KR960012412A - 자동테스트장비용 인터페이스장치 - Google Patents

자동테스트장비용 인터페이스장치

Info

Publication number
KR960012412A
KR960012412A KR1019950028594A KR19950028594A KR960012412A KR 960012412 A KR960012412 A KR 960012412A KR 1019950028594 A KR1019950028594 A KR 1019950028594A KR 19950028594 A KR19950028594 A KR 19950028594A KR 960012412 A KR960012412 A KR 960012412A
Authority
KR
South Korea
Prior art keywords
interface device
test equipment
automatic test
automatic
equipment
Prior art date
Application number
KR1019950028594A
Other languages
English (en)
Other versions
KR100379811B1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of KR960012412A publication Critical patent/KR960012412A/ko
Application granted granted Critical
Publication of KR100379811B1 publication Critical patent/KR100379811B1/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/30—Structural combination of electric measuring instruments with basic electronic circuits, e.g. with amplifier
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T403/00—Joints and connections
    • Y10T403/32—Articulated members
KR1019950028594A 1994-09-01 1995-09-01 자동 테스트 장비용 인터페이스 장치 KR100379811B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29983194A 1994-09-01 1994-09-01
US08/299831 1994-09-01

Publications (2)

Publication Number Publication Date
KR960012412A true KR960012412A (ko) 1996-04-20
KR100379811B1 KR100379811B1 (ko) 2003-05-23

Family

ID=23156483

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950028594A KR100379811B1 (ko) 1994-09-01 1995-09-01 자동 테스트 장비용 인터페이스 장치

Country Status (7)

Country Link
US (2) US6104202A (ko)
EP (1) EP0699913B1 (ko)
JP (1) JPH0926458A (ko)
KR (1) KR100379811B1 (ko)
CN (1) CN1113404C (ko)
DE (1) DE69533078T2 (ko)
TW (1) TW273635B (ko)

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CN102253251B (zh) * 2004-09-03 2014-04-02 塞莱敦体系股份有限公司 用于探测半导体晶片的可置换探针装置
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JP5184910B2 (ja) * 2008-02-13 2013-04-17 株式会社岡本工作機械製作所 基板の平面研削装置
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US8476918B2 (en) * 2010-04-28 2013-07-02 Tsmc Solid State Lighting Ltd. Apparatus and method for wafer level classification of light emitting device
CN103782182B (zh) 2011-07-12 2016-08-24 英泰斯特股份有限公司 驳接测试头与外围设备的方法与装置
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JP6488281B2 (ja) * 2013-05-14 2019-03-20 フォームファクター， インコーポレイテッド 交換可能プローブヘッドの自動取り付け及び取り外し
TWI548877B (zh) * 2015-01-13 2016-09-11 京元電子股份有限公司 半導體元件測試連接機構
DE102015109022B4 (de) * 2015-06-08 2018-08-23 Infineon Technologies Ag Modulares Messgerät zum Testen von Prüflingen mittels Schnittstellenelementen
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CN106181629A (zh) * 2016-07-15 2016-12-07 绔ユ旦 一种太阳能供电的磨削装置
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Also Published As

Publication number Publication date
KR100379811B1 (ko) 2003-05-23
US6104202A (en) 2000-08-15
CN1125898A (zh) 1996-07-03
DE69533078T2 (de) 2005-07-28
EP0699913A2 (en) 1996-03-06
DE69533078D1 (de) 2004-07-01
JPH0926458A (ja) 1997-01-28
US5821764A (en) 1998-10-13
TW273635B (ko) 1996-04-01
CN1113404C (zh) 2003-07-02
EP0699913A3 (en) 1997-04-16
EP0699913B1 (en) 2004-05-26

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