KR950004812U - 진공을 이용한 웨이퍼 홀더 - Google Patents
진공을 이용한 웨이퍼 홀더Info
- Publication number
- KR950004812U KR950004812U KR2019930012146U KR930012146U KR950004812U KR 950004812 U KR950004812 U KR 950004812U KR 2019930012146 U KR2019930012146 U KR 2019930012146U KR 930012146 U KR930012146 U KR 930012146U KR 950004812 U KR950004812 U KR 950004812U
- Authority
- KR
- South Korea
- Prior art keywords
- vacuum
- wafer holder
- wafer
- holder
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930012146U KR950004812U (ko) | 1993-07-02 | 1993-07-02 | 진공을 이용한 웨이퍼 홀더 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930012146U KR950004812U (ko) | 1993-07-02 | 1993-07-02 | 진공을 이용한 웨이퍼 홀더 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950004812U true KR950004812U (ko) | 1995-02-18 |
Family
ID=60819261
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019930012146U KR950004812U (ko) | 1993-07-02 | 1993-07-02 | 진공을 이용한 웨이퍼 홀더 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950004812U (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100373548B1 (ko) * | 2000-11-03 | 2003-02-26 | (주)케이.씨.텍 | 회전식 웨이퍼 처리 장치 |
-
1993
- 1993-07-02 KR KR2019930012146U patent/KR950004812U/ko not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100373548B1 (ko) * | 2000-11-03 | 2003-02-26 | (주)케이.씨.텍 | 회전식 웨이퍼 처리 장치 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |