KR940004345U - 탐침 평편성 검사장치 - Google Patents

탐침 평편성 검사장치

Info

Publication number
KR940004345U
KR940004345U KR2019920012530U KR920012530U KR940004345U KR 940004345 U KR940004345 U KR 940004345U KR 2019920012530 U KR2019920012530 U KR 2019920012530U KR 920012530 U KR920012530 U KR 920012530U KR 940004345 U KR940004345 U KR 940004345U
Authority
KR
South Korea
Prior art keywords
inspection device
flatness inspection
probe
probe flatness
inspection
Prior art date
Application number
KR2019920012530U
Other languages
English (en)
Other versions
KR960002807Y1 (ko
Inventor
심창복
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR92012530U priority Critical patent/KR960002807Y1/ko
Publication of KR940004345U publication Critical patent/KR940004345U/ko
Application granted granted Critical
Publication of KR960002807Y1 publication Critical patent/KR960002807Y1/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
KR92012530U 1992-07-08 1992-07-08 탐침 평편성 검사장치 KR960002807Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR92012530U KR960002807Y1 (ko) 1992-07-08 1992-07-08 탐침 평편성 검사장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR92012530U KR960002807Y1 (ko) 1992-07-08 1992-07-08 탐침 평편성 검사장치

Publications (2)

Publication Number Publication Date
KR940004345U true KR940004345U (ko) 1994-02-24
KR960002807Y1 KR960002807Y1 (ko) 1996-04-08

Family

ID=19336315

Family Applications (1)

Application Number Title Priority Date Filing Date
KR92012530U KR960002807Y1 (ko) 1992-07-08 1992-07-08 탐침 평편성 검사장치

Country Status (1)

Country Link
KR (1) KR960002807Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100477526B1 (ko) * 2002-05-03 2005-03-17 동부아남반도체 주식회사 반도체 테스트 장치의 포고 핀

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100695816B1 (ko) * 2005-07-29 2007-03-19 삼성전자주식회사 이디에스 설비의 포고 핀 검사 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100477526B1 (ko) * 2002-05-03 2005-03-17 동부아남반도체 주식회사 반도체 테스트 장치의 포고 핀

Also Published As

Publication number Publication date
KR960002807Y1 (ko) 1996-04-08

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Legal Events

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A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20050322

Year of fee payment: 10

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