KR950028687U - 반도체 칩 검사 장비에서의 번-인 시스템 - Google Patents

반도체 칩 검사 장비에서의 번-인 시스템

Info

Publication number
KR950028687U
KR950028687U KR2019940006513U KR19940006513U KR950028687U KR 950028687 U KR950028687 U KR 950028687U KR 2019940006513 U KR2019940006513 U KR 2019940006513U KR 19940006513 U KR19940006513 U KR 19940006513U KR 950028687 U KR950028687 U KR 950028687U
Authority
KR
South Korea
Prior art keywords
burn
semiconductor chip
inspection equipment
chip inspection
equipment
Prior art date
Application number
KR2019940006513U
Other languages
English (en)
Other versions
KR200194289Y1 (ko
Inventor
박영문
Original Assignee
현대반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체주식회사 filed Critical 현대반도체주식회사
Priority to KR2019940006513U priority Critical patent/KR200194289Y1/ko
Publication of KR950028687U publication Critical patent/KR950028687U/ko
Application granted granted Critical
Publication of KR200194289Y1 publication Critical patent/KR200194289Y1/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
    • G08B21/18—Status alarms
    • G08B21/182—Level alarms, e.g. alarms responsive to variables exceeding a threshold
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67248—Temperature monitoring
KR2019940006513U 1994-03-30 1994-03-30 반도체 칩 검사 장비에서의 번-인 시스템 KR200194289Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940006513U KR200194289Y1 (ko) 1994-03-30 1994-03-30 반도체 칩 검사 장비에서의 번-인 시스템

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940006513U KR200194289Y1 (ko) 1994-03-30 1994-03-30 반도체 칩 검사 장비에서의 번-인 시스템

Publications (2)

Publication Number Publication Date
KR950028687U true KR950028687U (ko) 1995-10-20
KR200194289Y1 KR200194289Y1 (ko) 2000-12-01

Family

ID=19379957

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940006513U KR200194289Y1 (ko) 1994-03-30 1994-03-30 반도체 칩 검사 장비에서의 번-인 시스템

Country Status (1)

Country Link
KR (1) KR200194289Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100393973B1 (ko) * 2001-03-29 2003-08-06 주식회사 하이닉스반도체 번인 테스트 모드 회로

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100393973B1 (ko) * 2001-03-29 2003-08-06 주식회사 하이닉스반도체 번인 테스트 모드 회로

Also Published As

Publication number Publication date
KR200194289Y1 (ko) 2000-12-01

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