920015762U (ko) 1992-08-17
KR0113167Y1 KR0113167Y1 (ko) 1998-04-14

Family

ID=19309752

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019910000471U KR0113167Y1 (ko) 1991-01-14 1991-01-14 웨이퍼의 정렬 장치

Country Status (1)

Country Link
KR (1) KR0113167Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100451953B1 (ko) * 1997-11-19 2004-11-16 삼성전자주식회사 반도체 패키지 테스트 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100451953B1 (ko) * 1997-11-19 2004-11-16 삼성전자주식회사 반도체 패키지 테스트 장치

Also Published As

Publication number Publication date
KR0113167Y1 (ko) 1998-04-14

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