KR970046878U - 반도체 웨이퍼의 센터링 장치 - Google Patents

반도체 웨이퍼의 센터링 장치

Info

Publication number
KR970046878U
KR970046878U KR2019950056153U KR19950056153U KR970046878U KR 970046878 U KR970046878 U KR 970046878U KR 2019950056153 U KR2019950056153 U KR 2019950056153U KR 19950056153 U KR19950056153 U KR 19950056153U KR 970046878 U KR970046878 U KR 970046878U
Authority
KR
South Korea
Prior art keywords
semiconductor wafer
centering device
wafer centering
semiconductor
wafer
Prior art date
Application number
KR2019950056153U
Other languages
English (en)
Other versions
KR0132430Y1 (ko
Inventor
서영만
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950056153U priority Critical patent/KR0132430Y1/ko
Publication of KR970046878U publication Critical patent/KR970046878U/ko
Application granted granted Critical
Publication of KR0132430Y1 publication Critical patent/KR0132430Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019950056153U 1995-12-31 1995-12-31 반도체 웨이퍼의 센터링 장치 KR0132430Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950056153U KR0132430Y1 (ko) 1995-12-31 1995-12-31 반도체 웨이퍼의 센터링 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950056153U KR0132430Y1 (ko) 1995-12-31 1995-12-31 반도체 웨이퍼의 센터링 장치

Publications (2)

Publication Number Publication Date
KR970046878U true KR970046878U (ko) 1997-07-31
KR0132430Y1 KR0132430Y1 (ko) 1999-02-01

Family

ID=19444201

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950056153U KR0132430Y1 (ko) 1995-12-31 1995-12-31 반도체 웨이퍼의 센터링 장치

Country Status (1)

Country Link
KR (1) KR0132430Y1 (ko)

Also Published As

Publication number Publication date
KR0132430Y1 (ko) 1999-02-01

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Legal Events

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