KR960003092U - 웨이퍼 세정장치 - Google Patents

웨이퍼 세정장치

Info

Publication number
KR960003092U
KR960003092U KR2019940015315U KR19940015315U KR960003092U KR 960003092 U KR960003092 U KR 960003092U KR 2019940015315 U KR2019940015315 U KR 2019940015315U KR 19940015315 U KR19940015315 U KR 19940015315U KR 960003092 U KR960003092 U KR 960003092U
Authority
KR
South Korea
Prior art keywords
wafer cleaner
cleaner
wafer
Prior art date
Application number
KR2019940015315U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940015315U priority Critical patent/KR960003092U/ko
Publication of KR960003092U publication Critical patent/KR960003092U/ko

Links

KR2019940015315U 1994-06-27 1994-06-27 웨이퍼 세정장치 KR960003092U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940015315U KR960003092U (ko) 1994-06-27 1994-06-27 웨이퍼 세정장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940015315U KR960003092U (ko) 1994-06-27 1994-06-27 웨이퍼 세정장치

Publications (1)

Publication Number Publication Date
KR960003092U true KR960003092U (ko) 1996-01-22

Family

ID=60668262

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940015315U KR960003092U (ko) 1994-06-27 1994-06-27 웨이퍼 세정장치

Country Status (1)

Country Link
KR (1) KR960003092U (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100536861B1 (ko) * 1999-03-29 2005-12-14 다다시 네기시 밤껍질 벗기기 장치
KR100858429B1 (ko) * 2007-09-18 2008-09-17 세메스 주식회사 튜브 구조체 및 이를 구비하는 반도체 제조 장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100536861B1 (ko) * 1999-03-29 2005-12-14 다다시 네기시 밤껍질 벗기기 장치
KR100858429B1 (ko) * 2007-09-18 2008-09-17 세메스 주식회사 튜브 구조체 및 이를 구비하는 반도체 제조 장치

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination