KR970050347U - 반도체 웨이퍼 이송기구 - Google Patents

반도체 웨이퍼 이송기구

Info

Publication number
KR970050347U
KR970050347U KR2019960000904U KR19960000904U KR970050347U KR 970050347 U KR970050347 U KR 970050347U KR 2019960000904 U KR2019960000904 U KR 2019960000904U KR 19960000904 U KR19960000904 U KR 19960000904U KR 970050347 U KR970050347 U KR 970050347U
Authority
KR
South Korea
Prior art keywords
semiconductor wafer
transfer mechanism
wafer transfer
semiconductor
wafer
Prior art date
Application number
KR2019960000904U
Other languages
English (en)
Other versions
KR200234725Y1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960000904U priority Critical patent/KR200234725Y1/ko
Publication of KR970050347U publication Critical patent/KR970050347U/ko
Application granted granted Critical
Publication of KR200234725Y1 publication Critical patent/KR200234725Y1/ko

Links

KR2019960000904U 1996-01-23 1996-01-23 반도체웨이퍼이송기구 KR200234725Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960000904U KR200234725Y1 (ko) 1996-01-23 1996-01-23 반도체웨이퍼이송기구

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960000904U KR200234725Y1 (ko) 1996-01-23 1996-01-23 반도체웨이퍼이송기구

Publications (2)

Publication Number Publication Date
KR970050347U true KR970050347U (ko) 1997-08-12
KR200234725Y1 KR200234725Y1 (ko) 2001-11-30

Family

ID=60843929

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960000904U KR200234725Y1 (ko) 1996-01-23 1996-01-23 반도체웨이퍼이송기구

Country Status (1)

Country Link
KR (1) KR200234725Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100482009B1 (ko) 2002-10-22 2005-04-14 삼성전자주식회사 반도체 웨이퍼 이송장치

Also Published As

Publication number Publication date
KR200234725Y1 (ko) 2001-11-30

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