KR950012605U - 반도체 제조용 웨이퍼 척 - Google Patents

반도체 제조용 웨이퍼 척

Info

Publication number
KR950012605U
KR950012605U KR2019930022117U KR930022117U KR950012605U KR 950012605 U KR950012605 U KR 950012605U KR 2019930022117 U KR2019930022117 U KR 2019930022117U KR 930022117 U KR930022117 U KR 930022117U KR 950012605 U KR950012605 U KR 950012605U
Authority
KR
South Korea
Prior art keywords
semiconductor manufacturing
wafer chuck
chuck
wafer
semiconductor
Prior art date
Application number
KR2019930022117U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019930022117U priority Critical patent/KR950012605U/ko
Publication of KR950012605U publication Critical patent/KR950012605U/ko

Links

KR2019930022117U 1993-10-26 1993-10-26 반도체 제조용 웨이퍼 척 KR950012605U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930022117U KR950012605U (ko) 1993-10-26 1993-10-26 반도체 제조용 웨이퍼 척

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930022117U KR950012605U (ko) 1993-10-26 1993-10-26 반도체 제조용 웨이퍼 척

Publications (1)

Publication Number Publication Date
KR950012605U true KR950012605U (ko) 1995-05-17

Family

ID=60818716

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930022117U KR950012605U (ko) 1993-10-26 1993-10-26 반도체 제조용 웨이퍼 척

Country Status (1)

Country Link
KR (1) KR950012605U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102133583B1 (ko) * 2019-05-03 2020-07-13 주식회사 에스세미텍 반도체 소자용 정전 척 밸런스 체크 툴

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102133583B1 (ko) * 2019-05-03 2020-07-13 주식회사 에스세미텍 반도체 소자용 정전 척 밸런스 체크 툴

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination