KR970059842U - 웨이퍼 세정장치 - Google Patents
웨이퍼 세정장치Info
- Publication number
- KR970059842U KR970059842U KR2019960009648U KR19960009648U KR970059842U KR 970059842 U KR970059842 U KR 970059842U KR 2019960009648 U KR2019960009648 U KR 2019960009648U KR 19960009648 U KR19960009648 U KR 19960009648U KR 970059842 U KR970059842 U KR 970059842U
- Authority
- KR
- South Korea
- Prior art keywords
- wafer cleaner
- cleaner
- wafer
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960009648U KR970059842U (ko) | 1996-04-29 | 1996-04-29 | 웨이퍼 세정장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960009648U KR970059842U (ko) | 1996-04-29 | 1996-04-29 | 웨이퍼 세정장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970059842U true KR970059842U (ko) | 1997-11-10 |
Family
ID=60927977
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019960009648U KR970059842U (ko) | 1996-04-29 | 1996-04-29 | 웨이퍼 세정장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970059842U (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100412318B1 (ko) * | 2001-10-18 | 2003-12-31 | 주식회사 라셈텍 | 양면 동시 세정이 가능한 매엽식 웨이퍼 세정장치 |
-
1996
- 1996-04-29 KR KR2019960009648U patent/KR970059842U/ko not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100412318B1 (ko) * | 2001-10-18 | 2003-12-31 | 주식회사 라셈텍 | 양면 동시 세정이 가능한 매엽식 웨이퍼 세정장치 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |