KR930005664U - 웨이퍼 이송용 캐리어 - Google Patents

웨이퍼 이송용 캐리어

Info

Publication number
KR930005664U
KR930005664U KR2019910012887U KR910012887U KR930005664U KR 930005664 U KR930005664 U KR 930005664U KR 2019910012887 U KR2019910012887 U KR 2019910012887U KR 910012887 U KR910012887 U KR 910012887U KR 930005664 U KR930005664 U KR 930005664U
Authority
KR
South Korea
Prior art keywords
wafer transfer
transfer carrier
carrier
wafer
transfer
Prior art date
Application number
KR2019910012887U
Other languages
English (en)
Other versions
KR940005608Y1 (ko
Inventor
송광복
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR2019910012887U priority Critical patent/KR940005608Y1/ko
Publication of KR930005664U publication Critical patent/KR930005664U/ko
Application granted granted Critical
Publication of KR940005608Y1 publication Critical patent/KR940005608Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019910012887U 1991-08-14 1991-08-14 웨이퍼 이송용 캐리어 KR940005608Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019910012887U KR940005608Y1 (ko) 1991-08-14 1991-08-14 웨이퍼 이송용 캐리어

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019910012887U KR940005608Y1 (ko) 1991-08-14 1991-08-14 웨이퍼 이송용 캐리어

Publications (2)

Publication Number Publication Date
KR930005664U true KR930005664U (ko) 1993-03-22
KR940005608Y1 KR940005608Y1 (ko) 1994-08-19

Family

ID=19317843

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019910012887U KR940005608Y1 (ko) 1991-08-14 1991-08-14 웨이퍼 이송용 캐리어

Country Status (1)

Country Link
KR (1) KR940005608Y1 (ko)

Also Published As

Publication number Publication date
KR940005608Y1 (ko) 1994-08-19

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Legal Events

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