KR970003198U - 웨이퍼 세정장치 - Google Patents

웨이퍼 세정장치

Info

Publication number
KR970003198U
KR970003198U KR2019950014628U KR19950014628U KR970003198U KR 970003198 U KR970003198 U KR 970003198U KR 2019950014628 U KR2019950014628 U KR 2019950014628U KR 19950014628 U KR19950014628 U KR 19950014628U KR 970003198 U KR970003198 U KR 970003198U
Authority
KR
South Korea
Prior art keywords
wafer cleaner
cleaner
wafer
Prior art date
Application number
KR2019950014628U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950014628U priority Critical patent/KR970003198U/ko
Publication of KR970003198U publication Critical patent/KR970003198U/ko

Links

KR2019950014628U 1995-06-24 1995-06-24 웨이퍼 세정장치 KR970003198U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950014628U KR970003198U (ko) 1995-06-24 1995-06-24 웨이퍼 세정장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950014628U KR970003198U (ko) 1995-06-24 1995-06-24 웨이퍼 세정장치

Publications (1)

Publication Number Publication Date
KR970003198U true KR970003198U (ko) 1997-01-24

Family

ID=60871941

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950014628U KR970003198U (ko) 1995-06-24 1995-06-24 웨이퍼 세정장치

Country Status (1)

Country Link
KR (1) KR970003198U (ko)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination