KR950004812U - 진공을 이용한 웨이퍼 홀더 - Google Patents

진공을 이용한 웨이퍼 홀더

Info

Publication number
KR950004812U
KR950004812U KR2019930012146U KR930012146U KR950004812U KR 950004812 U KR950004812 U KR 950004812U KR 2019930012146 U KR2019930012146 U KR 2019930012146U KR 930012146 U KR930012146 U KR 930012146U KR 950004812 U KR950004812 U KR 950004812U
Authority
KR
South Korea
Prior art keywords
vacuum
wafer holder
wafer
holder
Prior art date
Application number
KR2019930012146U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019930012146U priority Critical patent/KR950004812U/ko
Publication of KR950004812U publication Critical patent/KR950004812U/ko

Links

KR2019930012146U 1993-07-02 1993-07-02 진공을 이용한 웨이퍼 홀더 KR950004812U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930012146U KR950004812U (ko) 1993-07-02 1993-07-02 진공을 이용한 웨이퍼 홀더

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930012146U KR950004812U (ko) 1993-07-02 1993-07-02 진공을 이용한 웨이퍼 홀더

Publications (1)

Publication Number Publication Date
KR950004812U true KR950004812U (ko) 1995-02-18

Family

ID=60819261

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930012146U KR950004812U (ko) 1993-07-02 1993-07-02 진공을 이용한 웨이퍼 홀더

Country Status (1)

Country Link
KR (1) KR950004812U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100373548B1 (ko) * 2000-11-03 2003-02-26 (주)케이.씨.텍 회전식 웨이퍼 처리 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100373548B1 (ko) * 2000-11-03 2003-02-26 (주)케이.씨.텍 회전식 웨이퍼 처리 장치

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination