DE19581288T1 - Automatisches Testsystem und -verfahren für Halbleitervorrichtungen - Google Patents
Automatisches Testsystem und -verfahren für HalbleitervorrichtungenInfo
- Publication number
- DE19581288T1 DE19581288T1 DE19581288T DE19581288T DE19581288T1 DE 19581288 T1 DE19581288 T1 DE 19581288T1 DE 19581288 T DE19581288 T DE 19581288T DE 19581288 T DE19581288 T DE 19581288T DE 19581288 T1 DE19581288 T1 DE 19581288T1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor devices
- test system
- automatic test
- automatic
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
- G01R31/66—Testing of connections, e.g. of plugs or non-disconnectable joints
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
- G01R31/66—Testing of connections, e.g. of plugs or non-disconnectable joints
- G01R31/68—Testing of releasable connections, e.g. of terminals mounted on a printed circuit board
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6254361A JPH0894707A (ja) | 1994-09-22 | 1994-09-22 | Icハンドラ装置 |
JP6268231A JPH08105938A (ja) | 1994-10-06 | 1994-10-06 | Icテストハンドラ |
JP33891494A JP3492793B2 (ja) | 1994-12-28 | 1994-12-28 | Icテスタ用ハンドラにおける再検査方法 |
PCT/JP1995/001751 WO1996009556A1 (fr) | 1994-09-22 | 1995-09-04 | Procede et appareil d'inspection automatique de dispositifs semiconducteurs |
Publications (1)
Publication Number | Publication Date |
---|---|
DE19581288T1 true DE19581288T1 (de) | 1996-11-14 |
Family
ID=27334325
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19581288T Withdrawn DE19581288T1 (de) | 1994-09-22 | 1995-09-04 | Automatisches Testsystem und -verfahren für Halbleitervorrichtungen |
Country Status (5)
Country | Link |
---|---|
US (1) | US5788084A (de) |
KR (1) | KR100206644B1 (de) |
DE (1) | DE19581288T1 (de) |
MY (1) | MY111843A (de) |
WO (1) | WO1996009556A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19838491B4 (de) * | 1998-01-15 | 2006-06-01 | Samsung Electronics Co., Ltd., Suwon | Verfahren zur Analyse der Meßstetigkeit von Testgeräten für Halbleiterbauteile |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997005496A1 (fr) | 1995-07-28 | 1997-02-13 | Advantest Corporation | Testeur de dispositif a semiconducteur et systeme de test de dispositif a semiconducteur comportant plusieurs testeurs |
KR100187727B1 (ko) * | 1996-02-29 | 1999-06-01 | 윤종용 | 처리기 접촉 불량을 확인할 수 있는 접촉 점검 장치 및 이를 내장한 집적회로 소자 검사 시스템 |
JP3417528B2 (ja) * | 1996-04-05 | 2003-06-16 | 株式会社アドバンテスト | Ic試験装置 |
JPH10142293A (ja) * | 1996-11-12 | 1998-05-29 | Advantest Corp | Ic試験装置 |
JP3503860B2 (ja) * | 1997-03-18 | 2004-03-08 | 株式会社アドバンテスト | Ic試験方法およびこの方法を実施する装置 |
US6593761B1 (en) * | 1997-11-28 | 2003-07-15 | Kabushiki Kaisha Toshiba | Test handler for semiconductor device |
US6043443A (en) * | 1998-01-23 | 2000-03-28 | Lucent Technologies Inc. | Fabrication of semiconductor devices |
JP3805888B2 (ja) * | 1998-03-20 | 2006-08-09 | 株式会社アドバンテスト | Ic試験装置 |
JP3951436B2 (ja) * | 1998-04-01 | 2007-08-01 | 株式会社アドバンテスト | Ic試験装置 |
JPH11297791A (ja) * | 1998-04-14 | 1999-10-29 | Advantest Corp | トレイ移送アーム及びこれを用いたトレイの移載装置、ic試験装置並びにトレイの取り廻し方法 |
US6607071B1 (en) * | 1998-10-19 | 2003-08-19 | Mirae Corporation | Sealed test chamber for module IC handler |
US6204679B1 (en) | 1998-11-04 | 2001-03-20 | Teradyne, Inc. | Low cost memory tester with high throughput |
KR100361810B1 (ko) * | 1999-11-12 | 2002-11-23 | 미래산업 주식회사 | 모듈램 실장 테스트 핸들러 및 이를 이용한 모듈램 테스트 방법 |
KR100349942B1 (ko) * | 1999-12-06 | 2002-08-24 | 삼성전자 주식회사 | 램버스 핸들러 |
JP3584845B2 (ja) * | 2000-03-16 | 2004-11-04 | 日立ハイテク電子エンジニアリング株式会社 | Icデバイスの試験装置及び試験方法 |
US7079960B2 (en) * | 2002-11-02 | 2006-07-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Auto classification shipping system |
DE10256692A1 (de) * | 2002-12-04 | 2004-06-24 | Infineon Technologies Ag | Test-Gerät, Test-System und Test-Verfahren, insbesondere zum Testen der Kontaktierung zwischen einem Halbleiter-Bauelement und einem Carrier |
US7171587B2 (en) * | 2003-04-28 | 2007-01-30 | Teradyne, Inc. | Automatic test system with easily modified software |
KR100517074B1 (ko) * | 2003-06-05 | 2005-09-26 | 삼성전자주식회사 | 트레이 트랜스퍼 유닛 및 그를 포함하는 자동 테스트 핸들러 |
KR100541546B1 (ko) * | 2003-07-14 | 2006-01-10 | 삼성전자주식회사 | 반도체 디바이스 테스트장치 |
KR20050009912A (ko) * | 2003-07-18 | 2005-01-26 | 삼성전자주식회사 | 성능측정 시스템 |
JP2005345262A (ja) * | 2004-06-03 | 2005-12-15 | Niigata Seimitsu Kk | 半導体検査装置およびこれに用いる被検査部品トレー |
WO2005121739A1 (ja) * | 2004-06-08 | 2005-12-22 | Advantest Corporation | イメージセンサ用試験装置 |
US7292023B2 (en) * | 2004-06-30 | 2007-11-06 | Intel Corporation | Apparatus and method for linked slot-level burn-in |
US7151388B2 (en) * | 2004-09-30 | 2006-12-19 | Kes Systems, Inc. | Method for testing semiconductor devices and an apparatus therefor |
US7091737B2 (en) * | 2004-10-01 | 2006-08-15 | Intel Corporation | Apparatus and methods for self-heating burn-in processes |
US7355386B2 (en) * | 2005-11-18 | 2008-04-08 | Delta Design, Inc. | Method of automatically carrying IC-chips, on a planar array of vacuum nozzles, to a variable target in a chip tester |
KR100790988B1 (ko) * | 2006-04-11 | 2008-01-03 | 삼성전자주식회사 | 테스트 환경의 안정적 온도유지가 가능한 반도체 소자검사용 핸들러 |
KR100792728B1 (ko) * | 2006-05-12 | 2008-01-11 | 미래산업 주식회사 | 번인 테스트용 소팅 핸들러의 트레이 반송장치 |
WO2008012889A1 (en) * | 2006-07-27 | 2008-01-31 | Advantest Corporation | Electronic component transfer method and electronic component handling device |
KR101104291B1 (ko) * | 2006-10-12 | 2012-01-12 | 가부시키가이샤 아드반테스트 | 트레이 반송장치 및 이를 구비한 전자부품 시험장치 |
US7589520B2 (en) * | 2006-12-05 | 2009-09-15 | Delta Design, Inc. | Soak profiling |
US8866488B2 (en) | 2011-03-22 | 2014-10-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Power compensation in 3DIC testing |
KR101936348B1 (ko) * | 2012-09-17 | 2019-01-08 | 삼성전자주식회사 | 급속 온도 변환이 가능한 테스트 핸들러 및 그를 이용한 반도체 소자의 테스트 방법 |
TWI472778B (zh) * | 2013-08-30 | 2015-02-11 | Chroma Ate Inc | System - level IC test machine automatic retest method and the test machine |
CN103792485B (zh) * | 2014-02-17 | 2016-12-07 | 大唐微电子技术有限公司 | 自动化测试设备和测试方法 |
US9618570B2 (en) * | 2014-06-06 | 2017-04-11 | Advantest Corporation | Multi-configurable testing module for automated testing of a device |
US9678148B2 (en) * | 2014-06-06 | 2017-06-13 | Advantest Corporation | Customizable tester having testing modules for automated testing of devices |
US9618574B2 (en) | 2014-06-06 | 2017-04-11 | Advantest Corporation | Controlling automated testing of devices |
US9995767B2 (en) | 2014-06-06 | 2018-06-12 | Advantest Corporation | Universal container for device under test |
US9638749B2 (en) | 2014-06-06 | 2017-05-02 | Advantest Corporation | Supporting automated testing of devices in a test floor system |
KR102391516B1 (ko) | 2015-10-08 | 2022-04-27 | 삼성전자주식회사 | 반도체 테스트 장치 |
KR101877667B1 (ko) * | 2017-02-28 | 2018-07-11 | 세메스 주식회사 | 반도체 패키지 테스트 방법 |
US10677842B2 (en) | 2017-05-26 | 2020-06-09 | Advantest Corporation | DUT testing with configurable cooling control using DUT internal temperature data |
CN114415002A (zh) * | 2022-03-31 | 2022-04-29 | 佛山市联动科技股份有限公司 | 基于多台测试机数据处理的硬件系统及方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5313156A (en) * | 1991-12-04 | 1994-05-17 | Advantest Corporation | Apparatus for automatic handling |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH071301B2 (ja) * | 1988-01-08 | 1995-01-11 | 新明和工業株式会社 | 電子部品の搬送装置 |
US5024978A (en) * | 1989-05-30 | 1991-06-18 | Corning Incorporated | Compositions and methods for making ceramic matrix composites |
JPH0317574A (ja) * | 1989-06-14 | 1991-01-25 | Graphtec Corp | バーインボードテスタ |
US5307011A (en) * | 1991-12-04 | 1994-04-26 | Advantest Corporation | Loader and unloader for test handler |
-
1995
- 1995-09-04 DE DE19581288T patent/DE19581288T1/de not_active Withdrawn
- 1995-09-04 WO PCT/JP1995/001751 patent/WO1996009556A1/ja active Application Filing
- 1995-09-04 KR KR1019960702707A patent/KR100206644B1/ko not_active IP Right Cessation
- 1995-09-04 US US08/648,060 patent/US5788084A/en not_active Expired - Fee Related
- 1995-09-22 MY MYPI95002820A patent/MY111843A/en unknown
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5313156A (en) * | 1991-12-04 | 1994-05-17 | Advantest Corporation | Apparatus for automatic handling |
Non-Patent Citations (1)
Title |
---|
Schnitzlein, T.: Flexibel bei einheitlichen Daten in Z.: productronic 6-1991, Die Fachzeitschrift für Elektronik-Fertigung und Test, S. 26-28 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19838491B4 (de) * | 1998-01-15 | 2006-06-01 | Samsung Electronics Co., Ltd., Suwon | Verfahren zur Analyse der Meßstetigkeit von Testgeräten für Halbleiterbauteile |
Also Published As
Publication number | Publication date |
---|---|
US5788084A (en) | 1998-08-04 |
MY111843A (en) | 2001-01-31 |
KR960706080A (ko) | 1996-11-08 |
WO1996009556A1 (fr) | 1996-03-28 |
KR100206644B1 (ko) | 1999-07-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
8139 | Disposal/non-payment of the annual fee |