WO2022130796A1 - 光酸発生剤及びこれを用いた感光性組成物 - Google Patents
光酸発生剤及びこれを用いた感光性組成物 Download PDFInfo
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- WO2022130796A1 WO2022130796A1 PCT/JP2021/039794 JP2021039794W WO2022130796A1 WO 2022130796 A1 WO2022130796 A1 WO 2022130796A1 JP 2021039794 W JP2021039794 W JP 2021039794W WO 2022130796 A1 WO2022130796 A1 WO 2022130796A1
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- photoacid generator
- carbon atoms
- production example
- cations
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- 239000003446 ligand Substances 0.000 claims abstract description 118
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- 150000004696 coordination complex Chemical group 0.000 claims abstract description 28
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- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- CVNKFOIOZXAFBO-UHFFFAOYSA-J tin(4+);tetrahydroxide Chemical compound [OH-].[OH-].[OH-].[OH-].[Sn+4] CVNKFOIOZXAFBO-UHFFFAOYSA-J 0.000 description 1
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- DWCSXQCXXITVKE-UHFFFAOYSA-N triethyloxidanium Chemical compound CC[O+](CC)CC DWCSXQCXXITVKE-UHFFFAOYSA-N 0.000 description 1
- 125000004044 trifluoroacetyl group Chemical group FC(C(=O)*)(F)F 0.000 description 1
- FTVLMFQEYACZNP-UHFFFAOYSA-N trimethylsilyl trifluoromethanesulfonate Chemical compound C[Si](C)(C)OS(=O)(=O)C(F)(F)F FTVLMFQEYACZNP-UHFFFAOYSA-N 0.000 description 1
- ZFEAYIKULRXTAR-UHFFFAOYSA-M triphenylsulfanium;chloride Chemical compound [Cl-].C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 ZFEAYIKULRXTAR-UHFFFAOYSA-M 0.000 description 1
- 239000012953 triphenylsulfonium Substances 0.000 description 1
- VRRIVXLVXXAHJA-UHFFFAOYSA-N tris(2,3,4-tribromophenyl) phosphate Chemical compound BrC1=C(Br)C(Br)=CC=C1OP(=O)(OC=1C(=C(Br)C(Br)=CC=1)Br)OC1=CC=C(Br)C(Br)=C1Br VRRIVXLVXXAHJA-UHFFFAOYSA-N 0.000 description 1
- BIKXLKXABVUSMH-UHFFFAOYSA-N trizinc;diborate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]B([O-])[O-].[O-]B([O-])[O-] BIKXLKXABVUSMH-UHFFFAOYSA-N 0.000 description 1
- 125000001834 xanthenyl group Chemical group C1=CC=CC=2OC3=CC=CC=C3C(C12)* 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 239000001043 yellow dye Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- NDKWCCLKSWNDBG-UHFFFAOYSA-N zinc;dioxido(dioxo)chromium Chemical compound [Zn+2].[O-][Cr]([O-])(=O)=O NDKWCCLKSWNDBG-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D207/00—Heterocyclic compounds containing five-membered rings not condensed with other rings, with one nitrogen atom as the only ring hetero atom
- C07D207/02—Heterocyclic compounds containing five-membered rings not condensed with other rings, with one nitrogen atom as the only ring hetero atom with only hydrogen or carbon atoms directly attached to the ring nitrogen atom
- C07D207/30—Heterocyclic compounds containing five-membered rings not condensed with other rings, with one nitrogen atom as the only ring hetero atom with only hydrogen or carbon atoms directly attached to the ring nitrogen atom having two double bonds between ring members or between ring members and non-ring members
- C07D207/34—Heterocyclic compounds containing five-membered rings not condensed with other rings, with one nitrogen atom as the only ring hetero atom with only hydrogen or carbon atoms directly attached to the ring nitrogen atom having two double bonds between ring members or between ring members and non-ring members with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached to ring carbon atoms
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D487/00—Heterocyclic compounds containing nitrogen atoms as the only ring hetero atoms in the condensed system, not provided for by groups C07D451/00 - C07D477/00
- C07D487/22—Heterocyclic compounds containing nitrogen atoms as the only ring hetero atoms in the condensed system, not provided for by groups C07D451/00 - C07D477/00 in which the condensed system contains four or more hetero rings
-
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- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F13/00—Compounds containing elements of Groups 7 or 17 of the Periodic Table
- C07F13/005—Compounds without a metal-carbon linkage
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F15/00—Compounds containing elements of Groups 8, 9, 10 or 18 of the Periodic Table
- C07F15/02—Iron compounds
- C07F15/025—Iron compounds without a metal-carbon linkage
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F5/00—Compounds containing elements of Groups 3 or 13 of the Periodic Table
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F5/00—Compounds containing elements of Groups 3 or 13 of the Periodic Table
- C07F5/02—Boron compounds
- C07F5/027—Organoboranes and organoborohydrides
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/10—Compounds having one or more C—Si linkages containing nitrogen having a Si-N linkage
-
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- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/18—Compounds having one or more C—Si linkages as well as one or more C—O—Si linkages
- C07F7/1804—Compounds having Si-O-C linkages
-
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- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/22—Tin compounds
- C07F7/2284—Compounds with one or more Sn-N linkages
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/28—Titanium compounds
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- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
- C07F9/02—Phosphorus compounds
- C07F9/28—Phosphorus compounds with one or more P—C bonds
- C07F9/50—Organo-phosphines
- C07F9/52—Halophosphines
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- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
- C07F9/02—Phosphorus compounds
- C07F9/547—Heterocyclic compounds, e.g. containing phosphorus as a ring hetero atom
- C07F9/6561—Heterocyclic compounds, e.g. containing phosphorus as a ring hetero atom containing systems of two or more relevant hetero rings condensed among themselves or condensed with a common carbocyclic ring or ring system, with or without other non-condensed hetero rings
-
- C—CHEMISTRY; METALLURGY
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- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
- C07F9/90—Antimony compounds
- C07F9/902—Compounds without antimony-carbon linkages
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/20—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
- C08G59/22—Di-epoxy compounds
- C08G59/24—Di-epoxy compounds carbocyclic
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/20—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
- C08G59/22—Di-epoxy compounds
- C08G59/24—Di-epoxy compounds carbocyclic
- C08G59/245—Di-epoxy compounds carbocyclic aromatic
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/68—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the catalysts used
- C08G59/70—Chelates
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
Definitions
- the present invention relates to a compound that is exposed to light in the visible to infrared region and generates an acid, and a photosensitive composition using the same. More specifically, a photosensitive composition (for example, a coating agent, a paint, a slab printing plate, etc.) that is cured by using an acid generated by irradiating light in the visible to infrared region, or light in the visible to infrared region. Products or members (for example, electronic parts, optical products, optics) formed through patterning using the difference in solubility of exposed and unexposed areas in the developing solution by utilizing the acid catalytic reaction of the acid generated by irradiation with light.
- the present invention relates to a photoacid generator suitably used for producing (part forming material, layer forming material, adhesive, etc.).
- the photocurable coating agent comprises a photopolymerization initiator, a radical (cationic) polymerizable monomer, an oligomer or a polymer, and a colorant and an additive depending on the application.
- Colorants are roughly classified into pigments and dyes, and are blended to color the coating film, but they not only block light but also have light absorption characteristics according to the color and part of the light to be irradiated. Due to absorption, light may not reach the deep part of the applied coating film with a photocurable coating agent containing a colorant.
- a specific photopolymerization initiator see, for example, Patent Document 1.
- sensitivity to a long wavelength, particularly a near infrared region is required.
- known photopolymerizable compositions do not have sensitivity to the near-infrared region, or even if they do, they are not sufficiently sensitive, and if they have high sensitivity, they are photopolymerizable compositions. It has a drawback that the storage stability of the light is not sufficient. Therefore, a specific initiator has been proposed as a highly sensitive initiator in the long wavelength region (see, for example, Patent Documents 2 and 3).
- the photosensitive composition using the specific initiators described in Patent Documents 1 to 3 also has a high concentration of a substance such as a colorant that attenuates or shields the irradiated light, a thick film thickness, or There are problems that the curability is not sufficient when the light source is in the long wavelength region, and the solubility of the initiator in the composition is low.
- sensitizers it is known to use sensitizers to increase the efficiency of the initiator (see, for example, Patent Documents 4 and 5). Incorporating a complex structure directly into the initiator structure to align the absorption region of the direct initiator complicates the synthesis and is costly, so the method using the sensitizer as the co-initiator is in the wavelength region. It is considered that the longer the length is, the more convenient it is. On the other hand, regarding the effective addition amount and ratio of the sensitizer and the initiator, when both are added separately, there is a problem in the solubility of both in the composition, and the sensitizing effect has a problem. ..
- Non-Patent Document 1 As a measure for enhancing the sensitizing effect, a compound in which an initiator and a sensitizer are linked by a covalent bond has been reported (see Non-Patent Document 1).
- sensitizers used in the visible to near-infrared region are generally larger in molecule and more complex in structure, and changing their structure to enhance the effect of the initiator makes synthesis more difficult as described above. There are still issues to be solved.
- the problem to be solved by the present invention is that when a substance such as a colorant that attenuates or shields the irradiated light is present at a high concentration, when the film thickness is thick, and when the light source is visible light to infrared light, particularly low energy. It is an object of the present invention to provide a photoacid generator that effectively generates an acid even with respect to infrared light, and a photosensitive composition using the same and having excellent curability.
- the present inventors have found a photoacid generator having excellent sensitivity to visible light to infrared light. That is, the present invention is a metal complex in which a five-membered ring aromatic heterocyclic compound is directly or connected by ⁇ -conjugation and has this as a ligand, and the central metal is an axial ligand. It is a photoacid generator having one or two of them and having an onium salt structure in the axial ligand thereof.
- the present invention is a photosensitive composition containing the above-mentioned photoacid generator and a cationically polymerizable compound.
- the present invention is a cured product obtained by curing the above-mentioned photosensitive composition.
- the photoacid generator of the present invention efficiently generates a strong acid by being exposed to light in the visible to infrared light region having a wavelength of 400 nm to 1500 nm, and a reaction using the strong acid (acid-catalyzed reaction, cationic polymerization reaction, etc.). Can be used for. Further, even in a composition containing an additive and a colorant having absorption in the ultraviolet light to visible light region, the transmission of energy rays is not hindered, so that a cured product can be efficiently produced.
- the photoacid generator of the present invention is a metal complex in which a five-membered ring aromatic heterocyclic compound is directly or ⁇ -conjugated to form a ring structure, and the central metal is a metal complex having this as a ligand. It is characterized by having one or two axial ligands and having an onium salt structure in the axial ligand.
- the five-membered ring aromatic heterocyclic compound of the present invention includes five atoms including a carbon atom and one or more heteroatoms (for example, representing a nitrogen atom, an oxygen atom, a sulfur atom, a phosphorus atom, a silicon atom, etc.). It is a compound having a cyclic structure and an aromatic property, and examples thereof include furan, thiophene, pyrrole, oxazole, thiazole, imidazole, thiadiazol and triazole. From the viewpoint of availability of raw materials, furan, thiophene and pyrrole are preferable, and pyrrole is more preferable.
- a compound (hereinafter, abbreviated as a cyclic compound) in which the five-membered ring aromatic heterocyclic compound of the present invention is directly or ⁇ -conjugated to form a ring structure includes three or more of the five-membered ring aromatic heterocyclic compounds. It consists of four compounds, and while maintaining a ⁇ bond via a direct bond or one or two carbon atoms, a hetero atom (for example, representing a nitrogen atom, an oxygen atom, a sulfur atom, a phosphorus atom, a silicon atom, etc.). A group of compounds that combine to form a ring structure.
- the cyclic compound serves as a light absorption site.
- specific cyclic compounds include porphyrin, polyphilazine, corrole, phthalocyanine, subporphyrin, subphthalocyanine, chlorin, porphysen and corphisen.
- the cyclic compound is used as a ligand for a metal complex (hereinafter referred to as a cyclic ligand).
- the metal complex is composed of one metal element with respect to one molecule of the cyclic compound, and is formed by coordinating an unshared electron pair on a hetero atom possessed by a cyclic ligand to an empty orbital of the metal element.
- this metal complex further has an axial ligand.
- the axial ligand refers to a ligand that coordinates in the direction perpendicular to the plane on which the cyclic ligand is coordinated.
- the axial ligand has an onium salt structure, and the cyclic ligand, which is a light absorption site, absorbs light, and the onium salt is decomposed to generate an acid.
- the preferred structure of the photoacid generator of the present invention can be represented by the general formula (1) or the general formula (2).
- R 1 to R 8 are substituents on the aromatic heterocycle, and are bonded to each other at R 1 and R 2 , R 3 and R 4 , R 5 and R 6 , and R 7 and R 8 .
- Y may be a nitrogen atom, a carbon atom or a direct bond, and in the case of a carbon atom, hydrogen or an aromatic having 6 to 14 carbon atoms is placed on the carbon atom.
- Hydrocarbon is substituted, M is selected from Al, Ga, In, Si, Ge, Sn, Fe, Ti, Co, Mn, and L 1 and L 2 are represented by the formula (3) coordinated to the metal. It is an axial ligand to be formed, and when M is Al, Ga, In, Fe, Mn, it has only L1.
- Equation (2) represents the case where the central metal M is cationic, R 1 to R 8 , Y, L 1 and L 2 are the same as in equation (1), and M is P, Sb and Bi. Selected from the group, X2- represents a monovalent counter anion corresponding to the central metal cation.
- D represents an oxygen atom or a sulfur atom
- E represents an alkylene having 1 to 8 carbon atoms, an alkenylene having 2 to 8 carbon atoms, an alkynylene having 2 to 8 carbon atoms or an arylene having 6 to 14 carbon atoms.
- the main chain may contain an ether group, a sulfide group, a ketone group, an amide group, an ester group, a thioester group, a urea group, a sulfone group, a silyl group and a phenylene group
- a + is a monovalent onium cation.
- X 1- represents a monovalent counter anion corresponding to the onium cation.
- Y may be a nitrogen atom, a carbon atom or a direct bond.
- the direct bond indicates that the five-membered ring aromatic heterocyclic compound forms a ring structure in which the five-membered ring aromatic heterocyclic compound is directly bonded and connected by ⁇ conjugation.
- a carbon atom a hydrogen atom or an aryl group having 6 to 30 carbon atoms may be substituted on the carbon atom.
- M represented by the formula (1) is a central metal of a metal complex formed by using the aromatic heterocycle as a cyclic ligand, and is not particularly limited as long as it is a metal having an axial ligand, but it is a raw material. From the viewpoint of availability and stability as a metal complex, a metal selected from the group of Al, Ga, In, Si, Ge, Sn, Fe, Ti, Co and Mn is preferable.
- M represented by the formula (2) represents a central metal forming a cationic metal complex with the aromatic heterocycle as a cyclic ligand, and is P from the viewpoint of availability of raw materials and stability as a metal complex. , Sb and Bi selected from the group are preferred.
- R 1 to R 8 are substituents on the aromatic heterocyclic ring, and are independent of each other, an aryl group having 6 to 30 carbon atoms and a heteroaryl group having 4 to 30 carbon atoms.
- the aryl group having 6 to 30 carbon atoms includes a monocyclic aryl group such as a phenyl group and a biphenylyl group, and naphthyl, anthrasenyl, phenanthrenyl, pyrenyl, chrysenyl, naphthalsenyl, benzanthrasenyl, anthraquinolyl, fluorenyl, naphthoquinone and anthraquinone.
- Examples thereof include fused polycyclic aryl groups such as.
- heteroaryl group having 4 to 30 carbon atoms examples include cyclic compounds containing 1 to 3 complex atoms such as oxygen, nitrogen, and sulfur, which may be the same or different, and as a specific example.
- a monocyclic heteroaryl group such as thienyl, furanyl, pyranyl, pyrrolyl, oxazolyl, thiazolyl, pyridyl, pyrimidyl, pyrazinyl and indolyl, benzofuranyl, isobenzofuranyl, benzothienyl, isobenzothienyl, quinolyl, isoquinolyl, quinoxalinyl, quinazolinyl.
- Carbazolyl acridinyl, phenothiazinyl, phenazinyl, xanthenyl, thiantranyl, phenoxadinyl, phenoxatiinyl, chromanyl, isochromanyl, dibenzothienyl, xanthonyl, thioxanthonyl, dibenzofuranyl and the like.
- Alkyl groups having 1 to 30 carbon atoms include linear alkyl groups such as methyl, ethyl, propyl, butyl, hexadecyl and octadecyl, isopropyl, isobutyl, sec-butyl, tert-butyl, isopentyl, neopentyl, tert-pentyl and isohexyl. Examples thereof include branched alkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, and cyclohexyl.
- alkenyl group having 2 to 30 carbon atoms examples include vinyl, allyl, 1-propenyl, isopropenyl, 1-butenyl, 2-butenyl, 3-butenyl, 1-methyl-1-propenyl and the like.
- alkynyl group having 2 to 30 carbon atoms examples include ethynyl, 1-propynyl, 2-propynyl, 1-butynyl, 2-butynyl, 3-butynyl, 1-methyl-1-propynyl, 1-methyl-2-propynyl and the like. Can be mentioned.
- alkoxy group having 1 to 18 carbon atoms examples include methoxy, ethoxy, propoxy, isopropoxy, butoxy, isobutoxy, sec-butoxy, tert-butoxy, and dodecyloxy.
- Examples of the aryloxy group having 6 to 10 carbon atoms include phenoxy and naphthyloxy.
- alkylcarbonyl group having 2 to 19 carbon atoms examples include acetyl, trifluoroacetyl, propionyl, butanoyl, 2-methylpropionyl, heptanoyle, 2-methylbutanoyl, 3-methylbutanoyl, octanoyl and the like.
- arylcarbonyl group having 7 to 11 carbon atoms examples include benzoyl, 4-tert-butylbenzoyl, and naphthoyl.
- alkoxycarbonyl group having 2 to 19 carbon atoms examples include methoxycarbonyl, ethoxycarbonyl, propoxycarbonyl, isopropoxycarbonyl, butoxycarbonyl, isobutoxycarbonyl, sec-butoxycarbonyl, tert-butoxycarbonyl and the like.
- Examples of the aryloxycarbonyl group having 7 to 11 carbon atoms include phenoxycarbonyl and naphthoxycarbonyl.
- arylthiocarbonyl group having 7 to 11 carbon atoms examples include phenylthiocarbonyl and naphthoxythiocarbonyl.
- Examples of the asyloxy group having 2 to 19 carbon atoms include acetoxy, ethylcarbonyloxy, propylcarbonyloxy, isobutylcarbonyloxy, sec-butylcarbonyloxy, tert-butylcarbonyloxy, octadecylcarbonyloxy and the like.
- arylthio group having 6 to 20 carbon atoms examples include phenylthio, biphenylylthio, methylphenylthio, chlorophenylthio, bromophenylthio, fluorophenylthio, hydroxyphenylthio, methoxyphenylthio, naphthylthio, 4- [4- (phenylthio).
- Benzoyl] phenylthio 4- [4- (phenylthio) phenoxy] phenylthio, 4- [4- (phenylthio) phenyl] phenylthio, 4- (phenylthio) phenylthio, 4-benzoylphenylthio, 4-benzoyl-chlorophenylthio, 4- Examples thereof include benzoyl-methylthiophenylthio, 4- (methylthiobenzoyl) phenylthio, 4- (p-tert-butylbenzoyl) phenylthio and the like.
- alkylthio group having 1 to 18 carbon atoms examples include methylthio, ethylthio, propylthio, tert-butylthio, neopentylthio, dodecylthio and the like.
- alkylsulfinyl group having 1 to 18 carbon atoms examples include methylsulfinyl, ethylsulfinyl, propylsulfinyl, tert-pentylsulfinyl, octylsulfinyl and the like.
- arylsulfinyl group having 6 to 10 carbon atoms examples include phenylsulfinyl, trillsulfinyl, and naphthylsulfinyl.
- alkylsulfonyl group having 1 to 18 carbon atoms examples include methylsulfonyl, ethylsulfonyl, propylsulfonyl, isopropylsulfonyl, butylsulfonyl, and octylsulfonyl.
- arylsulfonyl group having 6 to 10 carbon atoms examples include phenylsulfonyl, tolylsulfonyl, and naphthylsulfonyl.
- halogen group examples include fluoro, chloro, bromo and iodine.
- R 1 to R 8 substituted with substituents on the aromatic heterocycle, preferably an alkyl group having 1 to 6 carbon atoms, an aryl group having 6 to 14 carbon atoms, a hydroxy group, and an alkoxy group having 1 to 6 carbon atoms.
- X 2- is a counter anion to the cationic central metal M
- X 1 - is a counter anion to the onium cation, and each atom can be a monovalent anion. It is an anion corresponding to an acid (HX) generated by irradiating the photoacid generator of the present invention with light (visible light, ultraviolet rays, electron beam, X-ray, etc.).
- X 1- and X 2- are not limited except that they are halogen anions and monovalent polyatomic anions, but for example F-, Cl- , Br- , I- , BY a- , PY a- , SbY a- , (Rf) b PF 6-b- , R 9 c BY 4-c- , R 9 c GaY 4-c- , R 10 SO 3- , (R 10 SO 2 ) 3 C- and (R) 10 SO 2 )
- Anions represented by 2N ⁇ are exemplified.
- P represents a phosphorus atom
- B represents a boron atom
- Sb represents an antimony atom
- F represents a fluorine atom
- Ga represents a gallium atom
- Y represents a halogen atom (preferably a fluorine atom).
- S represents a sulfur atom
- O represents an oxygen atom
- C represents a carbon atom
- N represents a nitrogen atom.
- Rf represents an alkyl group in which 80 mol% or more of a hydrogen atom is substituted with a fluorine atom (an alkyl group having 1 to 8 carbon atoms is preferable).
- Alkyl groups to be Rf by fluorine substitution include linear alkyl groups (methyl, ethyl, propyl, butyl, pentyl, octyl, etc.), branched alkyl groups (isopropyl, isobutyl, sec-butyl, tert-butyl, etc.) and Cycloalkyl groups (cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, etc.) and the like can be mentioned.
- the ratio of hydrogen atoms of these alkyl groups substituted with fluorine atoms in Rf is preferably 80 mol% or more, more preferably 90, based on the number of moles of hydrogen atoms possessed by the original alkyl group. % Or more, particularly preferably 100%.
- the substitution ratio by the fluorine atom is in these preferable ranges, the photosensitivity of the sulfonium salt is further improved.
- Rf are CF 3- , CF 3 CF 2- , (CF 3 ) 2 CF-, CF 3 CF 2 CF 2- , CF 3 CF 2 CF 2 CF 2- , (CF 3 ) 2 CFCF 2- , CF 3 CF 2 (CF 3 ) CF- and (CF 3 ) 3 C-.
- the b Rfs are independent of each other and therefore may be the same or different from each other.
- R 9 represents a phenyl group in which a part of a hydrogen atom is substituted with at least one element or an electron-withdrawing group.
- Examples of such one element include a halogen atom and include a fluorine atom, a chlorine atom, a bromine atom and the like.
- Examples of the electron-withdrawing group include a trifluoromethyl group, a nitro group and a cyano group. Of these, a phenyl group in which one hydrogen atom is substituted with a fluorine atom or a trifluoromethyl group is preferable.
- the c R9s are independent of each other and may therefore be the same or different from each other.
- R 10 represents an alkyl group having 1 to 20 carbon atoms, a perfluoroalkyl group having 1 to 20 carbon atoms or an aryl group having 6 to 20 carbon atoms, and the alkyl group and the perfluoroalkyl group are linear or branched. Alternatively, it may be cyclic, and the aryl group may be unsubstituted or may have a substituent.
- a represents an integer of 4 to 6.
- b is an integer of 1 to 5, preferably 2 to 4, and more preferably 2 or 3.
- c is an integer of 1 to 4, preferably 4.
- the anions represented by (Rf) b PF 6-b- include (CF 3 CF 2 ) 2 PF 4- , (CF 3 CF 2 ) 3 PF 3- , ((CF 3 ) 2 CF) 2 PF 4 - , ((CF 3 ) 2 CF) 3 PF 3- , (CF 3 CF 2 CF 2 ) 2 PF 4- , (CF 3 CF 2 CF 2 ) 3 PF 3- , ((CF 3 ) 2 CFCF 2 ) 2 PF 4- , ((CF 3 ) 2 CFCF 2 ) 3 PF 3- , (CF 3 CF 2 CF 2 CF 2 ) 2 PF 4 - and (CF 3 CF 2 CF 2 CF 2 ) 3 PF 3- Examples thereof include anions to be formed.
- the anions represented by R 8 c BY 4-c- are (C 6 F 5 ) 4 B- , ((CF 3 ) 2 C 6 H 3 ) 4 B- , (CF 3 C 6 H 4 ) 4 Examples thereof include anions represented by B- , (C 6 F 5 ) 2 BF 2- , C 6 F 5 BF 3- and (C 6 H 3 F 2 ) 4 B-. Of these, anions represented by (C 6 F 5 ) 4 B- and ((CF 3 ) 2 C 6 H 3 ) 4 B - are preferable.
- the anions represented by R 9 c GaY 4-c- include (C 6 F 5 ) 4 Ga- , ((CF 3 ) 2 C 6 H 3 ) 4 Ga- , (CF 3 C 6 H 4 ) 4 Examples thereof include anions represented by Ga ⁇ , (C 6 F 5 ) 2 GaF 2 ⁇ , C 6 F 5 GaF 3 ⁇ and (C 6 H 3 F 2 ) 4 Ga ⁇ . Of these, anions represented by (C 6 F 5 ) 4 Ga ⁇ and ((CF 3 ) 2 C 6 H 3 ) 4 Ga ⁇ are preferred.
- Examples of the anion represented by R 10 SO 3- include trifluoromethanesulfonic acid anion, pentafluoroethanesulfonic acid anion, heptafluoropropanesulfonic acid anion, nonafluorobutane sulfonic acid anion, pentafluorophenylsulfonic acid anion, and p-toluene.
- Examples thereof include sulfonic acid anion, benzene sulfonic acid anion, camphor sulfonic acid anion, methane sulfonic acid anion, ethane sulfonic acid anion, propane sulfonic acid anion and butane sulfonic acid anion.
- trifluoromethanesulfonic acid anion trifluoromethanesulfonic acid anion, nonafluorobutane sulfonic acid anion, methanesulfonic acid anion, butane sulfonic acid anion, camphor sulfonic acid anion, benzenesulfonic acid anion and p-toluene sulfonic acid anion are preferable.
- the anions represented by (R 10 SO 2 ) 3 C- include (CF 3 SO 2 ) 3 C- , (C 2 F 5 SO 2 ) 3 C- , and (C 3 F 7 SO 2 ) 3 C-. And (C 4 F 9 SO 2 ) 3 C - represented by anions and the like.
- the anions represented by (R 10 SO 2 ) 2 N- include (CF 3 SO 2 ) 2 N- , (C 2 F 5 SO 2 ) 2 N- , and (C 3 F 7 SO 2 ) 2 N-. And (C 4 F 9 SO 2 ) 2 N - represented by anions and the like.
- anions represented by 10 SO 3- , (R 10 SO 2 ) 3 C- or (R 10 SO 2 ) 2 N- perhalogenate ions (ClO 4- , BrO 4- , etc.), halogenated sulfates, etc.
- Acid ion FSO 3- , ClSO 3- , etc.
- Sulfate ion CH 3 SO 4- , CF 3 SO 4- , HSO 4- , etc.
- Carbonate ion HCO 3- , CH 3 CO 3- , etc.
- Alumin Acid ion AlCl 4- , AlF 4- , ( t- C 4 F 9 O) 4 Al- , etc.
- Hexafluorobismuth acid ion (BiF 6- ) Hexafluorobismuth acid ion (BiF 6- ) , Carboxylate ion (CH 3 COO- , CF 3 COO- ) , C 6 H 5 COO- , CH 3 C 6 H 4 COO- , C 6 F 5 COO- , CF 3 C 6 H 4 COO- , etc.
- aryl borate ion B (C 6 H 5 ) 4- , CH 3 CH 2 CH 2 CH 2 B (C 6 H 5 ) 3 -
- L 1 and L 2 represented by the formulas (1) and (2) are axial ligands represented by the formula (3) coordinated to the central metal M, and are axial ligands depending on the type of M. The number of is different. From the viewpoint of stability as a metal complex, when the preferable central metal is Al, Ga, In, Fe, Co or Mn, one axial ligand is used, and the other is two axial ligands. preferable. When two axial ligands are used, they may be the same or different.
- D is directly bonded to the central metal M and represents an oxygen atom or a sulfur atom.
- E is a divalent group that bonds D and the onium cation A + , and is an alkylene having 1 to 8 carbon atoms, an alkenylene having 2 to 8 carbon atoms, an alkynylene having 2 to 8 carbon atoms, or a carbon. It represents an arylene of the number 6 to 14, and may contain an ether group, a sulfide group, a ketone group, an amide group, an ester group, a thioester group, a urea group, a sulfone group, and a silyl group in the main chain.
- the main chain is the main skeleton that binds D and the onium cation A + .
- alkylene having 1 to 8 carbon atoms linear alkylene such as methylene, ethylene, trimethylene, tetramethylene, hexamethylene, octamethylene, 1-methylethyl, 1-methylethylidene, 1,1-dimethylethylene, 1,2-dimethyl
- alkylene having 1 to 8 carbon atoms linear alkylene such as methylene, ethylene, trimethylene, tetramethylene, hexamethylene, octamethylene, 1-methylethyl, 1-methylethylidene, 1,1-dimethylethylene, 1,2-dimethyl
- Examples thereof include branched alkylenes such as ethylene and 1-methylpropanol, and cyclic alkylenes such as cyclopropylene, cyclobutylene, cyclopentylene, cyclopentylidene, cyclohexylene and cyclohexylidene.
- alkenylene having 2 to 8 carbon atoms examples include vinylene, 1-propenylene, 2-propenylene, 1-butenylene, 2-butenylene, 3-butenylene, 1-hexenylene, cyclohexenylene, 1,3-butadienylene, 1,3-. Hexadienylene, 2,4,6-octatrienylene and the like can be mentioned.
- alkynylene having 2 to 8 carbon atoms include ethynylene, 1-propinilen, 2-propinilen, 1-butinirene, 2-butinirene, 3-butinirene, 1,3-butadiinylene, hexane-1-en-3-inylene and the like. Be done.
- the arylene having 6 to 14 carbon atoms examples include phenylene, naphthylene, anthrasenylene, and biphenylene.
- E in the case where the main chain contains an ether group, a sulfide group, a ketone group, an amide group, an ester group, a thioester group, a urea group, a sulfone group and a silyl group include the following. * Indicates the bond position.
- a + is a monovalent onium cation bonded to the metal via D and E as an axial ligand.
- the monovalent onium cation means a cation generated by coordinating a proton or a cation-type atomic group (alkyl group, etc.) to a compound containing an element having an unshared electron pair, and means a monovalent onium cation. Examples include the following cations.
- Oxonium cations (trimethyloxonium cations, triethyloxonium, tetramethylenemethyloxonium cations, etc.); Pyrrilinium cations (4-methylpyrrilinium cations and 2,6-diphenylpyrilinium cations, etc.); Chromenium cations (2,4-dimethylchromenium cations, etc.); Isochromenium cations (1,3-dimethylisochromenium cations, etc.); Ammonium cations [ammonium cations, primary ammonium cations (n-butylammonium cations, etc.), secondary ammonium cations (diethylammonium cations, etc.), tertiary ammonium cations (triethylammonium cations, etc.), quaternary ammonium cations (tetramethylammonium cations, etc.) , Phenyltrimethylammoni
- Imidazole cations N, N'-dimethylimidazolium cations, 1-ethyl-3-methylimidazolium cations, etc.
- Kinolium cations N-methylquinolium cation cations, N-benzyl quinolium cations, etc.
- Isoquinolium cations N-methylisoquinolium, etc.
- Thiazonim cation benzylbenzothiazonium cation, etc.
- Acridium cations benzylacrydium cations, phenacylacrydium, etc.
- Diazonium cations phenyldiazonium cations, 2,4,6-triethoxyphenyldiazonium cations, 2,4,6-trihexyloxyphenyldiazonium cations, 4-anilinophenyldiazonium cations, etc.
- Guazinium cations hexamethylguanidinium c
- Phosphonium cations [tertiary phosphonium cations (triphenylphosphonium cations and tritert-butylphosphonium cations, etc.) and quaternary phosphonium cations (tetraphenylphosphonium cations, tetra-p-tolylphosphonium cations, triphenylbenzylphosphonium cations, triphenylbutyl cations, etc.) , Tetraethyl phosphonium cation and tetrabutyl phosphonium cation, etc.)].
- Sulfonium cations ⁇ triphenylsulfonium cations, 4- (phenylthio) phenyldiphenylsulfonium cations, bis [4- (diphenylsulfonate) phenyl] sulfides and 4-hydroxyphenylmethylbenzylsulfonium cations, etc. ⁇ ; Sulfonium cations (triphenylsulfoxonium, etc.); Cianthrenium cations [5- (4-methoxyphenyl) thianthrenium, 5-phenylthianthrenium, 5-triltianslenium cations, etc.]; Thiophenium cation (2-naphthyltetrahydrothiophenium, etc.); Iodonium cations [diphenyliodonium cations, di-p-tolyl iodonium cations, 4-isopropylphenyl (p-tolyl) iodonium
- onium cations sulfonium cations, iodonium cations, and diazonium cations are preferable from the viewpoint of photoresponsiveness.
- preferable axial ligands L1 and L2 represented by the formula (3) containing a sulfonium cation include the following.
- preferable axial ligands L1 and L2 represented by the formula (3) containing an iodonium cation include the following.
- preferable axial ligands L1 and L2 represented by the formula (3) containing a diazonium cation include the following.
- the photoacid generator (object) represented by the general formula (1) of the present invention can be produced by a known method.
- a metal complex precursor (a) having an aromatic heterocyclic compound having a target light absorption site as a cyclic ligand and an axial ligand precursor (b) containing an onium structure and having a target anion are synthesized. Then, the desired compound can be obtained by binding these.
- the manufacturing method is shown by the following chemical formula.
- the aromatic heterocyclic compound is porphyrin.
- the metal complex precursor (a) can be variously produced by a known method (for the method of synthesizing porphyrins and phthalocyanine compounds, for example, KARL. The methods described in M. KADIS H KEVIN M. SMITH ROGER GUILARD, THE PORPHYRIN HANDBOOK VOL.1-10, ACADEMIC PRESS (2000) and VOL.11-20, (2003) can be used).
- M is the same as the central metal M and represents a valence m.
- X represents a halogen atom and has the same number of halogen atoms as the valence of the metal M.
- L 3 and L 4 are halogen atoms or hydroxy. The group is shown. [Onium] is the same as A in the formula (3), and X 1 is the same as X 1 in the formula (3).)
- the photoacid generator (object) represented by the general formula (2) of the present invention is a cationic metal complex
- it contains a cationic metal complex precursor (a') and an onium structure, and has an anion of interest.
- the desired compound can be obtained by binding to the ligand precursor (b).
- the purpose is to replace the alkali metal salt, alkaline earth metal salt, etc. of the X 2 anion which is the raw material in the presence of an equal amount or more.
- a metal complex is obtained.
- M is the same as the central metal M and represents a valence m.
- X represents a halogen atom and has the same number of halogen atoms as the valence of the metal M.
- L 3 and L 4 are halogen atoms or hydroxy. The group is shown.
- [Onium] is the same as A in the formula (3), X 1 is the same as X 1 in the formula (3), and M'represents an alkali metal or an alkaline earth metal.
- X 2 is the same as X 2 in equation (2).
- the onium cation structure used for the axial ligand precursor (b) of the present invention can be produced by a metathesis method.
- the metathesis method is, for example, New Experimental Chemistry Course 14-I (1978, Maruzen) p-448; Advance in Composer Science, 62, 1-48 (1984); New Experimental Chemistry Course 14-III (1978, Maruzen).
- the solvent water or an organic solvent can be used.
- organic solvent examples include hydrocarbons (hexane, heptane, toluene, xylene, etc.), cyclic ethers (tetratetra, dioxane, etc.), chlorine-based solvents (chloroform, dichloromethane, etc.), alcohols (methanol, ethanol, isopropyl alcohol, etc.), ketones (methanol, ethanol, isopropyl alcohol, etc.), ketones ( Includes acetone, methyl ethyl ketone and methyl isobutyl ketone, etc.), nitriles (acetohydrate, etc.) and polar organic solvents (dimethylsulfoxide, dimethylformamide, N-methylpyrrolidone, etc.). These solvents may be used alone or in combination of two or more.
- the obtained photoacid generator of interest can be purified by a method such as recrystallization or washing with water or a solvent, if necessary. Purification by recrystallization dissolves the target photoacid generator in a small amount of organic solvent, and separation from the organic solvent is performed directly (or after concentration) in an organic solvent solution containing the target photoacid generator. , It can be carried out by adding a poor solvent to precipitate the desired photoacid generator.
- Examples of the poor solvent used here include chain ethers (diethyl ether, dipropyl ether, etc.), esters (ethyl acetate, butyl acetate, etc.), aliphatic hydrocarbons (hexane, cyclohexane, etc.), and aromatic hydrocarbons (toluene and cyclohexane, etc.). Xylene, etc.) is included. Purification can also be performed by utilizing the difference in solubility depending on the temperature. Purification can be performed by recrystallization (a method utilizing the difference in solubility due to cooling, a method of adding a poor solvent to precipitate, and a combination thereof). Further, when the photoacid generator is an oil (when it does not crystallize), the oil can be purified by washing with water or a poor solvent.
- the structure of the photoacid generator thus obtained can be obtained by general analytical methods such as nuclear magnetic resonance spectra such as 1H , 13C , 19F and 31P , infrared absorption spectra or elemental analysis. Can be identified by.
- the photoacid generator of the present invention may contain other conventionally known photoacid generators in addition to the compounds listed above, if necessary.
- the content (mol%) of the other photoacid generator is preferably 0.1 to 100, more preferably 0.1 to 100, based on the number of moles of the photoacid generator of the present invention. Is 0.5 to 50.
- photoacid generators include conventionally known salts such as onium salts (sulfonium, iodonium, selenium, ammonium and phosphonium, etc.) and salts of transition metal complex ions and anions.
- the photoacid generator of the present invention may be previously dissolved in a solvent that does not inhibit polymerization, cross-linking, deprotection reaction, etc., in order to facilitate dissolution in a composition containing a cationically polymerizable compound.
- the solvent examples include carbonates such as propylene carbonate, ethylene carbonate, 1,2-butylene carbonate, dimethyl carbonate and diethyl carbonate; ketones such as acetone, methyl ethyl ketone, cyclohexanone, methylisoamyl ketone and 2-heptanone; ethylene glycol and ethylene glycol.
- Polyhydric alcohols such as monomethyl ether, monoethyl ether, monopropyl ether, monobutyl ether or monophenyl ether of monoacetate, diethylene glycol, diethylene glycol monoacetate, propylene glycol, propylene glycol monoacetate, dipropylene glycol and dipropylene glycol monoacetate.
- cyclic ethers such as dioxane; ethyl acetate, methyl lactate, ethyl lactate, methyl acetate, ethyl acetate, butyl acetate, methyl pyruvate, methyl acetoacetate, ethyl acetoacetate, ethyl pyruvate, ethyl ethoxyacetate , Methyl methoxypropionate, ethyl ethoxypropionate, methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate, ethyl 2-hydroxy-2-methylpropionate, methyl 2-hydroxy-3-methylbutanoate, 3-methoxybutyl
- esters such as acetate and 3-methyl-3-methoxybutyl acetate; aromatic hydrocarbons such as toluene and xylene.
- the ratio of the solvent used is preferably 15 to 1000 parts by weight, more preferably 30 to 500 parts by weight, based on 100 parts by weight of the photoacid generator of the present invention.
- the solvent used may be used alone or in combination of two or more.
- the photosensitive composition of the present invention comprises the photoacid generator and a cationically polymerizable compound.
- Examples of the cationically polymerizable compound which is a constituent component of the photosensitive composition include cyclic ethers (epoxide and oxetane, etc.), ethylenically unsaturated compounds (vinyl ether, styrene, etc.), bicycloorthoesters, spiroletocarbonates, spirolotoesters, and the like.
- cyclic ethers epoxide and oxetane, etc.
- ethylenically unsaturated compounds vinyl ether, styrene, etc.
- bicycloorthoesters ethylenically unsaturated compounds
- spiroletocarbonates spirolotoesters
- epoxide known epoxides and the like can be used, and aromatic epoxides, alicyclic epoxides and aliphatic epoxides are included.
- aromatic epoxide examples include glycidyl ethers of monovalent or polyvalent phenols (phenols, bisphenol A, phenol novolacs and compounds with alkylene oxide adducts thereof) having at least one aromatic ring.
- the alicyclic epoxide is a compound obtained by epoxidizing a compound having at least one cyclohexene or cyclopentene ring with an oxidizing agent (3,4-epoxycyclohexylmethyl-3,4-epoxycyclohexanecarboxylate, etc.). Can be mentioned.
- Aliphatic epoxides include aliphatic polyhydric alcohols or polyglycidyl ethers of this alkylene oxide adduct (1,4-butanediol diglycidyl ether, 1,6-hexanediol diglycidyl ether, etc.), and aliphatic polybasic acids. Examples thereof include polyglycidyl esters (diglycidyl tetrahydrophthalate, etc.) and epoxidized long-chain unsaturated compounds (epoxidized soybean oil, epoxidized polybutadiene, etc.).
- oxetane known ones and the like can be used, for example, 3-ethyl-3-hydroxymethyloxetane, 2-ethylhexyl (3-ethyl-3-oxetanylmethyl) ether, 2-hydroxyethyl (3-ethyl-3-).
- Oxetanylmethyl) ether 2-hydroxypropyl (3-ethyl-3-oxetanylmethyl) ether, 1,4-bis [(3-ethyl-3-oxetanylmethoxy) methyl] benzene, oxetanyl sill sesquioxetane, phenol novolac oxetane, etc.
- Oxetanylmethyl) ether 2-hydroxypropyl (3-ethyl-3-oxetanylmethyl) ether, 1,4-bis [(3-ethyl-3-oxetanylmethoxy) methyl] benzene, oxetanyl sill
- known cationically polymerizable monomers and the like can be used, and include aliphatic monovinyl ethers, aromatic monovinyl ethers, polyfunctional vinyl ethers, styrene and cationically polymerizable nitrogen-containing monomers.
- Examples of the aliphatic monovinyl ether include methyl vinyl ether, ethyl vinyl ether, butyl vinyl ether, cyclohexyl vinyl ether and the like.
- aromatic monovinyl ether examples include 2-phenoxyethyl vinyl ether, phenyl vinyl ether and p-methoxyphenyl vinyl ether.
- polyfunctional vinyl ether examples include butanediol-1,4-divinyl ether and triethylene glycol divinyl ether.
- styrene examples include styrene, ⁇ -methylstyrene, p-methoxystyrene, p-tert-butoxystyrene and the like.
- Examples of the cationically polymerizable nitrogen-containing monomer include vinyl-based monomers such as N-vinylcarbazole and N-vinylpyrrolidone, ethyl 3- (1-aziridyl) propionate, and bis (3- (1-aziridyl) propionic acid) neopentyl glycol ester. , Trimethylolpropanetris (3- (2-methyl-1-aziridyl) propionic acid) ester, pentaerythritol tetrakis (3- (1-aziridyl) propionic acid) ester and other monofunctional and polyfunctional aziridine-based monomers.
- vinyl-based monomers such as N-vinylcarbazole and N-vinylpyrrolidone, ethyl 3- (1-aziridyl) propionate, and bis (3- (1-aziridyl) propionic acid) neopentyl glycol ester.
- Bicycloorthoesters include 1-phenyl-4-ethyl-2,6,7-trioxabicyclo [2.2.2] octane and 1-ethyl-4-hydroxymethyl-2,6,7-trioxabicyclo. -[2.2.2] Octane and the like can be mentioned.
- spiro orthocarbonate examples include 1,5,7,11-tetraoxaspiro [5.5] undecane and 3,9-dibenzyl-1,5,7,11-tetraoxaspiro [5.5] undecane. Be done.
- Spiro-ortho esters include 1,4,6-trioxaspiro [4.4] nonane, 2-methyl-1,4,6-trioxaspiro [4.4] nonane and 1,4,6-trioxas. Pyro [4.5] decane and the like can be mentioned.
- polyorganosiloxane having at least one cationically polymerizable group in one molecule can be used (Japanese Patent Laid-Open No. 2001-348482, JP-A-2000-281965, JP-A-7-242828, JP. JP-A-2008-19593, Journal of Polymer. Sci., Part A, Polymer. Chem., Vol. 28,497 (1990), etc.). These polyorganosiloxanes may be linear, branched, or cyclic, or may be a mixture thereof.
- cationically polymerizable compounds epoxides, oxetane and vinyl ethers are preferable, and epoxides and oxetanees are more preferable, and alicyclic epoxides and oxetanees are particularly preferable. Further, these cationically polymerizable compounds may be used alone or in combination of two or more.
- the content of the photoacid generator of the present invention in the photosensitive composition is preferably 0.05 to 20 parts by weight, more preferably 0.1 to 10 parts by weight, based on 100 parts by weight of the cationically polymerizable compound. .. Within this range, the polymerization of the cationically polymerizable compound becomes more sufficient, and the physical properties of the cured product become even better. This content is determined by considering various factors such as the properties of the cationically polymerizable compound, the type of light (light source, wavelength, etc.), irradiation amount, temperature, curing time, humidity, and coating thickness. , Not limited to the above range.
- the content of the cationically polymerizable compound is 70% by weight to 99.9% by weight, preferably 80% by weight or more, based on the total weight of the photoacid generator and the cationically polymerizable compound. It is 99.5% by weight, more preferably 90% by weight to 99% by weight. Two or more kinds of cationically polymerizable compounds may be used in combination.
- the photosensitive composition of the present invention contains, if necessary, known additives (pigments, fillers, conductive particles, antistatic agents, flame retardants, antifoaming agents, flow modifiers, light stabilizers, antioxidants). Agents, adhesion-imparting agents, ion-supplementing agents, anticoloring agents, solvents, non-reactive resins, radically polymerizable compounds, etc.) can be contained.
- the photosensitive composition of the present invention may contain another additive (J) generally used for controlling the appearance and physical properties of the cured product of the photosensitive composition.
- Other additives (J) include colorants (Ja), metal oxide particles (Jb), metal particles (Jc) and the like.
- pigments and dyes such as inorganic pigments and organic pigments conventionally used for paints and inks can be used.
- inorganic pigment examples include chrome yellow, zinc yellow, navy blue, barium sulfate, cadmium red, titanium oxide, zinc flower, red iron oxide, alumina, calcium carbonate, ultramarine, carbon black, graphite and titanium black.
- organic pigments include soluble azo pigments such as ⁇ -naphthol type, ⁇ -oxynaphthoic acid type anilides type, acetoacetate anilides type and pyrazolone type, ⁇ -naphthol type, ⁇ -oxynaphthoic acid type and ⁇ -oxynaphthoic acid type.
- soluble azo pigments such as ⁇ -naphthol type, ⁇ -oxynaphthoic acid type anilides type, acetoacetate anilides type and pyrazolone type, ⁇ -naphthol
- examples thereof include azomethine dyes having methylene compounds, methine dyes such as benziliden dyes and monomethine oxonor dyes, quinone dyes such as naphthoquinone dyes and anthraquinone dyes, quinophthalone dyes, nitros, nitroso dyes, acrydin dyes and acridinone dyes.
- magenta dye phenols, naphthols, aniline, pyrazolones, pyridones, pyrazorotriazoles, ring-closed active methylene compounds or heterocycles (pyrrole, imidazole, thiophene, thiazole derivatives, etc.) are used as coupling components.
- Aryl or heteryl azo dyes such as carbonium dyes, naphthoquinone, anthraquinone and anthrapyridone, and condensed polycyclic dyes such as dioxazine dyes.
- Cyan dyes include azomethine dyes such as Indian aniline dyes and Indian phenol dyes, polymethine dyes such as cyanine dyes, oxonoll dyes and merocyanine dyes, carbonium dyes such as diphenylmethane dyes, triphenylmethane dyes and xanthene dyes, phthalocyanine dyes and anthraquinone dyes.
- the coupling component include phenols, naphthols, anilins, aryl or heteryl azo dyes (CI Direct Blue 14 and the like) having a pyrolopyrimidinone or pyrorotriadinone derivative, and indigo / thioindigo dyes.
- the particle size of the colorant (Ja) is preferably 0.01 ⁇ m to 2.0 ⁇ m, more preferably 0.01 ⁇ m to 1.0 ⁇ m, as an average particle size from the viewpoint of the vividness of the coating film.
- the amount of the colorant (Ja) added is not particularly limited, but is preferably 1 to 60% by weight based on the total weight of the photosensitive composition.
- pigment dispersant When a pigment is used, it is preferable to add a pigment dispersant in order to improve its dispersibility and storage stability of the photosensitive composition.
- the pigment dispersant include pigment dispersants manufactured by Big Chemie (Anti-Terra-U, Disperbyk-101, 103, 106, 110, 161, 162, 164, 166, 167, 168, 170, 174, 182, 184 or 2020, etc. ), Pigment dispersants manufactured by Ajinomoto Fine Techno Co., Ltd. (Azispar PB711, PB821, PB814, PN411, PA111, etc.), and pigment dispersants manufactured by Lubrizol (Solspurs 5000, 12000, 32000, 33000, 39000, etc.). These pigment dispersants may be used alone or in combination of two or more.
- the amount of the pigment dispersant added is not particularly limited, but it is preferably used in the range of 0.1 to 10% by weight in the photosensitive composition.
- filler known fillers and the like can be used, and molten silica, crystalline silica, calcium carbonate, aluminum oxide, titanium oxide, niobium oxide, barium titanate, aluminum hydroxide, zirconium oxide, magnesium carbonate, mica, talc, etc.
- Calcium silicate, lithium aluminum silicate and the like can be mentioned.
- the content of the filler is preferably 50 to 600,000 parts by weight, more preferably 300 to 200,000 parts by weight, based on 100 parts by weight of the acid generator.
- conductive particles known conductive particles can be used, and metal particles such as Ni, Ag, Au, Cu, Pd, Pb, Sn, Fe, Ni, and Al, and plated metal obtained by further metal-plating the metal particles. Particles, plated resin particles obtained by metal-plating resin particles, and particles of a conductive substance such as carbon can be used.
- the content of the conductive particles is preferably 50 to 30,000 parts by weight, more preferably 100 to 20,000 parts by weight, based on 100 parts by weight of the acid generator.
- antistatic agent known antistatic agents and the like can be used, and examples thereof include non-ionic antistatic agents, anionic antistatic agents, cationic antistatic agents, amphoteric antistatic agents and polymer antistatic agents. ..
- the content of the antistatic agent is preferably 0.1 to 20,000 parts by weight, more preferably 0.6 to 5,000 parts by weight, based on 100 parts by weight of the photoacid generator.
- a known flame retardant or the like can be used, and an inorganic flame retardant ⁇ antimon trioxide, antimon pentoxide, tin oxide, tin hydroxide, molybdenum oxide, zinc borate, barium metaborate, red phosphorus, aluminum hydroxide , Magnesium hydroxide, calcium aluminate, etc. ⁇ ; brominated flame retardants ⁇ tetrabromophthalic anhydride, hexabromobenzene, decabromobiphenyl ether, etc. ⁇ ; and phosphoric acid ester flame retardants ⁇ tris (tribromophenyl) phosphate, etc. ⁇ , etc. Be done.
- the content of the flame retardant is preferably 0.5 to 40,000 parts by weight, more preferably 5 to 10,000 parts by weight, based on 100 parts by weight of the photoacid generator.
- the defoaming agent a known defoaming agent or the like can be used, and an alcohol defoaming agent, a metal soap defoaming agent, a phosphoric acid ester defoaming agent, a fatty acid ester defoaming agent, a polyether defoaming agent, a silicone defoaming agent. And mineral oil defoaming agents and the like.
- known fluidity adjusters and the like can be used, and examples thereof include hydrogenated castor oil, polyethylene oxide, organic bentonite, colloidal silica, amidowax, metal soap and acrylic acid ester polymers.
- known light stabilizers and the like can be used, and ultraviolet absorption type stabilizers ⁇ benzotriazole, benzophenone, salicylate, cyanoacrylate and derivatives thereof, etc. ⁇ ; radical supplement type stabilizers ⁇ hindered amine, etc. ⁇ ; and quenching. Examples thereof include type stabilizers ⁇ nickel complexes, etc. ⁇ .
- antioxidants and the like can be used, and examples thereof include phenol-based antioxidants (monophenol-based, bisphenol-based and high-molecular-weight phenol-based, etc.), sulfur-based antioxidants, phosphorus-based antioxidants, and the like. Be done.
- adhesion-imparting agent a known adhesion-imparting agent or the like can be used, and examples thereof include a coupling agent, a silane coupling agent, and a titanium coupling agent.
- ion catching agent known ion catching agents and the like can be used, and examples thereof include organoaluminum (alkoxyaluminum, phenoxyaluminum and the like).
- an antioxidant is effective, and a phenol-based antioxidant (monophenol-based, bisphenol-based, polymer phenol-based, etc.), sulfur-based oxidation Examples thereof include antioxidants and phosphorus-based antioxidants, but they have little effect in preventing coloration during heat resistance tests at high temperatures.
- the content of each is based on 100 parts of the photoacid generator. It is preferably 0.1 to 20000 parts by weight, more preferably 0.5 to 5000 parts by weight.
- the solvent is not limited as long as it can be used for dissolving the cationically polymerizable compound and adjusting the viscosity of the photocurable composition, and the solvent mentioned above as the solvent for the photoacid generator can be used.
- the content of the solvent is preferably 50 to 2000000 parts by weight, more preferably 200 to 500,000 parts by weight, based on 100 parts by weight of the photoacid generator.
- Non-reactive resins include polyester, polyvinyl acetate, polyvinyl chloride, polybutadiene, polycarbonate, polystyrene, polyvinyl ether, polyvinyl butyral, polybutene, styrene butadiene block copolymer hydrogenated materials, and (meth) acrylic acid esters.
- Examples include coalescence and polyurethane.
- the number average molecular weight of these resins is preferably 1000 to 500,000, more preferably 5000 to 100,000 (the number average molecular weight is a value measured by a general method such as GPC).
- the content of the non-reactive resin is preferably 5 to 400,000 parts by weight, more preferably 50 to 150,000 parts by weight, based on 100 parts by weight of the photoacid generator.
- non-reactive resin When a non-reactive resin is contained, it is desirable to dissolve the non-reactive resin in a solvent in advance in order to easily dissolve the non-reactive resin with a cationically polymerizable compound or the like.
- Known radically polymerizable compounds include ⁇ Photopolymer Handbook edited by Photopolymer Council (1989, Industrial Research Council), UV / EB Curing Technology edited by Comprehensive Technology Center (1982, Comprehensive Technology Center), Radtech Research. "UV / EB Curing Materials” (1992, CMC) edited by the Society, “Causes of Curing Poorness / Inhibition in UV Curing and Countermeasures” (2003, Technical Information Association) ⁇ , etc. It can be used and includes monofunctional monomers, bifunctional monomers, polyfunctional monomers, epoxy (meth) acrylates, polyester (meth) acrylates and urethane (meth) acrylates.
- the content of the radically polymerizable compound is preferably 5 to 400,000 parts by weight, more preferably 50 to 150,000 parts by weight, based on 100 parts by weight of the photoacid generator.
- radical polymerization initiator that initiates polymerization by heat or light in order to increase the polymer by radical polymerization.
- radical polymerization initiator a known radical polymerization initiator or the like can be used, and a thermal radical polymerization initiator (organic peroxide, azo compound, etc.) and a photoradical polymerization initiator (acetophenone-based initiator, benzophenone-based initiator, etc.) can be used. Michler ketone-based initiators, benzoin-based initiators, thioxanthone-based initiators, acylphosphine-based initiators, etc.) are included.
- the content of the radical polymerization initiator is preferably 0.01 to 20 parts by weight, more preferably 0.1 to 10 parts by weight, based on 100 parts by weight of the radically polymerizable compound. ..
- a cationically polymerizable compound, an acid generator and, if necessary, an additive are uniformly mixed and dissolved at room temperature (about 20 to 30 ° C.) or, if necessary, heating (about 40 to 90 ° C.). It can be prepared by kneading with 3 rolls or the like.
- the photosensitive composition of the present invention can irradiate energy rays in the visible region to the infrared region using an argon ion laser, a helium cadmium laser, a helium neon laser, a krypton ion laser, various semiconductor lasers, a xenon lamp, or an LED light source.
- a light source can be used.
- an ultra-high-pressure mercury lamp, a metal halide lamp, a high-power metal halide lamp, and the like can also be used because energy rays are generated at 400 nm or more.
- the irradiation time of light is affected by the intensity of the light source and the transparency of light to the photocurable composition, but at room temperature (about 20 to 30 ° C.), about 0.1 to 10 seconds is sufficient. However, when the light transmission is low or the film thickness of the photocurable composition is thick, it may be preferable to take a longer time. Most of the photocurable compositions are cured by cationic polymerization 0.1 seconds to several minutes after light irradiation, but if necessary, after light irradiation, at room temperature (about 20 to 30 ° C.) to 200 ° C. for several seconds to It is also possible to heat for several hours and aftercure.
- known coating methods such as spin coat, roll coat and spray coat, as well as slab printing, carton printing, metal printing, offset printing and screen printing, depending on the application.
- known printing methods such as gravure printing can be applied. It can also be applied to an inkjet method of coating in which fine droplets are continuously ejected.
- the structure of the metal complex precursor (a) is shown below.
- reagents purchased from Aldrich were used.
- the reaction solution was put into an aqueous solution in which 2.0 g of KPF 6 was previously dissolved in 50 mL of water.
- the mixture was stirred for 1 hour, extracted with 100 mL of dichloromethane, and the aqueous layer was removed by separation.
- the organic layer was concentrated by washing with 50 mL of water 5 times. Recrystallization was performed with dichloromethane-hexane to obtain 3.2 g (yield 60%) of a white solid. From 1H, 19F and 31 P - NMR, it was confirmed that this white solid was an axial ligand precursor (b-1 / PF 6 ).
- Production Example 6 Synthesis of Axial Ligand Precursor (b-1 / SbF 6 ) Production Example 5 (2) except that KSbF 6 3.1 g is used instead of KPF 6 2.0 g in Production Example 5 (2).
- a white solid of 6.3 g (yield 72%) was obtained according to the method described in 1. From 1H and 19 F - NMR, it was confirmed that this white solid was an axial ligand precursor (b-1 / SbF 6 ).
- Production Example 7 Synthesis of Axial Ligand Precursor (b-1 / B (C 6 F 5 ) 4 )
- NaB (C 6 F 5 ) 4 7 instead of KPF 6 2.0 g 6.3 g (yield 59%) of a slightly yellow solid was obtained according to the method described in Production Example 5 (2) except that the amount was 0.7 g (dissolved in 100 mL of water). From 1H and 19 F - NMR, it was confirmed that this slightly yellow solid was an axial ligand precursor (b-1 / B (C 6 F 5 ) 4 ).
- Production Example 8 Synthesis of Axial Ligand Precursor (b-1 / (C 2 F 5 ) 3 PF 3 )
- K (C 2 F 5 ) 3 instead of KPF 6 2.0 g. 5.1 g (yield 61%) of a slightly yellow solid was obtained according to the method described in Production Example 5 (2) except that the amount was PF 3 5.3 g. From 1H, 19F and 31 P - NMR, it was confirmed that this slightly yellow solid was an axial ligand precursor (b-1 / (C 2 F 5 ) 3 PF 3 ).
- Production Example 9 Synthesis of Axial Ligand Precursor (b-1 / Ga (C 6 F 5 ) 4 )
- NaGa (C 6 F 5 ) 48 instead of KPF 6 2.0 g. 6.2 g (yield 55%) of a white solid was obtained according to the method described in Production Example 5 (2) except that the amount was .4 g (dissolved in 100 mL of water). From 1H and 19 F - NMR, it was confirmed that this white solid was an axial ligand precursor (b-1 / Ga (C 6 F 5 ) 4 ).
- Production Example 10 Synthesis of Axial Ligand Precursor (b-1 / Al (Ot-C 4 F 9 ) 4 )
- LiAl (Ot - C) was used instead of KPF 6 2.0 g. 4 F 9 ) 6.0 g (yield 44%) of a white solid was obtained according to the method described in Production Example 5 (2) except that the amount was 10.7 g (dissolved in 100 mL of water). From 1H, 19 F - NMR, it was confirmed that this white solid was an axial ligand precursor (b-1 / Al ( Ot- C 4 F 9 ) 4 ).
- Production Example 11 Synthesis of Axial Ligand Precursor (b-1 / C (CF 3 SO 2 ) 3 )
- KC (CF 3 SO 2 ) 3 4 instead of KPF 6 2.0 g
- a white solid of 4.9 g (yield 61%) was obtained according to the method described in Production Example 5 (2) except that the weight was 9.9 g. From 1H and 19 F - NMR, it was confirmed that this white solid was an axial ligand precursor (b-1 / C (CF 3 SO 2 ) 3 ).
- Production Example 13 Synthesis of Axial Ligand Precursor (b-2 / (C 2 F 5 ) 3 PF 3 )
- K (C 2 F 5 ) 3 instead of KPF 6 2.0 g. 4.9 g (yield 58%) of a slightly yellow solid was obtained according to the method described in Production Example 12 (2) except that the amount was PF 3 5.3 g. From 1H, 19F and 31 P - NMR, it was confirmed that this slightly yellow solid was an axial ligand precursor (b-2 / (C 2 F 5 ) 3 PF 3 ).
- Production Example 14 Synthesis of Axial Ligand Precursor (b-2 / SbF 6 ) Production Example 12 (2) except that KSbF 6 3.1 g is used instead of KPF 6 2.0 g in Production Example 12 (2).
- KSbF 6 3.1 g is used instead of KPF 6 2.0 g in Production Example 12 (2).
- 4.2 g yield 68%) of a slightly yellow solid was obtained. From 1H, 19 F - NMR, it was confirmed that this slightly yellow solid was an axial ligand precursor (b-2 / SbF 6 ).
- the reaction was stopped by slowly adding 30 mL of a 10% aqueous ammonium chloride solution, and the reaction solution was added to 400 mL of water. Extraction was made 5 times with 100 mL of diethyl ether, and the organic layer was washed with water 3 times. It was concentrated by an evaporator to obtain 9.5 g of a yellow oil. The obtained oil was used as it was as Intermediate-5. From 1 H-NMR, it was confirmed that the main component was Intermediate-5.
- Production Example 19 Axial ligand precursor (b-7 / Ga (C 6 F 5 ) 4 ) (1) Intermediate-11: Synthesis of Biphenyldimethylethoxysilane In Production Example 17 (1), 2.8 g of 4- (4-phenyl-1,3-butadiinyl) -1-bromobenzene was added to 4-bromobiphenyl 2. 2.4 g of a pale yellow oily substance was obtained according to the method described in Production Example 17 (1) except that the amount was 3 g. The obtained oil was used as it was as Intermediate-11. From 1 H-NMR, it was confirmed that the main component was Intermediate-11.
- reaction solution was gradually added to 200 mL of 20% saline solution while cooling in an ice bath with stirring. Further 100 mL of dichloromethane was added and the mixture was stirred for 1 hour. After standing, the aqueous layer was removed by liquid separation, and the organic layer was washed 5 times with 50 mL of water and concentrated. Separation and purification were performed by column chromatography to obtain 10.3 g of a white solid. 1 It was confirmed by 1 H-NMR that this white solid was (Intermediate-15).
- Production Example 22 Axial ligand precursor (b-9 / (C 2 F 5 ) 3 PF 3 ) In Production Example 12 (2), 5.3 g of (b-2 / OTf) was used instead of 4.5 g of (b-9 / Cl) and 2.0 g of KPF 6 and K (C 2 F 5 ) 3 PF 3 5. A slightly yellow solid of 5.2 g (yield 61%) was obtained according to the method described in Production Example 12 (2) except that the amount was 3 g. From 1H, 19F and 31 P - NMR, it was confirmed that this slightly yellow solid was an axial ligand precursor (b-9 / (C 2 F 5 ) 3 PF 3 ).
- Production Example 23 Axial ligand precursor (b-9 / (Ga (C 6 F 5 ) 4 )
- Production Example 12 (2) 5.3 g of (b-2 / OTf) was used instead of 4.5 g of (b-9 / Cl) and 2.0 g of KPF 6 and 48.4 g of NaGa (C 6 F 5 ) (C 6 F 5).
- 5.5 g (yield 48%) of a slightly yellow solid was obtained according to the method described in Production Example 12 (2) except that the mixture was dissolved in 100 mL of water. From 1H and 19 F - NMR, it was confirmed that this slightly yellow solid was an axial ligand precursor (b-9 / (Ga (C 6 F 5 ) 4 ).
- Production Example 24 Axial ligand precursor (b-9 / B (C 6 F 5 ) 4 )
- Production Example 12 (2) 5.3 g of (b-2 / OTf) was added to 4.5 g of (b-9 / Cl), and NaB (C 6 F 5 ) was 47.7 g instead of 2.0 g of KPF. 5.8 g (yield 53%) of a slightly yellow solid was obtained according to the method described in Production Example 12 (2) except that the mixture was dissolved in 100 mL of water. From 1H and 19 F - NMR, it was confirmed that this slightly yellow solid was an axial ligand precursor (b-9 / (B (C6 F 5) 4 ) .
- Production Example 25 Axial ligand precursor (b-10 / Al ( Ot- C 4 F 9 ) 4 ) (1) Intermediate-17: Synthesis of (2,6-dimethoxy-4-hydroxyphenyl) phenyliodonium chloride In Production Example 21 (1), 12.4 g of 3-methoxyphenol was added to 15.4 g of 3,5-dimethoxyphenol. In addition to the above, 29.5 g of a white solid was obtained according to the method described in Production Example 21 (1). 1 It was confirmed by 1 H-NMR that this white solid was (Intermediate-17).
- Production Example 15 (2) Intermediate-19 was obtained according to the method described in Production Example 15 (2) except that 4.5 g of (Intermediate-3) was changed to 5.4 g of (Intermediate-18). .. From 1 H-NMR, it was confirmed that the main component was Intermediate-19 (b-12 / OTf). (3) Axial ligand precursor (b-12 / (C 2 F 5 ) 3 PF 3 ) In Production Example 12 (2), 5.3 g of (b-2 / OTf) was replaced with 6.6 g of (b-12 / OTf) and 2.0 g of KPF 6 with K (C 2 F 5 ) 3 PF 3 5.
- a pale yellow solid of 5.6 g (yield 59%) was obtained according to the method described in Production Example 12 (2) except that the weight was 3 g. From 1H, 19F and 31 P - NMR, it was confirmed that this pale yellow solid was an axial ligand precursor (b-12 / (C 2 F 5 ) 3 PF 3 ).
- Production Example 29 Axial ligand precursor (b-13 / Ga (C 6 F 5 ) 4 ) Production Example 28 (2) except that K (C 2 F 5 ) 3 PF 3 5.3 g is replaced with NaGa (C 6 F 5 ) 4 8.4 g (dissolved in 100 mL of water) in Production Example 28 (2). ), 3.7 g (yield 37%) of a slightly yellow solid was obtained. From 1H and 19 F - NMR, it was confirmed that this slightly yellow solid was an axial ligand precursor (b-13 / Ga (C 6 F 5 ) 4 ).
- Synthesis method (I) (when the axial ligand is a metal complex with two) Examples 1-21, 32-41, 46-53
- the metal complex precursor (a) and the axial ligand precursor (b / X1-) are mixed in a reaction vessel at a molar ratio of 1 : 2 in an acetonitrile solvent at room temperature, and reacted for 6 hours while blowing nitrogen to acetonitrile. Was distilled off under reduced pressure to obtain the desired product (photoacid generator).
- Synthesis method (II) (when two axial ligands are cationic metal complexes and have a counter anion X 2- )
- Examples 30, 31, 42-45 Mix the metal complex precursor (a) and the axial ligand precursor (b / X1-) in a reaction vessel at a molar ratio of 1 : 2 in an acetonitrile solvent at room temperature, and react for 6 hours while blowing nitrogen. Then, acetonitrile was distilled off under reduced pressure and then dissolved in dichloromethane. An aqueous solution of an alkali metal salt (lithium , sodium or potassium salt) of anion X 2- was added thereto, and the mixture was stirred for 1 hour. After standing, the aqueous layer was removed, and the organic layer was washed with water 5 times to concentrate. Dichloromethane-hexane Purification to obtain the desired product (photoacid generator).
- H-1 CPI-210S (manufactured by Sun Appro)
- H-2 Di (tert-butylphenyl) iodonium hexafluorophosphate (manufactured by Tokyo Kasei)
- H-3 4-Isopropyl-4'-methyldiphenyliodonium tetrakis (pentafluorophenyl) borate (manufactured by Tokyo Kasei)
- B-1 Tetraphenylporphyrin (manufactured by Tokyo Kasei)
- B-2 Phthalocyanine (manufactured by Tokyo Kasei)
- C-1 Product name Serokiside 2021P (manufactured by Daicel)
- C-2 Product name jER828 (manufactured by Mitsubishi Chemical)
- C-3 Product name OXT-221 (manufactured by Toagosei)
- C-4 Product name
- Curability-1 Infrared transmittance filter (manufactured by HOYA) R64 (cuts below 620 nm)
- Curability-2 Infrared transmittance filter (manufactured by HOYA) R72 (cuts below 700 nm)
- the photosensitive composition containing the photoacid generator of the present invention from Examples 54 to 146 and Comparative Examples 1 to 14 has a visible to infrared region as compared with the comparative photosensitive composition. It can be seen that the curability is excellent when the exposure is performed with.
- the photoacid generator of the present invention has an onium salt structure as an acid generating portion in the axial ligand, which is a metal axial ligand. Therefore, it is considered that the acid is generated very efficiently because it is close to the aromatic heterocyclic compound which is a cyclic ligand and a light absorption site in the same molecule.
- Examples of photosensitive compositions containing the additive (J)> [Preparation of photosensitive composition-2]
- 30 g of titanium oxide ((Ja-1, "Typake R-930" manufactured by Ishihara Sangyo Co., Ltd.) or 30 g of Direct Blue 14 (Ja-2, manufactured by Tokyo Kasei)) is used as a pigment dispersant (manufactured by Lubrizol).
- 3 g of "Sol Spurs 32000", 60 g of the cationically polymerizable compound (C-1), and 1 g of the photoacid generator of the present invention were further added and kneaded at 25 ° C. for 3 hours using a ball mill to obtain the photosensitive properties of the present invention.
- the compositions (Q-94) to (Q-105) were produced, the coating film curability (curability -3 and 4) was evaluated by the following method, and the results are shown in Table 8.
- Curability -3 and 4 These photosensitive compositions were applied to a surface-treated 100 ⁇ m-thick PET (polyethylene terephthalate) film [Cosmo Shine A4300 manufactured by Toyobo Co., Ltd.] with a film thickness of 20 ⁇ m (curing) using a bar coater. It was applied so as to have a property of -3) and a film thickness of 100 ⁇ m (curability -4). Exposure was performed using an irradiation device LIGHTNINGCURE spot light source LC8 (manufactured by Hamamatsu Photonics Co., Ltd.) as a light source, and the curability was confirmed by the following evaluation method.
- LIGHTNINGCURE spot light source LC8 manufactured by Hamamatsu Photonics Co., Ltd.
- the photosensitive composition of the present invention can be efficiently cured even in the presence of a substance such as a colorant that attenuates or shields the irradiated light at a high concentration.
- H-3 was used as the acid generator and B-2 was used as the sensitizer instead of the photoacid generator of the present invention, but a cured product could not be obtained.
- the photosensitive composition of the present invention utilizes light (particularly in the visible region to the infrared region) to provide a coating material, a coating agent, and various coating materials (hard coat, stain-resistant coating material, anti-fog coating material, and touch-resistant coating material).
- Adhesive tape back treatment agent Release coating material for adhesive label release sheet (release paper, release plastic film, release metal foil, etc.), printing board, dental material (dental formulation, dental composite) ) Ink, inkjet ink, positive type resist (connection terminal for manufacturing electronic parts such as circuit board, CSP, MEMS element, wiring pattern formation, etc.), resist film, liquid resist, negative type resist (semiconductor element and transparent electrode for FPD (transparent electrode for semiconductor element and FPD) Surface protective films such as ITO, IZO, GZO), interlayer insulating films, permanent film materials such as flattening films, etc.), MEMS resists, positive photosensitive materials, negative photosensitive materials, various adhesives (various electronic parts) Temporary fixing agent for HDD, adhesive for pickup lens, adhesive for functional film for FPD (deflection plate, antireflection film, etc.), insulating film for circuit formation and semiconductor encapsulation, weird conductive adhesive Agent (ACA), film (ACF), paste (A
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Abstract
Description
一般に光硬化性コーティング剤は、光重合開始剤、ラジカル(カチオン)重合性モノマー、オリゴマー又はポリマー、用途に応じ着色剤及び添加剤からなる。着色剤は大別して顔料及び染料からなり、塗膜を着色させるために配合されるが、光を遮蔽してしまうだけでなく、その色に応じた光吸収特性を持ち照射する光の一部を吸収するため、着色剤を含む光硬化性コーティング剤では塗布された塗膜の深部にまで光が届かないことがある。これに対し、特定の光重合開始剤を使用することが提案されている(例えば特許文献1参照)。
そこで長波長の領域において高感度な開始剤として特定の開始剤が提案されている(例えば特許文献2及び3参照)。
増感作用を高める方策として、開始剤と増感剤を共有結合で連結した化合物が報告されている(非特許文献1参照)。しかしながら、可視~近赤外領域で用いられる増感剤は一般に分子が大きく、構造はより複雑で、開始剤の効果を高めるためその構造を変えることは上記で述べたとおり合成をより困難にしてしまう課題が依然残る。
すなわち本発明は、五員環芳香族複素環化合物が直接又はπ共役によって繋がった環構造を形成しており、これを配位子とする金属錯体であって、かつ中心金属は軸配位子を1つ又は2つ有し、その軸配位子にオニウム塩構造を有してなる、光酸発生剤である。
式(2)で表されるMは上記芳香族複素環を環状配位子とし、カチオン性金属錯体を形成する中心金属を表し、原料の入手しやすさと金属錯体としての安定性の観点でP、Sb及びBiの群から選ばれる金属が好ましい。
Yはハロゲン原子(フッ素原子が好ましい。)を表す。
Sは硫黄原子、Oは酸素原子、Cは炭素原子、Nは窒素原子を表す。
bは、1~5の整数であり、好ましくは2~4、さらに好ましくは2又は3である。
cは、1~4の整数であり、好ましくは4である。
ここで主鎖とはDとオニウムカチオンA+とを結合する主骨格のことである。
炭素数1~8のアルキレンとしてはメチレン、エチレン、トリメチレン、テトラメチレン、ヘキサメチレン、オクタメチレン等直鎖アルキレン、1-メチルエチル、1-メチルエチリデン、1,1-ジメチルエチレン、1,2-ジメチルエチレン、1-メチルプロピリデン等の分岐アルキレン、シクロプロピレン、シクロブチレン、シクロペンチレン、シクロペンチリデン、シクロヘキシレン、シクロヘキシリデン等環状アルキレンが挙げられる。
炭素数2~8のアルケニレンとしては、ビニレン、1-プロペニレン、2-プロペニレン、1-ブテニレン、2-ブテニレン、3-ブテニレン、1-ヘキセニレン、シクロヘキセニレン、1,3-ブタジエニレン、1,3-ヘキサジエニレン、2,4,6-オクタトリエニレン等が挙げられる。
炭素数2~8のアルキニレンとしては、エチニレン、1-プロピニレン、2-プロピニレン、1-ブチニレン、2-ブチニレン、3-ブチニレン、1、3-ブタジイニレン、ヘキサン-1-エン-3-イニレン等が挙げられる。
炭素数6~14のアリーレンとしては、フェニレン、ナフチレン、アントラセニレン、及びビフェニレンが挙げられる。
*は結合位置を示す。
1価のオニウムカチオンとは、非共有電子対を持つ元素を含んだ化合物にプロトン又は陽イオン型の原子団(アルキル基等)が配位して生じる陽イオンを意味し、1価のオニウムカチオンとしては以下のカチオンが挙げられる。
ピリリニウムカチオン(4-メチルピリリニウムカチオン及び2,6-ジフェニルピリリニウムカチオン等);
クロメニウムカチオン(2,4-ジメチルクロメニウムカチオン等);
イソクロメニウムカチオン(1,3-ジメチルイソクロメニウムカチオン等);
アンモニウムカチオン[アンモニウムカチオン、1級アンモニウムカチオン(n-ブチルアンモニウムカチオン等)、2級アンモニウムカチオン(ジエチルアンモニウムカチオン等)、3級アンモニウムカチオン(トリエチルアンモニウムカチオン等)、4級アンモニウムカチオン(テトラメチルアンモニウムカチオン、フェニルトリメチルアンモニウムカチオン及びテトラブチルアンモニウムカチオン等)];
ピロリジニウムカチオン(N,N-ジメチルピロリジニウムカチオン及びN,N-ジエチルピロリジニウムカチオン等);
イミダゾリニウムカチオン(N,N'-ジメチルイミダゾリニウムカチオン及びN-エチル-N'-メチルイミダゾリニウムカチオン等);
アミジニウムカチオン(N,N'-ジメチルテトラヒドロピリミジニウムカチオン、N-ベンジル-1,8-ジアザビシクロ[5.4.0]-7-ウンデセニウムカチオン及びN-ベンジル-1,5-ジアザビシクロ[4.3.0]-5-ノネニウムカチオン等);
モルホリニウムカチオン(N,N'-ジメチルモルホリニウムカチオン等)、ピペリジウムカチオン(N,N'-ジエチルピペリジニウムカチオン等);
ピリジニウムカチオン(N-メチルピリジニウムカチオン、N-メトキシピリジニウムカチオン、N-ブトキシピリジニウムカチオン、N-ベンジルオキシピリジニウムカチオン、及びN-ベンジルピリジニウムカチオン等)。
イミダゾリウムカチオン(N,N'-ジメチルイミダゾリウムカチオン及び1-エチル-3-メチルイミダゾリウムカチオン等);
キノリウムカチオン(N-メチルキノリウムカチオンカチオン及びN-ベンジルキノリウムカチオン等);
イソキノリウムカチオン(N-メチルイソキノリウム等);
チアゾニムカチオン(ベンジルベンゾチアゾニウムカチオン等);
アクリジウムカチオン(ベンジルアクリジウムカチオン及びフェナシルアクリジウム等);
ジアゾニウムカチオン(フェニルジアゾニウムカチオン、2,4,6-トリエトキシフェニルジアゾニウムカチオン、2,4,6-トリヘキシルオキシフェニルジアゾニウムカチオン及び4-アニリノフェニルジアゾニウムカチオン等);
グアジニウムカチオン(ヘキサメチルグアニジニウムカチオン及び2-ベンジル-2-tert-ブチル-1,1,3,3-テトラメチルグアニジニウムカチオン等)。
ホスホニウムカチオン[3級ホスホニウムカチオン(トリフェニルホスホニウムカチオン及びトリtert-ブチルホスホニウムカチオン等)並びに4級ホスホニウムカチオン(テトラフェニルホスホニウムカチオン、テトラ-p-トリルホスホニウムカチオン、トリフェニルベンジルホスホニウムカチオン、トリフェニルブチルカチオン、テトラエチルホスホニウムカチオン及びテトラブチルホスホニウムカチオン等)等]。
スルホニウムカチオン{トリフェニルスルホニウムカチオン、4-(フェニルチオ)フェニルジフェニルスルホニウムカチオン、ビス[4-(ジフェニルスルホニオ)フェニル]スルフィド及び4-ヒドロキシフェニルメチルベンジルスルホニウムカチオン等};
スルホキソニウムカチオン(トリフェニルスルホキソニウム等);
チアンスレニウムカチオン[5-(4-メトキシフェニル)チアンスレニウム、5-フェニルチアンスレニウム及び5-トリルチアンスレニウムカチオン等];
チオフェニウムカチオン(2-ナフチルテトラヒドロチオフェニウム等);
ヨードニウムカチオン[ジフェニルヨードニウムカチオン、ジ-p-トリルヨードニウムカチオン及び4-イソプロピルフェニル(p-トリル)ヨードニウムカチオン等]。
再結晶による精製は、目的の光酸発生剤を少量の有機溶剤で溶解し、その有機溶剤からの分離は、目的の光酸発生剤を含む有機溶剤溶液に対して直接(又は濃縮した後)、貧溶剤を加えて目的の光酸発生剤を析出させることにより行うことができる。ここで用いる貧溶剤としては、鎖状エーテル(ジエチルエーテル及びジプロピルエーテル等)、エステル(酢酸エチル及び酢酸ブチル等)、脂肪族炭化水素(へキサン及びシクロヘキサン等)及び芳香族炭化水素(トルエン及びキシレン等)が含まれる。また、温度による溶解度差を利用して、精製を行うこともできる。精製は、再結晶(冷却による溶解度の差を利用する方法、貧溶剤を加えて析出させる方法及びこれらの併用)によって精製することができる。また、光酸発生剤が油状物である場合(結晶化しない場合)、油状物を水又は貧溶媒で洗浄する方法により精製できる。
これらのポリオルガノシロキサンは、直鎖状、分岐鎖状、環状のいずれでもよく、これらの混合物であってもよい。
顔料分散剤としてはビックケミー社製顔料分散剤(Anti-Terra-U、Disperbyk-101,103、106、110、161、162、164、166、167、168,170、174、182、184又は2020等)、味の素ファインテクノ社製顔料分散剤(アジスパーPB711、PB821、PB814、PN411及びPA111等)、ルーブリゾール社製顔料分散剤(ソルスパーズ5000、12000、32000、33000及び39000等)が挙げられる。これらの顔料分散剤は単独で用いても2種以上を併用してもよい。顔料分散剤の添加量は特に限定されるものではないが、感光性組成物中に0.1~10重量%の範囲で用いることが好ましい。
光安定剤としては、公知の光安定剤等が使用でき、紫外線吸収型安定剤{ベンゾトリアゾール、ベンゾフェノン、サリチレート、シアノアクリレート及びこれらの誘導体等};ラジカル補足型安定剤{ヒンダードアミン等};及び消光型安定剤{ニッケル錯体等}等が挙げられる。
酸化防止剤としては、公知の酸化防止剤等が使用でき、フェノール系酸化防止剤(モノフェノール系、ビスフェノール系及び高分子フェノール系等)、硫黄系酸化防止剤及びリン系酸化防止剤等が挙げられる。
密着性付与剤としては、公知の密着性付与剤等が使用でき、カップリング剤、シランカップリング剤及びチタンカップリング剤等が挙げられる。
イオン補足剤としては、公知のイオン補足剤等が使用でき、有機アルミニウム(アルコキシアルミニウム及びフェノキシアルミニウム等)等が挙げられる。
着色防止剤としては、公知の着色防止剤が使用でき、一般的には酸化防止剤が有効であり、フェノール系酸化防止剤(モノフェノール系、ビスフェノール系及び高分子フェノール系等)、硫黄系酸化防止剤及びリン系酸化防止剤等が挙げられるが、高温時の耐熱試験時の着色防止にはほとんど効力がない。
オクタエチルポルフィリナトシリコン(IV)ジクロリド(a-1)の合成
J.W.Buchler,et.al.,Chem.Ber.1973,106,2710に従い、オクタエチルポルフィリンとテトラクロロシランより表題の化合物(a-1)を合成した。
ジクロロテトラフェニルポルフィリナトアンチモン(V)ブロミド(a-3)の合成
Y.M.Idemori,et.al.,Journal of Biological Inorganic Chemistry,2015,20,771に基づきテトラフェニルポルフィリンと三塩化アンチモンより表題の化合物(a-3)を合成した。
テトラキス(ペンタフルオロフェニル)ポルフィリナトシリコン(IV)ジクロリドの合成
製造例1と同様にして、オクタエチルポルフィリンに代えてテトラキス(ペンタフルオロフェニル)ポルフィリンを用いて表題の化合物(a-6)を合成した。
フタロシアナトゲルマニウム(IV)ジクロリドの合成
反応容器にn-ペンタノール150g、1,2-ジシアノベンゼン23g、四塩化ゲルマニウム10gを加え、そこへDBU(1,8-ジアザビシクロ[5.4.0]-7-ウンデセン)27g加えて混合した。これを昇温し140℃で還流下12時間反応させた。室温まで冷却し、反応液をメタノール/水=1/2(重量比)1500gへ撹拌しながら徐々に滴下し、スラリーを得た。これをろ過し、ろ過物をメタノール/水=1/2(重量比)100gで5回洗浄し乾燥させ18.9gを得た。1H-NMRよりこの暗青色固体が金属錯体前駆体(a-8)であることを確認した。
(1)中間体-1(b-1/Cl):3,5-ジメチル-4-ヒドロキシフェニルジフェニルスルホニウムクロリド塩の合成
反応容器に2,6-ジメチルフェノール7.3g、メタンスルホン酸50g、五酸化二リン7gを加え撹拌した。そこへジフェニルスルホキシド10gを加え45℃で6時間反応した。20%食塩水100mLに氷浴で冷却しながら反応液を撹拌下徐々に添加した。ジクロロメタン100mLをさらに加えて1時間撹拌した。静置後水層を分液により除去し、有機層を水50mLで5回洗浄し、濃縮した。アセトンにて再結晶を行い、白色固体15.2gを得た。1H-NMRよりこの白色固体が(b-1/Cl)であることを確認した。
(2)軸配位子前駆体(b-1/PF6)の合成
反応容器に(b-1/Cl)4.3g、THF20mL、炭酸カリウム1.5g、2-(2-ヒドロキシエトキシ)エチルブロミド1.7gを加え、60℃で6時間反応させた。反応後反応液をあらかじめKPF62.0gを水50mLへ溶解させた水溶液へ投入した。1時間撹拌し、さらにジクロロメタン100mLにて抽出を行い、分液にて水層を除去した。水50mLにて水洗を5回行い、有機層を濃縮した。ジクロロメタン-ヘキサンで再結晶を行い白色固体3.2g(収率60%)を得た。1H、19Fおよび31P-NMRよりこの白色固体が軸配位子前駆体(b-1/PF6)であることを確認した。
製造例5(2)において、KPF62.0gの代わりにKSbF63.1gとする以外は製造例5(2)に記載の方法に従い、白色固体6.3g(収率72%)を得た。1H、19F-NMRよりこの白色固体が軸配位子前駆体(b-1/SbF6)であることを確認した。
製造例5(2)において、KPF62.0gの代わりにNaB(C6F5)47.7g(水100mLに溶解)とする以外は製造例5(2)に記載の方法に従い、微黄色固体6.3g(収率59%)を得た。1H、19F-NMRよりこの微黄色固体が軸配位子前駆体(b-1/B(C6F5)4)であることを確認した。
製造例5(2)において、KPF62.0gの代わりにK(C2F5)3PF35.3gとする以外は製造例5(2)に記載の方法に従い、微黄色固体5.1g(収率61%)を得た。1H、19Fおよび31P-NMRよりこの微黄色固体が軸配位子前駆体(b-1/(C2F5)3PF3)であることを確認した。
製造例5(2)において、KPF62.0gの代わりにNaGa(C6F5)48.4g(水100mLに溶解)とする以外は製造例5(2)に記載の方法に従い、白色固体6.2g(収率55%)を得た。1H、19F-NMRよりこの白色固体が軸配位子前駆体(b-1/Ga(C6F5)4)であることを確認した。
製造例5(2)において、KPF62.0gの代わりにLiAl(Ot-C4F9)10.7g(水100mLに溶解)とする以外は製造例5(2)に記載の方法に従い、白色固体6.0g(収率44%)を得た。1H、19F-NMRよりこの白色固体が軸配位子前駆体(b-1/Al(Ot-C4F9)4)であることを確認した。
製造例5(2)において、KPF62.0gの代わりにKC(CF3SO2)34.9gとする以外は製造例5(2)に記載の方法に従い、白色固体4.9g(収率61%)を得た。1H、19F-NMRよりこの白色固体が軸配位子前駆体(b-1/C(CF3SO2)3)であることを確認した。
(1)中間体-2:4-{3-(ヒドロキシジメチルシリル)プロピル}フェニルジフェニルスルホニウムトリフラート(b-2/OTf)の合成
反応容器にジフェニルスルホキシド8.1g、ジクロロメタン100mLを加え-10℃に氷浴にて冷却した。そこへトリフルオロメタンスルホン酸無水物13.0gを0℃を超えないように滴下した。さらにそこへ3-(エトキシジメチルシリル)プロピルベンゼン8.8gを0℃以下で滴下した。滴下後徐々に昇温し室温で1時間撹拌した。反応液を氷浴にて冷却した5%炭酸水素ナトリウム水溶液50mLへ撹拌しながら滴下した。静置後分液により水層を除去した。有機層を5回水洗し濃縮、得られた粗結晶をジクロロメタン-シクロヘキサンにて再結晶を行い、微黄色固体12.1gを得た。1H-NMRよりこの白色固体が(b-2/OTf)であることを確認した。
(2)軸配位子前駆体(b-2/PF6)の合成
反応容器に(b-2/OTf)5.3gを加えジクロロメタン100mLで溶解させた。そこへあらかじめKPF62.0gを水50mLへ溶解させた水溶液を投入し、6時間撹拌した。分液にて水層を除去した。水50mLにて水洗を5回行い、有機層を濃縮した。ジクロロメタン-ヘキサンで再結晶を行い微黄色固体3.4g(収率65%)を得た。1H、19Fおよび31P-NMRよりこの微黄色固体が軸配位子前駆体(b-2/PF6)であることを確認した。
製造例12(2)において、KPF62.0gの代わりにK(C2F5)3PF35.3gとする以外は製造例12(2)に記載の方法に従い、微黄色固体4.9g(収率58%)を得た。1H、19Fおよび31P-NMRよりこの微黄色固体が軸配位子前駆体(b-2/(C2F5)3PF3)であることを確認した。
製造例12(2)において、KPF62.0gの代わりにKSbF63.1gとする以外は製造例12(2)に記載の方法に従い、微黄色固体4.2g(収率68%)を得た。1H、19F-NMRよりこの微黄色固体が軸配位子前駆体(b-2/SbF6)であることを確認した。
(1)中間体-3:4-カルボキシフェニルジフェニルスルホニウムトリフラートの合成
反応容器(A)に4-ヨード安息香酸10gを加えTHF150mLで溶解させた。そこへ水素化ナトリウム1.8gを添加した。これを10分間撹拌した後-40℃に冷却した。これにジイソプロピルマグネシウムブロミド15%THF溶液30mLを滴下した。-10℃にて3時間撹拌した。別の反応容器(B)にジフェニルスルホキシド16gを加え、THF50mLにて溶解させた。これを-40℃に冷却しそこへトリフルオロメタンスルホン酸トリメチルシリル15gを滴下した。-40℃で30分撹拌した後反応容器(A)へチューブを介して添加した。-20℃で3時間撹拌し、-70℃へ冷却した。そこへ40%臭化水素酸水溶液100mLを添加した。混合物を室温まで加温しジエチルエーテル300mLと40%臭化水素酸水溶液200mLを追加した。これを1時間撹拌し静置した。分液により水層をジエチルエーテルとジクロロメタンで抽出し、有機層と合わせ濃縮した。シリカゲルカラムクロマトグラフィーにて精製し、白色固体15gを得た。1H-NMRよりこの白色固体が中間体-3であることを確認した。
(2)中間体-4:4-[N-{(3-(ジメチルヒドロキシシリル)プロピル)}カルバモイル]フェニルジフェニルスルホニウムトリフラート(b-3/OTf)の合成
(3)軸配位子前駆体(b-3/Ga(C6F5)4)
製造例12(2)において、(b-2/OTf)5.3gを(b-3/OTf)5.7g、KPF62.0gの代わりにNaGa(C6F5)48.4g(水100mLに溶解)とする以外は製造例12(2)に記載の方法に従い、淡黄色固体6.3g(収率54%)を得た。1H、19Fおよび31P-NMRよりこの淡黄色固体が軸配位子前駆体(b-3/Ga(C6F5)4)であることを確認した。
(1)中間体-5:(3-フェニルプロピニル)ジメチルエトキシシランの合成
反応容器にジメチルエトキシエチニルシラン6.4g、THF500mLを加え-78℃に冷却した。そこへ15%n-ブチルリチウムヘキサン溶液37mLを滴下した。1時間そのまま撹拌し、ベンジルブロミド9.4g(THF50mLで希釈)を滴下した。滴下後室温まで昇温し、さらに6時間撹拌した。10%塩化アンモニウム水溶液30mLをゆっくり加えて反応を停止し、反応液を400mLの水へ加えた。ジエチルエーテルで100mLで5回抽出し、有機層を3回水洗した。エバポレーターにて濃縮し、黄色油状物9.5gを得た。得られた油状物は中間体-5としてこのまま用いた。なお、1H-NMRより主成分が中間体-5であることを確認した。
(2)中間体-6:4-{3-(ヒドロキシジメチルシリル)-1-プロピニル}フェニルジフェニルスルホニウムトリフラート(b-4/OTf)の合成
製造例12(1)において、3-(エトキシジメチルシリル)プロピルベンゼン8.8gを(中間体-5)8.7gとする以外製造例12(1)に記載の方法に従い、微黄色固体10.8gを得た。1H-NMRよりこの白色固体が(b-4/OTf)であることを確認した。
(3)軸配位子前駆体(b-4/B(C6F5)4)
製造例12(2)において(b-2/OTf)5.3gを(b-4/OTf)5.2g、KPF62.0gをNaB(C6F5)47.7g(水100mLに溶解)とする以外製造例12(2)に記載の方法に従い、微黄色固体10.8gを得た。1H-NMRよりこの微黄色固体が軸配位子前駆体(b-4/B(C6F5)4)であることを確認した。
(1)中間体-7:(3-カルボキシプロピル-1-オン-フェニル)ジフェニルスルホニウムクロリドの合成
反応容器にトリフェニルスルホニウムクロリド9.0g、ジクロロメタン50mL、塩化アルミニウム4.0gを加え撹拌した。これを氷浴にて冷却し、無水コハク酸9.0gを滴下した。その後室温で8時間撹拌し、反応液を氷水100mLに投入した。さらにジクロロメタン50mLを追加し、さらに1時間撹拌した。静置後水層を除去し有機層を5回水洗を行った後濃縮した。シリカゲルカラムクロマトグラフィーにて精製し、白色固体13.8gを得た。1H-NMRよりこの白色固体が中間体-7であることを確認した。
(2)中間体-8(b-5/Cl)の合成
(3)軸配位子前駆体(b-5/Ga(C6F5)4)
製造例12(2)において、(b-2/OTf)5.3gを(b-5/Cl)5.1g、KPF62.0gの代わりにNaGa(C6F5)48.4g(水100mLに溶解)とする以外は製造例12(2)に記載の方法に従い、淡黄色固体7.3g(収率60%)を得た。1H、19F-NMRよりこの淡黄色固体が軸配位子前駆体(b-5/Ga(C6F5)4)であることを確認した。
(1)中間体-9:4-(4-フェニル-1,3-ブタジイニル)フェニルジメチルエトキシシランの合成
反応容器に4-(4-フェニル-1,3-ブタジイニル)-1-ブロモベンゼン2.8g、THF20mLを加え溶解し-78℃に冷却した。そこへ15%n-ブチルリチウムヘキサン溶液8mLを滴下した。1時間そのまま撹拌し、クロロジメチルエトキシシラン1.4g(THF10mLで希釈)を滴下した。滴下後室温まで昇温し、さらに6時間撹拌した。氷冷下10%塩化アンモニウム水溶液20mLに反応液を徐々に加えて撹拌した。ヘキサン50mLで抽出を行い、有機層を3回水洗した。エバポレーターにて濃縮し、黄色油状物2.8gを得た。得られた油状物は中間体-9としてこのまま用いた。なお、1H-NMRより主成分が中間体-9であることを確認した。
(2)中間体-10:4-{4-(p-ジメチルヒドロキシシリル)フェニル-1,3-ブタジイニル}フェニルジフェニルスルホニウムトリフラート(b-6/OTf)の合成
製造例12(1)において、3-(エトキシジメチルシリル)プロピルベンゼン8.8gを(中間体-9)12.2gとする以外製造例12(1)に記載の方法に従い、微黄色固体12.8gを得た。1H-NMRよりこの微黄色固体が(b-6/OTf)であることを確認した。
(3)軸配位子前駆体(b-6/(C2F5)3PF3)の合成
製造例12(2)において(b-2/OTf)5.3gを(b-6/OTf)6.1g、KPF62.0gをK(C2F5)3PF35.3gとするとする以外製造例12(2)に記載の方法に従い、微黄色固体6.4gを得た。1H、19Fおよび31P-NMRよりこの微黄色固体が軸配位子前駆体(b-6/(C2F5)3PF3)であることを確認した。
(1)中間体-11:ビフェニルジメチルエトキシシランの合成
製造例17(1)において、4-(4-フェニル-1,3-ブタジイニル)-1-ブロモベンゼン2.8gを4-ブロモビフェニル2.3gとする以外製造例17(1)に記載の方法に従い、淡黄色油状物2.4gを得た。得られた油状物は中間体-11としてこのまま用いた。なお、1H-NMRより主成分が中間体-11であることを確認した。
(2)中間体-12:4-{4’-(ジメチルヒドロキシシリル)フェニル}フェニルジフェニルスルホニウムトリフラート(b-7/OTf)の合成
製造例12(1)において、3-(エトキシジメチルシリル)プロピルベンゼン8.8gを(中間体-11)10.3gとする以外製造例12(1)に記載の方法に従い、白色固体15.8gを得た。1H-NMRよりこの白色固体が(b-7/OTf)であることを確認した。
(3)軸配位子前駆体(b-7/Ga(C6F5)4)の合成
製造例12(2)において(b-2/OTf)5.3gを(b-7/OTf)6.1g、KPF62.0gをNaGa(C6F5)48.4g(水100mLに溶解)とする以外製造例12(2)に記載の方法に従い、微黄色固体7.0gを得た。1Hおよび19F-NMRよりこの微黄色固体が軸配位子前駆体(b-7/(Ga(C6F5)4)であることを確認した。
(1)中間体-13:4-(エトキシジメチルシリル)スチルベンの合成
製造例18(1)において、4-(4-フェニル-1,3-ブタジイニル)-1-ブロモベンゼン2.8gを4-ブロモスチルベン2.6gとする以外製造例18(1)に記載の方法に従い、淡黄色油状物2.7gを得た。得られた淡黄色油状物は中間体-13としてこのまま用いた。なお、1H-NMRより主成分が中間体-13であることを確認した。
(2)中間体-14:4-[1-{p-(ジメチルヒドロキシシリル)フェニル}エテニル)]フェニルジフェニルスルホニウムトリフラート(b-8/OTf)の合成
製造例12(1)において、3-(エトキシジメチルシリル)プロピルベンゼン8.8gを(中間体-13)11.3gとする以外製造例12(1)に記載の方法に従い、淡黄色固体14.1gを得た。1H-NMRよりこの淡黄色固体が(b-8/OTf)であることを確認した。
(3)軸配位子前駆体(b-8/(C2F5)3PF3)の合成
製造例12(2)において(b-2/OTf)5.3gを(b-8/OTf)5.9g、KPF62.0gをK(C2F5)3PF35.3gとするとする以外製造例12(2)に記載の方法に従い、微黄色固体5.2gを得た。1H、19Fおよび31P-NMRよりこの微黄色固体が軸配位子前駆体(b-8/(C2F5)3PF3)であることを確認した。
(1)中間体-15:(2-メトキシ-4-ヒドロキシフェニル)フェニルヨードニウムクロリドの合成
反応容器にヨードシルベンゼン22g、3-メトキシフェノール12.4g、氷酢酸700g、無水酢酸70gを溶解混合し、氷浴にて冷却した。5℃を超えないように濃硫酸12gを滴下し、室温でさらに3時間反応させた。20%食塩水200mLに氷浴で冷却しながら反応液を撹拌下徐々に添加した。ジクロロメタン100mLをさらに加えて1時間撹拌した。静置後水層を分液により除去し、有機層を水50mLで5回洗浄し、濃縮した。カラムクロマトグラフィーで分離精製を行い、白色固体10.3gを得た。1H-NMRよりこの白色固体が(中間体-15)であることを確認した。
(2)中間体-16:{2-メトキシ-4-(2-ヒドロキシエトキシ)エチル}フェニルフェニルヨードニウムクロリド(b-9/Cl)の合成
反応容器に(中間体-15)3.3g、THF20mL、炭酸カリウム1.5g、2-(2-ヒドロキシエトキシ)エチルブロミド1.7gを加え、室温で18時間反応させた。エバポレーターで反応液を濃縮し、得られた油状物をジクロロメタン50mLに溶解させた。水50mLにて水洗を5回行い、有機層を濃縮した。ジクロロメタン-ヘキサンで再結晶を行い白色固体3.8gを得た。1H-NMRよりこの白色固体が(b-9/Cl)であることを確認した。
(3)軸配位子前駆体(b-9/Al(Ot-C4F9)4)の合成
製造例12(2)において、(b-2/OTf)5.3gを(b-9/Cl)4.5g、KPF62.0gの代わりにLiAl(Ot-C4F9)10.7g(水100mLに溶解)とする以外は製造例12(2)に記載の方法に従い、微黄色固体7.6g(収率55%)を得た。1H、19F-NMRよりこの微黄色固体が軸配位子前駆体(b-9/Al(Ot-C4F9)4)であることを確認した。
製造例12(2)において、(b-2/OTf)5.3gを(b-9/Cl)4.5g、KPF62.0gの代わりにK(C2F5)3PF35.3gとする以外は製造例12(2)に記載の方法に従い、微黄色固体5.2g(収率61%)を得た。1H、19Fおよび31P-NMRよりこの微黄色固体が軸配位子前駆体(b-9/(C2F5)3PF3)であることを確認した。
製造例12(2)において、(b-2/OTf)5.3gを(b-9/Cl)4.5g、KPF62.0gの代わりにNaGa(C6F5)48.4g(水100mLに溶解)とする以外は製造例12(2)に記載の方法に従い、微黄色固体5.5g(収率48%)を得た。1H、19F-NMRよりこの微黄色固体が軸配位子前駆体(b-9/(Ga(C6F5)4)であることを確認した。
製造例12(2)において、(b-2/OTf)5.3gを(b-9/Cl)4.5g、KPF62.0gの代わりにNaB(C6F5)47.7g(水100mLに溶解)とする以外は製造例12(2)に記載の方法に従い、微黄色固体5.8g(収率53%)を得た。1H、19F-NMRよりこの微黄色固体が軸配位子前駆体(b-9/(B(C6F5)4)であることを確認した。
(1)中間体-17:(2,6-ジメトキシ-4-ヒドロキシフェニル)フェニルヨードニウムクロリドの合成
製造例21(1)において、3-メトキシフェノール12.4gを3,5-ジメトキシフェノール15.4gとする以外は製造例21(1)に記載の方法に従い、白色固体29.5gを得た。1H-NMRよりこの白色固体が(中間体-17)であることを確認した。
(2)軸配位子前駆体(b-10/Al(Ot-C4F9)4)の合成
反応容器に(中間体-17)3.6g、THF20mL、炭酸カリウム1.5g、2-(2-ヒドロキシエトキシエトキシ)エチルブロミド2.1gを加え、室温で18時間反応させた。反応液をあらかじめLiAl(Ot-C4F9)10.7gを水100mLに溶解させたところへ投入しさらに1時間撹拌し、ジクロロメタン50mLで抽出した。分液により水層を除去し、有機層を5回水洗した後濃縮した。ジクロロメタン-ヘキサンで再結晶を行い、淡黄色固体7.6g(収率52%)を得た。1H、19F-NMRよりこの淡黄色固体が軸配位子前駆体(b-10/Al(Ot-C4F9)4)であることを確認した。
反応容器に4-t-ブチルヨードベンゼン2.6g、3-(エトキシジメチルシリル)プロピルベンゼン3.3gジクロロメタン30mL、トリフルオロ酢酸50mLを加え溶解させた。40℃に昇温し、過硫酸カリウム2.7gを少しずつ加えた。20時間反応せさせた後、反応液を冷水100mLへ加えた。そこへジクロロメタン100mLを加え1時間撹拌した。静置後水層を除去し、あらかじめK(C2F5)3PF35.3gを50mLの水で溶解した水溶液を投入し、1時間撹拌した。静置後水層を除去し、有機層を5回水洗し濃縮、得られた油状物をジクロロメタン-シクロヘキサンによって精製し、淡黄色固体を4.5g(収率47%)を得た。1H、19Fおよび31P-NMRよりこの微黄色固体が軸配位子前駆体(b-11/(C2F5)3PF3)であることを確認した。
(1)中間体-18:(4-カルボキシフェニル)(4-t-アミルフェニル)ヨードニウムトリフラートの合成
反応容器に4-ヨード安息香酸2.5g、m-クロロ過安息香酸(65%)3.3gをジクロロメタン30mLに溶解した。そこへt-アミルベンゼン1.6gを添加し、0℃に冷却した。5℃を超えないようにトロリフルオロメタンスルホン酸3.0gを滴下した。徐々に室温に昇温し、室温下で2時間撹拌した。反応液を減圧下濃縮し、そこへジエチルエーテル50mLを加え、-10℃で静置し固体を析出させた。ろ過により白色の固体3.5gを得た。1H-NMRよりこの白色固体が(中間体-18)であることを確認した。
(2)中間体-19(b-12/OTf)の合成
(3)軸配位子前駆体(b-12/(C2F5)3PF3)
製造例12(2)において、(b-2/OTf)5.3gを(b-12/OTf)6.6g、KPF62.0gの代わりにK(C2F5)3PF35.3gとするとする以外は製造例12(2)に記載の方法に従い、淡黄色固体5.6g(収率59%)を得た。1H、19Fおよび31P-NMRよりこの淡黄色固体が軸配位子前駆体(b-12/(C2F5)3PF3)であることを確認した。
(1)中間体-20:4-(ヒドロキシエトキシ)エチル-2,6-メトキシアニリンの合成
反応容器に2,6-ジメトキシ-4-ヒドロキシアニリン1.7g、THF20mL、炭酸カリウム1.5g、2-(2-ヒドロキシエトキシ)エチルブロミド1.7gを加え、60℃で1時間反応した。エバポレーターで濃縮しそこへジクロロメタン10mLを加えた。水洗を5回行い有機層を濃縮した。淡黄色油状物2.2gを得た。1H-NMRよりこの淡黄色油状物が(中間体-20)であることを確認した。
(2)軸配位子前駆体(b-13/(C2F5)3PF3)
反応容器に(中間体-20)2.6g、水10mL、35%塩酸2mLを加え撹拌しながら塩氷浴にて冷却した。0℃にてあらかじめ亜硝酸ナトリウム0.7gを水5mLに溶解させた水溶液を撹拌下でゆっくりと加えた。そのまま0℃で1時間撹拌した。温度を保ちながらあらかじめK(C2F5)3PF35.3gを水50mLへ溶解させた水溶液を投入し、さらに6時間撹拌した。そこへジクロロメタン50mLを加え抽出し、分液操作で水層を除去した。水洗を5回行いエバポレーターで濃縮した。ジエチルエーテルで結晶化を行い微黄色固体2.9g(収率41%)を得た。1H、19Fおよび31P-NMRよりこの微黄色固体が軸配位子前駆体(b-13/(C2F5)3PF3)であることを確認した。
製造例28(2)において、K(C2F5)3PF35.3gの代わりにNaGa(C6F5)48.4g(水100mLに溶解)とする以外は製造例28(2)に記載の方法に従い、微黄色固体3.7g(収率37%)を得た。1H、19F-NMRよりこの微黄色固体が軸配位子前駆体(b-13/Ga(C6F5)4)であることを確認した。
(1)中間体-21:4-(ヒドロキシエトキシエトキシ)エチル-2,6-メトキシアニリンの合成
製造例28(1)において、2-(2-ヒドロキシエトキシ)エチルブロミド1.7gを2-(2-ヒドロキシエトキシエトキシ)エチルブロミド2.1gとする以外は製造例28(1)に記載の方法に従い、淡黄色油状物2.5gを得た。1H-NMRよりこの淡黄色油状物が(中間体-21)であることを確認した。
(2)軸配位子前駆体(b-14/(C2F5)3PF3)
製造例28(2)において、(中間体-20)2.6gを(中間体-21)3.0gとする以外は製造例28(2)に記載の方法に従い、淡黄色固体3.7g(収率40%)を得た。1H、19Fおよび31P-NMRよりこの淡黄色固体が軸配位子前駆体(b-14/(C2F5)3PF3)であることを確認した。
(1)中間体-22:2-メトキシ-4-(イソプロポキシジメチルシリルプロピル)アニリンの合成
反応容器に2-メトキシ-4-アリルアニリン1.6g、1,3-ジビニルテトラメチルジシロキサン白金錯体(0.1Mキシレン溶液)0.01g、トルエン5mLを加え、そこへイソプロポキシジメチルシラン1.2gを加え100℃で12時間反応させた。溶媒を留去しシリカゲルカラムクロマトグラフィーにて精製し、淡黄色油状物2.8gを得た。1H-NMRよりこの淡黄色油状物が(中間体-22)であることを確認した。
(2)軸配位子前駆体(b-15/C(CF3SO2)3)
製造例28(2)において、(中間体-20)2.6gを(中間体-22)2.8g、
K(C2F5)3PF35.3gの代わりにKC(CF3SO2)34.9gとする以外は製造例28(2)に記載の方法に従い、淡黄色固体2.9g(収率44%)を得た。1H、19F-NMRよりこの淡黄色固体が軸配位子前駆体(b-15/C(CF3SO2)3)であることを確認した。
本発明の光酸発生剤の合成は下記合成法(I~III)に基づき合成を行った。実施例1~53で合成した光酸発生剤(PAGと略す)の構造および用いた合成方法については表1に示すとおりである。
実施例1~21、32~41、46~53
反応容器に金属錯体前駆体(a)と軸配位子前駆体(b/X1 -)とをアセトニトリル溶媒中モル比1:2で室温下混合し、窒素を吹き込みながら6時間反応させ、アセトニトリルを減圧下留去することで目的物(光酸発生剤)を得た。
実施例30、31、42~45
反応容器に反応容器に金属錯体前駆体(a)と軸配位子前駆体(b/X1 -)とをアセトニトリル溶媒中モル比1:2で室温下混合し、窒素を吹き込みながら6時間反応させ、アセトニトリルを減圧留去後ジクロロメタンに溶解させた。そこへアニオンX2 -のアルカリ金属塩(リチウム、ナトリウム又はカリウム塩)の水溶液を投入し、1時間撹拌を行った。静置後水層を除去し、有機層の水洗を5回行い、濃縮した。ジクロロメタン-ヘキサン精製して目的物(光酸発生剤)を得た。
実施例22~29
反応容器に金属錯体前駆体(a)と製造例12で合成した軸配位子前駆体(b-2/X1 -)とをアセトニトリル溶媒中モル比1:1で室温下混合し、窒素を吹き込みながら6時間反応させ、アセトニトリルを減圧下留去することで目的物(光酸発生剤)を得た。
<実施例54~126及び比較例1~14>
[感光性組成物の調製-1]
カチオン重合性化合物(C)100g、本発明の酸発生剤(PAG-1~PAG-53)を均一混合し、本発明の感光性組成物(Q-1)~(Q-146)を調整した。同様に、及びカチオン重合性化合物(C)100g、比較用酸発生剤(H-1~H-3)、増感剤(B)を均一混合し、比較感光性樹脂組成物(Q’-1)~(Q’-14)を調製した。使用した原材料の種類および量について表2~表7に示した。
PAG-1~PAG-53(表1に記載の光酸発生剤)
H-1:CPI-210S(サンアプロ製)
H-2:ジ(tert-ブチルフェニル)ヨードニウムヘキサフルオロホスフェート(東京化成製)
H-3:4-イソプロピル-4'-メチルジフェニルヨードニウムテトラキス(ペンタフルオロフェニル)ボラート(東京化成製)
B-1:テトラフェニルポルフィリン(東京化成製)
B-2:フタロシアニン(東京化成製)
C-1:商品名 セロキサイド2021P(ダイセル製)
C-2:商品名 jER828(三菱ケミカル製)
C-3:商品名 OXT-221(東亜合成製)
C-4:商品名 ETERNACOLL OXBP(宇部興産製;本商品名は登録商標である。)
C-5:商品名 THI-DE(エネオス製)
硬化試験:本発明の感光性組成物及び比較感光性樹脂組成物をガラス基板(76mm×52mm)に、アプリケーター(40μm)を用いて塗布し、光源として照射装置LIGHTNINGCUREスポット光源LC8(浜松ホトニクス社製)を用いて下記条件にて露光を行い硬化試験を行った。
硬化性-1:赤外透過フィルター(HOYA製)R64(620nm以下カット)
硬化性-2:赤外透過フィルター(HOYA製)R72(700nm以下カット)
その後以下の評価方法にて硬化性を確認した。その結果を表2~表7に示す。
硬化性評価:
◎ 表面にタックがなく爪で引っかいても傷がつかない。
○ 表面にタックはないが、爪で傷つく。
△ 表面にタックが残る。
× 液状のまま硬化しない。
[感光性組成物の調製-2]
添加剤として、酸化チタン((Ja-1、石原産業社製「タイペークR-930」)30g、もしくはダイレクトブルー14(Ja-2、東京化成製)30g、をそれぞれ顔料分散剤(ルーブリゾール社製「ソルスパーズ32000」)3g、及びカチオン重合性化合物(C-1)60g、及び本発明の光酸発生剤1gをさらに加え、ボールミルを用いてそれぞれ25℃で3時間混練し、本発明の感光性組成物(Q-94)~(Q-105)を製造し、以下の方法で塗膜硬化性(硬化性-3及び4)の評価を行い、結果を表8に記載した。
硬化性-3及び4:これら感光性組成物を、表面処理を施した厚さ100μmのPET(ポリエチレンテレフタレート)フィルム[東洋紡(株)製コスモシャインA4300]に、バーコータを用いて膜厚20μm(硬化性-3)および膜厚100μm(硬化性-4)となるように塗布した。光源として照射装置LIGHTNINGCUREスポット光源LC8(浜松ホトニクス社製)を用いて露光を行い、以下の評価方法にて硬化性を確認した。
硬化性評価:
◎ 表面にタックがなく爪で引っかいても傷がつかない。
○ 表面にタックはないが、爪で傷つく。
△ 表面にタックが残る。
× 液状のまま硬化しない。
Claims (7)
- 五員環芳香族複素環化合物が直接又はπ共役によって繋がった環構造を形成しており、これを配位子とする金属錯体であって、かつ中心金属は軸配位子を1つ又は2つ有し、その軸配位子にオニウム塩構造を有してなる、光酸発生剤。
- 五員環芳香族複素環化合物がピロールであって、環構造を形成する配位子がポルフィリン、ポリフィラジン、コロール、フタロシアニン、サブポルフィリン、サブフタロシアニン、クロリン、ポルフィセン及びコルフィセンの群から選ばれる配位子からなる金属錯体である請求項1に記載の光酸発生剤。
- 一般式(1)又は一般式(2)で表される請求項1又は2に記載の光酸発生剤。
- 環構造を形成する配位子がポルフィリン又はフタロシアニンである請求項2又は3に記載の光酸発生剤。
- 一般式(1)中のA+がスルホニウムカチオン、ジアゾニウムカチオン又はヨードニウムカチオンである請求項3又は4に記載の光酸発生剤。
- 請求項1~5のいずれかに記載の光酸発生剤とカチオン重合性化合物とを含んでなる感光性組成物。
- 請求項6に記載の感光性組成物を硬化して得られることを特徴とする硬化体。
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115636835A (zh) * | 2022-10-19 | 2023-01-24 | 中国科学院理化技术研究所 | 一种基于卟吩结构的光敏剂、制备和应用 |
CN115636835B (zh) * | 2022-10-19 | 2023-11-28 | 中国科学院理化技术研究所 | 一种基于卟吩结构的光敏剂、制备和应用 |
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JPWO2022130796A1 (ja) | 2022-06-23 |
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