ATE157482T1 - Elektrode für einen vertikalen feldeffekttransistor und verfahren zu deren herstellung - Google Patents

Elektrode für einen vertikalen feldeffekttransistor und verfahren zu deren herstellung

Info

Publication number
ATE157482T1
ATE157482T1 AT91304828T AT91304828T ATE157482T1 AT E157482 T1 ATE157482 T1 AT E157482T1 AT 91304828 T AT91304828 T AT 91304828T AT 91304828 T AT91304828 T AT 91304828T AT E157482 T1 ATE157482 T1 AT E157482T1
Authority
AT
Austria
Prior art keywords
area
semiconductor
electrode
conductive type
production
Prior art date
Application number
AT91304828T
Other languages
English (en)
Inventor
Hayao Ohzu
Tetsunobu Kochi
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE157482T1 publication Critical patent/ATE157482T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
    • H01L21/743—Making of internal connections, substrate contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
    • H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
    • H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
    • H01L27/0928—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors comprising both N- and P- wells in the substrate, e.g. twin-tub

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Thin Film Transistor (AREA)
  • Junction Field-Effect Transistors (AREA)
AT91304828T 1990-05-31 1991-05-29 Elektrode für einen vertikalen feldeffekttransistor und verfahren zu deren herstellung ATE157482T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP13961890 1990-05-31
JP20814590 1990-08-08

Publications (1)

Publication Number Publication Date
ATE157482T1 true ATE157482T1 (de) 1997-09-15

Family

ID=26472367

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91304828T ATE157482T1 (de) 1990-05-31 1991-05-29 Elektrode für einen vertikalen feldeffekttransistor und verfahren zu deren herstellung

Country Status (10)

Country Link
US (2) US5378914A (de)
EP (1) EP0459771B1 (de)
JP (1) JP3067263B2 (de)
CN (1) CN1052343C (de)
AT (1) ATE157482T1 (de)
DE (1) DE69127402T2 (de)
DK (1) DK0459771T3 (de)
ES (1) ES2104668T3 (de)
GR (1) GR3025139T3 (de)
MY (1) MY107475A (de)

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KR100750275B1 (ko) * 1999-03-01 2007-08-20 제네럴 세미컨덕터, 인코포레이티드 상부 표면상에 위치한 드레인 접촉으로의 저 저항 경로를 갖는 트렌치 ｄｍｏｓ 트랜지스터 구조, 및 이러한 트랜지스터 구조의 형성 방법
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US6551881B1 (en) * 2001-10-01 2003-04-22 Koninklijke Philips Electronics N.V. Self-aligned dual-oxide umosfet device and a method of fabricating same
DE10231966A1 (de) 2002-07-15 2004-02-12 Infineon Technologies Ag Feldeffekttransistor, zugehörige Verwendung und zugehöriges Herstellungsverfahren
US6838723B2 (en) * 2002-08-29 2005-01-04 Micron Technology, Inc. Merged MOS-bipolar capacitor memory cell
US7224024B2 (en) * 2002-08-29 2007-05-29 Micron Technology, Inc. Single transistor vertical memory gain cell
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Also Published As

Publication number Publication date
MY107475A (en) 1995-12-30
EP0459771A3 (en) 1992-02-05
EP0459771B1 (de) 1997-08-27
DK0459771T3 (da) 1997-09-22
US5378914A (en) 1995-01-03
JP3067263B2 (ja) 2000-07-17
US5583075A (en) 1996-12-10
ES2104668T3 (es) 1997-10-16
DE69127402D1 (de) 1997-10-02
DE69127402T2 (de) 1998-01-02
CN1057736A (zh) 1992-01-08
GR3025139T3 (en) 1998-02-27
EP0459771A2 (de) 1991-12-04
JPH04226075A (ja) 1992-08-14
CN1052343C (zh) 2000-05-10

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Legal Events

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UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee