KR970056085U - 반도체 제조 공정용 웨이퍼 반송장치 - Google Patents

반도체 제조 공정용 웨이퍼 반송장치

Info

Publication number
KR970056085U
KR970056085U KR2019960005784U KR19960005784U KR970056085U KR 970056085 U KR970056085 U KR 970056085U KR 2019960005784 U KR2019960005784 U KR 2019960005784U KR 19960005784 U KR19960005784 U KR 19960005784U KR 970056085 U KR970056085 U KR 970056085U
Authority
KR
South Korea
Prior art keywords
manufacturing process
transfer device
semiconductor manufacturing
wafer transfer
wafer
Prior art date
Application number
KR2019960005784U
Other languages
English (en)
Other versions
KR200143989Y1 (ko
Inventor
안세일
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019960005784U priority Critical patent/KR200143989Y1/ko
Publication of KR970056085U publication Critical patent/KR970056085U/ko
Application granted granted Critical
Publication of KR200143989Y1 publication Critical patent/KR200143989Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019960005784U 1996-03-25 1996-03-25 반도체 제조 공정용 웨이퍼 반송장치 KR200143989Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960005784U KR200143989Y1 (ko) 1996-03-25 1996-03-25 반도체 제조 공정용 웨이퍼 반송장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960005784U KR200143989Y1 (ko) 1996-03-25 1996-03-25 반도체 제조 공정용 웨이퍼 반송장치

Publications (2)

Publication Number Publication Date
KR970056085U true KR970056085U (ko) 1997-10-13
KR200143989Y1 KR200143989Y1 (ko) 1999-06-15

Family

ID=19452473

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960005784U KR200143989Y1 (ko) 1996-03-25 1996-03-25 반도체 제조 공정용 웨이퍼 반송장치

Country Status (1)

Country Link
KR (1) KR200143989Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010070780A (ko) * 2001-06-07 2001-07-27 박용석 액정표시장치용 유리기판 반송장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010070780A (ko) * 2001-06-07 2001-07-27 박용석 액정표시장치용 유리기판 반송장치

Also Published As

Publication number Publication date
KR200143989Y1 (ko) 1999-06-15

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