WO2011114824A1 - α線量が少ない錫又は錫合金及びその製造方法 - Google Patents
α線量が少ない錫又は錫合金及びその製造方法 Download PDFInfo
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- WO2011114824A1 WO2011114824A1 PCT/JP2011/053024 JP2011053024W WO2011114824A1 WO 2011114824 A1 WO2011114824 A1 WO 2011114824A1 JP 2011053024 W JP2011053024 W JP 2011053024W WO 2011114824 A1 WO2011114824 A1 WO 2011114824A1
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B25/00—Obtaining tin
- C22B25/08—Refining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/26—Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/26—Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
- B23K35/262—Sn as the principal constituent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/36—Selection of non-metallic compositions, e.g. coatings, fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/40—Making wire or rods for soldering or welding
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B3/00—Extraction of metal compounds from ores or concentrates by wet processes
- C22B3/04—Extraction of metal compounds from ores or concentrates by wet processes by leaching
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C13/00—Alloys based on tin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
Definitions
- the present invention relates to tin or a tin alloy with a reduced ⁇ dose, which is used for manufacturing semiconductors, and a method for manufacturing the same.
- tin is a material used for manufacturing semiconductors, and is a main raw material for solder materials.
- solder is used to bond semiconductor chips and substrates, and when bonding or sealing Si chips such as ICs or LSIs to lead frames or ceramic packages, TAB (tape automated bonding) or flip It is used for bump formation at the time of chip manufacturing, semiconductor wiring materials, and the like.
- TAB tape automated bonding
- flip It is used for bump formation at the time of chip manufacturing, semiconductor wiring materials, and the like.
- the density is increased and the operating voltage and cell capacity are reduced, there is an increased risk of soft errors due to the influence of ⁇ rays from the material in the vicinity of the semiconductor chip. For these reasons, there is a demand for high purity of the solder material and tin, and a material with less ⁇ -rays is required.
- Patent Document 1 describes a method for producing low ⁇ -ray tin, in which tin and lead having an ⁇ dose of 10 cph / cm 2 or less are alloyed and then refining is performed to remove the lead contained in the tin.
- the purpose of this technique is to dilute 210 Pb in tin by adding high-purity Pb to reduce the ⁇ dose.
- Pb must be further removed after addition to tin
- a numerical value in which the ⁇ dose is greatly reduced after three years of refining tin. Since it is understood that it is not possible to use tin whose ⁇ dose has decreased after three years, it is not an industrially efficient method.
- Patent Document 2 when a material selected from Na, Sr, K, Cr, Nb, Mn, V, Ta, Si, Zr, and Ba is added to Sn—Pb alloy solder at 10 to 5000 ppm, There is a description that the count number decreases to 0.5 cph / cm 2 or less. However, the addition of such materials can reduce the count of radiation ⁇ particles at a level of 0.015 cph / cm 2 , which has not reached a level that can be expected as a material for semiconductor devices today. A further problem is that elements that are undesirable when mixed in semiconductors, such as alkali metal elements, transition metal elements, and heavy metal elements, are used as materials to be added. Therefore, it must be said that the material for assembling the semiconductor device is a material having a low level.
- Patent Document 3 describes that the count of radiation ⁇ particles emitted from a solder fine wire is 0.5 cph / cm 2 or less and used for connection wiring of a semiconductor device or the like. However, this level of radiation ⁇ particle count level does not reach the level that can be expected for today's semiconductor device materials.
- Patent Document 4 lead concentration is low by electrolysis using sulfuric acid and hydrochloric acid with high purity such as special grade sulfuric acid and special grade hydrochloric acid and using high purity tin as an anode. It is described that high-purity tin having an ⁇ -ray count number of 0.005 cph / cm 2 or less is obtained. It is natural that a high-purity material can be obtained by using raw materials (reagents) with a high purity without considering the cost, but it is still the lowest ⁇ of the precipitated tin shown in the example of Patent Document 4 The line count is 0.002 cph / cm 2 , and the expected level is not reached for the high cost.
- Patent Document 5 nitric acid is added to a heated aqueous solution to which crude metal tin is added to precipitate metastannic acid, which is filtered and washed, and the washed metastannic acid is dissolved with hydrochloric acid or hydrofluoric acid.
- a method of obtaining metal tin of 5N or more by electrowinning using this solution as an electrolyte is described.
- Patent Document 6 discloses a technique in which the amount of Pb contained in Sn constituting the solder alloy is reduced and Bi or Sb, Ag, Zn is used as the alloy material. However, in this case, even if Pb is reduced as much as possible, a means for fundamentally solving the problem of the count number of radiation ⁇ particles caused by Pb inevitably mixed in is not shown.
- Patent Document 7 discloses tin produced by electrolysis using a special grade sulfuric acid reagent, having a quality of 99.99% or more and a radiation ⁇ particle count of 0.03 cph / cm 2 or less. Yes. In this case as well, it is natural that a high-purity material can be obtained if high-purity raw materials (reagents) are used without considering the cost. However, the deposited tin shown in the example of Patent Document 7 is still used. The lowest ⁇ -ray count number is 0.003 cph / cm 2 , and the expected level is not reached for the high cost.
- Patent Document 8 listed below describes lead for a brazing material for semiconductor devices, having a grade of 4 nines or more, a radioisotope of less than 50 ppm, and a radiation ⁇ particle count of 0.5 cph / cm 2 or less.
- Patent Document 9 below discloses a tin for a brazing material for a semiconductor device having a quality of 99.95% or more, a radioisotope of less than 30 ppm, and a radiation ⁇ particle count of 0.2 cph / cm 2 or less. Are listed. All of these have a problem that the allowable amount of the count number of the radiation ⁇ particles is moderate and has not reached a level that can be expected as a material for a semiconductor device today.
- the present applicant has high-purity tin, that is, a purity of 5 N or more (except for gas components of O, C, N, H, S, and P).
- the contents of each of the radioactive elements U and Th are 5 ppb or less
- the contents of each of Pb and Bi that emit radiation ⁇ particles are 1 ppm or less to eliminate the influence of ⁇ rays on the semiconductor chip as much as possible.
- the high-purity tin is finally manufactured by melting, casting, and rolling / cutting if necessary, and the ⁇ -ray count of the high-purity tin is 0.001 cph / cm 2 or less. It relates to the technology that realizes.
- Po has a very high sublimation property, and Po sublimes when heated in a manufacturing process such as a melting / casting process. If the polonium isotope 210 Po is removed at the initial stage of production, it is natural that the polonium isotope 210 Po is not transformed into the lead isotope 206 Pb, and ⁇ rays are not generated. This is because the generation of ⁇ -rays in the manufacturing process was considered to be the time of disintegration from 210 Po to the lead isotope 206 Pb. However, in fact, it was thought that Po was almost lost at the time of manufacture, but generation of ⁇ rays was continuously observed. Therefore, simply reducing the ⁇ -ray count of high-purity tin at the initial stage of manufacture cannot be said to be a fundamental solution.
- the present invention generates ⁇ rays of tin and tin alloys. It is an object to obtain a high-purity tin having a reduced ⁇ dose of tin that can be applied to a required material and a method for producing the same.
- Tin characterized in that the ⁇ dose of the sample after melting and casting is less than 0.0005 cph / cm 2 .
- each ⁇ dose is less than 0.0005 cph / cm 2 after 1 week, 3 weeks, 1 month, 2 months, 6 months and 30 months after melting and casting.
- tin. 3 The ⁇ dose measured for the first time of the sample is less than 0.0002 cph / cm 2 , and the difference between the ⁇ dose and the ⁇ dose measured after 5 months has passed is less than 0.0003 cph / cm 2.
- the ⁇ dose measured for the first time of the sample is less than 0.0002 cph / cm 2 , and the difference between the ⁇ dose and the ⁇ dose measured after 5 months has passed is less than 0.0003 cph / cm 2.
- Po has very high sublimability, and Po is sublimated when heated in the manufacturing process, for example, the melting / casting process. If the polonium isotope 210 Po is removed in the production process, it is considered that the polonium isotope 210 Po does not change into the lead isotope 206 Pb, and ⁇ rays are not generated (see “U” in FIG. 1). See Collapse chain). However, in the state isotope 210 Po little of polonium, caused the collapse of 210 Pb ⁇ 210 Bi ⁇ 210 Po ⁇ 206 Pb. And it turned out that it takes about 27 months (a little over 2 years) for this broken chain to be in an equilibrium state (refer FIG. 2).
- FIG. 3 shows the relationship between the Pb content and the ⁇ dose.
- the straight line shown in FIG. 3 is shifted up and down depending on the ratio of the lead isotopes 214 Pb, 210 Pb, 209 Pb, 208 Pb, 207 Pb, 206 Pb, and 204 Pb, and the ratio of the lead isotope 210 Pb is large. It turns out that it shifts up. That is, when the amount of the lead isotope 210 Pb exceeds 30 Bq / kg, the straight line shown in FIG. 3 moves upward.
- the measurement sample is covered with an aluminum plate (27 mg / cm 2 ), and after being left for two weeks or longer, 210 Bi beta rays generated from 210 Pb are measured for 6000 seconds with a low background beta ray measurement device. The net count rate of the measurement sample is obtained, and the radioactivity concentration of 210 Pb is calculated by correcting the count efficiency, chemical recovery rate, and the like.
- a low background beta ray measuring device LBC-471Q and LBC-4201 manufactured by Aloka Co., Ltd. were used.
- the lower limit of detection of the radioactive concentration of 210 Pb is “the detection can be guaranteed for the nuclide to be analyzed when the analysis / measurement conditions (test amount, chemical recovery rate, measurement time, counting efficiency, etc.) are determined. “Minimum radioactivity value”.
- the lead isotope 210 Pb can also be reduced.
- the alpha dose does not increase over time.
- the low abundance ratio of the lead isotope 206 Pb means that the ratio of the U-decay chain shown in FIG. 1 is relatively small, and the lead isotope 210 Pb belonging to this series also decreases. It is done.
- the polonium isotope 210 Po that generates alpha rays due to the decay of lead to the isotope 206 Pb after 1 week, 3 weeks, 1 month, 2 months, 6 months after melting and casting.
- each of the ⁇ doses less than 0.0005 cph / cm 2 after 30 months after 27 months when the collapse chain of 210 Pb ⁇ 210 Bi ⁇ 210 Po ⁇ 206 Pb is in equilibrium provide.
- the difference between the result of measuring the ⁇ dose of the melted and cast tin sample and the ⁇ dose after 5 months can be less than 0.0003 cph / cm 2 .
- the abundance ratio of the lead isotope 206 Pb is less than 25% in the raw material tin.
- the isotope 206 Pb abundance of lead and, in the four stable isotopes 208 Pb, 207 Pb, 206 Pb , 204 Pb lead refers to a ratio of 206 Pb.
- the measurement of the ⁇ dose of the first tin sample does not mean the measurement of the ⁇ dose of the tin sample immediately after melting and casting. That is, even if the ⁇ dose is measured at any time of the tin sample, it means that the difference from the ⁇ dose after 5 months is less than 0.0003 cph / cm 2 .
- the first ⁇ dose measurement is not a denial of measuring the ⁇ dose of the tin sample immediately after melting and casting.
- BG background ⁇ ray measuring apparatus
- the above ⁇ dose is a substantial ⁇ dose obtained by removing ⁇ rays emitted from the ⁇ ray measuring apparatus.
- the “ ⁇ dose” described in the present specification is used in this sense.
- ⁇ dose may be mitigated by components other than tin that have little or little ⁇ dose, but at least in the case of a tin alloy containing 40% or more of tin in the alloy component, the ⁇ dose is It can be said that it is desirable to use a small amount of the tin of the present invention.
- tin is purified by distillation or electrolysis.
- distillation must be repeated many times, and if there is an azeotrope, it is difficult to isolate and purify, and lead cannot be reduced to a level of 1 ppm or less.
- electrolytic method an electrolytic solution in which hexafluorosilicic acid and acid are mixed and an additive such as glue is added thereto is used.
- the standard electrode potentials of tin and lead are very close (tin-0.14V, lead-0.13V), so it is difficult to separate them, and lead contamination from hexafluorosilicic acid or additive glue etc. There is a limit that lead can be reduced only to several tens of ppm level.
- lead is removed to a level of 0.1 ppm by controlling the pH (strongly acidic pH region) and the tin concentration in the electrolyte in an electrolyte containing only acid without using hexafluorosilicic acid and additives. It became possible to do.
- the high-purity tin of the present invention thus obtained has an excellent effect that the occurrence of soft errors due to the influence of ⁇ rays of the semiconductor device can be remarkably reduced.
- the Sn concentration of the electrolytic solution is preferably 30 to 200 g / L. If it is less than 30 g / L, the impurity concentration becomes high, and if it exceeds 200 g / L, Sn oxide tends to precipitate, so it can be said that the above range is desirable. Note that the upper limit of the Sn concentration is more preferably 180 g / L or less. Further, it is desirable to use raw material tin in which the amount of lead isotope 210 Pb in the raw material tin is 30 Bq / kg or less. Although raw material tin containing the lead isotope 210 Pb in an amount exceeding this amount can be used, it can be said that it is desirable to enhance the purification effect and reduce it as much as possible.
- a present Example is an example to the last, and is not restrict
- the raw material tin shown in Table 1 was used. Table 1 shows the types of raw material tin and the amount of lead isotope 210 Pb (unit: Bq / kg) contained in the raw materials A to E.
- Example 1 Raw material tin having a purity level of 3N was leached with hydrochloric acid (or sulfuric acid), and a leaching solution having a pH of 1.0 and an Sn concentration of 80 g / L was used as an electrolytic solution. Electrolysis was carried out under conditions of an electrolysis temperature of 30 ° C. and a current density of 7 A / dm 2 by using a raw material tin cast plate as the anode and a titanium plate as the cathode. When the thickness of tin electrodeposited on the cathode reached about 2 mm, the electrolysis was once stopped, and the cathode was pulled up from the electrolytic cell, and the electrodeposited tin was peeled off from the cathode and recovered.
- hydrochloric acid or sulfuric acid
- the cathode was returned to the electrolytic cell, electrolysis was resumed, and this was repeated.
- the collected electrodeposited tin was washed and dried, and melted and cast at a temperature of 260 ° C. to obtain a tin ingot.
- This tin ingot was rolled to a thickness of about 1.5 mm and cut into 310 mm ⁇ 310 mm. This surface area is 961 cm 2 .
- the Pb content was 0.06 ppm
- the U content was ⁇ 5 ppb
- the Th content was ⁇ 5 ppb.
- the amount of unstable lead isotope 210 Pb in the raw material tin (raw material A) used here was 14 Bq / kg.
- the total amount of the four stable isotopes of lead was 1.81 ppm, and the abundance ratio of the stable isotope 206 Pb of lead was 24.86%.
- Gas Flow Proportional Counter model 8600A-LB manufactured by Ordela was used as the ⁇ -ray measuring device.
- the gas used is 90% argon-10% methane, the measurement time is 104 hours for both the background and the sample, and the first 4 hours is the time required for the measurement chamber purge. Used for.
- the polonium isotope 210 Po which generates ⁇ -rays due to the decay of lead into the isotope 206 Pb after 1 week, 3 weeks, 1 month, 2 months, 6 months, and lead isotope 206 Pb
- the ⁇ dose is at most 0.0003 cph / cm 2 . Yes, the conditions of the present invention were satisfied.
- the difference in both ⁇ doses of the measurement sample was 0.0001 cph / cm 2 , and the conditions of the present invention were satisfied. I met.
- the measured ⁇ dose is a substantial ⁇ dose obtained by removing ⁇ rays emitted from the ⁇ ray measuring apparatus.
- the leaching solution having a pH of 1.0 and an Sn concentration of 80 g / L was used as the electrolytic solution.
- this electrolytic solution condition (Sn concentration) was changed to have a pH of 1.0 and an Sn concentration of 30 g. Even when electrolytic purification was performed using a leaching solution having a pH of 1.0 and an Sn concentration of 180 g / L, substantially the same result was obtained.
- Example 2 Raw material tin having a purity level of 3N was leached with hydrochloric acid (or sulfuric acid), and a leaching solution having a pH of 1.0 and an Sn concentration of 80 g / L was used as an electrolytic solution. Electrolysis was carried out under conditions of an electrolysis temperature of 30 ° C. and a current density of 1 A / dm 2 using raw material tin cast into a plate for the anode and a titanium plate for the cathode. When the thickness of tin electrodeposited on the cathode reached about 2 mm, the electrolysis was once stopped, and the cathode was pulled up from the electrolytic cell, and the electrodeposited tin was peeled off from the cathode and recovered.
- the cathode was returned to the electrolytic cell, electrolysis was resumed, and this was repeated.
- the collected electrodeposited tin was washed and dried, and melted and cast at a temperature of 260 ° C. to obtain a tin ingot.
- This tin ingot was rolled to a thickness of about 1.5 mm and cut into 310 mm ⁇ 310 mm. This surface area is 961 cm 2 .
- the Pb content was 0.07 ppm
- the U content was ⁇ 5 ppb
- the Th content was ⁇ 5 ppb.
- the amount of unstable lead isotope 210 Pb in the raw material tin (raw material A: the same raw material as in Example 1) used here was 14 Bq / kg.
- the total amount of the four stable isotopes of lead was 1.81 ppm, and the abundance ratio of the stable isotope 206 Pb of lead was 24.86%.
- the polonium isotope 210 Po which generates ⁇ -rays due to the decay of lead into the isotope 206 Pb after 1 week, 3 weeks, 1 month, 2 months, 6 months, and lead isotope 206 Pb
- the ⁇ dose is at most 0.0003 cph / cm 2 . Yes, the conditions of the present invention were satisfied.
- the difference in both ⁇ doses of the measurement sample was 0.0001 cph / cm 2 , and the conditions of the present invention were satisfied. I met.
- the leaching solution having a pH of 1.0 and an Sn concentration of 80 g / L was used as the electrolytic solution.
- this electrolytic solution condition (Sn concentration) was changed to have a pH of 1.0 and an Sn concentration of 30 g. Similar results were obtained even when electrolytic purification was performed using a leaching solution of / L, pH: 1.0, and Sn concentration: 180 g / L.
- Example 3 Raw material tin having a purity level of 3N was leached with hydrochloric acid (or sulfuric acid), and a leaching solution having a pH of 1.0 and an Sn concentration of 80 g / L was used as an electrolytic solution. Electrolysis was carried out under conditions of an electrolysis temperature of 30 ° C. and a current density of 1 A / dm 2 using raw material tin cast into a plate for the anode and a titanium plate for the cathode. When the thickness of tin electrodeposited on the cathode reached about 2 mm, the electrolysis was once stopped, and the cathode was pulled up from the electrolytic cell, and the electrodeposited tin was peeled off from the cathode and recovered.
- the cathode was returned to the electrolytic cell, electrolysis was resumed, and this was repeated.
- the collected electrodeposited tin was washed and dried, and melted and cast at a temperature of 260 ° C. to obtain a tin ingot.
- This tin ingot was rolled to a thickness of about 1.5 mm and cut into 310 mm ⁇ 310 mm. This surface area is 961 cm 2 .
- the Pb content was 0.05 ppm
- the U content was ⁇ 5 ppb
- the Th content was ⁇ 5 ppb.
- the amount of unstable lead isotope 210 Pb in the raw material tin (raw material B) used here was 15 Bq / kg.
- the total amount of the four stable isotopes of lead was 3.8 ppm, and the abundance ratio of the stable isotope 206 Pb of lead was 24.74%.
- the polonium isotope 210 Po which generates ⁇ -rays due to the decay of lead into the isotope 206 Pb after 1 week, 3 weeks, 1 month, 2 months, 6 months, and lead isotope 206 Pb
- the ⁇ dose is 0.0002 cph / cm 2 at the maximum. Yes, the conditions of the present invention were satisfied.
- the difference in both ⁇ doses of the measurement sample was 0.0001 cph / cm 2 , and the conditions of the present invention were satisfied. I met.
- the leaching solution having a pH of 1.0 and an Sn concentration of 80 g / L was used as the electrolytic solution.
- this electrolytic solution condition (Sn concentration) was changed to have a pH of 1.0 and an Sn concentration of 30 g. Similar results were obtained even when electrolytic purification was performed using a leaching solution of / L, pH: 1.0, and Sn concentration: 180 g / L.
- Example 4 Raw material tin having a purity level of 3N was leached with hydrochloric acid (or sulfuric acid), and a leaching solution having a pH of 1.0 and an Sn concentration of 80 g / L was used as an electrolytic solution.
- Raw material tin was cast into a plate shape for the anode and a titanium plate was used for the cathode, and electrolysis was performed twice under the conditions of an electrolysis temperature of 30 ° C. and a current density of 7 A / dm 2 . That is, in this step, the electrodeposited tin collected at the first time is melted and cast into a plate shape to make an anode plate, and re-electrolysis (second electrolysis) is performed.
- the electrolysis step when the thickness of tin electrodeposited on the cathode reached about 2 mm, the electrolysis was once stopped, and the cathode was lifted from the electrolytic cell, and the electrodeposited tin was peeled off from the cathode and collected. After collection, the cathode was returned to the electrolytic cell, electrolysis was resumed, and this was repeated. The collected electrodeposited tin was washed and dried, and melted and cast at a temperature of 260 ° C. to obtain a tin ingot.
- This tin ingot was rolled to a thickness of about 1.5 mm and cut into 310 mm ⁇ 310 mm. This surface area is 961 cm 2 .
- the Pb content was 0.06 ppm
- the U content was ⁇ 5 ppb
- the Th content was ⁇ 5 ppb.
- the amount of unstable lead isotope 210 Pb in the raw material tin (raw material C) used here was 48 ⁇ 6.2 Bq / kg.
- the total amount of the four stable isotopes of lead was 11.55 ppm, and the abundance ratio of the stable isotope 206 Pb of lead was 25.97%.
- the polonium isotope 210 Po that generates ⁇ -rays due to the decay of lead into the isotope 206 Pb after 1 week, 3 weeks, 1 month, 2 months, 6 months, and lead isotope 206 Pb
- the ⁇ dose is at most 0.0005 cph / cm 2 It was small and satisfied the conditions of the present invention.
- the ⁇ dose difference was 0.0002 cph / cm 2 , which satisfied the conditions of the present invention.
- the leaching solution having a pH of 1.0 and an Sn concentration of 80 g / L was used as the electrolytic solution.
- this electrolytic solution condition (Sn concentration) was changed to have a pH of 1.0 and an Sn concentration of 30 g. Similar results were obtained even when electrolytic purification was performed using a leaching solution of / L, pH: 1.0, and Sn concentration: 180 g / L.
- Example 5 Raw material tin having a purity level of 3N was leached with hydrochloric acid (or sulfuric acid), and a leaching solution having a pH of 1.0 and an Sn concentration of 80 g / L was used as an electrolytic solution. Electrolysis was carried out under conditions of an electrolysis temperature of 30 ° C. and a current density of 7 A / dm 2 by using a raw material tin cast plate as the anode and a titanium plate as the cathode. When the thickness of tin electrodeposited on the cathode reached about 2 mm, the electrolysis was once stopped, and the cathode was pulled up from the electrolytic cell, and the electrodeposited tin was peeled off from the cathode and recovered.
- the cathode was returned to the electrolytic cell, electrolysis was resumed, and this was repeated.
- the collected electrodeposited tin was washed and dried, and melted and cast at a temperature of 260 ° C. to obtain a tin ingot.
- This tin ingot was rolled to a thickness of about 1.5 mm and cut into 310 mm ⁇ 310 mm. This surface area is 961 cm 2 .
- the Pb content was 0.06 ppm
- the U content was ⁇ 5 ppb
- the Th content was ⁇ 5 ppb.
- the amount of unstable lead isotope 210 Pb in the raw material tin (raw material E) used here was 24 Bq / kg.
- the total amount of the four stable isotopes of lead was 4.5 ppm, and the abundance ratio of the stable isotope 206 Pb of lead was 22.22%.
- the polonium isotope 210 Po which generates ⁇ -rays due to the decay of lead into the isotope 206 Pb after 1 week, 3 weeks, 1 month, 2 months, 6 months, and lead isotope 206 Pb
- the ⁇ dose is 0.0005 cph / cm 2 at the maximum. Yes, the conditions of the present invention were satisfied.
- the difference in both ⁇ doses of the measurement sample was 0.0002 cph / cm 2 , and the conditions of the present invention were satisfied. I met.
- the leaching solution having a pH of 1.0 and an Sn concentration of 80 g / L was used as the electrolytic solution.
- this electrolytic solution condition (Sn concentration) was changed to have a pH of 1.0 and an Sn concentration of 30 g. Similar results were obtained even when electrolytic purification was performed using a leaching solution of / L, pH: 1.0, and Sn concentration: 180 g / L.
- the electrolysis was once stopped, and the cathode was pulled up from the electrolytic cell, and the electrodeposited tin was peeled off from the cathode and recovered. After collection, the cathode was returned to the electrolytic cell, electrolysis was resumed, and this was repeated. The collected electrodeposited tin was washed and dried, and melted and cast at a temperature of 260 ° C. to obtain a tin ingot.
- This tin ingot was rolled to a thickness of about 1.5 mm and cut into 310 mm ⁇ 310 mm. This surface area is 961 cm 2 .
- the Pb content was 0.07 ppm
- the U content was ⁇ 5 ppb
- the Th content was ⁇ 5 ppb.
- the amount of unstable lead isotope 210 Pb in the raw material tin (raw material D) used here was 60 ⁇ 7.2 Bq / kg.
- the total amount of the four stable isotopes of lead was 12.77 ppm, and the abundance ratio of the stable isotope 206 Pb of lead was 25.06%.
- the ⁇ dose after 3 weeks from melting and casting was the same level as the background (BG) ⁇ dose, but it clearly increased 6 months after melting and casting.
- the dose (difference from the background ⁇ dose) was 0.02 cph / cm 2 , which did not satisfy the conditions of the present invention.
- Comparative Example 2 Raw material tin having a purity level of 3N was leached with hydrochloric acid (or sulfuric acid), and a leaching solution having a pH of 1.0 and an Sn concentration of 80 g / L was used as an electrolytic solution.
- Raw material tin was cast into a plate shape for the anode, and a titanium plate was used for the cathode, and electrolysis was performed under conditions of an electrolysis temperature of 30 ° C. and a current density of 7 A / dm 2 .
- the electrolysis was once stopped, and the cathode was pulled up from the electrolytic cell, and the electrodeposited tin was peeled off from the cathode and recovered. After collection, the cathode was returned to the electrolytic cell, electrolysis was resumed, and this was repeated. The collected electrodeposited tin was washed and dried, and melted and cast at a temperature of 260 ° C. to obtain a tin ingot.
- This tin ingot was rolled to a thickness of about 1.5 mm and cut into 310 mm ⁇ 310 mm. This surface area is 961 cm 2 .
- the Pb content was 0.09 ppm
- the U content was ⁇ 5 ppb
- the Th content was ⁇ 5 ppb.
- the amount of unstable lead isotope 210 Pb in the raw material tin (raw material C: the same raw material as in Example 4) used here was 48 ⁇ 6.2 Bq / kg.
- the total amount of the four stable isotopes of lead was 11.55 ppm, and the abundance ratio of the stable isotope 206 Pb of lead was 25.97%.
- the ⁇ dose after 3 weeks from melting / casting was the same level as the background (BG) ⁇ dose, but it clearly increased 6 months after melting / casting.
- (Difference with the background ⁇ dose) was 0.01 cph / cm 2 , which did not satisfy the conditions of the present invention.
- This is a melting / casting process, but the alpha dose temporarily decreased due to the sublimation of Po, but the purification effect was not sufficient, and it contained a large amount of Pb, resulting in a large amount of 210 Pb. chain (210 Pb ⁇ 210 Bi ⁇ 210 Po ⁇ 206 Pb) is considered to be due to the increase is in ⁇ dose is built.
- the difference in ⁇ dose was 0.007 cph / cm 2 , which did not satisfy the conditions of the present invention.
- the total amount of the four stable isotopes of lead was 3.9 ppm, The abundance ratio of stable isotope 206 Pb was 25%.
- the ⁇ dose after 3 weeks from melting / casting was the same level as the background (BG) ⁇ dose, but it clearly increased 6 months after melting / casting.
- (Difference with the background ⁇ dose) was 0.0008 cph / cm 2 , which did not satisfy the conditions of the present invention. This is because the alpha dose temporarily decreased due to Po sublimation in the melting / casting process, but the purification effect was not sufficient, and it contained a lot of Pb, resulting in a lot of 210 Pb. ( 210 Pb ⁇ 210 Bi ⁇ 210 Po ⁇ 206 Pb) is constructed and it is considered that the ⁇ dose increased.
- the difference in ⁇ dose was 0.0004 cph / cm 2 , which also did not satisfy the conditions of the present invention. It was.
- the electrolysis was once stopped, and the cathode was pulled up from the electrolytic cell, and the electrodeposited tin was peeled off from the cathode and recovered. After collection, the cathode was returned to the electrolytic cell, electrolysis was resumed, and this was repeated.
- the recovered electrodeposited tin was washed and dried, and melted and cast at a temperature of 260 ° C. to obtain a tin ingot.
- This tin ingot was rolled to a thickness of about 1.5 mm and cut into 310 mm ⁇ 310 mm. This surface area is 961 cm 2 . This was used as an ⁇ -ray measurement sample.
- the Pb content was 0.7 ppm
- the U content was ⁇ 5 ppb
- the Th content was ⁇ 5 ppb.
- the amount of unstable lead isotope 210 Pb in the raw material tin (raw material A: the same raw material as in Example 1) used here was 14 Bq / kg.
- the total amount of the four stable isotopes of lead was 1.81 ppm
- the abundance ratio of the stable isotope 206 Pb of lead was 24.86%.
- the ⁇ dose after 3 weeks from melting / casting was the same level as the background (BG) ⁇ dose, but it clearly increased 6 months after melting / casting. (Difference with the background ⁇ dose) was 0.0003 cph / cm 2 , which did not satisfy the conditions of the present invention.
- Example 5 (0.5% Cu-3% Ag-tin alloy consisting of remaining Sn)
- the tin produced in Example 1 was prepared.
- the additive elements of the tin alloy of this example were 6N—Ag and 6N—Cu, which were obtained by highly purifying commercially available silver and copper by electrolysis. These were added to the above tin and melted and cast at 260 ° C. to produce a Sn—Cu—Ag alloy ingot composed of 0.5% Cu—3% Ag—remainder Sn.
- the ingot was rolled to a thickness of about 1.5 mm and cut into 310 mm ⁇ 310 mm. This surface area is 961 cm 2 . This was used as an ⁇ -ray measurement sample. In this sample, the Pb content was 0.06 ppm, the U content was ⁇ 5 ppb, and the Th content was ⁇ 5 ppb.
- the polonium isotope 210 Po which generates ⁇ -rays due to the decay of lead into the isotope 206 Pb after 1 week, 3 weeks, 1 month, 2 months, 6 months, and lead isotope 206 Pb
- the ⁇ dose is at most 0.0003 cph / cm 2 . Yes, the conditions of the present invention were satisfied.
- the ⁇ dose difference was 0.0001 cph / cm 2 , which satisfied the conditions of the present invention.
- Example 6 (3.5% Ag-tin alloy consisting of Sn)
- the tin produced in Example 1 was prepared.
- Silver, which is an additive element of the tin alloy of this example, is obtained by dissolving commercially available Ag with nitric acid, adding HCl to this to precipitate AgCl, and further reducing this with hydrogen to obtain high purity Ag of 5N-Ag. Obtained. This was added to the tin and melted and cast at 260 ° C. to produce a Sn—Ag alloy ingot composed of 3.5% Ag—the balance Sn.
- the ingot was rolled to a thickness of about 1.5 mm and cut into 310 mm ⁇ 310 mm. This surface area is 961 cm 2 . This was used as an ⁇ -ray measurement sample. In this sample, the Pb content was 0.06 ppm, the U content was ⁇ 5 ppb, and the Th content was ⁇ 5 ppb.
- the polonium isotope 210 Po which generates ⁇ -rays due to the decay of lead into the isotope 206 Pb after 1 week, 3 weeks, 1 month, 2 months, 6 months, and lead isotope 206 Pb
- the ⁇ dose is at most 0.0003 cph / cm 2 . Yes, the conditions of the present invention were satisfied.
- the difference in ⁇ dose was 0.0001 cph / cm 2 , which satisfied the conditions of the present invention.
- Example 7 Tein alloy consisting of 9% Zn-balance Sn
- the tin produced in Example 1 was prepared.
- commercially available zinc was purified to 6N—Zn by electrolysis. These were added to the tin and melted and cast at 240 ° C. to produce a Sn—Zn alloy ingot composed of 9% Zn—the balance Sn.
- the ingot was rolled to a thickness of about 1.5 mm and cut into 310 mm ⁇ 310 mm. This surface area is 961 cm 2 .
- the polonium isotope 210 Po which generates ⁇ -rays due to the decay of lead into the isotope 206 Pb after 1 week, 3 weeks, 1 month, 2 months, 6 months, and lead isotope 206 Pb
- the ⁇ dose is at most 0.0003 cph / cm 2 . Yes, the conditions of the present invention were satisfied.
- the difference in ⁇ dose was 0.0001 cph / cm 2 , which satisfied the conditions of the present invention.
- Example 5 (Comparative Example 5) (0.5% Cu-3% Ag-tin alloy consisting of remaining Sn)
- the tin produced in Example 1 was prepared.
- Commercially available 3N level silver and copper were used as additive elements of the tin alloy of this example. These were added to the above tin and melted and cast at 260 ° C. to produce a Sn—Cu—Ag alloy ingot composed of 0.5% Cu—3% Ag—remainder Sn.
- the Pb content was 7.1 ppm
- the U content was 10 ppb
- the Th content was 10 ppb.
- the ⁇ dose at 3 weeks after melting and casting was at the same level as the background, but it clearly increased after 6 months from melting and casting, and the ⁇ dose of this sample (background ⁇ dose) Difference) was 0.1 cph / cm 2 , which did not satisfy the conditions of the present invention.
- the difference in ⁇ dose is 0.005 cph / cm 2 , which also does not satisfy the conditions of the present invention. It was.
- Example 6 (3.5% Ag-tin alloy consisting of Sn)
- the tin produced in Example 1 was prepared.
- Silver, which is an additive element of the tin alloy of this example, is a Sn—Ag alloy composed of 3.5% Ag—the balance Sn, which is prepared by adding commercially available 3N level Ag to the tin, melting and casting at 260 ° C. An ingot was manufactured. In this sample, the Pb content was 5.3 ppm, the U content was 7 ppb, and the Th content was 6 ppb.
- the ⁇ dose at 3 weeks after melting and casting was at the same level as the background, but it clearly increased after 6 months from melting and casting, and the ⁇ dose of this sample (background ⁇ dose) Difference) was 0.03 cph / cm 2 , which did not satisfy the conditions of the present invention.
- the difference in ⁇ dose was 0.002 cph / cm 2 , which also did not satisfy the conditions of the present invention. It was.
- the alpha dose temporarily decreased because Po sublimated in the melting / casting process, it contained a large amount of Pb, and as a result, it contained a large amount of 210 Pb, so that the collapse chain ( 210 Pb ⁇ 210 Bi ⁇ 210 Po ⁇ 206 Pb), and the ⁇ dose is thought to have increased.
- Example 7 Tetin alloy consisting of 9% Zn-balance Sn
- the tin produced in Example 1 was prepared.
- As the additive element of the tin alloy of this example commercially available 3N level zinc was used. These were added to the tin and melted and cast at 240 ° C. to produce a Sn—Zn alloy ingot composed of 9% Zn—remainder Sn.
- the Pb content was 15.1 ppm
- the U content was 12 ppb
- the Th content was 10 ppb.
- the ⁇ dose at 3 weeks after melting and casting was at the same level as the background, but it clearly increased after 6 months from melting and casting, and the ⁇ dose of this sample (background ⁇ dose) Difference) was 0.5 cph / cm 2 , which did not satisfy the conditions of the present invention.
- the difference in ⁇ dose is 0.01 cph / cm 2 , which also does not satisfy the conditions of the present invention. It was.
- the present invention has an excellent effect that it can provide tin and a tin alloy that can be applied to a material with less ⁇ -rays, so that the influence of ⁇ -rays on the semiconductor chip can be eliminated as much as possible. Therefore, the occurrence of soft errors due to the influence of ⁇ rays of the semiconductor device can be remarkably reduced, and it is useful as a material for locations where tin such as a solder material is used.
Abstract
Description
最近の半導体装置は、高密度化及び動作電圧やセルの容量が低下しているので、半導体チップ近傍の材料からのα線の影響により、ソフトエラーが発生する危険が多くなってきた。このようなことから、前記はんだ材料及び錫の高純度化の要求があり、またα線の少ない材料が求められている。
しかし、この場合、錫に添加した後で、Pbをさらに除去しなければならないという煩雑な工程が必要であり、また錫を精錬した3年後にはα線量が大きく低下した数値を示しているが、3年を経ないとこのα線量が低下した錫を使用できないというようにも理解されるので、産業的には効率が良い方法とは言えない。
しかし、このような材料の添加によっても放射線α粒子のカウント数を減少できたのは0.015cph/cm2レベルであり、今日の半導体装置用材料としては期待できるレベルには達していない。
さらに問題となるのは、添加する材料としてアルカリ金属元素、遷移金属元素、重金属元素など、半導体に混入しては好ましくない元素が用いられていることである。したがって、半導体装置組立て用材料としてはレベルが低い材料と言わざるを得ない。
これらはいずれも、放射線α粒子のカウント数の許容量が緩やかで、今日の半導体装置用材料としては期待できるレベルには達していない問題がある。
製造工程でのα線の発生は、この210Poから鉛の同位体206Pbへの壊変時と考えられたからである。しかし、実際には、製造時にPoが殆ど消失したと考えられていたのに、引き続きα線の発生が見られた。したがって、単に製造初期の段階で、高純度錫のα線カウント数を低減させるだけでは、根本的な問題の解決とは言えなかった。
1)溶解・鋳造した後の試料のα線量が0.0005cph/cm2未満であることを特徴とする錫。
2)溶解・鋳造から1週間後、3週間後、1ヵ月後、2ヵ月後、6ヵ月後及び30ヵ月後の、それぞれのα線量が0.0005cph/cm2未満であることを特徴とする錫。
3)試料の第1回目に測定したα線量が0.0002cph/cm2未満であって、そのα線量と、それから5ヶ月経過した後に測定したα線量との差が0.0003cph/cm2未満であることを特徴とする錫。
4)試料の第1回目に測定したα線量が0.0002cph/cm2未満であって、そのα線量と、それから5ヶ月経過した後に測定したα線量との差が0.0003cph/cm2未満であることを特徴とする1)又は2)記載の錫。
5)Pb含有量が0.1ppm以下であることを特徴とする1)~4)のいずれか一項に記載の錫。
6)U,Thのそれぞれの含有量が5ppb以下であることを特徴とする1)~3)のいずれか一項に記載の錫。
7)前記1)~6)のいずれか一項に記載の錫を40%以上含有する錫合金。
8)純度3Nレベルの原料錫を塩酸又は硫酸で浸出した後、pH1.0以下、Sn濃度200g/L以下の電解液を用いて電解精製することを特徴とする前記1)~6)のいずれか一項に記載の錫の製造方法。
9)Sn濃度を30~180g/Lとして電解することを特徴とする8)記載の錫の製造方法。
10)原料錫中の鉛の同位体210Pbの量が30Bq/kg以下である原料錫を用いることを特徴とする8)又は9)記載の錫の製造方法。
半導体用Pbフリーはんだ材料はSn-Ag-Cu、Sn-Ag、Sn-Cu、Sn-Zn等が開発されており、低αの錫材料が求められているが、錫中の微量の鉛を完全に除去することは非常に困難であり、通常半導体用の錫材料には10ppmレベル以上の鉛が含有されている。
しかし、ポロニウムの同位体210Poが殆どない状態において、210Pb→210Bi→210Po→206Pbの崩壊が起こる。そして、この崩壊チェーンが平衡状態になるには約27ヶ月(2年強)を要することが分かった(図2参照)。
従って、製品製造直後はα線量が低くても問題は解決せず、時間の経過とともに徐々にα線量が高くなり、ソフトエラーが起こる危険性が高まるという問題が生ずるのである。前記約27ヶ月(2年強)は、決して短い期間ではない。
図3にPb含有量とα線量との関係を示す。この図3に示す直線は、鉛の同位体214Pb、210Pb、209Pb、208Pb、207Pb、206Pb、204Pbの割合によって上下にシフトし、鉛の同位体210Pbの割合が大きいほど上にシフトすることが分かった。すなわち、鉛の同位体210Pbの量が30Bq/kgを超えると、図3に示す直線は上方に移動する。
分析試料に混酸(硝酸・塩酸)を加えて溶解後、鉛、カルシウム担体を添加し、アンモニア水を用いて水酸化物沈殿を生成させ、錫を除去する。上澄みにアンモニア水と炭酸ナトリウムを入れ、炭酸塩沈殿を生成させる。この沈殿物を塩酸で溶解し、Srレジンカラムに通す。溶出液に硝酸を加え硫酸塩沈殿を生成した後、マウントし測定試料とする。この測定試料にアルミ板(27mg/cm2)をかぶせ、2週間以上放置後、低バックグラウンドベータ線測定装置で210Pbから生成した210Biのベータ線を6000秒間測定する。測定試料の正味計数率を求め、計数効率、化学回収率等の補正を行い210Pbの放射能濃度を算出する。なお、測定機器として、低バックグラウンドベータ線測定装置、アロカ社製LBC-471Q及びLBC-4201を用いた。また、210Pbの放射能濃度の検出下限値は、分析・測定条件(供試量、化学回収率、測定時間、計数効率等)が決定した時に、分析対象となる核種について「検出を保証できる最小の放射能値」とする。
また、鉛の同位体206Pbの存在比が少ないということは、図1に示すU崩壊チェーンの比率が相対的に小さいということであり、この系列に属する鉛の同位体210Pbも少なくなると考えられる。
具体的には、溶解・鋳造から1週間後、3週間後、1ヵ月後、2ヵ月後、6ヵ月後及び鉛の同位体206Pbへの壊変によるα線を発生させるポロニウムの同位体210Poがない状態において、210Pb→210Bi→210Po→206Pbの崩壊チェーンが平衡状態になる27ヶ月を過ぎた30ヵ月後の、それぞれのα線量が0.0005cph/cm2未満である錫を提供する。
以上については、錫から発生するα線量について述べたが、錫を含有する合金においても、同様にα線量の影響を強く受ける。α線量が少ないか又は殆ど発生しない錫以外の成分によりα線量の影響が緩和されることもあるが、少なくとも合金成分中に、錫が40%以上含有する錫合金の場合については、α線量が少ない本発明の錫を用いることが望ましいと言える。
また、電解法では、ヘキサフルオロケイ酸と酸とを混合し、これにニカワ等の添加剤を加えた電解液を用いる。しかし、錫と鉛は標準電極電位が非常に近い(錫-0.14V、鉛-0.13V)ので分離が困難であり、また、ヘキサフルオロケイ酸や添加剤のニカワ等から鉛の汚染を受けることがあり、鉛を数10ppmレベルまでしか低減できないという限界がある。
このようにして得た本願発明の高純度錫は、半導体装置のα線の影響によるソフトエラーの発生を著しく減少できるという優れた効果を有する。
なお、以下の実施例及び比較例に示す原料については、表1に示す原料錫を使用した。表1には原料錫の種類と各原料A~Eに含まれる鉛の同位体210Pb量(単位:Bq/kg)を示す。
純度3Nレベルの原料錫を塩酸(または硫酸)で浸出し、pH1.0、Sn濃度:80g/Lの浸出液を電解液とした。陽極には原料錫を鋳込み板形状のものを、陰極にはチタン製の板を用い、電解温度30°C、電流密度7A/dm2という条件で電解を行った。
陰極に電着する錫の厚さが2mm程度になると一旦電解を停止し、陰極を電解槽から引き上げて陰極から電着錫を剥がして回収した。回収後は陰極を電解槽に戻し、電解を再開し、これを繰り返した。回収した電着錫を洗浄・乾燥し、260°C温度で溶解・鋳造し、錫インゴットとした。
この試料中のPb含有量0.06ppm、U含有量<5ppb、Th含有量<5ppbとなった。
また、ここで用いた原料錫(原料A)における、鉛の不安定同位体210Pbの量は14Bq/kgであった。そして、鉛の4つの安定同位体の合計量は1.81ppm、鉛の安定同位体206Pbの存在比は24.86%であった。なお、ここでの鉛の同位体206Pbの存在比とは、鉛の4つの同位体208Pb、207Pb、206Pb、204Pbにおいて、206Pbの占める割合のことをいう。以下の実施例においても、同様とする。
なお、この実施例では、pH1.0、Sn濃度:80g/Lの浸出液を電解液とした場合であるが、この電解液条件(Sn濃度)を替え、pH:1.0、Sn濃度:30g/Lの浸出液、又pH:1.0、Sn濃度:180g/Lの浸出液を用いて電解精製しても、ほぼ同様な結果が得られた。
純度3Nレベルの原料錫を塩酸(または硫酸)で浸出し、pH1.0、Sn濃度:80g/Lの浸出液を電解液とした。陽極には原料錫を鋳込み板形状のものを、陰極にはチタン製の板を用い、電解温度30°C、電流密度1A/dm2という条件で電解を行った。
陰極に電着する錫の厚さが2mm程度になると一旦電解を停止し、陰極を電解槽から引き上げて陰極から電着錫を剥がして回収した。回収後は陰極を電解槽に戻し、電解を再開し、これを繰り返した。回収した電着錫を洗浄・乾燥し、260°C温度で溶解・鋳造し、錫インゴットとした。
この試料中のPb含有量0.07ppm、U含有量<5ppb、Th含有量<5ppbとなった。
また、ここで用いた原料錫(原料A:実施例1と同一の原料)における、鉛の不安定同位体210Pbの量は14Bq/kgであった。そして、鉛の4つの安定同位体の合計量は1.81ppm、鉛の安定同位体206Pbの存在比は24.86%であった。
また、同一試料について、1ヶ月後と6ヶ月後の5ヶ月間の、経時変化を見た場合、測定試料のα線量の双方の差は0.0001cph/cm2であり、本願発明の条件を満たしていた。
なお、この実施例では、pH1.0、Sn濃度:80g/Lの浸出液を電解液とした場合であるが、この電解液条件(Sn濃度)を替え、pH:1.0、Sn濃度:30g/Lの浸出液、又pH:1.0、Sn濃度:180g/Lの浸出液を用いて電解精製してもほぼ同様な結果が得られた。
純度3Nレベルの原料錫を塩酸(または硫酸)で浸出し、pH1.0、Sn濃度:80g/Lの浸出液を電解液とした。
陽極には原料錫を鋳込み板形状のものを、陰極にはチタン製の板を用い、電解温度30°C、電流密度1A/dm2という条件で電解を行った。
陰極に電着する錫の厚さが2mm程度になると一旦電解を停止し、陰極を電解槽から引き上げて陰極から電着錫を剥がして回収した。回収後は陰極を電解槽に戻し、電解を再開し、これを繰り返した。回収した電着錫を洗浄・乾燥し、260°C温度で溶解・鋳造し、錫インゴットとした。
この試料中のPb含有量0.05ppm、U含有量<5ppb、Th含有量<5ppbとなった。
また、ここで用いた原料錫(原料B)における、鉛の不安定同位体210Pbの量は15Bq/kgであった。そして、鉛の4つの安定同位体の合計量は3.8ppm、鉛の安定同位体206Pbの存在比は24.74%であった。
また、同一試料について、1ヶ月後と6ヶ月後の5ヶ月間の、経時変化を見た場合、測定試料のα線量の双方の差は0.0001cph/cm2であり、本願発明の条件を満たしていた。
なお、この実施例では、pH1.0、Sn濃度:80g/Lの浸出液を電解液とした場合であるが、この電解液条件(Sn濃度)を替え、pH:1.0、Sn濃度:30g/Lの浸出液、又pH:1.0、Sn濃度:180g/Lの浸出液を用いて電解精製してもほぼ同様な結果が得られた。
純度3Nレベルの原料錫を塩酸(または硫酸)で浸出し、pH1.0、Sn濃度:80g/Lの浸出液を電解液とした。陽極には原料錫を鋳込み板形状のものを、陰極にはチタン製の板を用い、電解温度30°C、電流密度7A/dm2という条件の電解を2回行った。すなわち、この工程は、1回目で回収した電着錫を溶解・鋳造して板形状にしたものを陽極板とし、再電解(第2回目の電解)を行うものである。
なお、前記電解工程においては、陰極に電着する錫の厚さが2mm程度になると一旦電解を停止し、陰極を電解槽から引き上げて陰極から電着錫を剥がして回収した。回収後は陰極を電解槽に戻し、電解を再開し、これを繰り返した。回収した電着錫を洗浄・乾燥し、260°C温度で溶解・鋳造し、錫インゴットとした。
この試料中のPb含有量0.06ppm、U含有量<5ppb、Th含有量<5ppbとなった。
また、ここで用いた原料錫(原料C)における、鉛の不安定同位体210Pbの量は48±6.2Bq/kgであった。そして、鉛の4つの安定同位体の合計量は11.55ppm、鉛の安定同位体206Pbの存在比は25.97%であった。
純度3Nレベルの原料錫を塩酸(または硫酸)で浸出し、pH1.0、Sn濃度:80g/Lの浸出液を電解液とした。陽極には原料錫を鋳込み板形状のものを、陰極にはチタン製の板を用い、電解温度30°C、電流密度7A/dm2という条件で電解を行った。
陰極に電着する錫の厚さが2mm程度になると一旦電解を停止し、陰極を電解槽から引き上げて陰極から電着錫を剥がして回収した。回収後は陰極を電解槽に戻し、電解を再開し、これを繰り返した。回収した電着錫を洗浄・乾燥し、260°C温度で溶解・鋳造し、錫インゴットとした。
この試料中のPb含有量0.06ppm、U含有量<5ppb、Th含有量<5ppbとなった。
また、ここで用いた原料錫(原料E)における、鉛の不安定同位体210Pbの量は24Bq/kgであった。そして、鉛の4つの安定同位体の合計量は4.5ppm、鉛の安定同位体206Pbの存在比は22.22%であった。
また、同一試料について、1ヶ月後と6ヶ月後の5ヶ月間の、経時変化を見た場合、測定試料のα線量の双方の差は0.0002cph/cm2であり、本願発明の条件を満たしていた。
なお、この実施例では、pH1.0、Sn濃度:80g/Lの浸出液を電解液とした場合であるが、この電解液条件(Sn濃度)を替え、pH:1.0、Sn濃度:30g/Lの浸出液、又pH:1.0、Sn濃度:180g/Lの浸出液を用いて電解精製してもほぼ同様な結果が得られた。
純度3Nレベルの原料錫を塩酸(または硫酸)で浸出し、pH1.0、Sn濃度:80g/Lの浸出液を電解液とした。
陽極には原料錫を鋳込み板形状のものを、陰極にはチタン製の板を用い、電解温度30°C、電流密度7A/dm2という条件の電解を行った。
陰極に電着する錫の厚さが2mm程度になると一旦電解を停止し、陰極を電解槽から引き上げて陰極から電着錫を剥がして回収した。回収後は陰極を電解槽に戻し、電解を再開し、これを繰り返した。回収した電着錫を洗浄・乾燥し、260°C温度で溶解・鋳造し、錫インゴットとした。
この試料中のPb含有量0.07ppm、U含有量<5ppb、Th含有量<5ppbとなった。
また、ここで用いた原料錫(原料D)における、鉛の不安定同位体210Pbの量は60±7.2Bq/kgであった。そして、鉛の4つの安定同位体の合計量は12.77ppm、鉛の安定同位体206Pbの存在比は25.06%であった。
上記試料について、溶解・鋳造から3週間後のα線量は、バックグラウンド(BG)α線量と同レベルであったが、溶解・鋳造から6ヵ月後で明らかに増加しており、本試料のα線量(バックグラウンドα線量との差)が0.02cph/cm2となり、本願発明の条件を満たしていなかった。
また、同一試料について、1ヶ月後と6ヶ月後の5ヶ月間の、経時変化を見た場合、α線量の差は0.007cph/cm2であり、本願発明の条件を満たしていなかった。
純度3Nレベルの原料錫を塩酸(または硫酸)で浸出し、pH1.0、Sn濃度:80g/Lの浸出液を電解液とした。
陽極には原料錫を鋳込み板形状のものを、陰極にはチタン製の板を用い、電解温度30°C、電流密度7A/dm2という条件の電解を行った。
陰極に電着する錫の厚さが2mm程度になると一旦電解を停止し、陰極を電解槽から引き上げて陰極から電着錫を剥がして回収した。回収後は陰極を電解槽に戻し、電解を再開し、これを繰り返した。回収した電着錫を洗浄・乾燥し、260°C温度で溶解・鋳造し、錫インゴットとした。
この試料中のPb含有量0.09ppm、U含有量<5ppb、Th含有量<5ppbとなった。
また、ここで用いた原料錫(原料C:実施例4と同一の原料)における、鉛の不安定同位体210Pbの量は48±6.2Bq/kgであった。そして、鉛の4つの安定同位体の合計量は11.55ppm、鉛の安定同位体206Pbの存在比は25.97%であった。
これは溶解・鋳造工程で、Poが昇華したため一時的にα線量が低くなったものの、精製効果が十分ではなく、Pbを多く含有し、結果として210Pbも多く含有しているために再び崩壊チェーン(210Pb→210Bi→210Po→206Pb)が構築されてα線量が増加したためと考えられる。
また、同一試料について、1ヶ月後と6ヶ月後の5ヶ月間の、経時変化を見た場合、α線量の差は0.007cph/cm2であり、本願発明の条件を満たしていなかった。
Pbを4ppm含有する錫を、260°Cの温度で溶解・鋳造し、錫インゴットとした。この錫インゴットを圧延し、約1.5mmの厚さとし、310mm×310mmに切り出した。この表面積は961cm2である。これをα線測定試料とした。
この試料中のPb含有量4ppm、U含有量<5ppb、Th含有量<5ppbとなった。
また、ここで用いた原料錫(実施例3で用いた原料Bと実施例3で作製した錫とを調整した原料)において、鉛の4つの安定同位体の合計量は3.9ppm、鉛の安定同位体206Pbの存在比は25%であった。
これは溶解・鋳造工程でPoが昇華したため一時的にα線量が低くなったものの、精製効果が十分ではなく、Pbを多く含有し、結果として210Pbも多く含有しているために再び崩壊チェーン(210Pb→210Bi→210Po→206Pb)が構築されてα線量が増加したためと考えられる。
また、同一試料について、1ヶ月後と6ヶ月後の5ヶ月間の、経時変化を見た場合、α線量の差は0.0004cph/cm2であり、これも本願発明の条件を満たしていなかった。
純度3Nレベルの原料錫を塩酸(または硫酸)で浸出し、ヘキサフルオロケイ酸と酸とを混合し、Sn濃度:50g/Lの浸出液を電解液とした。
陽極には原料錫を鋳込み板形状のものを、陰極にはチタン製の板を用い、電解温度20°C、電流密度1A/dm2という条件で電解を行った。
回収した電着錫を洗浄・乾燥し、260°Cの温度で溶解・鋳造し、錫インゴットとした。この錫インゴットを圧延し、約1.5mmの厚さとし、310mm×310mmに切り出した。この表面積は961cm2である。これをα線測定試料とした。
また、ここで用いた原料錫(原料A:実施例1と同一の原料)における、鉛の不安定同位体210Pbの量は14Bq/kgであった。そして、鉛の4つの安定同位体の合計量は1.81ppm、鉛の安定同位体206Pbの存在比は24.86%であった。
上記試料について、溶解・鋳造から3週間後のα線量はバックグラウンド(BG)α線量と同レベルであったが、溶解・鋳造から6ヵ月後で明らかに増加しており、本試料のα線量(バックグラウンドα線量との差)が0.0003cph/cm2となり、本願発明の条件を満たしていなかった。
また、同一試料について、1ヶ月後と6ヶ月後の5ヶ月間の、経時変化を見た場合、α線量の差は0.0003cph/cm2であり、これも本願発明の条件を満たしていなかった。
(0.5%Cu-3%Ag-残部Snからなる錫合金)
実施例1で作製した錫を準備した。本実施例の錫合金の添加元素は、市販の銀及び銅を電解により高純度化し、6N-Ag及び6N-Cuとした。これらを前記錫に添加し、260°Cで溶解・鋳造し、0.5%Cu-3%Ag-残部SnからなるSn-Cu-Ag合金インゴットを製造した。
このインゴットを圧延し、約1.5mmの厚さとし、310mm×310mmに切り出した。この表面積は961cm2である。これをα線測定試料とした。
この試料中のPb含有量0.06ppm、U含有量<5ppb、Th含有量<5ppbとなった。
また、同一試料について、1ヶ月後と6ヶ月後の5ヶ月間の、経時変化を見た場合、α線量の差は0.0001cph/cm2となり、本願発明の条件を満たしていた。
(3.5%Ag-残部Snからなる錫合金)
実施例1で作製した錫を準備した。本実施例の錫合金の添加元素である銀は、市販のAgを硝酸により溶解し、これにHClを添加してAgClを析出させ、これをさらに水素還元して5N-Agの高純度Agを得た。これを前記錫に添加し、260°Cで溶解・鋳造し、3.5%Ag-残部SnからなるSn-Ag合金インゴットを製造した。
この試料中のPb含有量0.06ppm、U含有量<5ppb、Th含有量<5ppbとなった。
上記試料について、溶解・鋳造から1週間後、3週間後、1ヵ月後、2ヵ月後、6ヵ月後及び鉛の同位体206Pbへの壊変によるα線を発生させるポロニウムの同位体210Poがない状態において、210Pb→210Bi→210Po→206Pbの崩壊チェーンが平衡状態になる27ヶ月を過ぎた30ヵ月後にα線量を測定した結果、α線量は最大でも0.0003cph/cm2であり、本願発明の条件を満たしていた。また、同一試料について、1ヶ月後と6ヶ月後の5ヶ月間の、経時変化を見た場合、α線量の差は0.0001cph/cm2であり、本願発明の条件を満たしていた。
(9%Zn-残部Snからなる錫合金)
実施例1で作製した錫を準備した。本実施例の錫合金の添加元素は、市販の亜鉛を電解により高純度化し6N-Znとした。これらを前記錫に添加し、240°Cで溶解・鋳造し、9%Zn-残部SnからなるSn-Zn合金インゴットを製造した。このインゴットを圧延し、約1.5mmの厚さとし、310mm×310mmに切り出した。この表面積は961cm2である。これをα線測定試料とした。この試料中のPb含有量0.06ppm、U含有量<5ppb、Th含有量<5ppbとなった。
(0.5%Cu-3%Ag-残部Snからなる錫合金)
実施例1で作製した錫を準備した。本実施例の錫合金の添加元素は、市販の3Nレベルの銀及び銅を用いた。これらを前記錫に添加し、260°Cで溶解・鋳造し、0.5%Cu-3%Ag-残部SnからなるSn-Cu-Ag合金インゴットを製造した。この試料中のPb含有量7.1ppm、U含有量10ppb、Th含有量10ppbとなった。
また、同一試料について、1ヶ月後と6ヶ月後の5ヶ月間の、経時変化を見た場合、α線量の差は0.005cph/cm2であり、これも本願発明の条件を満たしていなかった。
これは溶解・鋳造工程でPoが昇華したため一時的にα線量が低くなったものの、Pbを多く含有し、結果として210Pbも多く含有しているために再び崩壊チェーン(210Pb→210Bi→210Po→206Pb)が構築されてα線量が増加したためと考えられる。
(3.5%Ag-残部Snからなる錫合金)
実施例1で作製した錫を準備した。本実施例の錫合金の添加元素である銀は、市販の3NレベルのAgを前記錫に添加し、260°Cで溶解・鋳造し、3.5%Ag-残部SnからなるSn-Ag合金インゴットを製造した。
この試料中のPb含有量5.3ppm、U含有量7ppb、Th含有量6ppbとなった。
また、同一試料について、1ヶ月後と6ヶ月後の5ヶ月間の、経時変化を見た場合、α線量の差は0.002cph/cm2であり、これも本願発明の条件を満たしていなかった。
これは、溶解・鋳造工程でPoが昇華したため一時的にα線量が低くなったものの、Pbを多く含有し、結果として210Pbも多く含有しているために再び崩壊チェーン(210Pb→210Bi→210Po→206Pb)が構築されてα線量が増加したためと考えられる。
(9%Zn-残部Snからなる錫合金)
実施例1で作製した錫を準備した。本実施例の錫合金の添加元素は、市販の3Nレベルの亜鉛を用いた。これらを前記錫に添加し、240°Cで溶解・鋳造し、9%Zn-残部SnからなるSn-Zn合金インゴットを製造した。
この試料中のPb含有量15.1ppm、U含有量12ppb、Th含有量10ppbとなった。
これは溶解・鋳造工程でPoが昇華したため一時的にα線量が低くなったものの、Pbを多く含有し、結果として210Pbも多く含有しているために再び崩壊チェーン(210Pb→210Bi→210Po→206Pb)が構築されてα線量が増加したためと考えられる。
Claims (10)
- 溶解・鋳造した後の試料のα線量が0.0005cph/cm2未満であることを特徴とする錫。
- 溶解・鋳造から1週間後、3週間後、1ヵ月後、2ヵ月後、6ヵ月後及び30ヵ月後の、それぞれのα線量が0.0005cph/cm2未満であることを特徴とする錫。
- 試料の第1回目に測定したα線量が0.0002cph/cm2未満であって、そのα線量と、それから5ヶ月経過した後に測定したα線量との差が0.0003cph/cm2未満であることを特徴とする錫。
- 試料の第1回目に測定したα線量が0.0002cph/cm2未満であって、そのα線量と、それから5ヶ月経過した後に測定したα線量との差が0.0003cph/cm2未満であることを特徴とする請求項1又は2記載の錫。
- Pb含有量が0.1ppm以下であることを特徴とする請求項1~4のいずれか一項に記載の錫。
- U,Thのそれぞれの含有量が5ppb以下であることを特徴とする請求項1~3のいずれか一項に記載の錫。
- 前記請求項1~6のいずれか一項に記載の錫を40%以上含有する錫合金。
- 純度3Nレベルの原料錫を塩酸又は硫酸で浸出した後、pH1.0以下、Sn濃度200g/L以下の電解液を用いて電解精製することを特徴とする前記請求項1~6のいずれか一項に記載の錫の製造方法。
- Sn濃度を30~180g/Lとして電解することを特徴とする請求項8記載の錫の製造方法。
- 原料錫中の鉛の同位体210Pbの量が30Bq/kg以下である原料錫を用いることを特徴とする請求項8又は9記載の錫の製造方法。
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WO2014087514A1 (ja) * | 2012-12-06 | 2014-06-12 | 千住金属工業株式会社 | Cuボール |
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JP2015522796A (ja) * | 2012-05-04 | 2015-08-06 | ハネウェル・インターナショナル・インコーポレーテッド | 金属材料のα粒子放出ポテンシャルを査定する方法 |
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US11572632B2 (en) | 2014-10-02 | 2023-02-07 | Jx Nippon Mining & Metals Corporation | Method for manufacturing high purity tin, electrowinning apparatus for high purity tin and high purity tin |
US10400342B2 (en) | 2015-10-19 | 2019-09-03 | Jx Nippon Mining & Metals Corporation | High purity tin and method for manufacturing same |
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WO2017154740A1 (ja) * | 2016-03-09 | 2017-09-14 | Jx金属株式会社 | 高純度錫及びその製造方法 |
JPWO2017154740A1 (ja) * | 2016-03-09 | 2018-03-15 | Jx金属株式会社 | 高純度錫及びその製造方法 |
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Also Published As
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EP2548981A1 (en) | 2013-01-23 |
JP5456881B2 (ja) | 2014-04-02 |
KR20120106889A (ko) | 2012-09-26 |
JPWO2011114824A1 (ja) | 2013-06-27 |
TW201139692A (en) | 2011-11-16 |
US20130028786A1 (en) | 2013-01-31 |
EP2548981B1 (en) | 2020-09-02 |
US9394590B2 (en) | 2016-07-19 |
JP2014088621A (ja) | 2014-05-15 |
EP2548981A4 (en) | 2017-08-30 |
TWI495733B (zh) | 2015-08-11 |
KR101444568B1 (ko) | 2014-09-24 |
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