JPS5346287A - Production of semiconductor integrated circuit - Google Patents

Production of semiconductor integrated circuit

Info

Publication number
JPS5346287A
JPS5346287A JP12171476A JP12171476A JPS5346287A JP S5346287 A JPS5346287 A JP S5346287A JP 12171476 A JP12171476 A JP 12171476A JP 12171476 A JP12171476 A JP 12171476A JP S5346287 A JPS5346287 A JP S5346287A
Authority
JP
Japan
Prior art keywords
production
integrated circuit
semiconductor integrated
transistors
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12171476A
Other languages
Japanese (ja)
Inventor
Moritomo Ito
Shinpei Tanaka
Takashi Yabu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12171476A priority Critical patent/JPS5346287A/en
Publication of JPS5346287A publication Critical patent/JPS5346287A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce IC production processes by forming deep diffused regions in the electrode forming portions of the source, drain regions of transistors at the same instant of diffusing an impurity to impart conductivity to the polycrystalline Si layer constituting the gate electrodes of MIS type transistors and the leadout electrodes of other element formed within the same semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP12171476A 1976-10-08 1976-10-08 Production of semiconductor integrated circuit Pending JPS5346287A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12171476A JPS5346287A (en) 1976-10-08 1976-10-08 Production of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12171476A JPS5346287A (en) 1976-10-08 1976-10-08 Production of semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS5346287A true JPS5346287A (en) 1978-04-25

Family

ID=14818052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12171476A Pending JPS5346287A (en) 1976-10-08 1976-10-08 Production of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS5346287A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56168501U (en) * 1980-05-14 1981-12-12
JPS60196471A (en) * 1984-02-22 1985-10-04 ロス　オペレーテイング　バルブ　カンパニー In-line type poppet valve

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56168501U (en) * 1980-05-14 1981-12-12
JPS60196471A (en) * 1984-02-22 1985-10-04 ロス　オペレーテイング　バルブ　カンパニー In-line type poppet valve

Similar Documents

Publication Publication Date Title
GB1357515A (en) Method for manufacturing an mos integrated circuit
JPS5362989A (en) Semiconductor memory device
JPS5688354A (en) Semiconductor integrated circuit device
JPS57155777A (en) Mos transistor
JPS5346287A (en) Production of semiconductor integrated circuit
JPS5691470A (en) Semiconductor
JPS5448179A (en) Mis-type semiconductor integrated circuit device
JPS53112687A (en) Semiconductor device
JPS55154769A (en) Manufacture of semiconductor device
JPS5539688A (en) Integrated circuit device of semiconductors
JPS6489457A (en) Manufacture of semiconductor device
JPS522180A (en) Method of fabricating mos semiconductor integrated circuit
JPS5411687A (en) Manufacture for semiconductor integrated circuit
JPS534480A (en) Production of semiconductor device having mis transistors
JPS54101290A (en) Semiconductor integtated circuit unit and its manufacture
JPS52146568A (en) Production of silicon gate mos type semiconductor integrated circuit device
JPS5376770A (en) Production of insulated gate field effect transistor
JPS5518072A (en) Mos semiconductor device
JPS5317284A (en) Production of semiconductor device
JPS52136583A (en) Mos type semiconductor device
JPS5360181A (en) Production of mos type field effect transistor
JPS52123179A (en) Mos type semiconductor device and its production
JPS52123878A (en) Mos type semiconductor device and its production process
JPS5530873A (en) High withstand field-effect transistor of mis type
JPS52147983A (en) Insulation gate type semiconductor device