KR950034363U - 웨이퍼 척 세정장치 - Google Patents

웨이퍼 척 세정장치

Info

Publication number
KR950034363U
KR950034363U KR2019940012328U KR19940012328U KR950034363U KR 950034363 U KR950034363 U KR 950034363U KR 2019940012328 U KR2019940012328 U KR 2019940012328U KR 19940012328 U KR19940012328 U KR 19940012328U KR 950034363 U KR950034363 U KR 950034363U
Authority
KR
South Korea
Prior art keywords
wafer chuck
chuck cleaner
cleaner
wafer
chuck
Prior art date
Application number
KR2019940012328U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940012328U priority Critical patent/KR950034363U/ko
Publication of KR950034363U publication Critical patent/KR950034363U/ko

Links

KR2019940012328U 1994-05-30 1994-05-30 웨이퍼 척 세정장치 KR950034363U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940012328U KR950034363U (ko) 1994-05-30 1994-05-30 웨이퍼 척 세정장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940012328U KR950034363U (ko) 1994-05-30 1994-05-30 웨이퍼 척 세정장치

Publications (1)

Publication Number Publication Date
KR950034363U true KR950034363U (ko) 1995-12-18

Family

ID=60861448

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940012328U KR950034363U (ko) 1994-05-30 1994-05-30 웨이퍼 척 세정장치

Country Status (1)

Country Link
KR (1) KR950034363U (ko)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination