KR970046845U - 웨이퍼 이송장치 - Google Patents

웨이퍼 이송장치

Info

Publication number
KR970046845U
KR970046845U KR2019950045672U KR19950045672U KR970046845U KR 970046845 U KR970046845 U KR 970046845U KR 2019950045672 U KR2019950045672 U KR 2019950045672U KR 19950045672 U KR19950045672 U KR 19950045672U KR 970046845 U KR970046845 U KR 970046845U
Authority
KR
South Korea
Prior art keywords
transfer device
wafer transfer
wafer
transfer
Prior art date
Application number
KR2019950045672U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950045672U priority Critical patent/KR970046845U/ko
Publication of KR970046845U publication Critical patent/KR970046845U/ko

Links

KR2019950045672U 1995-12-22 1995-12-22 웨이퍼 이송장치 KR970046845U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950045672U KR970046845U (ko) 1995-12-22 1995-12-22 웨이퍼 이송장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950045672U KR970046845U (ko) 1995-12-22 1995-12-22 웨이퍼 이송장치

Publications (1)

Publication Number Publication Date
KR970046845U true KR970046845U (ko) 1997-07-31

Family

ID=60845155

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950045672U KR970046845U (ko) 1995-12-22 1995-12-22 웨이퍼 이송장치

Country Status (1)

Country Link
KR (1) KR970046845U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100327569B1 (ko) * 1998-10-29 2002-04-17 박종섭 웨이퍼 자동 로딩 시스템의 인터록킹 장치 및 그 제어 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100327569B1 (ko) * 1998-10-29 2002-04-17 박종섭 웨이퍼 자동 로딩 시스템의 인터록킹 장치 및 그 제어 방법

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination