WO2012133166A1 - 磁気記録膜用スパッタリングターゲット - Google Patents
磁気記録膜用スパッタリングターゲット Download PDFInfo
- Publication number
- WO2012133166A1 WO2012133166A1 PCT/JP2012/057482 JP2012057482W WO2012133166A1 WO 2012133166 A1 WO2012133166 A1 WO 2012133166A1 JP 2012057482 W JP2012057482 W JP 2012057482W WO 2012133166 A1 WO2012133166 A1 WO 2012133166A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sputtering
- powder
- target
- holding
- carbon
- Prior art date
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/0466—Alloys based on noble metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/02—Making non-ferrous alloys by melting
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/10—Alloys containing non-metals
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C30/00—Alloys containing less than 50% by weight of each constituent
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C33/00—Making ferrous alloys
- C22C33/02—Making ferrous alloys by powder metallurgy
- C22C33/0207—Using a mixture of prealloyed powders or a master alloy
- C22C33/0228—Using a mixture of prealloyed powders or a master alloy comprising other non-metallic compounds or more than 5% of graphite
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C33/00—Making ferrous alloys
- C22C33/02—Making ferrous alloys by powder metallurgy
- C22C33/0257—Making ferrous alloys by powder metallurgy characterised by the range of the alloying elements
- C22C33/0278—Making ferrous alloys by powder metallurgy characterised by the range of the alloying elements with at least one alloying element having a minimum content above 5%
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/002—Ferrous alloys, e.g. steel alloys containing In, Mg, or other elements not provided for in one single group C22C38/001 - C22C38/60
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C5/00—Alloys based on noble metals
- C22C5/04—Alloys based on a platinum group metal
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/14—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of noble metals or alloys based thereon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
Definitions
- the present invention relates to a sputtering target used for manufacturing a heat-assisted magnetic recording medium, and more particularly to an Fe—Pt sputtering target in which C particles are dispersed.
- materials based on Co, Fe, or Ni which are ferromagnetic metals, are used as materials for magnetic thin films in magnetic recording media.
- a Co—Cr-based or Co—Cr—Pt-based ferromagnetic alloy containing Co as a main component has been used for a magnetic thin film of a hard disk employing an in-plane magnetic recording method.
- hard magnetic thin films employing perpendicular magnetic recording that have been put into practical use in recent years often use a composite material composed of Co—Cr—Pt-based ferromagnetic alloy mainly composed of Co and non-magnetic inorganic particles. It has been.
- the above-mentioned magnetic thin film is often produced by sputtering a sputtering target containing the above material as a component with a DC magnetron sputtering apparatus because of its high productivity.
- FePt phase having an L1 0 structure is attracting attention as a material for an ultra-high density recording medium.
- FePt phase having an L1 0 structure with a high magnetocrystalline anisotropy, corrosion resistance and excellent oxidation resistance is what is expected as a material suitable for the application as a magnetic recording medium.
- a granular structure magnetic thin film of FePt magnetic particles are isolated by a non-magnetic material such oxides or carbon having an L1 0 structure, as for a magnetic recording medium of the next generation hard disk employing a thermally assisted magnetic recording method Proposed.
- This granular structure magnetic thin film has a structure in which magnetic particles are magnetically insulated by interposition of a nonmagnetic substance.
- Patent Document 1, Patent Document 2, Patent Document 3, Patent Document 4, and Patent Document 5 can be cited as magnetic recording media having a magnetic thin film having a granular structure and related documents.
- the granular structure magnetic thin film having a Fe-Pt phase with the L1 0 structure, a magnetic thin film containing 10-50% of C as a nonmagnetic material as a volume ratio, have attracted attention particularly because of their high magnetic properties . It is known that such a granular structure magnetic thin film is produced by simultaneously sputtering an Fe target, a Pt target, and a C target, or by simultaneously sputtering an Fe—Pt alloy target and a C target. However, in order to simultaneously sputter these sputtering targets, an expensive simultaneous sputtering apparatus is required.
- the magnetic recording layer is composed of a magnetic phase such as Fe—Pt and a nonmagnetic phase separating the magnetic phase, and it is known that carbon is effective as one of the nonmagnetic phases.
- carbon is a material that is difficult to sinter, and has a problem that an aggregate is easily formed between carbons. Accordingly, there is a problem that carbon lump is easily detached during sputtering, and many particles are generated on the film after sputtering. As described above, attempts have been made to improve the magnetic recording layer by introducing carbon, but the present situation has not yet solved the problem during sputtering of the target.
- Patent Document 7 the intensity I G of the band G (graphite) having a peak at approximately 1550 ⁇ 1650 cm -1 for surface enhanced Raman spectrum, the band D having a peak at approximately 1350 ⁇ 1450 cm -1 of the (disorder)
- a carbon film evaluation method having a step of evaluating the film quality of the carbon film based on the ratio I D / I G to the strength ID, and confirming that I D / I G is in the range of 0.1 to 0.5
- a carbon film evaluation method and a magnetic recording medium manufacturing method are described.
- Patent Documents 6 and 7 are merely evaluations of carbon films, and a considerable amount of carbon is included in the magnetic metal that is the main constituent material of a sputtering target for forming a magnetic recording film. If present, how the target will be affected, how it will behave during the manufacturing process of the target, and how it will be deposited when sputtered using such a target. It is not directly related to whether or not it will have a significant impact, and it cannot be said that these technologies have been fully elucidated.
- Patent Document 8 and Patent Document 9 although the magnetic recording medium is evaluated by Raman spectrum of SiC or carbon-based thin film, carbon is the main constituent material of the sputtering target for forming the magnetic recording film. How it affects the target when it is present in a significant amount in a magnetic metal, how it behaves during the manufacturing process of the target, and using such a target It is not directly related to how the film formation is affected by sputtering, and it cannot be said that these techniques have been sufficiently elucidated.
- An object of the present invention is to enable the production of a granular structure magnetic thin film without using an expensive simultaneous sputtering apparatus, and to provide a sputtering target for a magnetic recording film in which C particles are dispersed, particularly an Fe—Pt sputtering target.
- C particles are dispersed, particularly an Fe—Pt sputtering target.
- carbon has a problem that it is easy to form aggregates between carbons. There is a problem that a large number of particles are generated.
- An object is to provide a high-density sputtering target that can solve these problems.
- the present inventors have conducted intensive research.
- a dense sputtering target can be produced, and particle generation can be greatly reduced. That is, it was found that the yield during film formation can be improved.
- a sputtering target for a magnetic recording film containing C wherein the peak intensity ratio (I G / ID ) of G band and D band in Raman scattering spectroscopic measurement is 5.0 or less.
- Sputtering target for recording film 2)
- the sputtering target for a magnetic recording film of the present invention makes it possible to produce a granular structure magnetic thin film without using an expensive simultaneous sputtering apparatus.
- a sputtering target can be provided, and carbon is a material that is difficult to sinter and solves the problem of easy formation of aggregates between carbons. It has an excellent effect that the problem that a large number of particles are generated on the film can be solved.
- FIG. 6 is a diagram showing the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C in Comparative Example 1.
- FIG. 5 is a diagram showing the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C in Example 1.
- FIG. 6 is a diagram showing the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C in Example 2.
- FIG. 6 is a diagram showing the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C in Example 3.
- FIG. 6 is a diagram showing the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C in Example 4.
- the sputtering target for magnetic recording film of the present invention is a sputtering target for magnetic recording film containing C, and the peak intensity ratio (I G / I D ) of G band and D band in Raman scattering spectroscopic measurement is 5 0.0 or less.
- the present invention is particularly effective for a sputtering target for a magnetic recording film composed of a metal having a composition in which Pt is 5 mol% or more and 60 mol% or less and the balance is Fe and C. The content of these components is a condition for obtaining good magnetic properties.
- the C content is preferably 5 mol% or more and 70 mol% or less.
- the amount of C if the content in the target composition is less than 5 mol%, good magnetic properties may not be obtained. If it exceeds 70 mol%, C particles agglomerate and many particles are generated. This is because there is a case.
- the content ratio of C is more preferably 20 mol% or more and 70 mol% or less.
- it can be set as the sputtering target for magnetic recording films whose relative density is 90% or more. It is one of the requirements of the present invention that the relative density is 90% or more.
- the relative density is high, there are few problems due to degassing from the sputtering target at the time of sputtering, and the adhesion between the alloy and the C particles is improved, so that the generation of particles can be effectively suppressed. More preferably, it is 95% or more.
- the relative density is a value obtained by dividing the actually measured density of the target by the calculated density (also called the theoretical density).
- the calculated density is a density when it is assumed that the constituent elements of the target are mixed without diffusing or reacting with each other, and is calculated by the following equation.
- Calculated density Sigma ⁇ (atomic weight of constituent element x atomic ratio of constituent element) / ⁇ (atomic weight of constituent element x atomic ratio of constituent element / document value density of constituent element)
- ⁇ means taking the sum of all the constituent elements of the target.
- the sputtering target for a magnetic recording film can further contain 0.5 mol% or more and 20 mol% or less of one or more elements selected from B, Ru, Ag, Au, and Cu as additive elements. Although these additions are arbitrary, they can be added depending on the material in order to improve the magnetic properties.
- the sputtering target for a magnetic recording film further contains, as an additive, at least one oxide selected from SiO 2 , Cr 2 O 3 , CoO, Ta 2 O 5 , B 2 O 3 , MgO, and Co 3 O 4 . 5 mol% or more and 20 mol% or less can be contained. These additions are optional, but can be added depending on the material in order to improve the magnetic properties.
- the G band is a vibration mode derived from the six-membered ring structure of graphite. A peak appears in the vicinity of 1570 cm ⁇ 1 , and the peak intensity increases as the crystal structure becomes more complete.
- the D band is a vibration mode derived from the defect structure of graphite. A peak appears near 1350 cm ⁇ 1 , and the peak intensity increases as the defect increases.
- FIG. 1 shows representative examples of the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C.
- Renishaw in Via Raman Microscope (manufactured by Renishaw) was used.
- the excitation light was Compass TM 315M Diode-Pumped Laser (manufactured by COHERENT), the excitation wavelength was 532 nm, the output of the excitation light source was 5 mW, and the diffraction grating was 1800 L / mm.
- the measurement range of Raman shift was 1033 to 1842 cm ⁇ 1 .
- FIG. 1 is also the result of Example 2.
- D ′ band near 1620 cm ⁇ 1 also appears.
- the D ′ band is a vibration mode derived from a defect structure of graphite, and this is not directly related to the present invention. Keep on.
- the present invention uses a laser excitation wavelength of 532 nm.
- the excitation light source other than this, an Ar laser, He—Ne A gas laser such as a laser or a Kr laser can be used. These lasers are appropriately selected according to the required excitation wavelength.
- the present invention can be applied.
- the crystallinity of the carbon material can be evaluated by calculating the peak intensity ratio between the G band and the D band (referred to as the I G / ID ratio). That is, the higher the crystallinity, the higher the I G / ID ratio.
- the crystallinity is lowered, that is, the crystallinity of the carbon material is intentionally destroyed to improve the sputtering characteristics, and the particles during sputtering are reduced.
- the peak intensity ratio (I G / I D ) between the G band and the D band in the spectroscopic measurement is 5.0 or less.
- the lower limit value of the peak intensity ratio (I G / I D ) between the G band and the D band is not particularly limited, but is often 1 or more in many cases. If the peak intensity ratio (I G / I D ) is 5.0 or less, the generation of particles can be effectively suppressed.
- the sputtering target of the present invention is produced by a powder sintering method.
- each raw material powder for example, Fe powder, Pt powder, C powder as a typical example
- C powder carbon black having an average primary particle diameter of 30 to 50 nm, graphite having an average particle diameter of 1 to 100 ⁇ m, and glassy carbon having an average particle diameter of 0.4 to 100 ⁇ m can be used.
- alloy powders Fe—Pt powder, Fe—Cu powder, Pt—Cu powder, Fe—Pt—Cu powder
- various materials described in paragraphs 0024 and 0025 can be added to these alloy powders as needed in order to improve magnetic properties.
- the alloy powder containing Pt is particularly effective for reducing the amount of oxygen in the raw material powder.
- the above-mentioned powder is weighed so as to have a desired composition, and mixed by using a technique such as a ball mill also for grinding. What is important is this mixing and pulverization, and intentionally destroying the crystallinity of the carbon material by simultaneously mixing the carbon material and the matrix material using a ball mill. At this time, the crystallinity of the carbon material is controlled by mixing time and selection of the carbon material.
- the mixed powder thus obtained is molded and sintered with a hot press.
- a plasma discharge sintering method or a hot isostatic pressing method can also be used.
- the holding temperature at the time of sintering depends on the composition of the sputtering target, but in most cases, it is in the temperature range of 1200 to 1500 ° C. 25 MPa to 35 MPa. Even under this sintering condition, it is necessary to suppress aggregation of C particles.
- Hot isostatic pressing is performed on the sintered body taken out from the hot press.
- Hot isostatic pressing is effective in improving the density of the sintered body.
- the holding temperature during hot isostatic pressing depends on the composition of the sintered body, but in many cases is in the temperature range of 1000 to 1500 ° C. Further, the pressure is set to 100 Mpa or more.
- the peak intensity ratio (I G / I D ) of G band and D band in Raman scattering spectroscopic measurement in which C particles are uniformly finely dispersed in the alloy and high density C particles are dispersed is 5.0 or less.
- a sputtering target for a magnetic recording film can be produced.
- the sputtering target of the present invention produced as described above is useful as a sputtering target used for forming a granular structure magnetic thin film.
- Comparative Example 1 Fe powder having an average particle diameter of 3 ⁇ m, Pt powder having an average particle diameter of 3 ⁇ m, and carbon black having an average primary particle diameter of 48 nm were prepared as raw material powders.
- the composition of Comparative Example 1 was 30Fe-30Pt-40C (mol%), and weighed so that the total weight was 2600 g. Commercially available carbon black was used as C powder.
- the weighed powder was put in a mortar and mixed and pulverized for 4 hours.
- the mixed powder taken out from the mortar was filled into a carbon mold and hot pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1400 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber. Next, this was hot isostatically pressed at 1100 ° C. and 150 MPa.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 93.6%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- FIG. 2 shows the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C of Comparative Example 1.
- Table 1 shows the result of determining the I G / ID ratio from FIG. Table 1 shows the ratios I D , I G , and I G / ID . The same applies to the following embodiments. As is apparent from Table 1, the I G / ID ratio was 5.12, exceeding 5.0 of the present invention.
- a magnetron sputtering apparatus C-3010 sputtering system manufactured by Canon Anelva
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number at this time was 19,600.
- Comparative Example 2 Fe powder having an average particle diameter of 3 ⁇ m, Pt powder having an average particle diameter of 3 ⁇ m, and graphite having an average particle diameter of 1 ⁇ m were prepared as raw material powders.
- the composition of Comparative Example 2 was 30Fe-30Pt-40C (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was put in a mortar and mixed and pulverized for 4 hours.
- the mixed powder taken out from the mortar was filled into a carbon mold and hot pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1400 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber. Next, this was hot isostatically pressed at 1100 ° C. and 150 MPa.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 94.2%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- Table 1 shows the results of obtaining the I G / ID ratio from the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C in Comparative Example 2. As is apparent from Table 1, the I G / ID ratio was 5.83, which exceeded 5.0 of the present invention.
- a magnetron sputtering apparatus C-3010 sputtering system manufactured by Canon Anelva
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number at this time was 21,600.
- Comparative Example 3 Fe powder having an average particle diameter of 3 ⁇ m, Pt powder having an average particle diameter of 3 ⁇ m, and graphite having an average particle diameter of 20 ⁇ m were prepared as raw material powders.
- the composition of Comparative Example 2 was 30Fe-30Pt-40C (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was put in a mortar and mixed and pulverized for 4 hours.
- the mixed powder taken out from the mortar was filled into a carbon mold and hot pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1400 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber. Next, this was hot isostatically pressed at 1100 ° C. and 150 MPa.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 93.8%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- Table 1 shows the results of obtaining the I G / ID ratio from the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C in Comparative Example 2. As is apparent from Table 1, the I G / ID ratio was 6.48, which exceeded 5.0 of the present invention.
- a magnetron sputtering apparatus C-3010 sputtering system manufactured by Canon Anelva
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number at this time was 28600.
- Example 1 Fe powder having an average particle diameter of 3 ⁇ m, Pt powder having an average particle diameter of 3 ⁇ m, and graphite having an average particle diameter of 1 ⁇ m were prepared as raw material powders.
- the composition of Example 1 was 30Fe-30Pt-40C (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1400 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a temperature increase rate of 300 ° C./hour, a holding temperature of 1100 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of the temperature increase to 1100 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 96.6%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C in Example 1 are shown in FIG. Table 1 shows the result of determining the I G / ID ratio from FIG. As is apparent from Table 1, the I G / ID ratio was 4.96, which satisfied the condition that the I G / ID ratio of the present invention was 5.0 or less.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 490. Compared to the comparative example, it was greatly reduced.
- Example 2 Fe powder having an average particle diameter of 3 ⁇ m, Pt powder having an average particle diameter of 3 ⁇ m, and carbon black having an average primary particle diameter of 48 nm were prepared as raw material powders.
- the composition of Example 2 was 30Fe-30Pt-40C (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1400 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a temperature increase rate of 300 ° C./hour, a holding temperature of 1100 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of the temperature increase to 1100 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 96.9%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- FIG. 4 shows the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C of Example 2.
- Table 1 shows the result of obtaining I G / ID from FIG. As is apparent from Table 1, the I G / ID ratio was 4.17, which satisfied the condition that the I G / ID ratio of the present invention was 5.0 or less.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 350. Compared to the comparative example, it was greatly reduced.
- Example 3 Fe powder having an average particle size of 3 ⁇ m, Pt powder having an average particle size of 3 ⁇ m, and glassy carbon having an average particle size of 80 ⁇ m were prepared as raw material powders.
- the composition of Example 3 was 30Fe-30Pt-40C (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1400 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a temperature increase rate of 300 ° C./hour, a holding temperature of 1100 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of the temperature increase to 1100 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 96.8%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- FIG. 5 shows the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C of Example 3.
- Table 1 shows the results of determining the I G / ID ratio from FIG. As is apparent from Table 1, the I G / ID ratio was 3.48, which satisfied the condition that the I G / ID ratio of the present invention was 5.0 or less.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 330. Compared to the comparative example, it was greatly reduced.
- Example 4 Fe powder having an average particle diameter of 3 ⁇ m, Pt powder having an average particle diameter of 3 ⁇ m, and graphite having an average particle diameter of 20 ⁇ m were prepared as raw material powders.
- the composition of Example 4 was 30Fe-30Pt-40C (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1400 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a temperature increase rate of 300 ° C./hour, a holding temperature of 1100 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of the temperature increase to 1100 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 97.1%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- FIG. 6 shows the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C of Example 4.
- Table 1 shows the result of obtaining the I G / ID ratio from FIG. As is apparent from Table 1, the I G / ID ratio was 3.04, which satisfied the condition that the I G / ID ratio of the present invention was 5.0 or less.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 250. Compared to the comparative example, it was greatly reduced.
- the peak intensity ratio (I G / ID ) of G band and D band in Raman scattering spectroscopic measurement is 5.0 or less, and the number of particles further decreases as the intensity ratio decreases. Had a tendency to. From the above, it is possible to improve the sputtering characteristics of the carbon material by intentionally destroying the crystallinity of carbon and to have a great effect of reducing particles during sputtering.
- Example 5 Fe powder having an average particle diameter of 3 ⁇ m, Pt powder having an average particle diameter of 3 ⁇ m, and carbon black having an average primary particle diameter of 48 nm were prepared as raw material powders.
- the composition of Example 5 was 30Fe-60Pt-10C (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1400 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a temperature increase rate of 300 ° C./hour, a holding temperature of 1100 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of the temperature increase to 1100 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 98.2%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- Table 1 shows the results of obtaining the I G / ID ratio from the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C of Example 5. As is apparent from Table 1, the I G / ID ratio was 3.89, which satisfied the condition that the I G / ID ratio of the present invention was 5.0 or less.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 80. Compared to the comparative example, it was greatly reduced.
- Example 6 Fe powder having an average particle diameter of 3 ⁇ m, Pt powder having an average particle diameter of 3 ⁇ m, and carbon black having an average primary particle diameter of 48 nm were prepared as raw material powders.
- the composition of Example 6 was 20Fe-60Pt-20C (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1400 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a temperature increase rate of 300 ° C./hour, a holding temperature of 1100 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of the temperature increase to 1100 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 97.7%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- Table 1 shows the results of obtaining the I G / ID ratio from the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C in Example 6. As is apparent from Table 1, the I G / ID ratio was 3.86, which satisfied the condition that the I G / ID ratio of the present invention was 5.0 or less.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 165. Compared to the comparative example, it was greatly reduced.
- Example 7 Fe powder having an average particle diameter of 3 ⁇ m, Pt powder having an average particle diameter of 3 ⁇ m, and carbon black having an average primary particle diameter of 48 nm were prepared as raw material powders.
- the composition of Example 7 was 35Fe-60Pt-5C (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1400 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a temperature increase rate of 300 ° C./hour, a holding temperature of 1100 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of the temperature increase to 1100 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 99.2%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- Table 1 shows the results of obtaining the I G / ID ratio from the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C in Example 6. As is apparent from Table 1, the I G / ID ratio was 2.77, which satisfied the condition that the I G / ID ratio of the present invention was 5.0 or less.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 35. Compared to the comparative example, it was greatly reduced.
- Example 8 Fe powder having an average particle diameter of 3 ⁇ m, Pt powder having an average particle diameter of 3 ⁇ m, B powder having an average particle diameter of 10 ⁇ m, and carbon black having an average primary particle diameter of 48 nm were prepared as raw material powders.
- the composition of Example 8 was 34Fe-34Pt-2B-30C (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1400 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a temperature increase rate of 300 ° C./hour, a holding temperature of 1100 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of the temperature increase to 1100 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 97.3%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- Table 1 shows the results of determining the I G / ID ratio from the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—BC of Example 8. As is apparent from Table 1, the I G / ID ratio was 3.16, which satisfied the condition that the I G / ID ratio of the present invention was 5.0 or less.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 280. Compared to the comparative example, it was greatly reduced.
- Example 9 Fe powder having an average particle diameter of 3 ⁇ m, Pt powder having an average particle diameter of 3 ⁇ m, Ru powder having an average particle diameter of 3 ⁇ m, and carbon black having an average primary particle diameter of 48 nm were prepared as raw material powders.
- the composition of Example 9 was 35Fe-35Pt-5Ru-25C (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1400 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a temperature increase rate of 300 ° C./hour, a holding temperature of 1100 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of the temperature increase to 1100 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 98.0%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- Table 1 shows the results of obtaining the I G / ID ratio from the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—Ru—C of Example 9. As is clear from Table 1, the I G / ID ratio was 4.04, which satisfied the condition that the I G / ID ratio of the present invention was 5.0 or less.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 200. Compared to the comparative example, it was greatly reduced.
- Example 10 Fe powder having an average particle diameter of 3 ⁇ m, Pt powder having an average particle diameter of 3 ⁇ m, Ag powder having an average particle diameter of 3 ⁇ m, and carbon black having an average primary particle diameter of 48 nm were prepared as raw material powders.
- the composition of Example 10 was 25Fe-35Pt-10Ag-30C (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 950 ° C., and a holding time of 2 hours, and pressure was applied at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a heating rate of 300 ° C./hour, a holding temperature of 950 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of heating to 950 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 96.1%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- Table 1 shows the results of obtaining the I G / ID ratio from the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—Ag—C of Example 10. As is apparent from Table 1, the I G / ID ratio was 1.10, and the condition that the I G / ID ratio of the present invention was 5.0 or less was satisfied.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 305. Compared to the comparative example, it was greatly reduced.
- Example 11 Fe powder having an average particle diameter of 3 ⁇ m, Pt powder having an average particle diameter of 3 ⁇ m, Au powder having an average particle diameter of 5 ⁇ m, and carbon black having an average primary particle diameter of 48 nm were prepared as raw material powders.
- the composition of Example 11 was 34Fe-34Pt-2Au-30C (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1400 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a temperature increase rate of 300 ° C./hour, a holding temperature of 1100 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of the temperature increase to 1100 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 97.2%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- a Lorentz function was used for curve fitting of measurement results.
- Table 1 shows the results of obtaining the I G / ID ratio from the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—Au—C of Example 11. As is apparent from Table 1, the I G / ID ratio was 3.62, and the condition that the I G / ID ratio of the present invention was 5.0 or less was satisfied.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 270. Compared to the comparative example, it was greatly reduced.
- Example 12 Fe powder having an average particle diameter of 3 ⁇ m, Pt powder having an average particle diameter of 3 ⁇ m, Cu powder having an average particle diameter of 5 ⁇ m, and carbon black having an average primary particle diameter of 48 nm were prepared as raw material powders.
- the composition of Example 12 was 30Fe-30Pt-10Cu-30C (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1400 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a temperature increase rate of 300 ° C./hour, a holding temperature of 1100 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of the temperature increase to 1100 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by Archimedes method, and the relative density was calculated to be 97.9%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- Table 1 shows the results of obtaining the I G / ID ratio from the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—Cu—C of Example 12. As is apparent from Table 1, the I G / ID ratio was 3.67, which satisfied the condition that the I G / ID ratio of the present invention was 5.0 or less.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 300. Compared to the comparative example, it was greatly reduced.
- Example 13 Fe powder having an average particle diameter of 3 ⁇ m, Pt powder having an average particle diameter of 3 ⁇ m, Ru powder having an average particle diameter of 3 ⁇ m, and carbon black having an average primary particle diameter of 48 nm were prepared as raw material powders.
- the composition of Example 13 was 50Fe-25Pt-20Ru-5C (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1400 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a temperature increase rate of 300 ° C./hour, a holding temperature of 1100 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of the temperature increase to 1100 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 99.3%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- Table 1 shows the results of obtaining the I G / ID ratio from the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—Ru—C of Example 13. As is apparent from Table 1, the I G / ID ratio was 3.19, which satisfied the condition that the I G / ID ratio of the present invention was 5.0 or less.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 25. Compared to the comparative example, it was greatly reduced.
- Example 14 Fe powder with an average particle size of 3 ⁇ m, Pt powder with an average particle size of 3 ⁇ m, carbon black with an average primary particle size of 48 nm as a raw material powder, TiO 2 powder with an average particle size of 1 ⁇ m, SiO with an average particle size of 0.5 ⁇ m Two powders and Cr 2 O 3 powder having an average particle diameter of 1 ⁇ m were prepared.
- the composition of Example 13 was 50Fe-34Pt-20C-5TiO 2 -5SiO 2 -2Cr 2 O 3 (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1100 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a temperature increase rate of 300 ° C./hour, a holding temperature of 1100 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of the temperature increase to 1100 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 98.1%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- Table 1 shows the results of obtaining the I G / ID ratio from the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C—TiO 2 —SiO 2 —Cr 2 O 3 of Example 14. As is apparent from Table 1, the I G / ID ratio was 3.31, and the condition that the I G / ID ratio of the present invention was 5.0 or less was satisfied.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 75. Compared to the comparative example, it was greatly reduced.
- Example 15 Fe powder with an average particle size of 3 ⁇ m, Pt powder with an average particle size of 3 ⁇ m, carbon black with an average primary particle size of 48 nm as a raw material powder, Ta 2 O 5 powder with an average particle size of 1 ⁇ m, and an average particle size of 0.5 ⁇ m SiO 2 powder was prepared.
- the composition of Example 15 was 50Fe-35Pt-20C-5Ta 2 O 5 -5SiO 2 (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1100 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a temperature increase rate of 300 ° C./hour, a holding temperature of 1100 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of the temperature increase to 1100 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 98.3%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- Table 1 shows the results of obtaining the I G / ID ratio from the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C—Ta 2 O 5 —SiO 2 of Example 15. As is clear from Table 1, the I G / ID ratio was 3.21, and the condition that the I G / ID ratio of the present invention was 5.0 or less was satisfied.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 60. Compared to the comparative example, it was greatly reduced.
- Example 16 Fe powder with an average particle size of 3 ⁇ m, Pt powder with an average particle size of 3 ⁇ m, carbon black with an average primary particle size of 48 nm as a raw material powder, B 2 O 3 powder with an average particle size of 10 ⁇ m, and CoO with an average particle size of 1 ⁇ m Powder was prepared.
- the composition of Example 16 was 35Fe-40Pt-20C-2B 2 O 3 -3CoO (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1100 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a temperature increase rate of 300 ° C./hour, a holding temperature of 1100 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of the temperature increase to 1100 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by Archimedes method, and the relative density was calculated to be 97.9%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- Table 1 shows the results of obtaining the I G / ID ratio from the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—CB 2 O 3 —CoO of Example 16. As is apparent from Table 1, the I G / ID ratio was 3.74, which satisfied the condition that the I G / ID ratio of the present invention was 5.0 or less.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 65. Compared to the comparative example, it was greatly reduced.
- Example 17 Fe powder with an average particle diameter of 3 ⁇ m, Pt powder with an average particle diameter of 3 ⁇ m, carbon black with an average primary particle diameter of 48 nm as raw material powder, and SiO 2 powder with an average particle diameter of 0.5 ⁇ m, Co with an average particle diameter of 1 ⁇ m as an oxide 3 O 4 powder was prepared.
- the composition of Example 17 was 41Fe-31Pt-20C-5SiO 2 -3Co 3 O 4 (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1100 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a temperature increase rate of 300 ° C./hour, a holding temperature of 1100 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of the temperature increase to 1100 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 98.4%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- Table 1 shows the results of determining the I G / ID ratio from the results of Raman scattering spectroscopy measurement and curve fitting of Fe—Pt—C—SiO 2 —Co 3 O 4 of Example 16. As is apparent from Table 1, the I G / ID ratio was 3.17, which satisfied the condition that the I G / ID ratio of the present invention was 5.0 or less.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 80. Compared to the comparative example, it was greatly reduced.
- Example 18 Fe powder having an average particle diameter of 3 ⁇ m, Pt powder having an average particle diameter of 3 ⁇ m, and carbon black having an average primary particle diameter of 48 nm were prepared as raw material powders.
- the composition of Example 18 was 25Fe-25Pt-50C (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1400 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a temperature increase rate of 300 ° C./hour, a holding temperature of 1100 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of the temperature increase to 1100 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 96.1%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- Table 1 shows the results of obtaining the I G / ID ratio from the results of Raman scattering spectroscopy measurement and curve fitting results of Fe—Pt—C of Example 18. As is apparent from Table 1, the I G / ID ratio was 4.20, which satisfied the condition that the I G / ID ratio of the present invention was 5.0 or less.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 670. Compared to the comparative example, it was greatly reduced.
- Example 19 Fe powder having an average particle diameter of 3 ⁇ m, Pt powder having an average particle diameter of 3 ⁇ m, and carbon black having an average primary particle diameter of 48 nm were prepared as raw material powders.
- the composition of Example 19 was 20Fe-20Pt-60C (mol%), and weighed so that the total weight was 2600 g.
- Commercially available amorphous carbon was used as C powder.
- the weighed powder was enclosed in a ball mill pot having a capacity of 10 liters together with zirconia balls as a grinding medium, and mixed and pulverized by rotating for 4 hours.
- the mixed powder taken out from the ball mill was filled in a carbon mold and hot-pressed.
- the hot press conditions were a vacuum atmosphere, a heating rate of 300 ° C./hour, a holding temperature of 1400 ° C., and a holding time of 2 hours, and pressurization was performed at 30 MPa from the start of heating to the end of holding. After completion of the holding, it was naturally cooled in the chamber.
- hot isostatic pressing was performed on the sintered body taken out from the hot press mold.
- the conditions for hot isostatic pressing were a temperature increase rate of 300 ° C./hour, a holding temperature of 1100 ° C., a holding time of 2 hours, and gradually increasing the Ar gas pressure from the start of the temperature increase to 1100 ° While being held at C, it was pressurized at 150 MPa. After completion of the holding, it was naturally cooled in the furnace.
- the density of the sintered body thus produced was measured by the Archimedes method, and the relative density was calculated to be 95.9%.
- this sintered body was cut into a shape having a diameter of 180.0 mm and a thickness of 5.0 mm with a lathe to obtain a target.
- Raman scattering spectroscopic measurement conditions were an excitation wavelength of 532 nm, an output of 5 mW, and a diffraction grating of 1800 L / mm.
- the Lorentz function was used for curve fitting of measurement results.
- Table 1 shows the results of obtaining the I G / ID ratio from the results of Raman scattering spectroscopy measurement and curve fitting results of Fe—Pt—C of Example 19. As is apparent from Table 1, the I G / ID ratio was 4.22, and the condition that the I G / ID ratio of the present invention was 5.0 or less was satisfied.
- this target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva), and sputtering was performed.
- the sputtering conditions were an input power of 1 kW and an Ar gas pressure of 1.7 Pa.
- a film was formed on a 3.5-inch diameter aluminum substrate for 20 seconds.
- the number of particles adhering to the substrate was measured with a particle counter. As shown in Table 1, the number of particles at this time was 980. Compared to the comparative example, it was greatly reduced.
- the sputtering target for a magnetic recording film of the present invention makes it possible to produce a granular structure magnetic thin film without using an expensive simultaneous sputtering apparatus.
- a sputtering target can be provided, and carbon is a material that is difficult to sinter and solves the problem of easy formation of aggregates between carbons. It has an excellent effect that the problem that a large number of particles are generated on the film can be solved. Therefore, it is useful as a sputtering target for forming a magnetic thin film having a granular structure.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Powder Metallurgy (AREA)
Abstract
Description
また、近年実用化された垂直磁気記録方式を採用するハードディスクの磁性薄膜には、Coを主成分とするCo-Cr-Pt系の強磁性合金と非磁性の無機物粒子からなる複合材料が多く用いられている。そして上記の磁性薄膜は、生産性の高さから、上記材料を成分とするスパッタリングターゲットをDCマグネトロンスパッタ装置でスパッタして作製されることが多い。
そしてFePt相を超高密度記録媒体用材料として使用する場合には、規則化したFePt磁性粒子を磁気的に孤立させた状態で出来るだけ高密度に方位をそろえて分散させるという技術の開発が求められている。
このグラニュラー構造磁性薄膜は、磁性粒子同士が非磁性物質の介在により磁気的に絶縁される構造となっている。
グラニュラー構造の磁性薄膜を有する磁気記録媒体及びこれに関連する公知文献としては、特許文献1、特許文献2、特許文献3、特許文献4、特許文献5を挙げることができる。
また、一般に磁気記録層はFe-Ptなどの磁性相とそれを分離している非磁性相から構成されており、非磁性相の一つとして炭素が有効であることが知られている。
このように、炭素を導入することによる磁気記録層の改善が試みられているが、ターゲットのスパッタリング時の問題を解決するには至っていないのが現状である。
一つの波形(A)のピーク位置が1545cm-1以下、他の波形(B)のピーク位置が1320~1360cm-1であり、これらの波形の半値幅における面積比(B/A)が0.3~0.7となる非晶質水素化カーボン層からなる磁気ディスク及びその製造方法が記載されている。
1)Cを含有する磁気記録膜用スパッタリングターゲットであって、ラマン散乱分光測定におけるGバンドとDバンドのピーク強度比(IG/ID)が5.0以下であることを特徴とする磁気記録膜用スパッタリングターゲット。
2)Ptが5mol%以上60mol%以下、残余がFeである組成の金属とCからなる上記1)記載の磁気記録膜用スパッタリングターゲット。
3)Cの含有割合が5mol%以上70mol%以下であることを特徴とする上記1)又は2)記載の磁気記録膜用スパッタリングターゲット。
4)相対密度が90%以上であることを特徴とする上記1)~3)のいずれか一項に記載の磁気記録膜用スパッタリングターゲット。
5)添加元素として、B、Ru、Ag、Au、Cuから選択した1元素以上を、0.5mol%以上20mol%以下含有することを特徴とする上記1)~4)のいずれか一項に記載の磁気記録膜用スパッタリングターゲット。
6)さらに、添加剤として、SiO2、Cr2O3,CoO、Ta2O5、B2O3、MgO、Co3O4から選択した一種以上の酸化物を0.5mol%以上20mol%以下を含有することを特徴とする上記1)~5)のいずれか一項に記載の磁気記録膜用スパッタリングターゲット。
そこで、発明者らは、炭素の結晶性を意図的に崩すことによって炭素材料のスパッタリング特性を改善し、スパッタリング時のパーティクルを低減できると考え、このとき、炭素を含む焼結体をラマン散乱分光測定することで得られるG(graphite)バンドとD(disorder)バンドの強度比が、スパッタリング中のパーティクルと相関関係があることを見出した。
この場合、Ptが5mol%以上60mol%以下、残余がFeである組成の金属とCからなる磁気記録膜用スパッタリングターゲットに、特に有効である。これらの成分の含有量は、良好な磁気特性を得るための条件である。
また、相対密度が90%以上の磁気記録膜用スパッタリングターゲットとすることができる。相対密度が90%以上であることは、本発明の要件の一つである。相対密度が高いと、スパッタ時にスパッタリングターゲットからの脱ガスによる問題が少なく、また、合金とC粒子の密着性が向上するため、パーティクル発生を効果的に抑制できるからである。より好ましくは95%以上とする。
式:計算密度=シグマΣ(構成元素の原子量×構成元素の原子数比)/Σ(構成元素の原子量×構成元素の原子数比/構成元素の文献値密度)
ここで、Σは、ターゲットの構成元素の全てについて、和をとることを意味する。
このとき、炭素材料の結晶性(sp2混成軌道の完全性)を評価するための指標として、ラマン散乱分光測定を採用することができる。
Gバンドは、グラファイトの六員環構造に由来する振動モードであり、1570cm-1付近にピークが現れ、結晶構造が完全に近いほどピーク強度は大きくなる。
また、Dバンドは、グラファイトの欠陥構造に由来する振動モードであり、1350cm-1付近にピークが現れ、欠陥が大きいほどピーク強度は大きくなる。
カーブフィッティングをする都合上、1620cm-1付近のD´バンドも現れるが、D´バンドはグラファイトの欠陥構造に由来する振動モードであり、これは本願発明には、直接関係しないので、図において表示するに留める。
以上から、GバンドとDバンドのピーク強度比(IG/ID比と呼ぶことにする)を計算することで、炭素材料の結晶性を評価できる。すなわち、結晶性が高い炭素材料ほどIG/ID比が高くなる。Gバンドの強度が大きいほど結晶構造が完全(結晶性が高い)、小さいほど結晶構造が不完全(結晶性が低い)である。
GバンドとDバンドのピーク強度比(IG/ID)の下限値は、特に制限はないが、多くの場合1以上となる。ピーク強度比(IG/ID)が5.0以下であれば、パーティクルの発生を効果的に抑制できる。
また、C粉末は、平均一次粒子径30~50nmのカーボンブラック、平均粒径1~100μmのグラファイト、平均粒径0.4~100μmのグラッシーカーボンを用いることができる。使用するC粉末の種類に、特に制限はない。ターゲットの種類によって任意に選択し、使用することができる。
組成にもよるが、前記合金粉末の中で、特にPtを含む合金粉末は、原料粉末中の酸素量を少なくするために有効である。合金粉末を用いる場合も、平均粒径が0.5μm以上10μm以下のものを用いることが望ましい。
このようにして得られた焼結体を旋盤で所望の形状に加工することにより、本発明のスパッタリングターゲットは作製できる。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均一次粒子径48nmのカーボンブラックを用意した。本比較例1の組成は、30Fe-30Pt-40C(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販のカーボンブラックを用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1400°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。次に、これを1100°C、150MPaで熱間等方加圧した。こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ93.6%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本比較例1のFe-Pt-Cのラマン散乱分光測定結果とカーブフィッティング結果を図2に示す。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときの個数は19600個であった。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均粒径1μmのグラファイトを用意した。本比較例2の組成は、30Fe-30Pt-40C(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1400°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。次に、これを1100°C、150MPaで熱間等方加圧した。こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ94.2%であった。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときの個数は21600個であった。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均粒径20μmのグラファイトを用意した。本比較例2の組成は、30Fe-30Pt-40C(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1400°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。次に、これを1100°C、150MPaで熱間等方加圧した。こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ93.8%であった。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときの個数は28600個であった。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均粒径1μmのグラファイトを用意した。本実施例1の組成は、30Fe-30Pt-40C(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1400°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ96.6%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例1のFe-Pt-Cのラマン散乱分光測定結果とカーブフィッティング結果を図3に示す。
この図3から、IG/ID比を求めた結果を表1に示す。この表1から明らかなように、IG/ID比は4.96となり、本願発明のIG/ID比が5.0以下という条件を満たしていた。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は490個であった。比較例に比べ大きく減少した。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均一次粒子径48nmのカーボンブラックを用意した。本実施例2の組成は、30Fe-30Pt-40C(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1400°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ96.9%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例2のFe-Pt-Cのラマン散乱分光測定結果とカーブフィッティング結果を図4に示す。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は350個であった。比較例に比べ大きく減少した。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均粒径80μmのグラッシーカーボンを用意した。本実施例3の組成は、30Fe-30Pt-40C(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1400°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ96.8%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例3のFe-Pt-Cのラマン散乱分光測定結果とカーブフィッティング結果を図5に示す。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は330個であった。比較例に比べ大きく減少した。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均粒径20μmのグラファイトを用意した。本実施例4の組成は、30Fe-30Pt-40C(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1400°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ97.1%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例4のFe-Pt-Cのラマン散乱分光測定結果とカーブフィッティング結果を図6に示す。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は250個であった。比較例に比べ大きく減少した。
以上から、炭素の結晶性を意図的に崩すことによって炭素材料のスパッタリング特性を改善し、スパッタリング時のパーティクルを低減できる大きな効果を有するものである。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均一次粒子径48nmのカーボンブラックを用意した。本実施例5の組成は、30Fe-60Pt-10C(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1400°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ98.2%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例5のFe-Pt-Cのラマン散乱分光測定結果とカーブフィッティング結果から、IG/ID比を求めた結果を表1に示す。この表1から明らかなように、IG/ID比は3.89となり、本願発明のIG/ID比が5.0以下という条件を満たしていた。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は80個であった。比較例に比べ大きく減少した。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均一次粒子径48nmのカーボンブラックを用意した。本実施例6の組成は、20Fe-60Pt-20C(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1400°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ97.7%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例6のFe-Pt-Cのラマン散乱分光測定結果とカーブフィッティング結果から、IG/ID比を求めた結果を表1に示す。この表1から明らかなように、IG/ID比は3.86となり、本願発明のIG/ID比が5.0以下という条件を満たしていた。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は165個であった。比較例に比べ大きく減少した。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均一次粒子径48nmのカーボンブラックを用意した。本実施例7の組成は、35Fe-60Pt-5C(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1400°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ99.2%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例6のFe-Pt-Cのラマン散乱分光測定結果とカーブフィッティング結果から、IG/ID比を求めた結果を表1に示す。この表1から明らかなように、IG/ID比は2.77となり、本願発明のIG/ID比が5.0以下という条件を満たしていた。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は35個であった。比較例に比べ大きく減少した。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均粒径10μmのB粉末、平均一次粒子径48nmのカーボンブラックを用意した。本実施例8の組成は、34Fe-34Pt-2B-30C(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1400°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ97.3%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例8のFe-Pt-B-Cのラマン散乱分光測定結果とカーブフィッティング結果から、IG/ID比を求めた結果を表1に示す。この表1から明らかなように、IG/ID比は3.16となり、本願発明のIG/ID比が5.0以下という条件を満たしていた。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は280個であった。比較例に比べ大きく減少した。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均粒径3μmのRu粉末、平均一次粒子径48nmのカーボンブラックを用意した。本実施例9の組成は、35Fe-35Pt-5Ru-25C(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1400°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ98.0%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例9のFe-Pt-Ru-Cのラマン散乱分光測定結果とカーブフィッティング結果から、IG/ID比を求めた結果を表1に示す。この表1から明らかなように、IG/ID比は4.04となり、本願発明のIG/ID比が5.0以下という条件を満たしていた。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は200個であった。比較例に比べ大きく減少した。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均粒径3μmのAg粉末、平均一次粒子径48nmのカーボンブラックを用意した。本実施例10の組成は、25Fe-35Pt-10Ag-30C(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度950°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ96.1%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例10のFe-Pt-Ag-Cのラマン散乱分光測定結果とカーブフィッティング結果から、IG/ID比を求めた結果を表1に示す。この表1から明らかなように、IG/ID比は1.10となり、本願発明のIG/ID比が5.0以下という条件を満たしていた。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は305個であった。比較例に比べ大きく減少した。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均粒径5μmのAu粉末、平均一次粒子径48nmのカーボンブラックを用意した。本実施例11の組成は、34Fe-34Pt-2Au-30C(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1400°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ97.2%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例11のFe-Pt-Au-Cのラマン散乱分光測定結果とカーブフィッティング結果から、IG/ID比を求めた結果を表1に示す。この表1から明らかなように、IG/ID比は3.62となり、本願発明のIG/ID比が5.0以下という条件を満たしていた。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は270個であった。比較例に比べ大きく減少した。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均粒径5μmのCu粉末、平均一次粒子径48nmのカーボンブラックを用意した。本実施例12の組成は、30Fe-30Pt-10Cu-30C(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1400°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ97.9%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例12のFe-Pt-Cu-Cのラマン散乱分光測定結果とカーブフィッティング結果から、IG/ID比を求めた結果を表1に示す。この表1から明らかなように、IG/ID比は3.67となり、本願発明のIG/ID比が5.0以下という条件を満たしていた。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は300個であった。比較例に比べ大きく減少した。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均粒径3μmのRu粉末、平均一次粒子径48nmのカーボンブラックを用意した。本実施例13の組成は、50Fe-25Pt-20Ru-5C(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1400°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ99.3%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例13のFe-Pt-Ru-Cのラマン散乱分光測定結果とカーブフィッティング結果から、IG/ID比を求めた結果を表1に示す。この表1から明らかなように、IG/ID比は3.19となり、本願発明のIG/ID比が5.0以下という条件を満たしていた。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は25個であった。比較例に比べ大きく減少した。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均一次粒子径48nmのカーボンブラック、さらに酸化物として、平均粒径1μmのTiO2粉末、平均粒径0.5μmのSiO2粉末、平均粒径1μmのCr2O3粉末を用意した。本実施例13の組成は、50Fe-34Pt-20C-5TiO2-5SiO2-2Cr2O3(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1100°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ98.1%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例14のFe-Pt-C-TiO2-SiO2-Cr2O3のラマン散乱分光測定結果とカーブフィッティング結果から、IG/ID比を求めた結果を表1に示す。この表1から明らかなように、IG/ID比は3.31となり、本願発明のIG/ID比が5.0以下という条件を満たしていた。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は75個であった。比較例に比べ大きく減少した。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均一次粒子径48nmのカーボンブラック、さらに酸化物として、平均粒径1μmのTa2O5粉末、平均粒径0.5μmのSiO2粉末を用意した。本実施例15の組成は、50Fe-35Pt-20C-5Ta2O5-5SiO2(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1100°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ98.3%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例15のFe-Pt-C-Ta2O5-SiO2のラマン散乱分光測定結果とカーブフィッティング結果から、IG/ID比を求めた結果を表1に示す。この表1から明らかなように、IG/ID比は3.21となり、本願発明のIG/ID比が5.0以下という条件を満たしていた。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は60個であった。比較例に比べ大きく減少した。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均一次粒子径48nmのカーボンブラック、さらに酸化物として、平均粒径10μmのB2O3粉末、平均粒径1μmのCoO粉末を用意した。本実施例16の組成は、35Fe-40Pt-20C-2B2O3-3CoO(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1100°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ97.9%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例16のFe-Pt-C-B2O3-CoOのラマン散乱分光測定結果とカーブフィッティング結果から、IG/ID比を求めた結果を表1に示す。この表1から明らかなように、IG/ID比は3.74となり、本願発明のIG/ID比が5.0以下という条件を満たしていた。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は65個であった。比較例に比べ大きく減少した。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均一次粒子径48nmのカーボンブラック、さらに酸化物として、平均粒径0.5μmのSiO2粉末、平均粒径1μmのCo3O4粉末を用意した。本実施例17の組成は、41Fe-31Pt-20C-5SiO2-3Co3O4(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1100°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ98.4%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例16のFe-Pt-C-SiO2-Co3O4のラマン散乱分光測定結果とカーブフィッティング結果から、IG/ID比を求めた結果を表1に示す。この表1から明らかなように、IG/ID比は3.17となり、本願発明のIG/ID比が5.0以下という条件を満たしていた。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は80個であった。比較例に比べ大きく減少した。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均一次粒子径48nmのカーボンブラックを用意した。本実施例18の組成は、25Fe-25Pt-50C(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1400°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ96.1%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例18のFe-Pt-Cのラマン散乱分光測定結果とカーブフィッティング結果から、IG/ID比を求めた結果を表1に示す。この表1から明らかなように、IG/ID比は4.20となり、本願発明のIG/ID比が5.0以下という条件を満たしていた。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は670個であった。比較例に比べ大きく減少した。
原料粉末として平均粒径3μmのFe粉末、平均粒径3μmのPt粉末、平均一次粒子径48nmのカーボンブラックを用意した。本実施例19の組成は、20Fe-20Pt-60C(mol%)とし、合計重量が2600gとなるように秤量した。C粉末は市販の無定形炭素を用いた。
ホットプレスの条件は、真空雰囲気、昇温速度300°C/時間、保持温度1400°C、保持時間2時間とし、昇温開始時から保持終了まで30MPaで加圧した。保持終了後はチャンバー内でそのまま自然冷却させた。
こうして作製された焼結体の密度をアルキメデス法で測定し、相対密度を計算したところ95.9%であった。
また、測定結果のカーブフィッティングにはローレンツ関数を使用した。本実施例19のFe-Pt-Cのラマン散乱分光測定結果とカーブフィッティング結果から、IG/ID比を求めた結果を表1に示す。この表1から明らかなように、IG/ID比は4.22となり、本願発明のIG/ID比が5.0以下という条件を満たしていた。
スパッタリングの条件は、投入電力1kW、Arガス圧1.7Paとし、2kWhrのプレスパッタリングを実施した後、3.5インチ径のアルミ基板上に20秒間成膜した。そして基板上へ付着したパーティクルの個数をパーティクルカウンターで測定した。表1に示すように、このときのパーティクル個数は980個であった。比較例に比べ大きく減少した。
Claims (6)
- Cを含有する磁気記録膜用スパッタリングターゲットであって、ラマン散乱分光測定におけるGバンドとDバンドのピーク強度比(IG/ID)が5.0以下であることを特徴とする磁気記録膜用スパッタリングターゲット。
- Ptが5mol%以上60mol%以下、残余がFeである組成の金属とCからなる請求項1記載の磁気記録膜用スパッタリングターゲット。
- Cの含有割合が20mol%以上70mol%以下であることを特徴とする請求項1又は2記載の磁気記録膜用スパッタリングターゲット。
- 相対密度が90%以上であることを特徴とする請求項1~3のいずれか一項に記載の磁気記録膜用スパッタリングターゲット。
- 添加元素として、B、Ru、Ag、Au、Cuから選択した1元素以上を、0.5mol%以上20mol%以下含有することを特徴とする請求項1~4のいずれか一項に記載の磁気記録膜用スパッタリングターゲット。
- 添加剤として、SiO2、Cr2O3,CoO、Ta2O5、B2O3、MgO、Co3O4から選択した一種以上の酸化物を0.5mol%以上20mol%以下を含有することを特徴とする請求項1~5のいずれか一項に記載の磁気記録膜用スパッタリングターゲット。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201280016580.2A CN103459656B (zh) | 2011-03-30 | 2012-03-23 | 磁记录膜用溅射靶 |
JP2012535499A JP5497904B2 (ja) | 2011-03-30 | 2012-03-23 | 磁気記録膜用スパッタリングターゲット |
US13/982,051 US9683284B2 (en) | 2011-03-30 | 2012-03-23 | Sputtering target for magnetic recording film |
SG2013045414A SG191134A1 (en) | 2011-03-30 | 2012-03-23 | Sputtering target for magnetic recording film |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011075566 | 2011-03-30 | ||
JP2011-075566 | 2011-03-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2012133166A1 true WO2012133166A1 (ja) | 2012-10-04 |
Family
ID=46930890
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2012/057482 WO2012133166A1 (ja) | 2011-03-30 | 2012-03-23 | 磁気記録膜用スパッタリングターゲット |
Country Status (7)
Country | Link |
---|---|
US (1) | US9683284B2 (ja) |
JP (1) | JP5497904B2 (ja) |
CN (1) | CN103459656B (ja) |
MY (1) | MY154754A (ja) |
SG (1) | SG191134A1 (ja) |
TW (1) | TWI568871B (ja) |
WO (1) | WO2012133166A1 (ja) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013175884A1 (ja) * | 2012-05-22 | 2013-11-28 | Jx日鉱日石金属株式会社 | C粒子が分散したFe-Pt-Ag-C系スパッタリングターゲット及びその製造方法 |
WO2013190943A1 (ja) * | 2012-06-18 | 2013-12-27 | Jx日鉱日石金属株式会社 | 磁気記録膜用スパッタリングターゲット |
JP2014120180A (ja) * | 2012-12-13 | 2014-06-30 | Showa Denko Kk | スパッタリングターゲット、スパッタリングターゲットの製造方法、磁気記録媒体の製造方法および磁気記録再生装置 |
WO2014132746A1 (ja) * | 2013-03-01 | 2014-09-04 | 田中貴金属工業株式会社 | FePt-C系スパッタリングターゲット及びその製造方法 |
JP5587495B2 (ja) * | 2011-12-22 | 2014-09-10 | Jx日鉱日石金属株式会社 | C粒子が分散したFe−Pt系スパッタリングターゲット |
WO2014171161A1 (ja) * | 2013-04-15 | 2014-10-23 | Jx日鉱日石金属株式会社 | スパッタリングターゲット |
WO2014175392A1 (ja) * | 2013-04-26 | 2014-10-30 | Jx日鉱日石金属株式会社 | 磁気記録膜用スパッタリングターゲット及びその製造に用いる炭素原料 |
WO2014185266A1 (ja) * | 2013-05-13 | 2014-11-20 | Jx日鉱日石金属株式会社 | 磁性薄膜形成用スパッタリングターゲット |
WO2014188916A1 (ja) * | 2013-05-20 | 2014-11-27 | Jx日鉱日石金属株式会社 | 磁性記録媒体用スパッタリングターゲット |
WO2014196377A1 (ja) * | 2013-06-06 | 2014-12-11 | Jx日鉱日石金属株式会社 | 磁性記録媒体用スパッタリングターゲット |
WO2015141571A1 (ja) * | 2014-03-18 | 2015-09-24 | Jx日鉱日石金属株式会社 | 磁性材スパッタリングターゲット |
WO2019220675A1 (ja) * | 2018-05-14 | 2019-11-21 | Jx金属株式会社 | スパッタリングターゲット及びスパッタリングターゲットの製造方法 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9567665B2 (en) | 2010-07-29 | 2017-02-14 | Jx Nippon Mining & Metals Corporation | Sputtering target for magnetic recording film, and process for producing same |
US9328412B2 (en) | 2010-08-31 | 2016-05-03 | Jx Nippon Mining & Metals Corporation | Fe—Pt-based ferromagnetic material sputtering target |
CN103270554B (zh) | 2010-12-20 | 2016-09-28 | 吉坤日矿日石金属株式会社 | 分散有C粒子的Fe-Pt型溅射靶 |
CN104221085B (zh) | 2012-07-20 | 2017-05-24 | 吉坤日矿日石金属株式会社 | 磁记录膜形成用溅射靶及其制造方法 |
WO2014045744A1 (ja) | 2012-09-21 | 2014-03-27 | Jx日鉱日石金属株式会社 | Fe-Pt系磁性材焼結体 |
JP6285043B2 (ja) | 2014-09-22 | 2018-03-07 | Jx金属株式会社 | 磁気記録膜形成用スパッタリングターゲット及びその製造方法 |
JP6084711B2 (ja) * | 2014-09-26 | 2017-02-22 | Jx金属株式会社 | 磁気記録膜形成用スパッタリングターゲット及びその製造方法 |
SG11201806169UA (en) | 2016-02-19 | 2018-09-27 | Jx Nippon Mining & Metals Corp | Sputtering target for magnetic recording medium, and magnetic thin film |
TWI761264B (zh) * | 2021-07-15 | 2022-04-11 | 光洋應用材料科技股份有限公司 | 鐵鉑銀基靶材及其製法 |
US20240096368A1 (en) * | 2022-09-15 | 2024-03-21 | Western Digital Technologies, Inc. | Media structure configured for heat-assisted magnetic recording and improved media fabrication |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0234536A (ja) * | 1988-07-22 | 1990-02-05 | Hitachi Maxell Ltd | 非晶質性材料 |
JP2000207735A (ja) * | 1999-01-12 | 2000-07-28 | Sony Corp | 磁気記録媒体の製造方法 |
JP2000282229A (ja) * | 1999-03-29 | 2000-10-10 | Hitachi Metals Ltd | CoPt系スパッタリングターゲットおよびその製造方法ならびにこれを用いた磁気記録膜およびCoPt系磁気記録媒体 |
JP2008169464A (ja) * | 2007-01-08 | 2008-07-24 | Heraeus Inc | スパッタターゲット及びその製造方法 |
WO2010110033A1 (ja) * | 2009-03-27 | 2010-09-30 | 日鉱金属株式会社 | 非磁性材粒子分散型強磁性材スパッタリングターゲット |
JP4673453B1 (ja) * | 2010-01-21 | 2011-04-20 | Jx日鉱日石金属株式会社 | 強磁性材スパッタリングターゲット |
JP4885333B1 (ja) * | 2010-09-03 | 2012-02-29 | Jx日鉱日石金属株式会社 | 強磁性材スパッタリングターゲット |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06267063A (ja) | 1993-03-11 | 1994-09-22 | Hitachi Ltd | 磁気ディスクおよびその製造方法 |
JP2000268357A (ja) | 1999-03-12 | 2000-09-29 | Hitachi Ltd | 磁気記録媒体の製造方法及び製造装置 |
JP3141109B2 (ja) | 1999-04-19 | 2001-03-05 | 東北大学長 | 磁気記録媒体及び磁気記録媒体の製造方法 |
JP3328692B2 (ja) | 1999-04-26 | 2002-09-30 | 東北大学長 | 磁気記録媒体の製造方法 |
JP2003028802A (ja) * | 2001-07-12 | 2003-01-29 | Sony Corp | カーボン膜評価方法および磁気記録媒体の製造方法 |
US6759005B2 (en) | 2002-07-23 | 2004-07-06 | Heraeus, Inc. | Fabrication of B/C/N/O/Si doped sputtering targets |
KR100470151B1 (ko) * | 2002-10-29 | 2005-02-05 | 한국과학기술원 | FePtC 박막을 이용한 고밀도 자기기록매체 및 그제조방법 |
JP2006127621A (ja) | 2004-10-28 | 2006-05-18 | Hitachi Global Storage Technologies Netherlands Bv | 垂直磁気記録媒体及びその製造方法 |
US9034153B2 (en) * | 2006-01-13 | 2015-05-19 | Jx Nippon Mining & Metals Corporation | Nonmagnetic material particle dispersed ferromagnetic material sputtering target |
US20080057350A1 (en) | 2006-09-01 | 2008-03-06 | Heraeus, Inc. | Magnetic media and sputter targets with compositions of high anisotropy alloys and oxide compounds |
KR101587954B1 (ko) * | 2007-10-25 | 2016-01-22 | 어플라이드 머티어리얼스, 인코포레이티드 | 박막 배터리들의 대량 생산을 위한 방법 |
WO2011016312A1 (ja) * | 2009-08-07 | 2011-02-10 | 三井金属鉱業株式会社 | 有機el素子に用いられるアノード構造体およびその製造方法ならびに有機el素子 |
US8173282B1 (en) * | 2009-12-11 | 2012-05-08 | Wd Media, Inc. | Perpendicular magnetic recording medium with an ordering temperature reducing layer |
MY149437A (en) | 2010-01-21 | 2013-08-30 | Jx Nippon Mining & Metals Corp | Ferromagnetic material sputtering target |
US9328412B2 (en) * | 2010-08-31 | 2016-05-03 | Jx Nippon Mining & Metals Corporation | Fe—Pt-based ferromagnetic material sputtering target |
CN103270554B (zh) | 2010-12-20 | 2016-09-28 | 吉坤日矿日石金属株式会社 | 分散有C粒子的Fe-Pt型溅射靶 |
JP5145437B2 (ja) * | 2011-03-02 | 2013-02-20 | 株式会社日立製作所 | 磁気記録媒体 |
US20140083847A1 (en) | 2011-09-26 | 2014-03-27 | Jx Nippon Mining & Metals Corporation | Fe-Pt-C Based Sputtering Target |
JP5587495B2 (ja) * | 2011-12-22 | 2014-09-10 | Jx日鉱日石金属株式会社 | C粒子が分散したFe−Pt系スパッタリングターゲット |
SG11201403264SA (en) | 2012-05-22 | 2014-09-26 | Jx Nippon Mining & Metals Corp | Fe-Pt-Ag-C-BASED SPUTTERING TARGET HAVING C PARTICLES DISPERSED THEREIN, AND METHOD FOR PRODUCING SAME |
JP5592022B2 (ja) * | 2012-06-18 | 2014-09-17 | Jx日鉱日石金属株式会社 | 磁気記録膜用スパッタリングターゲット |
CN104221085B (zh) | 2012-07-20 | 2017-05-24 | 吉坤日矿日石金属株式会社 | 磁记录膜形成用溅射靶及其制造方法 |
-
2012
- 2012-03-23 US US13/982,051 patent/US9683284B2/en active Active
- 2012-03-23 MY MYPI2013002302A patent/MY154754A/en unknown
- 2012-03-23 SG SG2013045414A patent/SG191134A1/en unknown
- 2012-03-23 CN CN201280016580.2A patent/CN103459656B/zh active Active
- 2012-03-23 WO PCT/JP2012/057482 patent/WO2012133166A1/ja active Application Filing
- 2012-03-23 JP JP2012535499A patent/JP5497904B2/ja active Active
- 2012-03-27 TW TW101110536A patent/TWI568871B/zh active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0234536A (ja) * | 1988-07-22 | 1990-02-05 | Hitachi Maxell Ltd | 非晶質性材料 |
JP2000207735A (ja) * | 1999-01-12 | 2000-07-28 | Sony Corp | 磁気記録媒体の製造方法 |
JP2000282229A (ja) * | 1999-03-29 | 2000-10-10 | Hitachi Metals Ltd | CoPt系スパッタリングターゲットおよびその製造方法ならびにこれを用いた磁気記録膜およびCoPt系磁気記録媒体 |
JP2008169464A (ja) * | 2007-01-08 | 2008-07-24 | Heraeus Inc | スパッタターゲット及びその製造方法 |
WO2010110033A1 (ja) * | 2009-03-27 | 2010-09-30 | 日鉱金属株式会社 | 非磁性材粒子分散型強磁性材スパッタリングターゲット |
JP4673453B1 (ja) * | 2010-01-21 | 2011-04-20 | Jx日鉱日石金属株式会社 | 強磁性材スパッタリングターゲット |
JP4885333B1 (ja) * | 2010-09-03 | 2012-02-29 | Jx日鉱日石金属株式会社 | 強磁性材スパッタリングターゲット |
Cited By (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5587495B2 (ja) * | 2011-12-22 | 2014-09-10 | Jx日鉱日石金属株式会社 | C粒子が分散したFe−Pt系スパッタリングターゲット |
WO2013175884A1 (ja) * | 2012-05-22 | 2013-11-28 | Jx日鉱日石金属株式会社 | C粒子が分散したFe-Pt-Ag-C系スパッタリングターゲット及びその製造方法 |
WO2013190943A1 (ja) * | 2012-06-18 | 2013-12-27 | Jx日鉱日石金属株式会社 | 磁気記録膜用スパッタリングターゲット |
US9540724B2 (en) | 2012-06-18 | 2017-01-10 | Jx Nippon Mining & Metals Corporation | Sputtering target for magnetic recording film |
JP2014120180A (ja) * | 2012-12-13 | 2014-06-30 | Showa Denko Kk | スパッタリングターゲット、スパッタリングターゲットの製造方法、磁気記録媒体の製造方法および磁気記録再生装置 |
CN105026610A (zh) * | 2013-03-01 | 2015-11-04 | 田中贵金属工业株式会社 | FePt-C系溅射靶及其制造方法 |
WO2014132746A1 (ja) * | 2013-03-01 | 2014-09-04 | 田中貴金属工業株式会社 | FePt-C系スパッタリングターゲット及びその製造方法 |
US10186404B2 (en) | 2013-03-01 | 2019-01-22 | Tanaka Kikinzoku Kogyo K.K. | FePt—C-based sputtering target and method for manufacturing same |
JP5965539B2 (ja) * | 2013-03-01 | 2016-08-10 | 田中貴金属工業株式会社 | FePt−C系スパッタリングターゲット |
WO2014171161A1 (ja) * | 2013-04-15 | 2014-10-23 | Jx日鉱日石金属株式会社 | スパッタリングターゲット |
JP5944580B2 (ja) * | 2013-04-15 | 2016-07-05 | Jx金属株式会社 | スパッタリングターゲット |
WO2014175392A1 (ja) * | 2013-04-26 | 2014-10-30 | Jx日鉱日石金属株式会社 | 磁気記録膜用スパッタリングターゲット及びその製造に用いる炭素原料 |
CN104955981A (zh) * | 2013-04-26 | 2015-09-30 | 吉坤日矿日石金属株式会社 | 磁记录膜用溅射靶及用于制造该溅射靶的碳原料 |
JP5876155B2 (ja) * | 2013-04-26 | 2016-03-02 | Jx金属株式会社 | 磁気記録膜用スパッタリングターゲット及びその製造に用いる炭素原料 |
JP5969120B2 (ja) * | 2013-05-13 | 2016-08-17 | Jx金属株式会社 | 磁性薄膜形成用スパッタリングターゲット |
WO2014185266A1 (ja) * | 2013-05-13 | 2014-11-20 | Jx日鉱日石金属株式会社 | 磁性薄膜形成用スパッタリングターゲット |
WO2014188916A1 (ja) * | 2013-05-20 | 2014-11-27 | Jx日鉱日石金属株式会社 | 磁性記録媒体用スパッタリングターゲット |
JP5946922B2 (ja) * | 2013-06-06 | 2016-07-06 | Jx金属株式会社 | 磁性記録媒体用スパッタリングターゲット |
WO2014196377A1 (ja) * | 2013-06-06 | 2014-12-11 | Jx日鉱日石金属株式会社 | 磁性記録媒体用スパッタリングターゲット |
WO2015141571A1 (ja) * | 2014-03-18 | 2015-09-24 | Jx日鉱日石金属株式会社 | 磁性材スパッタリングターゲット |
JP6030271B2 (ja) * | 2014-03-18 | 2016-11-24 | Jx金属株式会社 | 磁性材スパッタリングターゲット |
WO2019220675A1 (ja) * | 2018-05-14 | 2019-11-21 | Jx金属株式会社 | スパッタリングターゲット及びスパッタリングターゲットの製造方法 |
JPWO2019220675A1 (ja) * | 2018-05-14 | 2021-07-15 | Jx金属株式会社 | スパッタリングターゲット及びスパッタリングターゲットの製造方法 |
JP7242652B2 (ja) | 2018-05-14 | 2023-03-20 | Jx金属株式会社 | スパッタリングターゲット及びスパッタリングターゲットの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
MY154754A (en) | 2015-07-15 |
US9683284B2 (en) | 2017-06-20 |
CN103459656A (zh) | 2013-12-18 |
JPWO2012133166A1 (ja) | 2014-07-28 |
SG191134A1 (en) | 2013-07-31 |
TWI568871B (zh) | 2017-02-01 |
JP5497904B2 (ja) | 2014-05-21 |
US20130306470A1 (en) | 2013-11-21 |
CN103459656B (zh) | 2015-05-06 |
TW201241218A (en) | 2012-10-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5497904B2 (ja) | 磁気記録膜用スパッタリングターゲット | |
JP5592022B2 (ja) | 磁気記録膜用スパッタリングターゲット | |
JP5041262B2 (ja) | 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法 | |
JP5290468B2 (ja) | C粒子が分散したFe−Pt系スパッタリングターゲット | |
JP5457615B1 (ja) | 磁気記録膜形成用スパッタリングターゲット及びその製造方法 | |
JP5705993B2 (ja) | C粒子が分散したFe−Pt−Ag−C系スパッタリングターゲット及びその製造方法 | |
US20140083847A1 (en) | Fe-Pt-C Based Sputtering Target | |
TWI605132B (zh) | Magnetic film forming sputtering target | |
WO2013094605A1 (ja) | C粒子が分散したFe-Pt系スパッタリングターゲット | |
JP6422096B2 (ja) | C粒子が分散したFe−Pt系スパッタリングターゲット | |
JP5041261B2 (ja) | 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法 | |
JP6108064B2 (ja) | 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法 | |
JP6037206B2 (ja) | 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法 | |
WO2014171161A1 (ja) | スパッタリングターゲット | |
TWI605143B (zh) | Magnetic recording media sputtering target | |
JP5826945B2 (ja) | 磁性記録媒体用スパッタリングターゲット | |
JP6037197B2 (ja) | 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法 | |
JP6062586B2 (ja) | 磁気記録膜形成用スパッタリングターゲット | |
WO2023079857A1 (ja) | Fe-Pt-C系スパッタリングターゲット部材、スパッタリングターゲット組立品、成膜方法、及びスパッタリングターゲット部材の製造方法 | |
WO2015141571A1 (ja) | 磁性材スパッタリングターゲット |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ENP | Entry into the national phase |
Ref document number: 2012535499 Country of ref document: JP Kind code of ref document: A |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 12764066 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 13982051 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 12764066 Country of ref document: EP Kind code of ref document: A1 |