KR970050347U - 반도체 웨이퍼 이송기구 - Google Patents
반도체 웨이퍼 이송기구Info
- Publication number
- KR970050347U KR970050347U KR2019960000904U KR19960000904U KR970050347U KR 970050347 U KR970050347 U KR 970050347U KR 2019960000904 U KR2019960000904 U KR 2019960000904U KR 19960000904 U KR19960000904 U KR 19960000904U KR 970050347 U KR970050347 U KR 970050347U
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor wafer
- transfer mechanism
- wafer transfer
- semiconductor
- wafer
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960000904U KR200234725Y1 (ko) | 1996-01-23 | 1996-01-23 | 반도체웨이퍼이송기구 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960000904U KR200234725Y1 (ko) | 1996-01-23 | 1996-01-23 | 반도체웨이퍼이송기구 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970050347U true KR970050347U (ko) | 1997-08-12 |
KR200234725Y1 KR200234725Y1 (ko) | 2001-11-30 |
Family
ID=60843929
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019960000904U KR200234725Y1 (ko) | 1996-01-23 | 1996-01-23 | 반도체웨이퍼이송기구 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200234725Y1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100482009B1 (ko) | 2002-10-22 | 2005-04-14 | 삼성전자주식회사 | 반도체 웨이퍼 이송장치 |
-
1996
- 1996-01-23 KR KR2019960000904U patent/KR200234725Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR200234725Y1 (ko) | 2001-11-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20070514 Year of fee payment: 7 |
|
LAPS | Lapse due to unpaid annual fee |