KR950028688U - 웨이퍼 이송도구 - Google Patents

웨이퍼 이송도구

Info

Publication number
KR950028688U
KR950028688U KR2019940003998U KR19940003998U KR950028688U KR 950028688 U KR950028688 U KR 950028688U KR 2019940003998 U KR2019940003998 U KR 2019940003998U KR 19940003998 U KR19940003998 U KR 19940003998U KR 950028688 U KR950028688 U KR 950028688U
Authority
KR
South Korea
Prior art keywords
wafer transfer
transfer tool
tool
wafer
transfer
Prior art date
Application number
KR2019940003998U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940003998U priority Critical patent/KR950028688U/ko
Publication of KR950028688U publication Critical patent/KR950028688U/ko

Links

KR2019940003998U 1994-03-03 1994-03-03 웨이퍼 이송도구 KR950028688U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940003998U KR950028688U (ko) 1994-03-03 1994-03-03 웨이퍼 이송도구

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940003998U KR950028688U (ko) 1994-03-03 1994-03-03 웨이퍼 이송도구

Publications (1)

Publication Number Publication Date
KR950028688U true KR950028688U (ko) 1995-10-20

Family

ID=60882639

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940003998U KR950028688U (ko) 1994-03-03 1994-03-03 웨이퍼 이송도구

Country Status (1)

Country Link
KR (1) KR950028688U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application