JP5699080B2 - 光酸発生剤,光硬化性組成物,及びその硬化体 - Google Patents
光酸発生剤,光硬化性組成物,及びその硬化体 Download PDFInfo
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- JP5699080B2 JP5699080B2 JP2011525884A JP2011525884A JP5699080B2 JP 5699080 B2 JP5699080 B2 JP 5699080B2 JP 2011525884 A JP2011525884 A JP 2011525884A JP 2011525884 A JP2011525884 A JP 2011525884A JP 5699080 B2 JP5699080 B2 JP 5699080B2
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- phenylthio
- phenyl
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- 239000000203 mixture Substances 0.000 title claims description 112
- -1 ethyleneoxy group Chemical group 0.000 claims description 191
- 150000001875 compounds Chemical class 0.000 claims description 176
- 125000004432 carbon atom Chemical group C* 0.000 claims description 62
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 62
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical class S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 claims description 45
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 37
- 150000001450 anions Chemical class 0.000 claims description 25
- 125000000217 alkyl group Chemical group 0.000 claims description 19
- 125000003118 aryl group Chemical group 0.000 claims description 17
- 125000001153 fluoro group Chemical group F* 0.000 claims description 11
- 229910052731 fluorine Inorganic materials 0.000 claims description 9
- 125000004423 acyloxy group Chemical group 0.000 claims description 8
- 125000003545 alkoxy group Chemical group 0.000 claims description 8
- 125000004453 alkoxycarbonyl group Chemical group 0.000 claims description 8
- 125000004448 alkyl carbonyl group Chemical group 0.000 claims description 8
- 125000004644 alkyl sulfinyl group Chemical group 0.000 claims description 8
- 125000004390 alkyl sulfonyl group Chemical group 0.000 claims description 8
- 125000004414 alkyl thio group Chemical group 0.000 claims description 8
- 125000003277 amino group Chemical group 0.000 claims description 8
- 125000005843 halogen group Chemical group 0.000 claims description 8
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 8
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 7
- 125000005129 aryl carbonyl group Chemical group 0.000 claims description 6
- 125000005161 aryl oxy carbonyl group Chemical group 0.000 claims description 6
- 125000005135 aryl sulfinyl group Chemical group 0.000 claims description 6
- 125000004391 aryl sulfonyl group Chemical group 0.000 claims description 6
- 125000004104 aryloxy group Chemical group 0.000 claims description 6
- 125000000623 heterocyclic group Chemical group 0.000 claims description 6
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 6
- 229910052698 phosphorus Inorganic materials 0.000 claims description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 5
- 125000005529 alkyleneoxy group Chemical group 0.000 claims description 5
- 125000005110 aryl thio group Chemical group 0.000 claims description 5
- 229910052796 boron Inorganic materials 0.000 claims description 5
- 125000004437 phosphorous atom Chemical group 0.000 claims description 5
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 claims description 4
- 125000004093 cyano group Chemical group *C#N 0.000 claims description 4
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 4
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims description 4
- 229910018286 SbF 6 Inorganic materials 0.000 claims description 3
- 125000002777 acetyl group Chemical group [H]C([H])([H])C(*)=O 0.000 claims description 3
- 229910052787 antimony Inorganic materials 0.000 claims description 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical group [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 229910052801 chlorine Inorganic materials 0.000 claims description 3
- 125000001309 chloro group Chemical group Cl* 0.000 claims description 3
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 claims description 3
- 125000005010 perfluoroalkyl group Chemical group 0.000 claims description 3
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 claims description 3
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical group [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 claims description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical group [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 2
- 239000011737 fluorine Substances 0.000 claims description 2
- 229910052733 gallium Inorganic materials 0.000 claims description 2
- 229910052740 iodine Inorganic materials 0.000 claims description 2
- 229930195734 saturated hydrocarbon Natural products 0.000 claims description 2
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 5
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims 1
- 229910052785 arsenic Inorganic materials 0.000 claims 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical group [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims 1
- 125000004429 atom Chemical group 0.000 claims 1
- 125000003356 phenylsulfanyl group Chemical group [*]SC1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 93
- 239000007983 Tris buffer Substances 0.000 description 46
- 239000000463 material Substances 0.000 description 44
- 125000006340 pentafluoro ethyl group Chemical group FC(F)(F)C(F)(F)* 0.000 description 34
- 238000004566 IR spectroscopy Methods 0.000 description 33
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 33
- 238000002360 preparation method Methods 0.000 description 32
- JFZKOODUSFUFIZ-UHFFFAOYSA-N trifluoro phosphate Chemical compound FOP(=O)(OF)OF JFZKOODUSFUFIZ-UHFFFAOYSA-N 0.000 description 32
- 239000000047 product Substances 0.000 description 30
- 238000005160 1H NMR spectroscopy Methods 0.000 description 29
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- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 28
- UHOVQNZJYSORNB-UHFFFAOYSA-N benzene Substances C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 27
- 150000001793 charged compounds Chemical class 0.000 description 22
- 239000011248 coating agent Substances 0.000 description 22
- 238000004895 liquid chromatography mass spectrometry Methods 0.000 description 22
- 239000007864 aqueous solution Substances 0.000 description 21
- 238000000034 method Methods 0.000 description 21
- WGBYOWIYAKVOLO-UHFFFAOYSA-N 1,4-bis(phenylsulfanyl)benzene Chemical compound C=1C=C(SC=2C=CC=CC=2)C=CC=1SC1=CC=CC=C1 WGBYOWIYAKVOLO-UHFFFAOYSA-N 0.000 description 20
- 239000011651 chromium Substances 0.000 description 20
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- YXFVVABEGXRONW-UHFFFAOYSA-N toluene Substances CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 19
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 18
- 238000010521 absorption reaction Methods 0.000 description 18
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- 239000002904 solvent Substances 0.000 description 18
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 17
- 239000002253 acid Substances 0.000 description 16
- 125000000319 biphenyl-4-yl group Chemical group [H]C1=C([H])C([H])=C([H])C([H])=C1C1=C([H])C([H])=C([*])C([H])=C1[H] 0.000 description 16
- 229920005989 resin Polymers 0.000 description 16
- 239000011347 resin Substances 0.000 description 16
- LWNGJAHMBMVCJR-UHFFFAOYSA-N (2,3,4,5,6-pentafluorophenoxy)boronic acid Chemical compound OB(O)OC1=C(F)C(F)=C(F)C(F)=C1F LWNGJAHMBMVCJR-UHFFFAOYSA-N 0.000 description 15
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 15
- 239000003795 chemical substances by application Substances 0.000 description 15
- 238000004128 high performance liquid chromatography Methods 0.000 description 15
- 230000003287 optical effect Effects 0.000 description 15
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 14
- 239000000853 adhesive Substances 0.000 description 13
- 230000001070 adhesive effect Effects 0.000 description 13
- 238000001723 curing Methods 0.000 description 13
- 239000007788 liquid Substances 0.000 description 13
- AZFFUGUTCQGAAW-UHFFFAOYSA-N 1-(benzenesulfinyl)-4-phenylsulfanylbenzene Chemical compound C=1C=C(SC=2C=CC=CC=2)C=CC=1S(=O)C1=CC=CC=C1 AZFFUGUTCQGAAW-UHFFFAOYSA-N 0.000 description 12
- WFDIJRYMOXRFFG-UHFFFAOYSA-N Acetic anhydride Chemical compound CC(=O)OC(C)=O WFDIJRYMOXRFFG-UHFFFAOYSA-N 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 12
- 239000000178 monomer Substances 0.000 description 12
- FNYWFRSQRHGKJT-UHFFFAOYSA-N 3-ethyl-3-[(3-ethyloxetan-3-yl)methoxymethyl]oxetane Chemical compound C1OCC1(CC)COCC1(CC)COC1 FNYWFRSQRHGKJT-UHFFFAOYSA-N 0.000 description 11
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 description 11
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 11
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 11
- 150000002500 ions Chemical class 0.000 description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 11
- FXUDFWSZQAEDCP-UHFFFAOYSA-N 4-phenylsulfanylbenzenethiol Chemical compound C1=CC(S)=CC=C1SC1=CC=CC=C1 FXUDFWSZQAEDCP-UHFFFAOYSA-N 0.000 description 10
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 10
- 239000003566 sealing material Substances 0.000 description 10
- AKFWNNLYUZDMET-UHFFFAOYSA-N 1,4-bis[[4-[2-(4-phenylsulfanylphenyl)phenyl]sulfanylphenyl]sulfanyl]benzene Chemical compound C(C=C1)=CC=C1SC(C=C1)=CC=C1C(C=CC=C1)=C1SC(C=C1)=CC=C1SC(C=C1)=CC=C1SC(C=C1)=CC=C1SC(C=CC=C1)=C1C(C=C1)=CC=C1SC1=CC=CC=C1 AKFWNNLYUZDMET-UHFFFAOYSA-N 0.000 description 9
- 239000004593 Epoxy Substances 0.000 description 9
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 9
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 9
- OUSHJSZZJRZPOM-UHFFFAOYSA-N P(=O)(F)(F)F.FC(C(F)(F)F)(F)[K] Chemical compound P(=O)(F)(F)F.FC(C(F)(F)F)(F)[K] OUSHJSZZJRZPOM-UHFFFAOYSA-N 0.000 description 9
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- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 9
- 125000000538 pentafluorophenyl group Chemical group FC1=C(F)C(F)=C(*)C(F)=C1F 0.000 description 9
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- 150000003839 salts Chemical class 0.000 description 9
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- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 8
- 125000002091 cationic group Chemical group 0.000 description 8
- RWGFKTVRMDUZSP-UHFFFAOYSA-N isopropyl-benzene Natural products CC(C)C1=CC=CC=C1 RWGFKTVRMDUZSP-UHFFFAOYSA-N 0.000 description 8
- RMVRSNDYEFQCLF-UHFFFAOYSA-O phenylsulfanium Chemical compound [SH2+]C1=CC=CC=C1 RMVRSNDYEFQCLF-UHFFFAOYSA-O 0.000 description 8
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- 238000003860 storage Methods 0.000 description 8
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- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 6
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- QQFYJXKKHBDLQV-UHFFFAOYSA-N tetrakis(2-methoxyphenyl)phosphanium Chemical compound COC1=CC=CC=C1[P+](C=1C(=CC=CC=1)OC)(C=1C(=CC=CC=1)OC)C1=CC=CC=C1OC QQFYJXKKHBDLQV-UHFFFAOYSA-N 0.000 description 1
- XLZOKVSFMDOMTL-UHFFFAOYSA-N tetrakis(3-methoxyphenyl)phosphanium Chemical compound COC1=CC=CC([P+](C=2C=C(OC)C=CC=2)(C=2C=C(OC)C=CC=2)C=2C=C(OC)C=CC=2)=C1 XLZOKVSFMDOMTL-UHFFFAOYSA-N 0.000 description 1
- BFADQASMYNGYBX-UHFFFAOYSA-N tetrakis(4-methoxyphenyl)phosphanium Chemical compound C1=CC(OC)=CC=C1[P+](C=1C=CC(OC)=CC=1)(C=1C=CC(OC)=CC=1)C1=CC=C(OC)C=C1 BFADQASMYNGYBX-UHFFFAOYSA-N 0.000 description 1
- QEMXHQIAXOOASZ-UHFFFAOYSA-N tetramethylammonium Chemical compound C[N+](C)(C)C QEMXHQIAXOOASZ-UHFFFAOYSA-N 0.000 description 1
- USFPINLPPFWTJW-UHFFFAOYSA-N tetraphenylphosphonium Chemical compound C1=CC=CC=C1[P+](C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 USFPINLPPFWTJW-UHFFFAOYSA-N 0.000 description 1
- 125000000335 thiazolyl group Chemical group 0.000 description 1
- 125000001544 thienyl group Chemical group 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- CVNKFOIOZXAFBO-UHFFFAOYSA-J tin(4+);tetrahydroxide Chemical compound [OH-].[OH-].[OH-].[OH-].[Sn+4] CVNKFOIOZXAFBO-UHFFFAOYSA-J 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- 125000002088 tosyl group Chemical group [H]C1=C([H])C(=C([H])C([H])=C1C([H])([H])[H])S(*)(=O)=O 0.000 description 1
- STCOOQWBFONSKY-UHFFFAOYSA-N tributyl phosphate Chemical compound CCCCOP(=O)(OCCCC)OCCCC STCOOQWBFONSKY-UHFFFAOYSA-N 0.000 description 1
- SEACXNRNJAXIBM-UHFFFAOYSA-N triethyl(methyl)azanium Chemical compound CC[N+](C)(CC)CC SEACXNRNJAXIBM-UHFFFAOYSA-N 0.000 description 1
- CZMCQLHUFVDMLM-UHFFFAOYSA-N triethyl(phenacyl)phosphanium Chemical compound CC[P+](CC)(CC)CC(=O)C1=CC=CC=C1 CZMCQLHUFVDMLM-UHFFFAOYSA-N 0.000 description 1
- COOSQAXLLKTSQO-UHFFFAOYSA-N trimethyl(2-methylpropyl)azanium Chemical compound CC(C)C[N+](C)(C)C COOSQAXLLKTSQO-UHFFFAOYSA-N 0.000 description 1
- BMTHNVMASXVELE-UHFFFAOYSA-N trimethyl(propan-2-yl)azanium Chemical compound CC(C)[N+](C)(C)C BMTHNVMASXVELE-UHFFFAOYSA-N 0.000 description 1
- MGACORKJUSACCA-UHFFFAOYSA-N trinaphthalen-1-ylsulfanium Chemical compound C1=CC=C2C([S+](C=3C4=CC=CC=C4C=CC=3)C=3C4=CC=CC=C4C=CC=3)=CC=CC2=C1 MGACORKJUSACCA-UHFFFAOYSA-N 0.000 description 1
- HKDYXDHJQBAOAC-UHFFFAOYSA-N trinaphthalen-2-ylsulfanium Chemical compound C1=CC=CC2=CC([S+](C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 HKDYXDHJQBAOAC-UHFFFAOYSA-N 0.000 description 1
- 239000012953 triphenylsulfonium Substances 0.000 description 1
- VRRIVXLVXXAHJA-UHFFFAOYSA-N tris(2,3,4-tribromophenyl) phosphate Chemical compound BrC1=C(Br)C(Br)=CC=C1OP(=O)(OC=1C(=C(Br)C(Br)=CC=1)Br)OC1=CC=C(Br)C(Br)=C1Br VRRIVXLVXXAHJA-UHFFFAOYSA-N 0.000 description 1
- AXYQQAVHPAUFQX-UHFFFAOYSA-N tris(2-methylphenyl)sulfanium Chemical compound CC1=CC=CC=C1[S+](C=1C(=CC=CC=1)C)C1=CC=CC=C1C AXYQQAVHPAUFQX-UHFFFAOYSA-N 0.000 description 1
- MAOCPIDAEMTJLK-UHFFFAOYSA-N tris(4-fluorophenyl)sulfanium Chemical compound C1=CC(F)=CC=C1[S+](C=1C=CC(F)=CC=1)C1=CC=C(F)C=C1 MAOCPIDAEMTJLK-UHFFFAOYSA-N 0.000 description 1
- XUWXFPUSCUUNPR-UHFFFAOYSA-O tris(4-hydroxyphenyl)sulfanium Chemical compound C1=CC(O)=CC=C1[S+](C=1C=CC(O)=CC=1)C1=CC=C(O)C=C1 XUWXFPUSCUUNPR-UHFFFAOYSA-O 0.000 description 1
- WUKMCKCDYKBLBG-UHFFFAOYSA-N tris(4-methoxyphenyl)sulfanium Chemical compound C1=CC(OC)=CC=C1[S+](C=1C=CC(OC)=CC=1)C1=CC=C(OC)C=C1 WUKMCKCDYKBLBG-UHFFFAOYSA-N 0.000 description 1
- QKFJVDSYTSWPII-UHFFFAOYSA-N tris(4-methylphenyl)sulfanium Chemical compound C1=CC(C)=CC=C1[S+](C=1C=CC(C)=CC=1)C1=CC=C(C)C=C1 QKFJVDSYTSWPII-UHFFFAOYSA-N 0.000 description 1
- BIKXLKXABVUSMH-UHFFFAOYSA-N trizinc;diborate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]B([O-])[O-].[O-]B([O-])[O-] BIKXLKXABVUSMH-UHFFFAOYSA-N 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
- 125000001834 xanthenyl group Chemical group C1=CC=CC=2OC3=CC=CC=C3C(C12)* 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Medicinal Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Materials For Photolithography (AREA)
- Polymerisation Methods In General (AREA)
- Epoxy Resins (AREA)
Description
しかしながら,既存の光酸発生剤のうち,トリアリールスルホニウム塩(特許文献1),ナフタレン骨格を有するフェナシルスルホニウム塩(特許文献2)及びジアルキルベンジルスルホニウム塩(特許文献3)は,i線に対する感応性が低いため,感応性を高めるには増感剤の併用が必要となる。また,チオキサントン骨格を導入したスルホニウム塩(特許文献4)は,i線に対し吸収率が大きすぎ,そのため,厚膜硬化時に深部まで光が通らずに硬化不良が生じる,という問題がある。また,ポリアリールスルフィド骨格を有するスルホニウム塩(特許文献5)は,水銀灯照射に対する光酸発生剤としての有効性については記載されているものの,i線に対する感度については開示されてない。
本発明の光酸発生剤は,カチオン重合性化合物の硬化に用いるとき,紫外光,特にi線の作用による硬化性に優れており,増感剤を用いなくても,カチオン重合性化合物を硬化させることができる。本発明の光酸発生剤はまた,厚膜硬化性にも優れている。
本発明のエネルギー線硬化性組成物は,上記の光酸発生剤を含有するため,紫外光で硬化させることができる。また,本発明のエネルギー線硬化性組成物は,貯蔵安定性が高く,増感剤を用いる必要がないことから,コスト及び作業性に優れる。
本発明の硬化体は,増感剤を用いずに得ることができるため,増感剤の残存に起因する着色や劣化という問題がない。
Yはハロゲン原子(フッ素原子が好ましい。)を表す。
aは4〜6の整数を表す。
bは,1〜5の整数が好ましく,さらに好ましくは2〜4,特に好ましくは2又は3である。
cは,1〜4の整数が好ましく,さらに好ましくは4である。
次反応式で示される方法(たとえば,第4版実験化学講座24巻,1992年,丸善株式会社発行,376頁,特開平7−329399号公報,特開平8−165290号公報,特開平10−212286号公報又は特開平10−7680号公報等に記載されている方法)。
HX’は,一価の多原子アニオンの共役酸を表す。HX’としては,入手しやすさ,酸の安定性及び反応収率の観点から,メタンスルホン酸,パーフルオロメタンスルホン酸及び硫酸が好ましい。
脱水剤は,たとえば,無水リン酸及び無水酢酸等を表す。
一価の多原子アニオン(X’−)は,たとえば,上記のように副分解反応により,本発明の他のアニオン(X−)に交換することができる。
DXは,アルカリ金属(リチウム,ナトリウム及びカリウム等)カチオンと本発明の他のアニオン(例えば,MYa −,(Rf)bPF6−b −,R10 cBY4−c −,R10 cGaY4−c −,R11SO3 −,(R11SO2)3C−,R11SO2)2N−等で示されるアニオン)との塩を表す。
DX’は,アルカリ金属(リチウム,ナトリウム及びカリウム等)カチオンと一価の多原子アニオン(メタンスルホン酸アニオン,パーフルオロメタンスルホン酸アニオン及び硫酸水素アニオンが好ましい。)との塩を表す。
上記<G2>は下記反応式のように,第4版実験化学講座23巻(1991年,丸善),276〜277頁等に記載されている酸化反応によって合成できる。
酸化剤は,酸化剤(過酸化水素等)を表す。
光酸発生剤とは,光照射によりその化学構造が分解し,酸を発生するものをいう。発生した酸は,エポキシドの硬化反応等の触媒として適用できる。
本発明の光酸発生剤は,本発明の混合物をそのまま使用してもよいし,これに他の光酸発生剤を含有させて使用してもよい。
ここで,Mは,リン原子,ホウ素原子又はアンチモン原子を表す。
Chem., 50, 9 (1976),Macromol. Chem., 153, 229(1972),J. Polym. Sci., Polym. Chem. Edn., 14, 1547(1976),Chem. Ztg., 108, 345(1984),J. Imaging. Sci.,
30, 174(1986),J. Photochem. Photobiol. A:Chem., 77(1994),J. Rad. Curing., 26(1986),Adv. Polym. Sci., 78,
61(1986),米国特許第4973722号,同第4992572号,同第3895954号,ヨーロッパ特許公開公報第203829号,同第354181号,同第94914号,同第109851号,同第94915号,特開平58−210904号(米国特許第4868288号),特開昭59−108003号,特開2000−226396号及び特開平2−284903号等)。
エネルギー線としては,本発明のスルホニウム塩の分解を誘発するエネルギーを有する限りいかなるものでもよいが,低圧,中圧,高圧若しくは超高圧の水銀灯,メタルハライドランプ,LEDランプ,キセノンランプ,カーボンアークランプ,蛍光灯,半導体固体レーザ,アルゴンレーザ,He−Cdレーザ,KrFエキシマレーザ,ArFエキシマレーザ又はF2レーザ等から得られる紫外〜可視光領域(波長:約100〜約800nm)のエネルギー線が好ましい。なお,エネルギー線には,電子線又はX線等の高エネルギーを有する放射線を用いることもできる。
[4−(フェニルチオ)フェニル]フェニルスルフィド10.0部,アセトニトリル40.0部,硫酸0.17部を仕込み均一に混合後,50℃に昇温して30%過酸化水素水溶液2.31部を10分間かけて滴下した。その後65℃で3時間反応させ,反応溶液を室温(約25℃)まで冷却後,ジクロロメタン120部を加え,蒸留水200部で
pHが中性になるまで分液操作にて洗浄した。ジクロロメタン層をロータリーエバポレーターに移して溶媒を留去することにより,褐色液状の[4−(フェニルチオ)フェニル]フェニルスルフィドを38.7%と[4−(フェニルチオ)フェニル]フェニルスルホキシドを61.3%含む混合物を9.8部得た。[4−(フェニルチオ)フェニル]フェニルスルホキシドの1H−NMRデータ:{d6−ジメチルスルホキシド,δ(ppm)7.59〜7.70(4H,m),7.40〜7.55(8H,m),7.25〜7.35(2H,m)}。含有量は混合物のHPLC分析によるピーク面積比より算出した。
30%過酸化水素水溶液2.31部を,2.37部に変更した以外,製造例1と同様にして,褐色液状の[4−(フェニルチオ)フェニル]フェニルスルフィドを37.3%と[4−(フェニルチオ)フェニル]フェニルスルホキシドを62.7%含む混合物を9.8部得た。
30%過酸化水素水溶液2.31部を,2.18部に変更した以外,製造例1と同様にして,褐色液状の[4−(フェニルチオ)フェニル]フェニルスルフィドを42.2%と[4−(フェニルチオ)フェニル]フェニルスルホキシドを57.8%含む混合物を9.8部得た。
30%過酸化水素水溶液2.31部を,2.02部に変更した以外,製造例1と同様にして,褐色液状の[4−(フェニルチオ)フェニル]フェニルスルフィドを46.3%と[4−(フェニルチオ)フェニル]フェニルスルホキシドを53.7%含む混合物を9.7部得た。
[4−(フェニルチオ)フェニル]フェニルスルフィド10.0部を,〔4−[(2−メチル)フェニルチオ]フェニル〕(2−メチルフェニル)スルフィド11.0部に,30%過酸化水素水溶液2.31部を,2.18部に変更した以外,製造例1と同様にして,褐色液状の〔4−[(2−メチル)フェニルチオ]フェニル〕(2−メチルフェニル)スルフィドを42.3%と〔4−[(2−メチル)フェニルチオ]フェニル〕(2−メチルフェニル)スルホキシドを57.7%を含む混合物を10.7部得た。〔4−[(2−メチル)フェニルチオ]フェニル〕(2−メチルフェニル)スルホキシドの1H−NMRデータ:{d6−ジメチルスルホキシド,δ(ppm)7.40〜7.65(5H,m),7.10〜7.45(7H,m),2.30〜2.40(6H,d)}。各化合物の含有量は混合物のHPLC分析によるピーク面積比より算出した。
[4−(フェニルチオ)フェニル]フェニルスルフィド10.0部を,〔4−[(2−メトキシ)フェニルチオ]フェニル〕(2−メトキシフェニル)スルフィド12.0部に,30%過酸化水素水溶液2.31部を,2.18部に変更した以外,製造例1と同様にして,褐色液状の〔4−[(2−メトキシ)フェニルチオ]フェニル〕(2−メトキシフェニル)スルフィドを42.4%と〔4−[(2−メトキシ)フェニルチオ]フェニル〕(2−メトキシフェニル)スルホキシドを57.6%を含む混合物を11.7部得た。〔4−[(2−メトキシ)フェニルチオ]フェニル〕(2−メトキシフェニル)スルホキシドの1H−NMRデータ:{d6−ジメチルスルホキシド,δ(ppm)7.35〜7.45(5H,m),7.00〜7.35(7H,m),3.60〜3.75(6H,d)}。各化合物の含有量は混合物のHPLC分析によるピーク面積比より算出した。
2−クロロチオキサントン11.0部,チオフェノール4.9部,水酸化カリウム2.5部及びN,N−ジメチルホルムアミド162部を均一混合し,130℃で9時間反応させた後,反応溶液を室温(約25℃)まで冷却し,蒸留水200部中に投入し,生成物を析出させた。これをろ過し,残渣を水で濾液のpHが中性になるまで洗浄した後,残渣を減圧乾燥させ,黄色粉末状の生成物を得た。カラムクロマトグラフィー(溶離液:トルエン/ヘキサン=1/1:容量比)にて生成物を精製して,2−(フェニルチオ)チオキサントンを収率45%で得た。生成物は1H−NMRにて同定した{d6−ジメチルスルホキシド,δ(ppm)8.43(1H,d),8.25(1H,s),7.75〜7.90(3H,m),7.66(1H,d),7.60(1H,t),7.42〜7.46(5H,m)}。
フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム トリス(ペンタフルオロエチル)トリフルオロホスフェート〔化合物(a)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[トリス(ペンタフルオロエチル)トリフルオロホスフェート]〔化合物(b)〕の混合物の製造−1
フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム トリス(ペンタフルオロエチル)トリフルオロホスフェート〔化合物(a)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[トリス(ペンタフルオロエチル)トリフルオロホスフェート]〔化合物(b)〕の混合物の製造−2
製造例1で製造した[4−(フェニルチオ)フェニル]フェニルスルフィドを39%と[4−(フェニルチオ)フェニル]フェニルスルホキシドを61%含む混合物4.6部を,製造例2で製造した[4−(フェニルチオ)フェニル]フェニルスルフィドを37%と[4−(フェニルチオ)フェニル]フェニルスルホキシドを63%含む混合物4.5部に変更した以外は,実施例1と同様にして,フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム トリス(ペンタフルオロエチル)トリフルオロホスフェート〔化合物(a)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[トリス(ペンタフルオロエチル)トリフルオロホスフェート]〔化合物(b)〕の混合物〔化合物(a)と化合物(b)のモル比率はそれぞれ,40モル%,60モル%であった〕を7.1部得た。
フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム トリス(ペンタフルオロエチル)トリフルオロホスフェート〔化合物(a)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[トリス(ペンタフルオロエチル)トリフルオロホスフェート]〔化合物(b)〕の混合物の製造−3
製造例1で製造した[4−(フェニルチオ)フェニル]フェニルスルフィドを39%と[4−(フェニルチオ)フェニル]フェニルスルホキシドを61含む混合物4.6部を,製造例3で製造した[4−(フェニルチオ)フェニル]フェニルスルフィドを42%と[4−(フェニルチオ)フェニル]フェニルスルホキシドを58%含む混合物4.9部に変更した以外は,実施例1と同様にして,フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム トリス(ペンタフルオロエチル)トリフルオロホスフェート〔化合物(a)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[トリス(ペンタフルオロエチル)トリフルオロホスフェート]〔化合物(b)〕の混合物〔化合物(a)と化合物(b)のモル比率はそれぞれ,70モル%,30モル%であった〕を7.4部得た。
フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム トリス(ペンタフルオロエチル)トリフルオロホスフェート〔化合物(a)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[トリス(ペンタフルオロエチル)トリフルオロホスフェート]〔化合物(b)〕の混合物の製造−4
製造例1で製造した[4−(フェニルチオ)フェニル]フェニルスルフィドを39%と[4−(フェニルチオ)フェニル]フェニルスルホキシドを61%含む混合物4.6部を,製造例4で製造した[4−(フェニルチオ)フェニル]フェニルスルフィドを46%と[4−(フェニルチオ)フェニル]フェニルスルホキシドを54%含む混合物5.2部に変更した以外は,実施例1と同様にして,フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム トリス(ペンタフルオロエチル)トリフルオロホスフェート〔化合物(a)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[トリス(ペンタフルオロエチル)トリフルオロホスフェート]〔化合物(b)〕の混合物〔化合物(a)と化合物(b)のモル比率はそれぞれ,90モル%,10モル%であった〕を7.8部得た。
フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム テトラキス(ペンタフルオロフェニル)ボレート〔化合物(c)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[テトラキス(ペンタフルオロフェニル)ボレート]〔化合物(d)〕の混合物の製造−1
フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム テトラキス(ペンタフルオロフェニル)ボレート〔化合物(c)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[テトラキス(ペンタフルオロフェニル)ボレート]〔化合物(d)〕の混合物の製造−2
「10%トリス(ペンタフルオロエチル)トリフルオロリン酸カリウム水溶液52.7部」を「10%テトラキス(ペンタフルオロフェニル)ホウ酸リチウム水溶液74.6部」に変更したこと以外,実施例2と同様にして,フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム テトラキス(ペンタフルオロフェニル)ボレート〔化合物(c)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[テトラキス(ペンタフルオロフェニル)ボレート]〔化合物(d)〕の混合物〔化合物(c)と化合物(d)のモル比率はそれぞれ,40モル%,60モル%であった〕を8.9部得た。
フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム テトラキス(ペンタフルオロフェニル)ボレート〔化合物(c)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[テトラキス(ペンタフルオロフェニル)ボレート]〔化合物(d)〕の混合物の製造−3
「10%トリス(ペンタフルオロエチル)トリフルオロリン酸カリウム水溶液52.7部」を「10%テトラキス(ペンタフルオロフェニル)ホウ酸リチウム水溶液74.6部」に変更したこと以外,実施例3と同様にして,フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム テトラキス(ペンタフルオロフェニル)ボレート〔化合物(c)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[テトラキス(ペンタフルオロフェニル)ボレート]〔化合物(d)〕の混合物〔化合物(c)と化合物(d)のモル比率はそれぞれ,70モル%,30モル%であった〕を9.2部得た。
フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム テトラキス(ペンタフルオロフェニル)ボレート〔化合物(c)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[テトラキス(ペンタフルオロフェニル)ボレート]〔化合物(d)〕の混合物の製造−4
「10%トリス(ペンタフルオロエチル)トリフルオロリン酸カリウム水溶液52.7部」を「10%テトラキス(ペンタフルオロフェニル)ホウ酸リチウム水溶液74.6部」に変更したこと以外,実施例4と同様にして,フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム テトラキス(ペンタフルオロフェニル)ボレート〔化合物(c)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[テトラキス(ペンタフルオロフェニル)ボレート]〔化合物(d)〕の混合物〔化合物(c)と化合物(d)のモル比率はそれぞれ,90モル%,10モル%であった〕を9.6部得た。
フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム ヘキサフルオロアンチモネート〔化合物(e)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[ヘキサフルオロアンチモネート]〔化合物(f)〕の混合物の製造
生成物は1H−NMR,赤外吸光分光分析(IR),LC−MSにて同定した。{1H−NMR:d6−ジメチルスルホキシド;δ(ppm)7.6〜8.0(m),7.3〜7.6(m)。IR(KBr錠剤法):Sb−F結合特性吸収;650cm−1付近。LC−MS:化合物(e)の分子イオンピーク;588,化合物(f)の分子イオンピーク;441}。また,混合物の比率(モル%)はHPLC分析によるピーク面積比より算出した。
フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム ヘキサフルオロホスフェート〔化合物(g)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[ヘキサフルオロホスフェート]〔化合物(h)〕の混合物の製造
生成物は1H−NMR,赤外吸光分光分析(IR),LC−MSにて同定した。{1H−NMR:d6−ジメチルスルホキシド;δ(ppm)7.6〜8.0(m),7.3〜7.6(m)。IR(KBr錠剤法):P−F結合特性吸収;840cm−1付近。LC−MS:化合物(g)の分子イオンピーク;588,化合物(h)の分子イオンピーク;441}。また,混合物の比率(モル%)はHPLC分析によるピーク面積比より算出した。
(2−メチル)フェニル{〔4−[4−(2−メチル)フェニルチオ]フェニルチオ〕−3−メチル−フェニル}[4−(2−メチル)フェニルチオ]フェニルスルホニウム トリス(ペンタフルオロエチル)トリフルオロホスフェート〔化合物(i)〕と1,4−ビス{4−〔[4−((2−メチル)フェニルチオ)フェニル(2−メチル)フェニル]スルホニオ〕−2−(メチル)フェニルチオ}ベンゼン ビス[トリス(ペンタフルオロエチル)トリフルオロホスフェート]〔化合物(j)〕の混合物の製造
生成物は1H−NMR,赤外吸光分光分析(IR),LC−MSにて同定した。{1H−NMR:d6−ジメチルスルホキシド;δ(ppm)7.6〜8.0(m),7.3〜7.6(m),2.3〜2.4(m)。IR(KBr錠剤法):C−F結合特性吸収;1200cm−1付近。LC−MS:化合物(i)の分子イオンピーク;644,化合物(j)の分子イオンピーク;483}。また,混合物の比率(モル%)はHPLC分析によるピーク面積比より算出した。
(2−メチル)フェニル{〔4−[4−(2−メチル)フェニルチオ]フェニルチオ〕−3−メチル−フェニル}[4−(2−メチル)フェニルチオ]フェニルスルホニウム テトラキス(ペンタフルオロフェニル)ボレート〔化合物(k)〕と1,4−ビス{4−〔[4−((2−メチル)フェニルチオ)フェニル(2−メチル)フェニル]スルホニオ〕−2−(メチル)フェニルチオ}ベンゼン ビス[テトラキス(ペンタフルオロフェニル)ボレート]〔化合物(m)〕の混合物の製造
生成物は1H−NMR,赤外吸光分光分析(IR),LC−MSにて同定した。{1H−NMR:d6−ジメチルスルホキシド;δ(ppm)7.6〜8.0(m),7.3〜7.6(m),2.3〜2.4(m)。IR(KBr錠剤法):B−C結合特性吸収;980cm−1付近。LC−MS:化合物(k)の分子イオンピーク;644,化合物(m)の分子イオンピーク;483}。また,混合物の比率(モル%)はHPLC分析によるピーク面積比より算出した。
(2−メトキシ)フェニル{〔4−[4−(2−メトキシ)フェニルチオ]フェニルチオ〕−3−メトキシ−フェニル}[4−(2−メトキシ)フェニルチオ]フェニルスルホニウム トリス(ペンタフルオロエチル)トリフルオロホスフェート〔化合物(n)〕と1,4−ビス{4−〔[4−((2−メトキシ)フェニルチオ)フェニル(2−メトキシ)フェニル]スルホニオ〕−2−(メトキシ)フェニルチオ}ベンゼン ビス[トリス(ペンタフルオロエチル)トリフルオロホスフェート]〔化合物(o)〕の混合物の製造
生成物は1H−NMR,赤外吸光分光分析(IR),LC−MSにて同定した。{1H−NMR:d6−ジメチルスルホキシド;δ(ppm)7.6〜8.0(m),7.3〜7.6(m),3.6〜3.75(m)。IR(KBr錠剤法):C−F結合特性吸収;1200cm−1付近。LC−MS:化合物(n)の分子イオンピーク;710,化合物(o)の分子イオンピーク;531}。また,混合物の比率(モル%)はHPLC分析によるピーク面積比より算出した。
(2−メトキシ)フェニル{〔4−[4−(2−メトキシ)フェニルチオ]フェニルチオ〕−3−メトキシ−フェニル}[4−(2−メトキシ)フェニルチオ]フェニルスルホニウム テトラキス(ペンタフルオロフェニル)ボレート〔化合物(p)〕と1,4−ビス{4−〔[4−((2−メトキシ)フェニルチオ)フェニル(2−メトキシ)フェニル]スルホニオ〕−2−(メトキシ)フェニルチオ}ベンゼン ビス[テトラキス(ペンタフルオロフェニル)ボレート]〔化合物(q)〕の混合物の合成
生成物は1H−NMR,赤外吸光分光分析(IR),LC−MSにて同定した。{1H−NMR:d6−ジメチルスルホキシド;δ(ppm)7.6〜8.0(m),7.3〜7.6(m),3.6〜3.75(m)。IR(KBr錠剤法):B−C結合特性吸収;980cm−1付近。LC−MS:化合物(p)の分子イオンピーク;710,化合物(q)の分子イオンピーク;531}。また,混合物の比率(モル%)はHPLC分析によるピーク面積比より算出した。
フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム トリス(トリフルオロメタンスルホニル)メチド〔化合物(u)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[トリス(トリフルオロメタンスルホニル)メチド]〔化合物(v)〕の混合物の製造
「10%トリス(ペンタフルオロエチル)トリフルオロリン酸カリウム水溶液52.7部」を「10%トリス(トリフルオロメタンスルホニル)メチドリチウム水溶液45.5部」に変更したこと以外,実施例3と同様にして,フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム トリス(トリフルオロメタンスルホニル)メチド〔化合物(u)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[トリス(トリフルオロメタンスルホニル)メチド]〔化合物(v)〕の混合物〔化合物(u)と化合物(v)のモル比率はそれぞれ,70モル%,30モル%であった〕を7.2部得た。
生成物は1H−NMR,赤外吸光分光分析(IR),LC−MSにて同定した。{1H−NMR:d6−ジメチルスルホキシド;δ(ppm)7.6〜8.0(m),7.3〜7.6(m)。IR(KBr錠剤法:C−F結合特性吸収;1200cm−1付近。LC−MS:化合物(a)の分子イオンピーク;588,化合物(b)の分子イオンピーク;441)。また,混合物の比率(モル%)はHPLC分析によるピーク面積比より算出した。
フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム ビス(トリフルオロメタンスルホニル)イミド〔化合物(w)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[ビス(トリフルオロメタンスルホニル)イミド]〔化合物(x)〕の混合物の製造
「10%トリス(ペンタフルオロエチル)トリフルオロリン酸カリウム水溶液52.7部」を「10%ビス(トリフルオロメタンスルホニル)イミドリチウム水溶液31.2部」に変更したこと以外,実施例3と同様にして,フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム ビス(トリフルオロメタンスルホニル)イミド〔化合物(w)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス[ビス(トリフルオロメタンスルホニル)イミド]〔化合物(x)〕の混合物〔化合物(w)と化合物(x)のモル比率はそれぞれ,70モル%,30モル%であった〕を5.9部得た。
生成物は1H−NMR,赤外吸光分光分析(IR),LC−MSにて同定した。{1H−NMR:d6−ジメチルスルホキシド;δ(ppm)7.6〜8.0(m),7.3〜7.6(m)。IR(KBr錠剤法:C−F結合特性吸収;1200cm−1付近。LC−MS:化合物(a)の分子イオンピーク;588,化合物(b)の分子イオンピーク;441)。また,混合物の比率(モル%)はHPLC分析によるピーク面積比より算出した。
フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム ノナフルオロブタンスルホネート〔化合物(y)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス(ノナフルオロブタンスルホネート)〔化合物(z)〕の混合物の製造
製造例3で製造した混合物〔[4−(フェニルチオ)フェニル]フェニルスルフィドを42%と[4−(フェニルチオ)フェニル]フェニルスルホキシドを58%含む混合物〕4.9部,無水酢酸2.8部及びアセトニトリル16.5部を仕込み,均一に混合後,ノナフルオロブタンスルホン酸3.3部を室温で滴下した。その後の操作は実施例1と同様に行い,フェニル[4−(4−フェニルチオ)フェニルチオ]フェニル(4−フェニルチオ)フェニルスルホニウム ノナフレート(ノナフレート=ノナフルオロブタンスルホン酸アニオン)〔化合物(y)〕と1,4−ビス{4−〔[4−(フェニルチオ)フェニルフェニル]スルホニオ〕フェニルチオ}ベンゼン ビス(ノナフラート)〔化合物(z)〕の混合物〔化合物(y)と化合物(z)のモル比率はそれぞれ,70モル%,30モル%であった〕を6.3部得た。
生成物は1H−NMR,赤外吸光分光分析(IR),LC−MSにて同定した。{1H−NMR:d6−ジメチルスルホキシド;δ(ppm)7.6〜8.0(m),7.3〜7.6(m)。IR(KBr錠剤法:C−F結合特性吸収;1200cm−1付近。LC−MS:化合物(a)の分子イオンピーク;588,化合物(b)の分子イオンピーク;441)。また,混合物の比率(モル%)はHPLC分析によるピーク面積比より算出した。
CPI−110P〔4−(フェニルチオ)フェニルジフェニルスルホニウム ヘキサフルオロホスフェート,サンアプロ株式会社製〕を比較用のスルホニウム塩とした。
CPI−110A〔4−(フェニルチオ)フェニルジフェニルスルホニウム ヘキサフルオロアンチモネート,サンアプロ株式会社製〕を比較用のスルホニウム塩とした。
4−(フェニルチオ)フェニルジフェニルスルホニウムトリス(ペンタフルオロエチル)トリフルオロホスフェート(化合物(r))の合成
4−(フェニルチオ)フェニルジフェニルスルホニウム テトラキス(ペンタフルオロフェニル)ボレート(化合物(s))の合成
ジフェニル−2−チオキサントニルスルホニウム トリス(ペンタフルオロエチル)トリフルオロホスフェート(化合物(t))の合成
1.硬化性組成物の調製
評価試料{実施例1〜15,比較例1〜5のスルホニウム塩}と,エポキシド(3,4−エポキシシクロヘキシルメチル−3,4−エポキシシクロヘキサンカルボキシレート,ダウケミカル株式会社製,UVR−6110)とを表1に示した配合量(重量部)で60℃にて加熱し,均一混合して,光硬化性試験用の組成物を調製した。
上記で得た硬化性組成物をアプリケーター(40μm)でポリエチレンテレフタレート(PET)フィルムに塗布した。PETフィルムに紫外線照射装置を用いて,フィルターによって波長を限定した紫外光を照射した。なお,フィルターは365フィルター(アイグラフィックス株式会社製,365nm未満の光をカットするフィルター)とL−34(株式会社ケンコー光学製,340nm未満の光をカットするフィルター)を併用した。照射後,40分後の塗膜硬度を鉛筆硬度(JIS K5600−5−4:1999)を測定し,以下の基準により評価し(硬化後の塗膜厚は約40μm),これらの結果を表2に示した。鉛筆硬度が高いほど,エネルギー線硬化性組成物の光硬化性が良好であること,すなわちスルホニウム塩のカチオン重合性化合物に対する重合開始能(スルホニウム塩の光感応性)が優れていることを示す。
◎:鉛筆硬度が2H以上
○:鉛筆硬度がH〜B
△:鉛筆硬度が2B〜4B
×:液状〜タックがあり,鉛筆硬度を測定できない
・紫外線照射装置:ベルトコンベア式UV照射装置(アイグラフィックス株式会社製)
・ランプ:1.5kW高圧水銀灯
・フィルター:365フィルター(アイグラフィックス株式会社製)
L−34(株式会社ケンコー光学製)
・照度(365nmヘッド照度計で測定):145mW/cm2
条件−1:200mJ/cm2
条件−2:400mJ/cm2
条件−3:600mJ/cm2
(試料の調製)
評価試料{実施例1〜15,比較例1〜5のスルホニウム塩}3部と,エポキシド(3,4−エポキシシクロヘキシルメチル−3,4−エポキシシクロヘキサンカルボキシレート,ダウケミカル株式会社製,UVR−6110)100部をそれぞれ配合し,60℃で混合後,均一混合して貯蔵安定性試験用試料を調製した。
この配合試料を遮光下80℃で加熱して,1ヶ月保存した後,加熱前後の配合試料の粘度を測定し,下記基準により評価した。粘度の上昇がないものほど貯蔵安定性が良い。
(評価基準)
×:加熱後の粘度変化が1.5倍以上。
○:加熱後の粘度変化が1.5倍未満。
これらの結果を表2に示した。
Claims (8)
- 下記式(1)で示されるスルホニウム塩と(2)で示されるスルホニウム塩とを含んでなる光酸発生剤。
〔式(1)及び(2)中,R1〜R9は,互いに独立して,アルキル基,ヒドロキシル基,アルコキシル基,アルキルカルボニル基,アリールカルボニル基,アルコキシカルボニル基,アリールオキシカルボニル基,アリールチオカルボニル基,アシロキシ基,アリールチオ基,アルキルチオ基,アリール基,複素環式炭化水素基,アリールオキシ基,アルキルスルフィニル基,アリールスルフィニル基,アルキルスルホニル基,アリールスルホニル基,ヒドロキシ(ポリ)アルキレンオキシ基,置換されていてよいアミノ基,シアノ基,ニトロ基又はハロゲン原子を表し,ここに該置換されていてよいアミノ基は,アミノ基(−NH 2 )であるか又は炭素数1〜15の,飽和炭化水素基又は芳香族基を含んでよい炭化水素基で置換された置換アミノ基であり,m1〜m9,はそれぞれR1〜R9の個数を表し,m4,m6,m7及びm9は0〜5の整数を,m1,m2,m3,m5及びm8は0〜4の整数を表し,A1はSまたはSOを,X−は一価の多原子アニオンを表す。〕 - R1〜R9について,該アルキル基が炭素数1〜18の直鎖アルキル基,炭素数3〜18の分枝鎖アルキル基,又は炭素数3〜18のシクロアルキル基であり,該アルコキシル基が炭素数1〜18の直鎖アルコキシル基又は炭素数3〜18の分枝鎖アルコキシル基であり,該アルキルカルボニル基が炭素数2〜18の直鎖アルキルカルボニル基又は炭素数4〜18の分枝鎖アルキルカルボニル基であり,該アリールカルボニル基が炭素数7〜11のアリールカルボニル基であり,該アルコキシカルボニル基が炭素数2〜19の直鎖アルコキシカルボニル基又は炭素数4〜19の分枝鎖アルコキシカルボニル基であり,該アリールオキシカルボニル基が炭素数7〜11のアリールオキシカルボニル基であり,該アリールチオカルボニル基が炭素数7〜11のアリールチオカルボニル基であり,該アシロキシ基が炭素数2〜19の直鎖アシロキシ基又は炭素数4〜19の分枝鎖アシロキシ基であり,該アリールチオ基が炭素数6〜20のアリールチオ基であり,該アルキルチオ基が炭素数1〜18の直鎖アルキルチオ基又は炭素数3〜18の分枝鎖アルキルチオ基であり,該アリール基が炭素数6〜10のアリール基であり,該複素環式炭化水素基が炭素数4〜20の複素環式炭化水素基であり,該アリールオキシ基が炭素数6〜10のアリールオキシ基であり,該アルキルスルフィニル基が炭素数1〜18の直鎖アルキルスルフィニル基又は炭素数3〜18の分枝鎖アルキルスルフィニル基であり,該アリールスルフィニル基が炭素数6〜10のアリールスルフィニル基であり,該アルキルスルホニル基が炭素数1〜18の直鎖アルキルスルホニル基又は炭素数3〜18の分枝鎖アルキルスルホニル基であり,該アリールスルホニル基が炭素数6〜10のアリールスルホニル基であり,該ヒドロキシ(ポリ)アルキレンオキシ基が式(3),
〔AOはエチレンオキシ基及び/又はプロピレンオキシ基,qは1〜5の整数を表す。〕で示されるヒドロキシ(ポリ)アルキレンオキシ基であり,該ハロゲン原子基がフッ素原子,塩素原子,臭素原子又はヨウ素原子である,請求項1の光酸発生剤。 - R1〜R9が,互いに独立して,メチル基,メトキシ基またはアセチル基よりなる群から選ばれる1種を表すものである,請求項1又は2に記載の光酸発生剤。
- m1〜m9が何れも0である,請求項1ないし3の何れかに記載の光酸発生剤。
- X−が,MYa −,(Rf)bPF6−b −,R10 cBY4−c −,R10 cGaY4−c −,R11SO3 −,(R11SO2)3C−又は(R11SO2)2N−で表されるアニオン〔ここに,Mはリン原子,ホウ素原子,ヒ素原子又はアンチモン原子,Yはハロゲン原子,Rfは水素原子の80モル%以上がフッ素原子で置換されたアルキル基,Pはリン原子,Fはフッ素原子,R10は,少なくとも1個の水素原子がハロゲン原子,トリフルオロメチル基,ニトロ基又はシアノ基で置換されたフェニル基,Bはホウ素原子,Gaはガリウム原子,R11は炭素数1〜20のアルキル基,炭素数1〜20のパーフルオロアルキル基又は炭素数6〜20のアリール基,aは4〜6の整数,bは1〜5の整数,cは1〜4の整数を表す。〕である,請求項1ないし4の何れかに記載の光酸発生剤。
- X−が,PF6 −,SbF6 −,(CF3CF2)3PF3 −,(C6F5)4B−,((CF3)2C6H3)4B−,(C6F5)4Ga−,((CF3)2C6H3)4Ga−又は(CF3SO2)3C−で表されるアニオンである,請求項1ないし5の何れかに記載の光酸発生剤。
- 該光酸発生剤に含まれる式(1)で示されるスルホニウム塩と(2)で示されるスルホニウム塩の合計量のうち,式(1)で示されるスルホニウム塩の割合が少なくとも50モル%であることを特徴とする,請求項1ないし6の何れかに記載の光酸発生剤。
- 請求項1ないし7の何れかに記載の光酸発生剤とカチオン重合性化合物とを含有することを特徴とするエネルギー線硬化性組成物。
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