Classifications

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  • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
  • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
  • G11B5/127—Structure or manufacture of heads, e.g. inductive
  • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
  • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
  • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
  • G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
  • G11B5/3929—Disposition of magnetic thin films not used for directly coupling magnetic flux from the track to the MR film or for shielding
  • G11B5/3932—Magnetic biasing films
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  • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
  • G01R33/00—Arrangements or instruments for measuring magnetic variables
  • G01R33/0052—Manufacturing aspects; Manufacturing of single devices, i.e. of semiconductor magnetic sensor chips
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
  • G01R33/00—Arrangements or instruments for measuring magnetic variables
  • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
  • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
  • G01R33/09—Magnetoresistive devices
• • G—PHYSICS
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  • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
  • G01R33/00—Arrangements or instruments for measuring magnetic variables
  • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
  • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
  • G01R33/09—Magnetoresistive devices
  • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
  • G01R33/00—Arrangements or instruments for measuring magnetic variables
  • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
  • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
  • G01R33/09—Magnetoresistive devices
  • G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
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  • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
  • G11B5/127—Structure or manufacture of heads, e.g. inductive
  • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
  • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
• • G—PHYSICS
  • G11—INFORMATION STORAGE
  • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
  • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
  • G11B5/127—Structure or manufacture of heads, e.g. inductive
  • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
  • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
  • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
• • G—PHYSICS
  • G11—INFORMATION STORAGE
  • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
  • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
  • G11B5/127—Structure or manufacture of heads, e.g. inductive
  • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
  • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
  • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
  • G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
• • G—PHYSICS
  • G11—INFORMATION STORAGE
  • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
  • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
  • G11B5/127—Structure or manufacture of heads, e.g. inductive
  • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
  • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
  • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
  • G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
  • G11B5/3909—Arrangements using a magnetic tunnel junction
• • G—PHYSICS
  • G11—INFORMATION STORAGE
  • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
  • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
  • G11B5/127—Structure or manufacture of heads, e.g. inductive
  • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
  • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
  • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
  • G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
  • G11B5/3929—Disposition of magnetic thin films not used for directly coupling magnetic flux from the track to the MR film or for shielding
• • G—PHYSICS
  • G11—INFORMATION STORAGE
  • G11C—STATIC STORES
  • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
  • G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
  • G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
  • H01F10/00—Thin magnetic films, e.g. of one-domain structure
  • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
  • H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
  • H01F10/3263—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being symmetric, e.g. for dual spin valve, e.g. NiO/Co/Cu/Co/Cu/Co/NiO
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
  • H01F10/00—Thin magnetic films, e.g. of one-domain structure
  • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
  • H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
  • H01F10/3268—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
  • H01F10/3272—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn by use of anti-parallel coupled [APC] ferromagnetic layers, e.g. artificial ferrimagnets [AFI], artificial [AAF] or synthetic [SAF] anti-ferromagnets
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
  • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
  • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
  • H01F41/30—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE]
  • H01F41/302—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices
  • H01F41/305—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices applying the spacer or adjusting its interface, e.g. in order to enable particular effect different from exchange coupling
  • H01F41/306—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices applying the spacer or adjusting its interface, e.g. in order to enable particular effect different from exchange coupling conductive spacer
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  • H10B—ELECTRONIC MEMORY DEVICES
  • H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
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  • H10N50/80—Constructional details
• • H—ELECTRICITY
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• • G—PHYSICS
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  • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
  • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
  • G11B5/127—Structure or manufacture of heads, e.g. inductive
  • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
  • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
  • G11B2005/3996—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices

Definitions

• This invention relates generally to spin electronics magnetoresistance elements and, more particularly, to giant magnetoresistance (GMR) elements and tunnel magnetoresistance (TMR) elements that have an improved response to magnetic fields.
• GMR giant magnetoresistance
• TMR tunnel magnetoresistance
• magnetic field sensing element is used to describe a variety of electronic elements that can sense a magnetic field.
• One such magnetic field sensing element is a magnetoresistance (MR) element.
• the magnetoresistance element has a resistance that changes in relation to a magnetic field experienced by the MR element.
• magnetoresistance elements for example, a semiconductor magnetoresistance element such as Indium Antimonide (InSb), a giant magnetoresistance (GMR) element, for example, a spin valve, an anisotropic
• AMR magnetoresistance element
• TMR tunneling magnetoresistance element
• MTJ magnetic tunnel junction
• the GMR and the TMR elements operate with spin electronics (i.e., electron spins), which result in a resistance of the GMR element or the TMR element being related to an angular direction of a magnetization in a so-called "free-layer.”
• spin electronics i.e., electron spins
• the magnetoresistance element may be a single element or, alternatively, may include two or more magnetoresistance elements arranged in various configurations, e.g., a half bridge or full (Wheatstone) bridge.
• metal based or metallic magnetoresistance elements tend to have axes of sensitivity parallel to a substrate on which they are formed.
• the term "magnetic field sensor” is used to describe a circuit that uses a magnetic field sensing element, generally in combination with other circuits. In a typical magnetic field sensor, the magnetic field sensing element and the other circuits can be integrated upon a common substrate.
• Magnetic field sensors are used in a variety of applications, including, but not limited to, an angle sensor that senses an angle of a direction of a magnetic field, a current sensor that senses a magnetic field generated by a current earned by a current-carrying conductor, a magnetic switch that senses the proximity of a ferromagnetic object, a rotation detector that senses passing ferromagnetic articles, for example, magnetic domains of a ring magnet or a ferromagnetic target (e.g., gear teeth) where the magnetic field sensor is used in combination with a back-biased or other magnet, and a magnetic field sensor that senses a magnetic field density of a magnetic field.
• an angle sensor that senses an angle of a direction of a magnetic field
• a current sensor that senses a magnetic field generated by a current earned by a current-carrying conductor
• a magnetic switch that senses the proximity of a ferromagnetic object
• a rotation detector that senses passing ferromagnetic articles,
• the parameters include sensitivity, which is the change in the output signal of a magnetic field sensing element in response to a magnetic field, and linearity, which is the degree to which the output signal of a magnetic field sensor varies linearly (i.e. , in direct proportion) to the magnetic field.
• GMR and TMR elements are known to have a relatively high sensitivity, compared, for example, to Hall elements.
• GMR and TMR elements are also known to have moderately good linearity, but over a restricted range of magnetic fields, more restricted in range than a range over which a Hall element can operate.
• the present invention provides a GMR or a TMR element (or any spin electronics magnetoresistance element) for which linearity irregularities are reduced.
• a magnetoresistance element in accordance with an example useful for understanding an aspect of the present invention, includes a substrate and a first layer disposed over the substrate, the first layer comprising a seed layer.
• the magnetoresistance element also includes a second layer disposed over the substrate, the second layer comprising a first antiferromagnetic pinning layer.
• the magnetoresistance element also includes a third layer disposed over the substrate and proximate to the second layer, the third layer comprising a first pinned layer, wherein a position of the second layer is selected to influence a magnetization of the third layer.
• the magnetoresistance element also includes a fourth layer disposed over the substrate and proximate to the third layer, the fourth layer comprising a first nonmagnetic spacer layer.
• the magnetoresistance element also includes a fifth layer disposed over the substrate and proximate to the fourth layer, the fifth layer comprising a free layer, the free layer having a plurality of magnetic domains.
• the plurality of magnetic domains comprise: a first plurality of magnetic domains with magnetic fields pointing in a first direction; and a second plurality of magnetic domains with magnetic fields pointing in one or more directions different than the first direction.
• the magnetoresistance element also includes a sixth layer disposed over the substrate, the sixth layer comprising a second pinned layer.
• the magnetoresistance element also includes a seventh layer disposed over the substrate and proximate to the sixth layer, the seventh layer comprising a second antiferromagnetic pinning layer.
• a position of the seventh layer is selected to influence a magnetization of the sixth layer.
• the sixth layer is at a selected position relative to the fifth layer.
• the selected position of the sixth layer relative of the fifth layer results in a selected reduction in a quantity of magnetic domains within the second plurality of magnetic domains in the fifth layer without fully pinning the fifth layer.
• the magnetoresistance element also includes an eighth layer disposed between the fifth layer and the sixth and seventh layers taken together.
• the eighth layer includes a second nonmagnetic spacer layer.
• a material of the eighth layer is selected to allow a thickness of the eighth layer to be greater than 0.5 nm while allowing a desired partial pinning between the fifth layer and the sixth layer.
• some layers surrounding the eighth layer are different or are omitted.
• the above magnetoresistance element can include one or more of the following aspects in any combination.
• the material of the second nonmagnetic spacer layer is selected to allow the thickness of the second nonmagnetic spacer layer of greater than 0.5nm to allow a magnetic coupling between the fifth layer and the sixth layer to be between a maximum ferromagnetic coupling and a maximum antiferromagnetic coupling.
• the second nonmagnetic spacer layer is comprised of a material selected to provide an adjustable RKKY coupling between the fifth layer and the sixth layer.
• the second nonmagnetic spacer layer is comprised of Ru.
• the thickness of the second nonmagnetic spacer layer is between about 0.9nm and about 2nm.
• the second nonmagnetic spacer layer is comprised of a selected one of Ru, Ag, or Au.
• the thickness of the second nonmagnetic spacer layer is between about 0.9nm and about 2nm.
• the thickness of the second nonmagnetic spacer layer is between about 0.9nm and about 2nm. In some embodiments of the above magnetoresistance element, the material and the thickness of the second nonmagnetic spacer layer are selected to result in a partial pinning of the fifth layer, the particle pinning corresponding to less magnetic coupling between the sixth layer and the fifth layer than between the third layer and the fifth layer.
• the thickness of the second nonmagnetic spacer layer is between about 0.1 nm and about 1.7 nm.
• a material of the second antiferromagnetic pinning layer is the same as the material of the first
• magnetic field directions in the first and second pinned layers are annealed to be ninety degrees apart, and wherein a magnetic field direction in the second pinned layer is parallel with the magnetic field direction in the second antiferromagnetic pinning layer.
• the material of the second antiferromagnetic pinning layer is selected to have a Neel temperature and a blocking temperature both above three hundred degrees Celsius.
• the second layer is disposed over the first layer
• the third layer is disposed over the second layer
• the fourth layer is disposed over the third layer
• the fifth layer is disposed over the fourth layer
• the eighth layer is disposed over the fifth layer
• the sixth and seventh layers are disposed over the eighth layer in either order.
• the first and second antiferromagnetic pinning layers are comprised of a respectively selected one of PtMn, IrMn, or FeMn.
• the second layer is disposed over the first layer
• the third layer is disposed over the second layer
• the fourth layer is disposed over the third layer
• the fifth layer is disposed over the fourth layer
• the eighth layer is disposed over the fifth layer
• the sixth and seventh layers are disposed over the eighth layer in either order
• the second pinned layer is comprised of CoFe and the second antiferromagnetic pinning layer is comprised of a selected one of PtMn, IrMn, or FeMn.
• the third layer is comprised of:
• first ferromagnetic pinned layer disposed proximate to the second layer, a third nonmagnetic spacer layer disposed over the first ferromagnetic pinned layer;
• a second ferromagnetic pinned layer disposed over the second nonmagnetic spacer layer.
• ferromagnetic pinned layers are comprised of CoFe and the third nonmagnetic spacer layer is comprised of Ru.
• magnetic field directions in the first and second pinned layers are annealed to be ninety degrees apart, and wherein a magnetic field direction in the second pinned layer is parallel with the magnetic field direction in the second antiferromagnetic pinning layer.
• a method of fabricating a magnetoresistance element includes depositing a double pinned magnetoresistance element upon a substrate.
• the double pinned magnetoresistance element includes a first antiferromagnetic pinning layer.
• the double pinned magnetoresistance element also includes a first pinned layer proximate to the antiferromagnetic pinning layer.
• the double pinned magnetoresistance element also includes a first nonmagnetic spacer layer disposed proximate to the first antiferromagnetic pinning layer.
• the double pinned magnetoresistance element also includes a second pinned layer.
• the double pinned magnetoresistance element also includes a second antiferromagnetic pinning layer proximate to the second pinned layer.
• the double pinned magnetoresistance element also includes a free layer between the first and second pinned layers.
• the double pinned magnetoresistance element also includes a second nonmagnetic spacer layer between the second pinned layer and the free layer.
• a material of the second nonmagnetic spacer layer is selected to allow a thickness of the second nonmagnetic spacer layer to be greater than 0.5 nm while allowing a desired partial pinning between the second pinned layer and the free layer.
• some layers surrounding the second nonmagnetic spacer layer are different or are omitted.
• the above method can include one or more of the following aspects in any combination.
• the material of the second nonmagnetic spacer layer is selected to allow the thickness of the second nonmagnetic spacer layer of greater than 0.5nm to allow a magnetic coupling between the second pinned layer and the free layer to be between a maximum ferromagnetic coupling and a maximum
• the above method further comprises:
• the first annealing magnetic field direction is in a selected magnetization direction
• the second annealing magnetic field direction is orthogonal to the first annealing magnetic field direction
• the first annealing magnetic field is higher than the second annealing magnetic field, wherein the second annealing magnetic field is selected to result in annealing of the second pinned layer and annealing of the second
• the first annealing magnetic field is about one Tesla
• the second annealing magnetic field is in a range of about twenty milliTesla to about one hundred milliTesla.
• the first annealing temperature is about two hundred ninety five degrees Celsius, wherein the second annealing temperature is about three hundred degrees Celsius, and wherein the first annealing duration is about one hour and the second annealing duration is about one hour.
• the first and second pinned layers are both comprised of CoFe. In some embodiments of the above method, the first and second antiferromagnetic pinning layers are both comprised of PtMn.
• the first and second antiferromagnetic pinning layers are both comprised of PtMn.
• the first and second antiferromagnetic pinning layers are comprised of the same material.
• the first and second pinned layers are both comprised of CoFe.
• the thickness of the second nonmagnetic spacer layer is between about 0.9nm and about 2nm.
• FIG. 1 is a graph showing an ideal and an actual transfer characteristic of a giant magnetoresistance (GMR) element
• FIG. 2 is a block diagram showing layers of a conventional prior art GMR element with a single pinned arrangement
• FIG. 3 is a block diagram showing layers of a conventional prior art GMR element with a double pinned arrangement
• FIG. 4 is a block diagram showing layers of an embodiment of a
• magnetoresistance element having a particular double pinned arrangement
• FIG. 5 is a top view diagram of magnetic field sensing element having a yoke shape that, in some embodiments, can describe a shape of the magnetoresistance element of FIG. 4;
• FIG. 6 is a block diagram of a magnetoresistance element magnetic field sensor placed above a magnetic target for rotation speed measurement
• FIG. 7 is a flow chart showing an example of process steps that can be used to form the double pinned GMR element of FIGS. 4 and 5;
• FIGS. 8 and 9 are flow charts showing examples of alternate process steps that can be used to form the double pinned GMR element of FIGS. 4 and 5.
• anisotropy or “anisotropic” refer to a particular axis or direction to which the magnetization of a ferromagnetic or ferrimagnetic layer tends to orientate when it does not experience an additional external field.
• An axial anisotropy can be created by a crystalline effect or by a shape anisotropy, both of which allow two equivalent directions of magnetic fields.
• a directional anisotropy can also be created in an adjacent layer, for example, by an anti ferromagnetic layer, which allows only a single magnetic field direction along a specific axis in the adjacent layer.
• a directional anisotropy provides an ability to obtain a coherent rotation of the magnetic field in a magnetic layer in response, for example, to an external magnetic field.
• magnetic field sensing element is used to describe a variety of electronic elements that can sense a magnetic field.
• a magnetoresistance element is but one type of magnetic field sensing elements.
• magnetic field sensor is used to describe a circuit that uses a magnetic field sensing element, generally in combination with other circuits.
• Magnetic field sensors are used in a variety of applications, including, but not limited to, an angle sensor that senses an angle of a direction of a magnetic field, a current sensor that senses a magnetic field generated by a current carried by a current-carrying conductor, a magnetic switch that senses the proximity of a ferromagnetic object, a rotation detector that senses passing ferromagnetic articles, for example, magnetic domains of a ring magnet, and a magnetic field sensor that senses a magnetic field density of a magnetic field.
• an angle sensor that senses an angle of a direction of a magnetic field
• a current sensor that senses a magnetic field generated by a current carried by a current-carrying conductor
• a magnetic switch that senses the proximity of a ferromagnetic object
• a rotation detector that senses passing ferromagnetic articles, for example, magnetic domains of a ring magnet
• a magnetic field sensor that senses a magnetic field density of a magnetic field.
• a graph 100 has a horizontal axis with a scale in units of magnetic field in milliTesla (mT) and a vertical axis with a scale in units of resistance in arbitrary units.
• mT milliTesla
• a curve 102 is representative of a transfer function of an ideal GMR element, i.e. , resistance versus magnetic field experienced by the GMR element.
• the transfer function 102 has a linear region 102a between an upper saturation point 102b and a lower saturation point 102c. Regions 102d, 102e are in saturation. It should be understood that the linear region 102a is an ideal linear region. Steps, e.g. , a step 104, are representative of an actual transfer function of the
• the steps 104 are not desirable.
• the steps 104 result from magnetic behavior of magnetic domains within a so-called free layer in a GMR element. Behavior of the free layer is described more fully below in conjunction with FIG. 2.
• steps 104 are shown to be regular steps with equal spacing and equal step heights, the steps 104 can also be irregular, with unequal spacing and unequal step heights (i.e. , amplitudes).
• a conventional prior art GMR element 200 includes a plurality of layers disposed over a substrate. An upper surface of the substrate is shown as a lowermost line at the bottom of FIG. 2.
• each layer is identified by functional name.
• On the right side or FIG. 2 are shown magnetic characteristics of sub-layers that can form the functional layers.
• magnetic materials can have a variety of magnetic characteristics and can be classified by a variety of terms, including, but not limited to, ferromagnetic, antiferromagnetic, and nonmagnetic. Description of the variety of types of magnetic materials is not made herein in detail. However, let it suffice here to say, that a ferromagnetic material is one in which magnetic moments of conduction electrons within 0417 the ferromagnetic material tend to, on average, align to be both parallel and in the same direction, resulting in a nonzero net magnetic field from the ferromagnetic material.
• Diamagnetic materials are also called nonmagnetic materials.
• An antiferromagnetic material is one in which magnetic moments within the antiferromagnetic material tend to, on average, align to be parallel, but in opposite directions, resulting in a zero net magnetic field.
• the conventional prior art GMR element 200 can include a seed layer 202 disposed over the substrate, an antiferromagnetic pinning layer 204 disposed over the seed layer 202, and a pinned layer 206 disposed over the antiferromagnetic pinning layer 204.
• the pinned layer 206 can be comprised of a first ferromagnetic pinned layer 206a, a second ferromagnetic pinned layer 206c, and a spacer layer 206b disposed therebetween.
• the conventional GMR element 200 can also include a spacer layer 208 disposed over the second ferromagnetic pinned layer 206c, and a free layer 210 disposed over the spacer layer 208.
• the spacer layer 206b is a nonmagnetic metallic layer.
• the spacer 208 is also a nonmagnetic layer, which can be metallic for GMR or insulating for TMR.
• the free layer 210 can be comprised of a first ferromagnetic free layer 210a and a second ferromagnetic free layer 210b.
• a cap layer 212 can be disposed over the free layer 210 to protect the GMR element 200.
• Examples of thicknesses of the layers of the conventional prior art GMR element 200 are shown in nanometers. Examples of materials of the layers of the conventional prior art GMR element are shown by atomic symbols. Within some layers, arrows are shown that are indicative or directions of magnetic field directions of the layers when the GMR element 200 does not experience an external magnetic field. Arrows coming out of the page are indicated as dots within circles and arrows going into the page are indicated as crosses within circles.
• the seed layer 202 is used to provide a regular crystalline structure upon the substrate that affects crystal properties of layers above.
• sub-layers i.e., layer portions
• the antiferromagnetic pinning layer 204 tend to have magnetic fields that point in alternating different directions indicated by right and left arrows, resulting in the antiferromagnetic pinning layer having a net magnetic field of zero.
• a top surface of the antiferromagnetic pinning layer 204 tends to have a magnetic moment pointing in one direction, here shown to the left.
• the first ferromagnetic pinned layer 206a tends to couple ferromagnetically to the top surface of the antiferromagnetic pinning layer 204, and thus, the magnetic field in the first ferromagnetic pinned layer 206a can point in the same direction as the magnetic moments at the top surface of the antiferromagnetic pinning layer 204, here shown to the left.
• the second ferromagnetic pinned layer 206c tends to couple antiferromagnetically with the first ferromagnetic pinned layer 206a, and thus, it has a magnetic field pointing in the other direction, here shown pointing to the right.
• the combination of the three layers 206a, 206b, 206c can be referred to as a synthetic antiferromagnetic structure or layer.
• the first and second free layers 210a, 210b have respective magnetic fields pointing out of the page in the absence of an external magnetic field. This pointing direction can be achieved by creating a specific anisotropy along a direction pointing out of the page.
• That anisotropy can be created by a shape of the GMR element.
• the anisotropy can be created by patterning the GMR element 200 (top view) to have a yoke shape, or by a crystalline or a magnetic anisotropy.
• a yoke shape is more fully described below in conjunction with FIG. 5.
• the free layer 210 has a preferential axis (the yoke axis). If the yoke axis is perpendicular to the reference magnetization a crossed anisotropy can be achieved, which allows obtaining a linear response on a field extension of the order of the free layer anisotropy.
• the magnetic fields in the ferromagnetic free layers 210a, 210b tend to rotate to the right to become more aligned (or fully aligned, i.e., pointing to the right) with the magnetic field pointing direction in the second ferromagnetic pinned layer 206c.
• the magnetic fields in the pinned layer 206 are pinned by the antiferromagnetic pinning layer and do not rotate. The amount of rotation of the magnetic fields in the ferromagnetic free layers 210a, 210b depends upon the magnitude of the external magnetic field.
• the increased alignment of the magnetic fields in the ferromagnetic free layers 210a, 210b with the direction of the magnetic field in the second ferromagnetic pinned layer 206c tends to make a resistance of the GMR element 200 lower.
• resistance tends to vary primarily in the first free layer 210a, in the second (Cu) spacer layer 208, and in the second ferromagnetic (e.g., CoFe) pinned layer 206c.
• the magnetic fields in the free layer 210 tend to rotate to the left to become more anti-aligned (or fully anti-aligned, i.e., pointing to the left) with the magnetic field pointing direction in the second ferromagnetic pinned layer 206c.
• the amount of rotation depends upon the magnitude of the external magnetic field.
• the increased anti- alignment of the magnetic fields in the ferromagnetic free layers 210a, 210b with the direction of the magnetic field in the second ferromagnetic pinned layer 206c tends to make a resistance of the GMR element 200 higher.
• a resistance of the GMR element 200 is at the center of the linear region 102a, and the resistance can move to the right or to the left on the transfer characteristic curve 102 (i.e., lower or higher) depending upon a direction of the external magnetic field 214.
• the GMR element 200 will be in the lower saturation region 102e or the upper saturation region 102d, respectively.
• the ferromagnetic free layers 210a, 210b tend to naturally have a plurality of magnetic domains, including, but not limited to, a first plurality of magnetic domains with magnetic fields pointing in a first direction and a second plurality of magnetic domains with magnetic fields pointing in one or more other directions.
• the first plurality of magnetic domains in the ferromagnetic free layers 210a, 210b have magnetic field pointing directions that are aligned with the net magnetic field of the free layer 210, shown to be coming out of the page when the GMR element 200 is not exposed to an external magnetic field, but which can rotate as the GMR element 200 is exposed to a magnetic field.
• the magnetic field pointing direction of the first plurality of magnetic domains rotates in response to the external magnetic field.
• the second plurality of magnetic domains tends to have magnetic field pointing directions that point in one or more other directions.
• each step is generated when one or more of the magnetic domains that are not within the first plurality of magnetic domains (e.g., that are within the second plurality of magnetic domains), i.e., one or more of the magnetic domains with magnetic fields not pointing in the direction of the net magnetic field in the ferromagnetic free layers 210a, 210b, suddenly snaps (i.e., jumps) in direction to become aligned with the net magnetic field pointing direction of the magnetic field in the ferromagnetic free layers 210a, 210b, wherever the net field in the
• ferromagnetic free layers 210a, 210b may be pointing (i.e., may have rotated) in response to an external magnetic field.
• one or more of the magnetic domains with magnetic fields not pointing in the direction of the net magnetic field in the ferromagnetic free layers 210a, 210b more slowly transitions in direction to become aligned with the net magnetic field pointing direction of the magnetic field in the ferromagnetic free layers 210a, 21 Ob, in which case one or more of the steps of FIG. 1 would be less steep than those shown, but still undesirable.
• an external biasing magnet can be used.
• a plurality of layers can be added to the basic GMR element 200 in order to achieve an intra-stack magnetic bias with a so-called "double pinned" arrangement.
• a conventional prior art double pinned GMR element 300 can include a nonmagnetic seed layer 302, an antiferromagnetic pinning layer 304 disposed over the seed layer 302, a pinned layer 306 disposed over the pinning layer 304, a spacer layer 308 disposed over the pinned layer 306, and a free layer 310 disposed over the spacer layer.
• the free layer 310 can be comprised of two ferromagnetic free layers 310a, 310b.
• the spacer layer 308 is a nonmagnetic layer.
• the double pinned GMR element 300 can further include a spacer layer 312 disposed over the free layer 310, a second pinned layer 314 disposed over the spacer layer 312, a second pinning layer 316 disposed over the second pinned layer 314, and a nonmagnetic cap layer 318 disposed over the second pinning layer 316.
• the spacer layer 312 is a nonmagnetic layer.
• Examples of thicknesses of the layers of the GMR element 300 are shown in nanometers. Examples of materials of the layers of the GMR element 300 are shown by atomic symbols.
• the prior art double pinned GMR element 300 achieves a magnetostatic field created by the second pinned layer 314.
• the second pinned layer 314 layer is coupled ferromagnetically to the bottom surface of a second anti erromagnetic pinning layer 316, and thus, the magnetic field in the second pinned layer 314 points in the same direction as the magnetic moments at the bottom surface of the antiferromagnetic pinning layer 316, here shown pointing into the page.
• the material used for the second antiferromagnetic pinning layer 316 is different from the one used for the first antiferromagnetic pinning layer 304. In this way the magnetization of the two layers 304, 316 can be manipulated independently by exploiting different blocking temperatures of the two materials (below 230°C for IrMn and well above 250°C for PtMn).
• the second pinned layer 314 has a magnetic field oriented, here shown to be pointing into the page, to be perpendicular to the magnetic field of the first pinned layer 306.
• the pointing direction of the magnetic field created by the second pinned layer 314 and experienced by the free layer 310 causes a reduction in the number of magnetic domains in the free layer 310 that point in directions other than the direction of the net magnetic field of the free layer 310, e.g., a reduction in the number of magnetic domains that point in directions other than out of the page.
• a thickness of the spacer layer 312 is chosen to provide a desired magnetic coupling strength between the second pinned layer 314 and the free layer 310.
• the thickness of the Ta of the spacer layer 312 is only a few Angstroms, and the coupling takes places also through pinholes in the spacer layer 312. It will be understood that a thickness of a deposition of only a few angstroms is difficult to control, and pinhole density is also difficult to control. Thus, the amount of magnetic coupling between the second pinned layer 314 and the free layer 310 is difficult to control.
• the spacer 308 is a metallic nonmagnetic layer (usually
• the spacer 308 is an insulating nonmagnetic layer (e.g., A1203 or MgO). Otherwise, the GMR element 300 can have layers the same as or similar to a comparable TMR element. Thus, a TMR element is not explicitly shown.
• an example of a double pinned GMR element 400 includes a plurality of layers disposed over a substrate. An upper surface of the substrate is shown as a dark line at the bottom of FIG. 4.
• each layer is identified by functional name.
• On the right side or FIG. 4 are shown magnetic characteristics of sub-layers that can form the functional layers.
• Examples of thicknesses of the layers of the GMR element 400 are shown in nanometers. Examples of materials of the layers of the GMR element 400 are shown by atomic symbols.
• magnetic materials can have a variety of magnetic characteristics and can be classified by a variety of terms, including, but not limited to, ferromagnetic, antiferromagnetic, and nonmagnetic. Brief descriptions of these types of magnetic materials are given above.
• the exemplary GMR element 400 can include some of the same layers described above for the prior art GMR element of FIG. 3. Like the prior art GMR element of FIG. 3, the exemplary GMR element 400 can include a seed layer 402 disposed over the substrate, an antiferromagnetic pinning layer 404 disposed over the seed layer 402, and a pinned layer 406 disposed over the antiferromagnetic pinning layer 404.
• the pinned layer 406 can be comprised of a first ferromagnetic pinned layer 406a, a second ferromagnetic pinned layer 406c, and a spacer layer 406b disposed therebetween.
• the spacer layer 406b is comprised of a
• the pinned layer 406 can instead be comprised of one pinned layer, the same as or similar to the pinned layer 306 of FIG. 3. Due to the presence of the spacer 406b between the first and second ferromagnetic pinned layers 406a, 406c, the second ferromagnetic pinned layer 406c tends to couple antifeiTomagnetically with the first feiTomagnetic pinned layer 406a, and thus, it has a magnetic field pointing in the other direction, here shown pointing to the right. As described above, the combination of the three layers 406a, 406b, 406c can be refen-ed to as a synthetic antiferromagnetic structure or layer.
• the exemplary GMR element 400 can also include a spacer layer 408 disposed over the second ferromagnetic pinned layer 406c, and a free layer 410 disposed over the spacer layer 408.
• the free layer 410 can be comprised of a first ferromagnetic free layer 410a disposed under a second ferromagnetic free layer 410b.
• the spacer layer 408 is comprised of a nonmagnetic material (e.g., conductive Cu for GMR or an insulating material for TMR).
• the GMR element 400 of FIG. 4 can further include a spacer layer 412 disposed over the second ferromagnetic free layer 410b, and a second pinned layer 414 disposed over the spacer layer 412.
• the second pinned layer 414 can be comprised of a ferromagnetic material.
• the spacer layer 412 is comprised of a nonmagnetic material (e.g.,
• the GMR element 400 of FIG. 4 can further include a second antiferromagnetic pinning layer 416 disposed over the second pinned layer 414.
• a cap layer 418 can be disposed at the top of the GMR element 400 to protect the GMR element 400.
• the seed layer 402 is comprised of Ru or Ta
• the first antiferromagnetic pinning layer 404 is comprised of PtMn.
• the first pinned layer 406 is comprised of the first ferromagnetic pinned layer 406a comprised of CoFe
• the spacer layer 406b comprised of Ru
• the second ferromagnetic pinned layer 406c comprised of CoFe.
• the spacer layer 408 is comprised of Cu (or alternatively, Au, or Ag).
• the first ferromagnetic free layer 410a is comprised of CoFe and the second ferromagnetic free layer 410b is comprised of NiFe.
• the spacer layer 412 is comprised of Ru (or alternatively, Au, or Ag)
• the second pinned layer 414 is comprised of CoFe
• the second antiferromagnetic pinning layer 416 is comprised of PtMn
• the cap layer 418 is comprised of Ta.
• other materials are also possible.
• the spacer layer 412 being comprised of Ru (or Au, or Ag) allows realizable ranges of thicknesses (described below) of the spacer layer 412 to allow for partial pinning of the free layer 420. Partial pinning is described more fully below.
• the first and second antiferromagnetic pinning layers 404 and 416 can be comprised of IrMn, FeMn, or any other type of antiferromagnetic material.
• the second pinned layer 414 can instead be comprised of a plurality of sublayers, the same as or similar to the sublayers of the first pinned layer 406.
• the spacer layer 408 can be comprised of Ta or Cu.
• a thickness of the spacer layer 412 is selected to provide a desired amount of (i.e., a partial) magnetic coupling between the second pinned layer 414 and the free layer 410. Also, the thickness of the spacer layer 412 is selected to provide a desired type of magnetic coupling between the second pinned layer 414 and the free layer 410, i.e., ferromagnetic coupling or antiferromagnetic coupling, or between ferromagnetic and antiferromagnetic coupling.
• the coupling is shown to be ferromagnetic coupling, but, by selection of the thickness of the spacer layer 412, the coupling can be
• the thickness of the spacer layer 412 is selected to be within a range of about 0.1 to about 2 nm, but preferably between 0.9 and 2 nm for robustness of the manufacturing process, i.e., thick enough that the spacer layer 412 can be deposited with repeatable and reliable thickness. In some embodiments, a thickness of the spacer layer 412 is greater than 0.5nm, i.e., greater than a thickness of the spacer layer 312 of the prior art double pinned GMR element 300 of FIG. 3.
• Ru is well suited for the spacer layer 412 because it allows anti ferromagnetic or magnetic coupling (also called Ruderman Kittel Kasuya Yoshida or RKKY coupling) between surrounding layers, according to the Ru thickness. In essence, the Ru material permits coupling through it, as opposed to in spite of it. This allows for a thicker Ru layer 412, with a range of achievable thickness values, to achieve and to tune the desired partial pinning of the free layer 410. Partial pinning is more fully described above and below.
• the Ta spacer layer 312 of FIG. 3 is only used as a nonmagnetic spacer layer and does not provide RKKY coupling. In essence, the
• Ta spacer layer 312 only decouples the free layer 310 from the pinned layer 314.
• the Ru spacer layer 412 of FIG. 4 provides RKKY coupling between the free layer 410 and the pinned layer 414.
• the thickness of the Ru spacer layer 412 is selected to provide an RKKY coupling of between about -50mT and about 50T.
• the RKKY coupling tends to be stable with respect to possible process drift, i.e., the amount of coupling tends to remain constant and stable even for a thickness change of about ten percent in the Ru layer due to manufacturing process variations or the like.
• the second pinned layer 414 having a pinned magnetic field pointing direction aligned with a pointing direction of the magnetic field in the free layer 410, tends to cause particular behavior within the free layer 410.
• the pointing direction of the magnetic field in the second pinned layer 414 causes a reduction in the number of magnetic domains in the free layer 410 that point at directions other than the direction of the net magnetic field of the free layer, i.e., a reduction in the number of magnetic domains that point in directions other than out of the page when in the presence of no external magnetic field.
• the ferromagnetic free layers 410a, 410b tend to naturally have a plurality of magnetic domains, including, but not limited to, a first plurality of magnetic domains with magnetic fields pointing in a first direction and a second plurality of magnetic domains with magnetic fields pointing in one or more directions different than the first direction.
• the first direction described above can be parallel to upper and lower surfaces of the free layer 410.
• the first plurality of magnetic domains have magnetic field pointing directions that are aligned with the net magnetic field of the free layer 410 shown to be coming out of the page when the GMR element 400 is not exposed to an external magnetic field, but which can rotate as the GMR element 400 is exposed to a magnetic field.
• the magnetic field pointing direction of the first plurality of magnetic domains in the free layer 410 rotates in response to an external magnetic field.
• the second plurality of magnetic domains will tend to have magnetic field pointing directions that point in the one or more directions different than the first direction.
• each step is generated when one or more of the magnetic domains that are not within the first plurality of magnetic domains (e.g., that are within the second plurality of magnetic domains), i.e., one or more of the magnetic domains with magnetic fields not pointing in the direction of the net magnetic field in the free layer 410, suddenly snaps (or more slowly rotates) in direction to become aligned with the magnetic field pointing direction of the net magnetic field in the free layer 410, wherever the net magnetic field in the free layer 410 may be pointing (i.e., may have rotated) in response to an external magnetic field.
• the second pinned layer 414 is operable to partially magnetically couple, through the spacer layer 412, to the free layer 410, to reduce a number of magnetic domains (i.e., to reduce a quantity of magnetic domains in the second plurality of magnetic domains) in the free layer 410 that point in a direction other than the first direction, i.e., other than the direction of the net magnetic field in the free layer 410 in the absence of an external magnetic field.
• This reduction results in fewer steps 104, smaller steps 104, or no steps 104.
• the reduction can include a reduction in a quantity of magnetic domains within the above second plurality of magnetic domains.
• partial pinning it is meant that there is less magnetic coupling between the second pinned layer 414 and the free layer 410 than between the first pinned layer 406 and the free layer 410.
• An amount of partial pinning is determined in part by a material and a thickness of the spacer layer 412.
• the PtMn first and second antiferromagnetic pinning layer 404, 416 can have a Neel temperature and a blocking temperature that are both above about three hundred degrees Celsius. This high temperature is important to eliminate loss of magnetic characteristics of the GMR element 400 in high temperature applications, for example, automobile applications.
• the layers of the GMR element are shown in a particular order, it should be understood that, in other embodiments, the layers 404, 406 (i.e., 406a, 406b, 406c), and 408 can be exchanged with the layers 416, 414, 412, respectively. In some embodiments, all of the layers shown in FIG. 4 can be reversed in order from bottom to top.
• the coupling strength and hence the anisotropy amplitude is controlled by the nonmagnetic spacer layer 412 between the free layer 410 and the second pinned layer 414. In the prior art arrangement of FIG. 3, a very thin Ta spacer 312 is used.
• FIG. 4 uses a different nonmagnetic spacer layer 412, allowing a strong RKKY coupling between the second pinned layer 414 and the free layer 410.
• Ru, Ag, or Au can be used for the spacer layer 412.
• RKKY coupling decreases and switches between a maximum anti ferromagnetic coupling and a maximum ferromagnetic coupling as the distance between the pinned layer 414 and the free layer 410 increases (i.e., as the thickness of the nonmagnetic spacer layer 412 is increased) .
• a minima of couplings appears between these maxima and occurs at ranges of thicknesses where the coupling can be tuned by way of selection of the thickness.
• a material of the spacer layer 412 can be chosen around the second minimum of coupling (e.g., 1.6nm for Ru), which allows a much more reproducible deposition process than currently used for the thin Ta spacer 312 of FIG. 2, which just decreases RKKY coupling rapidly with thickness.
• the spacer layer 408 is a metallic nonmagnetic layer (usually Copper).
• the spacer layer 408 is an insulating nonmagnetic layer (e.g., A1203 or MgO). Otherwise, the GMR element 400 can have layers the same as or similar to a comparable TMR element. Thus, a TMR element is not explicitly shown.
• the magnetoresistance element 400 of FIG. 4 can be formed in the shape of a yoke 500.
• a section line A-A shows the perspective of FIG. 4.
• the yoke 500 has a main part 501 , two arms 506, 508 coupled to the main part 501, and two lateral amis 512, 514 coupled to the two arms 506, 508, respectively.
• the main part 501 , the two am s 506, 508, and the two lateral arms 512, 514 each have a width (w).
• the widths can be different.
• a length (L) of the yoke 500 and a length (d) of the lateral arms 512, 514 of the yoke 500 are each at least three times the width (w) of the yoke 500, and the width (w) of the yoke 500 can be between about one ⁇ and about twenty ⁇ .
• the yoke dimensions can be, for example, within the following ranges:
• the length (L) of the main part 501 of the yoke 500 can be between about ten ⁇ and ten millimeters;
• the length (1) of the arms 506, 508 of the yoke 500 can be at least three times the width (w);
• the width (w) of the yoke 500 can be between about one ⁇ and about twenty ⁇ .
• the arms 506, 508 of the yoke 500 are linked to the lateral anus 512, 514, which are parallel to the main part 501, and have a length 1 which is between about 1/4 and 1/3 of the overall length (L).
• sensitivity of the magnetoresistance element 400 having the yoke shape 500 decreases with the width (w), and the low frequency noise of the magnetoresistance element 400 increases with the width (w).
• the yoke shape offers better magnetic homogeneity in a longitudinally central area of the main part 501. This is due to the demagnetizing field of the yoke length which is mainly along the main part 501, and this induces an anisotropy of the free layer 410 of FIG. 4, which can be seen as a magnetization at zero field along the length of the yoke 500.
• the pinned layer e.g., 406 of FIG. 4
• the free layer 410 magnetization rotates uniformly, i.e. without domain jumps.
• the homogeneous rotation of the magnetization of the free layer 410 results in a response curve without steps in the response (see, e.g., FIG. 1 )
• the overall stack can be designed in a yoke shape, but for a TMR element, in some embodiments, only the free layer can have a yoke shape.
• the GMR or TMR elements 400 is not formed in the shape of a yoke, but is instead formed in the shape of a straight bar, e.g., having the dimensions L and w, and not having features associated with the dimensions 1 and d.
• the section line A-A is representative of the cross sections of the GMR elements 400 of FIG. 4.
• a magnetic field sensor 600 can include one or more magnetoresistance elements.
• magnetoresistance elements which can be of a type described above in conjunction with FIG. 4, are arranged over a common substrate.
• the four magnetoresistance elements can be arranged in a bridge.
• Other electronic components (not shown), for example, amplifiers and processors, can also be integrated upon the common substrate.
• the magnetic field sensor 600 can be disposed proximate to a moving magnetic object, for example, a ring magnet 602 having alternating north and south magnetic poles.
• the ring magnet 602 is subject to rotation.
• the magnetic field sensor 600 can be configured to generate an output signal indicative of at least a speed of rotation of the ring magnet.
• the ring magnet 602 is coupled to a target object, for example, a cam shaft in an engine, and the sensed speed of rotation of the ring magnet 602 is indicative of a speed of rotation of the target object.
• FIG. 7 shows a flowchart corresponding to the below contemplated technique that would be implemented with semiconductor manufacturing equipment. Rectangular elements (typified by element 704 in FIG. 7), herein denoted “processing blocks,” represent process steps.
• an exemplary process 700 for manufacturing a double pinned GMR element as in FIG. 4 above begins at block 702, where the full stack 400 of FIG. 4 is deposited in sequential deposition steps. This deposition can be followed at block 704 by a patterning process. The patterning can result, for example, in the yoke shape of FIG. 5.
• a first annealing is applied at block 706 to the processed wafer, where the direction of the magnetic field in the first pinned layer (e.g., 406 of FIG. 4), and also directions in the first anti ferromagnetic layer (e.g., 404 of FIG. 4) are defined.
• the annealing is perfonned at a temperature Tl with a magnetic field HI applied parallel to the wafer and, for instance, parallel to the arrow 502 of FIG. 5.
• This annealing can have, for example, a one hour duration under a magnetic field of IT at 295°C, but these values are adapted to the stack composition, i.e., layer materials.
• a second annealing is performed to define the magnetization of the second pinned layer (e.g., 414 of FIG. 4) and of the second antiferromagnetic layer (e.g., 416 of FIG. 4), which provides a magnetic field in the second pinned layer and also in the second antiferromagnetic layer that are oriented perpendicular to the direction of the magnetic field in the first pinned layer (e.g., 406 of FIG. 4) and the directions in the first antiferromagnetic layer (e.g., 404 of FIG. 4).
• This annealing step can have, for example, a one hour duration, at a temperature T2, which can be equal to Tl , and with a magnetic field H2 that is lower than the magnetic field HI .
• the magnetic field H2 can be applied in a direction parallel to the arrow 504 of FIG. 5.
• This step is meant to orientate the magnetization of the second pinned layer (e.g., 414 of FIG. 4) without changing the magnetization direction and value of the first pinned layer (e.g., 406 of FIG. 4).
• ranges of values are as follows:
• FIGS. 8 and 9 in which like elements of FIG. 7 are shown having like reference designations, similar processes 800, 900 can be also applied according to the steps of FIG. 7 but in different orders as shown.
• the magnetic field H2 applied during the second annealing is smaller than HI and applied in another direction, preferably perpendicularly to HI .

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