KR960019144U - 진공 웨이퍼 척 - Google Patents

진공 웨이퍼 척

Info

Publication number
KR960019144U
KR960019144U KR2019940030352U KR19940030352U KR960019144U KR 960019144 U KR960019144 U KR 960019144U KR 2019940030352 U KR2019940030352 U KR 2019940030352U KR 19940030352 U KR19940030352 U KR 19940030352U KR 960019144 U KR960019144 U KR 960019144U
Authority
KR
South Korea
Prior art keywords
wafer chuck
vacuum wafer
vacuum
chuck
wafer
Prior art date
Application number
KR2019940030352U
Other languages
English (en)
Other versions
KR0132640Y1 (ko
Inventor
최근만
김대기
유성균
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940030352U priority Critical patent/KR0132640Y1/ko
Publication of KR960019144U publication Critical patent/KR960019144U/ko
Application granted granted Critical
Publication of KR0132640Y1 publication Critical patent/KR0132640Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940030352U 1994-11-16 1994-11-16 진공 웨이퍼 척 KR0132640Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940030352U KR0132640Y1 (ko) 1994-11-16 1994-11-16 진공 웨이퍼 척

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940030352U KR0132640Y1 (ko) 1994-11-16 1994-11-16 진공 웨이퍼 척

Publications (2)

Publication Number Publication Date
KR960019144U true KR960019144U (ko) 1996-06-19
KR0132640Y1 KR0132640Y1 (ko) 1999-02-01

Family

ID=19398295

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940030352U KR0132640Y1 (ko) 1994-11-16 1994-11-16 진공 웨이퍼 척

Country Status (1)

Country Link
KR (1) KR0132640Y1 (ko)

Also Published As

Publication number Publication date
KR0132640Y1 (ko) 1999-02-01

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Legal Events

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