KR960029739U - 반도체 웨이퍼의 업/다운장치 - Google Patents

반도체 웨이퍼의 업/다운장치

Info

Publication number
KR960029739U
KR960029739U KR2019950003309U KR19950003309U KR960029739U KR 960029739 U KR960029739 U KR 960029739U KR 2019950003309 U KR2019950003309 U KR 2019950003309U KR 19950003309 U KR19950003309 U KR 19950003309U KR 960029739 U KR960029739 U KR 960029739U
Authority
KR
South Korea
Prior art keywords
semiconductor wafer
down device
wafer
semiconductor
Prior art date
Application number
KR2019950003309U
Other languages
English (en)
Other versions
KR0137928Y1 (ko
Inventor
최정석
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950003309U priority Critical patent/KR0137928Y1/ko
Publication of KR960029739U publication Critical patent/KR960029739U/ko
Application granted granted Critical
Publication of KR0137928Y1 publication Critical patent/KR0137928Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019950003309U 1995-02-27 1995-02-27 반도체 웨이퍼의 업/다운장치 KR0137928Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950003309U KR0137928Y1 (ko) 1995-02-27 1995-02-27 반도체 웨이퍼의 업/다운장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950003309U KR0137928Y1 (ko) 1995-02-27 1995-02-27 반도체 웨이퍼의 업/다운장치

Publications (2)

Publication Number Publication Date
KR960029739U true KR960029739U (ko) 1996-09-17
KR0137928Y1 KR0137928Y1 (ko) 1999-03-20

Family

ID=19408496

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950003309U KR0137928Y1 (ko) 1995-02-27 1995-02-27 반도체 웨이퍼의 업/다운장치

Country Status (1)

Country Link
KR (1) KR0137928Y1 (ko)

Also Published As

Publication number Publication date
KR0137928Y1 (ko) 1999-03-20

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