KR970046845U - 웨이퍼 이송장치 - Google Patents
웨이퍼 이송장치Info
- Publication number
- KR970046845U KR970046845U KR2019950045672U KR19950045672U KR970046845U KR 970046845 U KR970046845 U KR 970046845U KR 2019950045672 U KR2019950045672 U KR 2019950045672U KR 19950045672 U KR19950045672 U KR 19950045672U KR 970046845 U KR970046845 U KR 970046845U
- Authority
- KR
- South Korea
- Prior art keywords
- transfer device
- wafer transfer
- wafer
- transfer
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950045672U KR970046845U (ko) | 1995-12-22 | 1995-12-22 | 웨이퍼 이송장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950045672U KR970046845U (ko) | 1995-12-22 | 1995-12-22 | 웨이퍼 이송장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970046845U true KR970046845U (ko) | 1997-07-31 |
Family
ID=60845155
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950045672U KR970046845U (ko) | 1995-12-22 | 1995-12-22 | 웨이퍼 이송장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970046845U (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100327569B1 (ko) * | 1998-10-29 | 2002-04-17 | 박종섭 | 웨이퍼 자동 로딩 시스템의 인터록킹 장치 및 그 제어 방법 |
-
1995
- 1995-12-22 KR KR2019950045672U patent/KR970046845U/ko not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100327569B1 (ko) * | 1998-10-29 | 2002-04-17 | 박종섭 | 웨이퍼 자동 로딩 시스템의 인터록킹 장치 및 그 제어 방법 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |