KR930001528U - 직접회로 이송장치 - Google Patents

직접회로 이송장치

Info

Publication number
KR930001528U
KR930001528U KR2019910009571U KR910009571U KR930001528U KR 930001528 U KR930001528 U KR 930001528U KR 2019910009571 U KR2019910009571 U KR 2019910009571U KR 910009571 U KR910009571 U KR 910009571U KR 930001528 U KR930001528 U KR 930001528U
Authority
KR
South Korea
Prior art keywords
integrated circuit
transfer device
circuit transfer
integrated
transfer
Prior art date
Application number
KR2019910009571U
Other languages
English (en)
Other versions
KR960006410Y1 (ko
Inventor
오석주
Original Assignee
삼성항공산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성항공산업 주식회사 filed Critical 삼성항공산업 주식회사
Priority to KR2019910009571U priority Critical patent/KR960006410Y1/ko
Publication of KR930001528U publication Critical patent/KR930001528U/ko
Application granted granted Critical
Publication of KR960006410Y1 publication Critical patent/KR960006410Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR2019910009571U 1991-06-25 1991-06-25 직접회로 이송장치 KR960006410Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019910009571U KR960006410Y1 (ko) 1991-06-25 1991-06-25 직접회로 이송장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019910009571U KR960006410Y1 (ko) 1991-06-25 1991-06-25 직접회로 이송장치

Publications (2)

Publication Number Publication Date
KR930001528U true KR930001528U (ko) 1993-01-21
KR960006410Y1 KR960006410Y1 (ko) 1996-07-24

Family

ID=19315614

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019910009571U KR960006410Y1 (ko) 1991-06-25 1991-06-25 직접회로 이송장치

Country Status (1)

Country Link
KR (1) KR960006410Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210135766A (ko) * 2020-05-06 2021-11-16 강명석 쇄암선

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210135766A (ko) * 2020-05-06 2021-11-16 강명석 쇄암선

Also Published As

Publication number Publication date
KR960006410Y1 (ko) 1996-07-24

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Legal Events

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E701 Decision to grant or registration of patent right
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Payment date: 20040621

Year of fee payment: 9

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