KR940025550U - 반도체 칩 검사장치 - Google Patents

반도체 칩 검사장치

Info

Publication number
KR940025550U
KR940025550U KR2019930006646U KR930006646U KR940025550U KR 940025550 U KR940025550 U KR 940025550U KR 2019930006646 U KR2019930006646 U KR 2019930006646U KR 930006646 U KR930006646 U KR 930006646U KR 940025550 U KR940025550 U KR 940025550U
Authority
KR
South Korea
Prior art keywords
semiconductor chip
inspection device
chip inspection
semiconductor
inspection
Prior art date
Application number
KR2019930006646U
Other languages
English (en)
Other versions
KR0128397Y1 (ko
Inventor
오석주
Original Assignee
삼성항공산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성항공산업주식회사 filed Critical 삼성항공산업주식회사
Priority to KR2019930006646U priority Critical patent/KR0128397Y1/ko
Publication of KR940025550U publication Critical patent/KR940025550U/ko
Application granted granted Critical
Publication of KR0128397Y1 publication Critical patent/KR0128397Y1/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR2019930006646U 1993-04-26 1993-04-26 반도체 칩 검사장치 KR0128397Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930006646U KR0128397Y1 (ko) 1993-04-26 1993-04-26 반도체 칩 검사장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930006646U KR0128397Y1 (ko) 1993-04-26 1993-04-26 반도체 칩 검사장치

Publications (2)

Publication Number Publication Date
KR940025550U true KR940025550U (ko) 1994-11-18
KR0128397Y1 KR0128397Y1 (ko) 1998-12-01

Family

ID=19354220

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930006646U KR0128397Y1 (ko) 1993-04-26 1993-04-26 반도체 칩 검사장치

Country Status (1)

Country Link
KR (1) KR0128397Y1 (ko)

Also Published As

Publication number Publication date
KR0128397Y1 (ko) 1998-12-01

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Legal Events

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E701 Decision to grant or registration of patent right
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Year of fee payment: 6

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