KR950028688U - 웨이퍼 이송도구 - Google Patents
웨이퍼 이송도구Info
- Publication number
- KR950028688U KR950028688U KR2019940003998U KR19940003998U KR950028688U KR 950028688 U KR950028688 U KR 950028688U KR 2019940003998 U KR2019940003998 U KR 2019940003998U KR 19940003998 U KR19940003998 U KR 19940003998U KR 950028688 U KR950028688 U KR 950028688U
- Authority
- KR
- South Korea
- Prior art keywords
- wafer transfer
- transfer tool
- tool
- wafer
- transfer
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940003998U KR950028688U (ko) | 1994-03-03 | 1994-03-03 | 웨이퍼 이송도구 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940003998U KR950028688U (ko) | 1994-03-03 | 1994-03-03 | 웨이퍼 이송도구 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950028688U true KR950028688U (ko) | 1995-10-20 |
Family
ID=60882639
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940003998U KR950028688U (ko) | 1994-03-03 | 1994-03-03 | 웨이퍼 이송도구 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950028688U (ko) |
-
1994
- 1994-03-03 KR KR2019940003998U patent/KR950028688U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |