KR960012671U - 프로브카드 특성을 측정하는 웨이퍼 검사장치 - Google Patents

프로브카드 특성을 측정하는 웨이퍼 검사장치

Info

Publication number
KR960012671U
KR960012671U KR2019940025280U KR19940025280U KR960012671U KR 960012671 U KR960012671 U KR 960012671U KR 2019940025280 U KR2019940025280 U KR 2019940025280U KR 19940025280 U KR19940025280 U KR 19940025280U KR 960012671 U KR960012671 U KR 960012671U
Authority
KR
South Korea
Prior art keywords
inspection device
probe card
wafer inspection
card characteristics
measures probe
Prior art date
Application number
KR2019940025280U
Other languages
English (en)
Other versions
KR0115035Y1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR94025280U priority Critical patent/KR0115035Y1/ko
Publication of KR960012671U publication Critical patent/KR960012671U/ko
Application granted granted Critical
Publication of KR0115035Y1 publication Critical patent/KR0115035Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
KR94025280U 1994-09-29 1994-09-29 Test apparatus of probe card KR0115035Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR94025280U KR0115035Y1 (en) 1994-09-29 1994-09-29 Test apparatus of probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR94025280U KR0115035Y1 (en) 1994-09-29 1994-09-29 Test apparatus of probe card

Publications (2)

Publication Number Publication Date
KR960012671U true KR960012671U (ko) 1996-04-17
KR0115035Y1 KR0115035Y1 (en) 1998-04-15

Family

ID=19394332

Family Applications (1)

Application Number Title Priority Date Filing Date
KR94025280U KR0115035Y1 (en) 1994-09-29 1994-09-29 Test apparatus of probe card

Country Status (1)

Country Link
KR (1) KR0115035Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100385398B1 (ko) * 2001-02-12 2003-05-23 프롬써어티 주식회사 접속 점검 기능을 가진 집적 회로 번인 장치, 검사용 기판 및 접속 점검 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100385398B1 (ko) * 2001-02-12 2003-05-23 프롬써어티 주식회사 접속 점검 기능을 가진 집적 회로 번인 장치, 검사용 기판 및 접속 점검 방법

Also Published As

Publication number Publication date
KR0115035Y1 (en) 1998-04-15

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