KR970059842U - 웨이퍼 세정장치 - Google Patents

웨이퍼 세정장치

Info

Publication number
KR970059842U
KR970059842U KR2019960009648U KR19960009648U KR970059842U KR 970059842 U KR970059842 U KR 970059842U KR 2019960009648 U KR2019960009648 U KR 2019960009648U KR 19960009648 U KR19960009648 U KR 19960009648U KR 970059842 U KR970059842 U KR 970059842U
Authority
KR
South Korea
Prior art keywords
wafer cleaner
cleaner
wafer
Prior art date
Application number
KR2019960009648U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960009648U priority Critical patent/KR970059842U/ko
Publication of KR970059842U publication Critical patent/KR970059842U/ko

Links

KR2019960009648U 1996-04-29 1996-04-29 웨이퍼 세정장치 KR970059842U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960009648U KR970059842U (ko) 1996-04-29 1996-04-29 웨이퍼 세정장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960009648U KR970059842U (ko) 1996-04-29 1996-04-29 웨이퍼 세정장치

Publications (1)

Publication Number Publication Date
KR970059842U true KR970059842U (ko) 1997-11-10

Family

ID=60927977

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960009648U KR970059842U (ko) 1996-04-29 1996-04-29 웨이퍼 세정장치

Country Status (1)

Country Link
KR (1) KR970059842U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100412318B1 (ko) * 2001-10-18 2003-12-31 주식회사 라셈텍 양면 동시 세정이 가능한 매엽식 웨이퍼 세정장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100412318B1 (ko) * 2001-10-18 2003-12-31 주식회사 라셈텍 양면 동시 세정이 가능한 매엽식 웨이퍼 세정장치

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application