WO2009090846A1 - 複合銀ナノ粒子、複合銀ナノペースト、その製法、製造装置、接合方法及びパターン形成方法 - Google Patents
複合銀ナノ粒子、複合銀ナノペースト、その製法、製造装置、接合方法及びパターン形成方法 Download PDFInfo
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- WO2009090846A1 WO2009090846A1 PCT/JP2008/073660 JP2008073660W WO2009090846A1 WO 2009090846 A1 WO2009090846 A1 WO 2009090846A1 JP 2008073660 W JP2008073660 W JP 2008073660W WO 2009090846 A1 WO2009090846 A1 WO 2009090846A1
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Definitions
- the present invention relates to a composite silver nanoparticle in which an organic coating layer made of an organic substance is formed around a silver nucleus consisting of a large number of silver atoms. In particular, the organic coating layer is diffused by heating to a predetermined temperature.
- the present invention relates to composite silver nanoparticles that are metallized, that is, silver, composite silver nanopaste, a manufacturing method thereof, a manufacturing apparatus, a joining method, and a pattern forming method.
- solder is an alloy of Sn and Pb, and the use of Pb is being banned as a recent environmental preservation measure. Therefore, a Pb-free alternative solder replacing the conventional solder is being developed.
- the melting point of eutectic solder of Sn and Pb is 183 ° C.
- the melting point of Sn / Ag / Cu solder which is a conventional alternative solder is 217 ° C.
- solder does not contain Pb and has a low metallization temperature, but it also has high safety, no corrosiveness, and good electrical and thermal conductivity. Is desired. Silver attracted attention as a material that meets this expectation. Moreover, ultra-fine composite silver nanoparticles have been developed to lower the melting point.
- Patent Document 1 Japanese Patent No. 3205793 (Japanese Patent Laid-Open No. 10-183207) has been published as Patent Document 1.
- Silver organic compounds (especially silver organic complexes) were selected as starting materials.
- the silver organic compound In an inert gas atmosphere in which air is shut off, the silver organic compound is heated at a temperature not lower than the decomposition start temperature and lower than the complete decomposition temperature, and the organic substance derived from the silver organic compound is placed around the decomposed and reduced silver core.
- Composite silver nanoparticles were produced as a coating layer. This process is a solid-gas reaction.
- the particle size of silver nuclei is 1 to 100 nm, and is therefore commonly referred to as composite silver nanoparticles.
- composite silver nanoparticles having an organic coating layer of stearic acid groups around a silver core having a particle size of 5 nm are obtained. Generated.
- the generation temperature is as high as 250 ° C.
- the metallization temperature of the composite silver nanoparticles is as extremely high as 220 ° C.
- Silver nanoparticles having a high production temperature also have a high silveration temperature. Considering that the melting point of general Sn—Pb solder is 183 ° C. and the desired bonding temperature is 200 ° C. or less, the metallization temperature (silvering temperature) is too high at 220 ° C.
- the metallization temperature is high because of the large particles in a dumpling state and the decomposition temperature of the stearic acid group is high.
- the inventor has confirmed that the silver nucleus is not a single crystal but a simple atomic group or a polycrystal. When silver nuclei are polycrystalline or disordered, electron scattering and heat scattering occur at many grain interfaces, resulting in a decrease in electrical conductivity and thermal conductivity.
- Patent Document 2 is an invention in which the inventor also participated as one of the inventors.
- a metal organic compound was dissolved and dispersed in an organic solvent or water to successfully produce composite silver nanoparticles coated with the organic material derived from the metal organic compound. This process is a solid-liquid reaction.
- this composite silver nanoparticle was observed with a high-resolution transmission electron microscope, a lattice image was confirmed in the silver nucleus, and it was confirmed to be a single crystal silver nucleus.
- the metal organic compound is dissolved and dispersed as a molecule in a solvent, the molecule is reduced to precipitate silver atoms, and single crystals are formed by recombination of silver atoms. That is, the single crystallinity is considered to be caused by intermolecular reaction.
- silver nuclei are single crystals, there is an advantage of high electrical conductivity and thermal conductivity.
- the silvering temperature it is written in [0076] that the composite silver nanoparticles coated with stearic acid groups were heated at 250 ° C. for 10 minutes. That is, the weak point of Patent Document 2 is that the silvering temperature is as high as 250 ° C.
- the reason for the high silveration temperature is that the decomposition temperature of the organic acid group constituting the coating layer is high because it starts from a silver organic compound such as silver acetate, silver hexanoate, or silver octoate. Further ingenuity is required to reduce the metallization temperature to 200 ° C or lower.
- Patent Document 3 The inventor is one of the inventors of this international publication.
- a plurality of inventions are disclosed. Among them, a method for treating a metal inorganic compound with a surfactant was first disclosed, and the way of starting with a metal inorganic compound was opened. That is, a first step of colloiding a metal inorganic compound with a surfactant in a non-aqueous solvent to form an ultrafine particle precursor, and a reducing agent is added to the colloidal solution to reduce the ultrafine particle precursor. And a second step of generating composite metal nanoparticles in which a surfactant shell is formed as a coating layer on the outer periphery of the metal core.
- the above-described method has a feature that since the metal inorganic compound is dissolved in a non-aqueous solvent, the produced composite metal nanoparticles are dispersed in the non-aqueous solvent and are not likely to be in a dumpling state.
- examples are copper oleate, silver abietate, silver acetate, nickel oleate, diethylhexaneindium, copper acetate, silver stearate, and only organometallic compounds are implemented.
- the metallization temperature of the composite silver nanoparticles produced from silver stearate was found to be as high as 220 ° C. Further ingenuity is required to reduce the metallization temperature to 200 ° C or lower.
- Patent Document 3 since determination of single crystallinity / polycrystallinity of silver nuclei is not made, it is impossible to determine the quality of the electrical conductivity and thermal conductivity of the composite metal nanoparticles.
- Patent Document 4 discloses composite metal nanoparticles in which a coating layer made of an organic compound containing an alcoholic hydroxyl group having 4 or more carbon atoms is formed around a metal core having a particle diameter of 1 to 100 nm obtained from a metal salt. ing. Moreover, higher alcohols having 6 or more carbon atoms are described as organic compounds containing an adsorbing functional group.
- Patent Document 5 discloses a composite metal nanoparticle having a central portion composed of a metal nucleus and an organic coating layer having a thermal desorption start temperature of 140 ° C. or higher and lower than 190 ° C. around the core.
- a manufacturing method it is described that a composite metal nanoparticle having an inorganic metal salt and an organic substance coexisting, an inorganic metal salt is decomposed to form a metal nucleus, and an organic coating layer is formed around the metal core is described. Yes.
- composite metal nanoparticles in which an organic coating layer is formed around an inorganic metal salt or a decomposed inorganic metal compound are also disclosed.
- Patent Document 6 Japanese Patent Application Laid-Open No. 2007-95510 is disclosed as Patent Document 6.
- Claim 1 of Patent Document 6 includes a metal core composed of a metal component derived from a metal salt represented by the chemical formula (RA) n -M, and an organic coating layer derived from the metal salt.
- a conductive paste made of composite metal nanoparticles and an organic solvent is disclosed.
- R is a hydrocarbon group having 4 to 9 carbon atoms
- A is COO, OSO 3 , SO 3 or OPO 3
- M is a silver, gold or platinum group.
- composite silver nanoparticles are included.
- Patent Document 7 Japanese Patent Application Laid-Open No. 2004-107728 is disclosed as Patent Document 7.
- Claim 1 of Patent Document 7 describes composite metal nanoparticles having an organic coating layer mainly composed of C, H and / or O around a metal core having an average particle size of 100 nm or less. Is produced from an organic acid metal salt.
- Japanese Patent No. 3205793 Japanese Patent Laid-Open No. 10-183207 JP 2003-342605 A WO00 / 076699 WO01 / 070435 WO2005 / 075132 JP 2007-95510 A JP 2004-107728 A
- Patent Document 4 describes that in the case of composite silver nanoparticles having a particle diameter of 5 to 10 nm, if the decomposition temperature of the organic compound is 80 ° C. or lower, the silver film forming temperature is 80 ° C., and the decomposition temperature is 80 ° C. It is described that a silver film can be formed by heating to the decomposition temperature if it is at or above.
- the above description is merely a wishful observation, and no such example is described in the embodiment. The following is a concrete description.
- Example 1 when copper formate and 1-decanol are reacted, the solution is discolored from around 185 ° C. to form composite silver nanoparticles, and the silvering firing temperature is 200 to 350 ° C., 250 to 300 ° C. Is preferred.
- Example 2 describes that composite silver nanoparticles were formed from solution of silver carbonate and myristic acid (C number of 14) at 230 ° C. by solution discoloration, and a silver coating film was formed at 250 ° C. in air firing. .
- formation of composite silver nanoparticles was confirmed from silver carbonate and stearyl alcohol (C number is 18) by solution discoloration by heating at 150 ° C. for 1 hour, but the silvering temperature in a nitrogen atmosphere was confirmed.
- Example 4 formation of composite silver nanoparticles was confirmed from silver carbonate and phenol (C number is 6) by solution discoloration by heating at 180 ° C. for 1 hour, and the silvering temperature is described as 300 ° C.
- Example 5 generation of composite silver nanoparticles was confirmed from copper acetate and lauryl alcohol (C number: 12) by solution discoloration by heating at 100 ° C. for 1 hour, but silveration was performed in an atmosphere of hydrogenated nitrogen. The temperature was 250 ° C.
- Example 6 formation of composite platinum nanoparticles was confirmed by solution discoloration from platinum chloride and ethylene glycol (C number is 2) by heating at 180 ° C. for 1 hour, but the heat treatment temperature was 300 ° C. there were.
- Example 7 formation of composite copper nanoparticles was confirmed by solution discoloration at 110 ° C. from copper acetate and lauryl alcohol (C number: 12), but the copperization temperature in a nitrogen atmosphere was 300 ° C. there were.
- Example 8 formation of composite copper nanoparticles was confirmed by solution discoloration at 150 ° C. from copper acetate, ethanol (C number is 2) and nonionic surfactant (sorbitan tristearate). However, the copperization temperature in a nitrogen atmosphere was 300 ° C.
- any of the composite silver nanoparticles has a metallization temperature much higher than 200 ° C., and no composite metal nanoparticles that achieve the desired metallization temperature of 200 ° C. or less have been generated.
- Patent Document 5 describes that it cannot be understood. It is described that when an inorganic metal salt and an organic substance are allowed to coexist, an organic coating layer is formed around the central core containing the inorganic metal salt or the decomposed inorganic metal compound.
- page 6 shows that when a mixture of silver carbonate (inorganic metal salt) and myristyl alcohol (organic substance, C number is 14) is reacted at 120 ° C. for 2 hours, the organic substance is physically adsorbed on silver or silver carbonate. It is described that nanoparticles are produced. It is clear from the following reaction formula that when an organic substance adheres around silver carbonate, the thermal decomposition temperature at which silver is precipitated from silver carbonate exceeds 400 ° C.
- Patent Document 5 show the opposite of the present invention and cannot even be used as a reference.
- myristyl alcohol has a C number of 14 and a large molecular weight, increases the weight of the organic coating layer with respect to the silver core, increases the firing temperature, increases the amount of exhaust gas during firing, and causes a large amount of voids during bonding. This has the disadvantage that the qualification as a bonding paste is reduced.
- the composite metal nanoparticles of Patent Document 6 are different from the present invention in that a metal nucleus and an organic coating layer are formed as a decomposition product obtained by decomposing a metal salt, and start from an organic metal compound.
- a silver nucleus is formed from silver carbonate and an organic coating layer is formed from alcohol, and the manufacturing method is completely different.
- the organic coating layer is a bonding group of a hydrocarbon group and COO, OSO 3 , SO 3, or OPO 3 , has a complicated structure, and has a high decomposition temperature.
- SO X which is an air pollution component is generated by firing, and does not conform to environmental standards.
- the organic coating layer is an organic acid group, and the aeration temperature is considerably high.
- the [0031] describes that the melting point is 210 ° C.
- [0068] describes that firing is performed in a temperature range of 210 to 250 ° C. Therefore, the metallization of 200 ° C. or lower, preferably 150 ° C. or lower, which is the object of the present invention, cannot be realized at all in Patent Document 7.
- the crystallinity of the metal nucleus is not described or suggested at all, and it is impossible to judge whether the electrical conductivity and the thermal conductivity are good or bad.
- the present invention has been made in view of the above problems, and has established a method and a production apparatus for producing composite silver nanoparticles having an organic coating layer derived from an alcohol having 1 to 12 carbon atoms at a low temperature.
- the present invention provides an alcohol-derived organic coating-type composite silver nanoparticle that has a silver nucleus weight considerably increased due to its small number and realizes a metallization temperature (silverization temperature) of 200 ° C. or less. Since the alcohol-derived organic coating layer is composed of one or more alcohol molecule derivatives, alcohol molecule residues or alcohol molecules, only H2O and CO2 are produced even when baked, and is completely compatible with environmental standards. Moreover, since it is metalized at 200 ° C.
- the decomposition start temperature T1 and the decomposition temperature T2 were successfully limited to the range of T2-100 ⁇ T1 ⁇ T2, and composite silver nanoparticles capable of low-temperature firing were successfully manufactured. Since the generation temperature PT (° C.) of such composite silver nanoparticles can be smaller than the metallization temperature T3, the low temperature generation in which the inequality of PT ⁇ T3 ⁇ 200 ° C. is established is successful.
- the alcohol-derived substance is specifically an alcohol derivative, an alcohol residue, or an alcohol molecule, and only H2O and CO2 are generated by firing, so that it is also effective for bonding electronic components such as semiconductors. It is possible to apply.
- Alcohol derivatives include carboxylic acids and carboxylic acid groups, as well as alkoxides and alkoxide groups, and include all compounds derived from alcohols by chemical reactions.
- the present invention has been made in order to solve the above-mentioned problems.
- the first embodiment of the present invention is a method in which a carbon atom is formed around a silver nucleus having an average particle diameter of 1 to 20 nm composed of an aggregate of silver atoms.
- a second aspect of the present invention is a composite silver nanoparticle according to the first aspect, wherein a plurality of the composite silver nanoparticles are aggregated to form an aggregate.
- the third form of the present invention is composite silver nanoparticles in which the organic coating layer contains at least an alkoxide group and / or a carboxylic acid group in the first or second form.
- DTA differential thermal analysis
- thermogravimetry In the composite silver nanoparticles, the relationship between the decomposition start temperature T1 (° C.) obtained from TG) and the decomposition temperature T2 (° C.) obtained from differential thermal analysis (DTA) is T2-100 ⁇ T1 ⁇ T2.
- the sixth aspect of the present invention is a composite silver nanoparticle according to the fourth or fifth aspect, wherein the generation temperature PT (° C.) for generating the composite silver nanoparticle is lower than the metallization temperature T3 (° C.).
- a seventh aspect of the present invention is the composite silver according to any one of the first to sixth aspects, wherein a lattice image is observed in the silver nucleus when the composite silver nanoparticles are observed with a high resolution transmission electron microscope. Nanoparticles.
- the decomposition start temperature T1 (° C.), the decomposition temperature T2 (° C.), and the metallization temperature T3 (° C.) are the rate of temperature increase.
- the ninth form of the present invention is a composite silver nanoparticle using a silver salt and an alcohol having 1 to 12 carbon atoms as starting materials in any of the first to eighth forms.
- the tenth form of the present invention is a composite silver nanopaste containing at least the composite silver nanoparticles of any of the first to ninth forms, and having a solvent and / or a viscosity imparting agent added thereto.
- the eleventh form of the present invention is a composite silver nanopaste blended with silver fine particles in the tenth form.
- the composite silver nanopaste satisfies T3 ⁇ Tp3 ⁇ T3 + 50 when the metallization temperatures are T3 (° C.) and Tp3 (° C.).
- silver salt fine particles are mixed in an alcohol solvent having 1 to 12 carbon atoms to prepare an alcohol solution, and the alcohol solution is kept in a reaction chamber at a predetermined generation temperature PT for a predetermined generation time.
- the silver salt fine particles are reduced by heating to form silver nuclei having an average particle size of 1 to 20 nm by the alcohol solvent, and an alcohol molecule derivative of the alcohol solvent, an alcohol molecule residue, or This is a method for producing composite silver nanoparticles for forming an organic coating layer composed of one or more alcohol molecules.
- a fifteenth aspect of the present invention is a method for producing composite silver nanoparticles according to the fourteenth aspect, wherein the silver salt fine particles are dispersed or dissolved in the alcohol solvent.
- a sixteenth aspect of the present invention is the composite silver nanoparticle according to the fourteenth or fifteenth aspect, wherein the alcohol solution is an excess alcohol solution in which the alcohol solvent is added in excess of the number of moles of the silver salt fine particles. It is a manufacturing method.
- the metallization temperature T3 (degreeC) obtained from the manufacturing method of the composite silver nanoparticle which is 200 degrees C or less.
- the eighteenth aspect of the present invention is a method for producing composite silver nanoparticles according to the seventeenth aspect, wherein the generation temperature PT (° C.) is lower than the metallization temperature T3 (° C.).
- the nineteenth aspect of the present invention is the method for producing composite silver nanoparticles according to any one of the fourteenth to eighteenth aspects, wherein the generation time of the composite silver nanoparticles is 60 minutes or less.
- the twentieth aspect of the present invention is the method for producing composite silver nanoparticles according to any one of the fourteenth to nineteenth aspects, wherein the alcohol solution is cooled after the production time to stop the production reaction.
- the silver salt fine particles are refined until the particle diameter is in the range of 10 nm to 1000 nm. It is a manufacturing method of the described composite silver nanoparticle.
- the twenty-second aspect of the present invention is the composite silver nanoparticle according to any one of the sixteenth to twenty-first aspects, wherein the molar ratio of the alcohol solvent to the silver salt fine particles in the excess alcohol solution is adjusted to a range of 5 to 100. It is a manufacturing method.
- a twenty-third aspect of the present invention is a method for producing composite silver nanoparticles, wherein the composite silver nanoparticles are separated from the alcohol solution in which the composite silver nanoparticles are produced in any one of the fourteenth to twenty-second forms.
- the twenty-fourth aspect of the present invention is a raw material mixer for preparing an alcohol solution by mixing silver salt fine particles with an alcohol solvent, and generating the composite silver nanoparticles by heating the alcohol solution with a heater at a predetermined temperature for a predetermined time. And a component purifier for separating composite silver nanoparticles from the alcohol solution supplied from the cooler, and a cooler for cooling the alcohol solution supplied from the reactor. And a composite silver nanoparticle production apparatus in which the raw material mixer, the reactor, the cooler, and the component purifier are connected in a continuous, partially continuous, or batch process.
- a twenty-fifth aspect of the present invention is the apparatus for producing composite silver nanoparticles according to the twenty-fourth aspect, wherein the silver salt fine particles charged into the raw material mixer are refined in advance.
- a finer for refining silver salt fine particles in an alcohol solution supplied from the raw material mixer, and a refined alcohol solution formed by the finer Is an apparatus for producing composite silver nanoparticles for supplying the above to the reactor.
- the composite silver nanoparticles are treated with alcohol by treating the purified liquid containing the composite silver nanoparticles supplied from the component purifier. It is a manufacturing apparatus of the composite silver nanoparticle collect
- the component purifier comprises a centrifugal ultrafiltration device, and diffuses the composite silver nanoparticles into the extraction solvent through micropores. It is a manufacturing apparatus of the composite silver nanoparticle which is made to form the said refinement
- a twenty-ninth aspect of the present invention is the composite silver nanoparticle according to the twenty-eighth aspect, wherein the ultrafiltration device comprises a triple tube of an inner tube, an intermediate tube, and an outer tube, and the inner tube and the inner tube are rotated coaxially.
- the excess alcohol solution that has generated is supplied to a middle passage between the inner tube and the middle tube, the micropores are formed on the surface of the inner tube, and the extraction solvent is supplied to the inner passage inside the inner tube,
- the composite silver nanoparticles are an apparatus for producing composite silver nanoparticles that are selectively diffused from the middle passage into the extraction solvent through the micropores.
- a composite silver nanopaste of any one of the tenth to thirteenth aspects is prepared, a paste layer is formed by applying the composite silver nanopaste to a lower body, and the paste layer is formed on the paste layer.
- the upper body is placed, the paste layer is silvered by heating, and the lower body and the upper body are joined.
- a composite silver nanopaste of any one of the tenth to thirteenth aspects is prepared, and the composite silver nanopaste is applied to a predetermined pattern on a surface of a substrate to form a paste pattern.
- a pattern forming method in which the paste pattern is silvered by heating to form a silver pattern.
- an alcohol molecule derivative having 1 to 12 carbon atoms, an alcohol molecule residue, or an alcohol molecule residue around the silver nucleus having an average particle diameter of 1 to 20 nm composed of an aggregate of silver atoms is provided.
- Alcohol molecule derivatives are all alcohol derivatives derived from alcohol molecules and include carboxylic acids, carboxylic acid groups, alkoxides, alkoxide groups, and the like.
- An alcohol molecule residue is a residue from which some components of an alcohol molecule are separated, including alkoxides and alkoxide groups, and other cleavage residues. The alcohol molecule is the alcohol molecule itself.
- the silver core particle diameter of the composite silver nanoparticles is 1 to 20 nm, and the particle diameter of the composite silver nanoparticles themselves increases by the thickness of the alcohol organic coating layer, but the number of carbons is limited to 1 to 12, so that The thickness is not so large. The smaller the number of carbon atoms, the smaller the thickness, and at the same time, the silver nucleus weight ratio increases and the bonding strength increases.
- composite silver nanoparticles in which a plurality of composite silver nanoparticles are aggregated to form an aggregate.
- the composite silver nanoparticles of the present invention have the property of being monodispersed in an organic solvent.
- the composite silver nanoparticles may agglomerate to form aggregates due to the collision action during production.
- the aggregates are also combined with composite silver nanoparticles. Called.
- the particle size distribution of the powder in which the composite silver nanoparticles are aggregated is distributed from small to large, the minimum limit is a single composite silver nanoparticle particle diameter d 0 , and the maximum limit is 1/3 of the aggregation number N. Since it is proportional to the power, d 0 (Nmax) 1/3 .
- composite silver nanoparticle powder having a particle size distribution in this way large and small composite silver nanoparticles sinter while embedding gaps between each other. .
- composite silver nanoparticles are provided in which the organic coating layer has at least an alkoxide group and / or a carboxylic acid group.
- a composite silver nanoparticle in which a plurality of aggregates are formed is provided.
- the molecular formula of the alcohol is C n H 2n + 1 OH
- the alkoxide group is C n H 2n + 1 O
- a lower alkoxide group corresponds to the alkoxide group.
- the alkoxide group may be called an alcohol molecule residue, but may be called an alcohol molecule derivative.
- the carboxylic acid group is C n-1 H 2n-1 COO, but a lower carboxylic acid group may also be used.
- This carboxylic acid group is contained in the alcohol molecule derivative.
- the organic coating layer contains a carboxylic acid group or an alkoxide group, the composite silver nanoparticles are extremely safe.
- generation changes with time may become a carboxylic acid group, may become an alkoxide group, and may change into those mixed layers.
- C n H 2n + 1 O is an alkoxide group in a narrow sense, but in the present invention, it is used in a broad sense when referring to an alkoxide-coated composite silver nanoparticle, and means a composite silver nanoparticle having the alcohol-derived organic coating layer. . Since the organic coating material is all derived from alcohol, and the safety of alcohol is extremely high compared to other organic substances, the composite silver nanoparticles of the present invention are guaranteed in safety, environmental protection and ease of handling.
- the metallization temperature T3 (° C.) obtained from differential thermal analysis (DTA).
- DTA differential thermal analysis
- Composite silver nanoparticles having a temperature of 200 ° C. or less are provided.
- the organic coating layer is oxidized to generate reaction heat, and a large DTA peak is formed.
- this DTA peak is composed of a single peak, the temperature at which this single peak ends is the metallization temperature T3 (° C.).
- the temperature at which the final peak ends is the metallization temperature T3 (° C.).
- the ending temperature of the TG curve corresponds to the metallization temperature T3 (° C.).
- the metallization temperature T3 is within 200 ° C., the composite silver nanoparticles can be fired at a low temperature.
- the temperature increase rate VT during DTA measurement increases, the temperature T3 also increases.
- the present inventor studied low-temperature firing type composite silver nanoparticles and developed composite silver nanoparticles satisfying T3 ⁇ 150 ° C. or T2 ⁇ 150 ° C. This has led to the development of a range of composite silver nanoparticles. Even if the conventional literature is examined, composite silver nanoparticles having T3 ⁇ 200 ° C. do not exist, and composite silver nanoparticles having T3 ⁇ 200 ° C. are realized for the first time by the present invention.
- the development of composite silver nanoparticles having a metallization temperature T3 of 200 ° C. or lower has succeeded in providing an alternative solder having high characteristics comparable to the melting point of 183 ° C. of conventional Sn—Pb solder.
- the composite silver nanoparticles of the present invention have structures such as electronic materials such as printed wiring and conductive materials, magnetic materials such as magnetic recording media, electromagnetic wave absorbers and electromagnetic wave resonators, far infrared materials and composite film forming materials. It can be applied to various uses such as materials, ceramics and metal materials such as sintering aids and coating materials, and medical materials.
- the decomposition start temperature T1 (from thermogravimetry (TG)) ° C) and the decomposition temperature T2 (° C) obtained from the differential thermal analysis (DTA) are composite silver nanoparticles in which T2-100 ⁇ T1 ⁇ T2.
- the decomposition start temperature T1 (° C.) can be measured by the decrease start temperature of the TG curve, but changes when the TG curve decreases linearly from the beginning and decreases from the midway to a quadratic curve.
- a point, that is, a deviation point from a straight line can be defined as a decomposition start temperature T1.
- the linear region shows a decrease region of the pure alcohol component.
- a temperature at which the DTG curve starts to fall from a certain value may be defined as a decomposition start temperature T1.
- the decomposition temperature T2 at which the organic coating layer undergoes strong oxidative decomposition is defined as the peak temperature when the DTA peak is a single peak, and the first first peak temperature when the DTA peak is a plurality of peaks. In the range of T2-100 ⁇ T1 ⁇ T2, it means that the decomposition start temperature T1 exists within the range of 100 ° C.
- T2-100 ⁇ T1 ⁇ T2 ⁇ T3 ⁇ 200 ° C. all the temperatures T1, T2, and T3 are present in a low temperature region of 200 ° C. or lower, which means that the composite silver nanoparticles of the present invention are for low temperature firing, and the characteristics of the composite silver nanoparticles according to the present invention one of.
- the present invention confirms that the inequality of T2-100 ⁇ T1 ⁇ T2 holds.
- composite silver nanoparticles having a production temperature PT (° C.) for producing the composite silver nanoparticles lower than the metallization temperature T3 (° C.).
- the metallization temperature T3 is T3 ⁇ 200 (° C.).
- PT ⁇ T3 (° C.) Therefore, when both are combined, PT ⁇ T3 ⁇ 200 (° C.) is obtained. . Therefore, since the production temperature PT is lower than the metallization temperature T3 having a maximum value of 200 ° C., composite silver nanoparticles for low temperature production are provided in the present invention.
- a composite silver nanoparticle in which a lattice image is observed in a silver nucleus when the composite silver nanoparticle is observed with a high resolution transmission electron microscope.
- a transmission electron microscope JEM-2000FX with an acceleration voltage of 200 kV installed at Kyoto University
- a lattice image was confirmed in the silver nuclei of the composite silver nanoparticles in a monodispersed state.
- the silver nucleus diameter was in the range of 1 to 20 nm, and the lattice spacing was 0.24 nm, which was found to match the spacing of the (111) plane of bulk silver.
- the silver nucleus is not polycrystalline but is a single crystal of silver or a state close to a single crystal. Therefore, the composite silver nanoparticles coated with the alcohol-derived material according to the present invention have high crystallinity to such an extent that a lattice image is observed, and as a result, there are almost no grain boundaries inside the silver nucleus, so that the electron scattering It has been proved to have high electrical conductivity and high thermal conductivity. It was discovered that this was a revolutionary new substance that completely denied the polycrystallinity that was previously said. The fact that a lattice image is observed in a silver nucleus having an organic coating layer derived from alcohol is a fact that has been revealed for the first time by the present invention.
- the temperature increase rate VT is changed within the range of 1 to 20 (° C./min)
- the decomposition start temperature T1 increases by about 50 ° C.
- the decomposition temperature T2 increases by about 60 ° C.
- the metallization temperature T3 is about 70%.
- the T1, T2, T3 is considered to increase by about 50 ° C, about 60 ° C, and about 70 ° C, respectively.
- these temperature increases depend on the carbon number of the organic coating layer, but also somewhat on the silver nucleus particle size.
- composite silver nanoparticles using a silver salt and an alcohol having 1 to 12 carbon atoms as starting materials are provided.
- silver salts inorganic silver salts and organic silver salts can be used.
- Inorganic silver salts include silver carbonate, silver chloride, silver nitrate, silver phosphate, silver sulfate, silver borate, silver fluoride, and organic silver salts.
- fatty acid salts such as silver formate and silver acetate, sulfonates, and silver salts of hydroxy, thiol and enol groups.
- a silver salt composed of C, H, O and Ag or a silver salt composed of C, O and Ag is preferable.
- the composite silver nanoparticles of the present invention can be produced at a relatively low temperature with either an inorganic silver salt or an organic silver salt by the reducing power of the alcohol.
- Inorganic silver salts are sparingly soluble in alcohol, while organic silver salts are soluble in alcohol and sparingly soluble.
- There are very few alcohol-soluble organic silver salts such as silver abitienate, and inorganic silver salts and many organic silver salts may be considered to be hardly soluble in alcohol.
- the composite silver nanoparticles of the present invention are written as CnAgAL in the following notation.
- C1 is methanol
- C2 is ethanol
- C3 propanol
- C4 is butanol
- C5 is pentanol
- C6 is hexanol
- C7 is heptanol
- C8 is octanol
- C9 is nonanol
- C10 is decanol
- C11 undecanol
- C12 is dodecanol.
- a composite silver nanopaste containing at least the composite silver nanoparticles of any one of the first to ninth forms and added with a solvent and / or a viscosity imparting agent.
- the solvent is a material in which powder composed of composite silver nanoparticles is dispersed to form a solution.
- alcohol, acetone, toluene, xylene, propanol, ether, petroleum ether, benzene, or the like can be used.
- the viscosity-imparting agent is a material that imparts a viscosity that is easy to add to the solution, such as turpentine oil, terpineol, methylcellulose, ethylcellulose, butyral, various terpene derivatives, IBCH (isobornylcyclohexanol), glycerin, Alcohol that is solid at room temperature of C14 or higher can be used.
- terpene derivatives include 1,8-terpine monoacetate and 1,8-terpine diacetate.
- IBCH is rosin-like, glycerin is syrup-like, and alcohols of C14 or higher have a solid-liquid change property, and are non-flowing at 10 ° C. or less.
- the composite silver nanoparticles of the present invention are mixed and dispersed in the non-flowable viscosity imparting agent to form a non-flowable paste, the composite silver nanoparticles are fixed in a dispersed state at a low temperature of 10 ° C. or lower. Aggregation of nanoparticles does not occur. If the non-flowable paste is heated immediately before use, it can be fluidized and applied as a paste, and the function as a paste can be exhibited. Needless to say, if a solvent is added to the non-flowable paste immediately before use, it becomes a flowable paste without heating and can function as a paste. Since the composite silver nanoparticles of the present invention have a metallization temperature T3 of 200 ° C.
- the firing temperature of the paste is not determined only by the metallization temperature of the composite silver nanoparticles, but also depends on the evaporation temperature and decomposition temperature of the solvent and / or the viscosity-imparting agent. Moreover, it is necessary to evaporate and decompose by heating, and carbonized residue is excluded. Moreover, the paste which added only the solvent, the paste which added only the viscosity agent, and the paste which added both the solvent and the viscosity agent can be utilized as a usage form.
- a composite silver nanopaste containing silver fine particles is provided.
- the composite silver nanoparticles are composed of silver nuclei and an organic coating layer, and the silver content in the composite silver nanoparticles increases as the number of carbons (C number) of the alcohol-derived substance constituting the organic coating layer decreases.
- silver fine particles may be blended in the paste. The smaller the particle size of the silver fine particles, the better.
- a range of 50 nm to 5 ⁇ m is appropriate, but a silver fine particle of 0.1 ⁇ m to 1 ⁇ m is more preferable, and composite silver nanoparticles There is size compatibility with.
- the mass ratio between the composite silver nanoparticles and the silver fine particles can be adjusted appropriately.
- the composite silver nanopaste when the composite silver nanopaste is subjected to thermal analysis in the atmosphere at a heating rate VT (° C./min), it is obtained from thermogravimetry (TG) and differential thermal analysis (DTA).
- VT heating rate
- DTA differential thermal analysis
- a composite silver nanopaste in which the paste decomposition start temperature Tp1 (° C.), the paste decomposition temperature Tp2 (° C.), and the paste metalization temperature Tp3 (° C.) increases as the temperature increase rate VT increases can be provided.
- the definitions of the paste decomposition start temperature Tp1 (° C.), paste decomposition temperature Tp2 (° C.) and paste metallization temperature Tp3 (° C.) of the composite silver nanopaste of the present invention are as follows.
- T1 (° C.), decomposition temperature T2 (° C.) and metallization temperature T3 (° C.).
- a solvent and / or a viscosity-imparting agent is added to the composite silver nanoparticle. Therefore, before the composite silver nanoparticle is oxidatively decomposed, Oxidative decomposition precedes. Therefore, the TG curve and the DTA curve are preceded by the solvent and / or viscosity-imparting curve, followed by the curve of the composite silver nanoparticles.
- the first rapid decrease that appears in the TG curve forms the first deep valley in the DTG curve that is the differential curve, and the temperature at which the DTG curve becomes almost zero after the valley is restored starts paste decomposition. It can be determined that the temperature is Tp1.
- This Tp1 gives the second decreasing start temperature of the DT curve.
- Tp2 the paste decomposition temperature
- the steep final peak appearing at the end of the DTA peak is considered to be a binding energy emission peak in which the bare silver nuclei remaining after the organic coating layer is oxidatively decomposed are bonded to each other.
- the point at which this final peak falls and breaks in the horizontal direction is defined as the paste metalization temperature Tp3 (° C.). These paste temperatures satisfy the inequality Tp1 ⁇ Tp2 ⁇ Tp3.
- the paste decomposition start temperature Tp1 increases by about 50 ° C.
- the paste decomposition temperature Tp2 increases by about 65 ° C.
- Tp2 and Tp3 are considered to increase by about 50 ° C, about 65 ° C, and about 80 ° C, respectively.
- these temperature increases depend on the carbon number of the organic coating layer, but also somewhat on the silver nucleus particle size.
- T3 (° C.) and Tp3 (° C.) a composite silver nanopaste satisfying T3 ⁇ Tp3 ⁇ T3 + 50 can be provided.
- VT temperature rising rate
- the expression (P3) is expressed.
- silver salt fine particles are mixed in an alcohol solvent having 1 to 12 carbon atoms to prepare an alcohol solution, and the alcohol solution is formed at a predetermined generation temperature PT in a reaction chamber.
- the silver salt fine particles are reduced with the alcohol solvent by heating for a period of time to form silver nuclei having an average particle diameter of 1 to 20 nm, and alcohol molecule derivatives, alcohol molecule residues of the alcohol solvent are formed around the silver nuclei.
- a method for producing composite silver nanoparticles for forming an organic coating layer composed of one or more alcohol molecules is provided.
- An alcohol solution is a mixture of silver salt and alcohol.
- the silver salt fine particles are surrounded by alcohol and become a stable monodispersed colloid when the particle diameter of the silver salt fine particles is reduced.
- the alcohol may precipitate.
- the silver salt fine particles are in a dispersed state for a certain time after mixing and stirring, the reaction may be completed during that time.
- alcohol itself has a reducing action, but alcohol easily changes to an aldehyde even at a production temperature of 200 ° C. or lower, and this aldehyde has a strong reducing action.
- the generation temperature PT is set to 200 ° C. or less, for example, composite silver nanoparticles having a low metallization temperature T3 can be generated.
- the production temperature PT is set lower than the metallization temperature T3 ( ⁇ 200 ° C.) to produce composite silver nanoparticles for low-temperature firing.
- the average particle diameter of the silver nuclei is 1 to 20 nm, but if the silver salt fine particles are thoroughly refined, composite silver nanoparticles having a smaller particle diameter can be produced.
- a method for producing composite silver nanoparticles in which the silver salt fine particles are dispersed or dissolved in the alcohol solvent can be provided.
- the silver salt fine particles used in the present invention inorganic silver salts and organic silver salts can be used.
- the inorganic silver salts include silver carbonate, silver chloride, silver nitrate, silver phosphate, silver sulfate, silver borate, and silver fluoride.
- Organic silver salts include fatty acid salts such as silver formate and silver acetate, sulfonates, and silver salts of hydroxy, thiol and enol groups.
- a silver salt composed of C, H, O and Ag or a silver salt composed of C, O and Ag is preferable.
- the reason is that atoms such as P, S, and N may diffuse into semiconductors and ceramics to become impurities and reduce physical properties.
- silver carbonate (Ag 2 CO 3 ) is most preferable.
- alcohol is used as a solvent, the composite silver nanoparticles of the present invention can be produced at a relatively low temperature with either an inorganic silver salt or an organic silver salt by the reducing power of the alcohol. Inorganic silver salts are sparingly soluble in alcohol, while organic silver salts are soluble in alcohol and sparingly soluble.
- alcohol-soluble organic silver salts such as silver abitienate, and inorganic silver salts and many organic silver salts may be considered to be hardly soluble in alcohol.
- the alcohol-soluble silver salt is dissolved in alcohol at the molecular level, and the reactivity with the alcohol is increased.
- the alcohol-insoluble silver salt is finely divided and mixed and dispersed in alcohol, and when the fine particle size is reduced to nano-size, it can be stably dispersed in an alcohol solvent to increase the reactivity with alcohol. it can.
- the alcohol solution is an excess alcohol solution in which the alcohol solvent is added in excess of the number of moles of the silver salt fine particles.
- the alcohol mass is much more excessive than the silver salt mass.
- the molar ratio of alcohol is considerably larger than the stoichiometric ratio to obtain an excess alcohol solution.
- the degree of excess increases, the composite silver nanoparticles produced are less likely to collide with each other, and the association and aggregation of the composite silver nanoparticles can be prevented.
- the metallization temperature T3 becomes too high, and the metallization temperature T3 may be set to 200 ° C. or higher. In this production method, the metallization temperature T3 was successfully reduced to 200 or less for the first time by using an excess alcohol solution.
- the metallization temperature T3 (° C.) obtained from differential thermal analysis (DTA).
- DTA differential thermal analysis
- the paste metallization temperature Tp3 can also be adjusted to 250 ° C. or lower from the equation (p3), and a low-temperature firing paste can be provided.
- the eighteenth aspect of the present invention it is possible to provide a method for producing composite silver nanoparticles in which the generation temperature PT (° C.) is lower than the metalization temperature T3 (° C.).
- the formation temperature PT of the composite silver nanoparticles tends to be smaller than the atmospheric metallization temperature T3, that is, PT ⁇ T3. Therefore, when T3 ⁇ 200 (° C.), the production temperature PT becomes PT ⁇ T3 ⁇ 200 (° C.), and a method for producing composite silver nanoparticles produced at low temperature and fired at low temperature can be provided.
- the nineteenth aspect of the present invention it is possible to provide a method for producing composite silver nanoparticles in which the generation time of the composite silver nanoparticles is 60 minutes or less. Since the composite silver nanoparticles are gradually generated in the alcohol solution, it was confirmed that when the generation time is lengthened, the aggregation of the composite silver nanoparticles occurs and the particle diameter of the composite silver nanoparticles increases. In consideration of this point, the generation time is limited to 60 minutes, and within this time, composite silver nanoparticles having a target silver nucleus particle size can be produced. In addition, the fact that the organic coating layer becomes thinner as the carbon number becomes smaller, and the fact that the aggregation is accelerated by the action was also confirmed. Therefore, it is important to further shorten the generation time from 60 minutes as the carbon number decreases.
- the twentieth aspect of the present invention there is provided a method for producing composite silver nanoparticles in which the alcohol solution is cooled after the production time to stop the production reaction. At the end of the formation time, the alcohol solution was cooled to rapidly stop the formation reaction. At the same time, the agglomeration reaction could be reduced, and homogeneous composite silver nanoparticles with uniform particle sizes could be produced. The faster the cooling rate, the better.
- the cooling device an electrical cooling device, a fluid cooling device, or the like can be used. Simply, cooling to 0 ° C. with ice water is effective. Furthermore, the reaction can be rapidly stopped by immersing the reaction vessel in liquid nitrogen.
- the twenty-first aspect of the present invention there is provided a method for producing composite silver nanoparticles in which the silver salt fine particles are refined until the particle diameter is in the range of 10 nm to 1000 nm.
- the average particle diameter of commercially available silver salt fine particles is 10 ⁇ m, but there is a large variation in the particle size distribution, and there are also 50 ⁇ m particles. Therefore, this is pulverized by a mixer so that the average particle size is as uniform as possible, 10 ⁇ m.
- centrifugal rotation is performed together with the beads, and the silver salt fine particles are forcibly pulverized by the beads to reduce the particle size of the silver salt fine particles to a range of 10 nm to 1000 nm.
- the smaller the particle size Composite silver nanoparticles with uniform and small silver core particle size can be produced.
- the twenty-second aspect of the present invention there is provided a method for producing composite silver nanoparticles wherein the molar ratio of the alcohol solvent to the silver salt in the excess alcohol solution is adjusted to a range of 5 to 200.
- the molar ratio of alcohol solvent to silver salt is adjusted in the range of 5 to 200. If it is 5 or less, the aggregation of the composite silver nanoparticles is conspicuous, and if it is 100 or more, particularly 200 or more, the alcohol cost becomes too high, which is uneconomical, and the reaction chamber becomes large and the equipment cost becomes excessive. Further, the molar ratio is more preferably in the range of 10-100.
- a method for producing composite silver nanoparticles wherein the composite silver nanoparticles are separated from the alcohol solution in which the composite silver nanoparticles are produced. It is most desirable that the silver salt fine particles and the alcohol react completely in the reaction vessel, and the composite silver nanoparticles and the alcohol remain in the reaction vessel. However, unreacted silver salt and composite silver nanoparticles may coexist, and it is better to isolate only the composite silver nanoparticles from the reaction vessel to improve the purity of the composite silver nanoparticles. Even if some silver salt remains as an impurity, the silver salt is also decomposed by firing.
- a raw material mixer that prepares an alcohol solution by mixing silver salt fine particles with an alcohol solvent, and the composite silver nanoparticles by heating the alcohol solution at a predetermined temperature for a predetermined time with a heater.
- a component purifier for separating composite silver nanoparticles from the alcohol solution supplied from the cooler, and a cooler for cooling the alcohol solution supplied from the reactor.
- the apparatus comprises: a raw material mixer that mixes silver salt fine particles with an alcohol solvent to prepare an alcohol solution; and a reactor that generates composite silver nanoparticles by heating the alcohol solution at a predetermined temperature for a predetermined time with a heater.
- a reactor that generates composite silver nanoparticles by heating the alcohol solution at a predetermined temperature for a predetermined time with a heater.
- the reactor comprises a heating device and a reaction vessel, and as the heating device, an induction heating device, an infrared heating device, a plasma heating device, a laser heating device, an ultrasonic heating device, or a combination heating device thereof can be used.
- This apparatus may be a continuous production apparatus or a batch production apparatus.
- the raw material mixer, the reactor, the cooler, and the component purifier are connected in a continuous, partially continuous or batch type.
- An apparatus for producing silver nanoparticles can be provided.
- An apparatus for producing composite silver nanoparticles is provided. This apparatus makes it possible to mass-produce composite silver nanoparticles at high speed, and to provide an alternative solder mass production apparatus that replaces Sn—Pb solder.
- a case where beads are introduced into the raw material mixer to make the raw material mixer a raw material refinement mixer is also included in this embodiment.
- an apparatus for producing composite silver nanoparticles wherein the silver salt fine particles charged into the raw material mixer are refined in advance. If the silver carbonate charged into the raw material mixer is refined in advance by a mixer or beads, it is possible to guarantee the refinement and uniformity of the silver salt fine particles to be reacted, and as a result, the composite silver produced The particle size uniformity of the nanoparticles can be enhanced.
- the silver salt fine particles may be refined by a mixer in the raw material mixer.
- a production apparatus in which a fine pulverizer, a raw material mixer, a reactor, a cooler, and a component purifier are configured as a continuous type or a batch type.
- the fine pulverizer may be first-stage refined by a mixer, and the raw material refined mixer may be positioned as ultrafine refined by beads.
- a finer for further refinement of silver salt fine particles in the alcohol solution supplied from the raw material mixer, and a refined alcohol solution formed by the finer are reacted with each other.
- An apparatus for producing composite silver nanoparticles to be supplied to a vessel is provided. Therefore, as a device form, a production device is provided in which a raw material mixer, a micronizer, a reactor, a cooler, and a component purifier are configured in a continuous type or a batch type. This arrangement is different from the above-described configuration in that a micronizer is arranged between the raw material mixer and the reactor. In any case, the finer the silver salt fine particles, the finer the composite silver nanoparticles and the finer and uniform particle size.
- the composite silver that recovers the composite silver nanoparticles as an alcohol wet state or powder by treating the purified liquid containing the composite silver nanoparticles supplied from the component purifier.
- An apparatus for producing nanoparticles is provided.
- the separation method include a membrane separation method and an evaporation drying method. In the wet state, the powder is moistened with a small amount of a solvent such as alcohol, and the powder can be prevented from scattering.
- the component purifier comprises a centrifugal ultrafiltration device, and the composite silver nanoparticles are diffused into the extraction solvent through micropores to form the purified liquid.
- An apparatus for producing nanoparticles is provided.
- the particle size order is silver salt fine particles> composite silver nanoparticles> alcohol.
- the mass order is considered to be silver salt fine particles> composite silver nanoparticles> alcohol. Therefore, the alcohol with a light mass is blown out and separated by the centrifugal method.
- the composite silver nanoparticles are diffused and separated in an extraction solvent such as hexane and toluene.
- an extraction solvent such as hexane and toluene.
- the silver salt can also be separated.
- alcohol and silver carbonate can be reused, and it is possible to recover pure composite silver nanoparticle powder free from impurities.
- the ultrafiltration device comprises an inner tube, an intermediate tube, and an outer tube triple tube, and the inner tube and the intermediate tube are rotated coaxially to generate the composite silver nanoparticles.
- the alcohol solution is supplied to the middle passage between the inner tube and the middle tube, the micropores are formed on the surface of the inner tube, the extraction solvent is supplied to the inner passage inside the inner tube, and the composite silver nano
- An apparatus for producing composite silver nanoparticles is provided in which particles are selectively diffused from the middle passage through the micropores into the extraction solvent.
- Alcohol with a small mass is blown outward by centrifugal force, and if a small minute hole is formed in the wall surface of the middle tube, it is separated from this minute hole into an outer passage formed between the middle tube and the outer tube.
- the Only fine silver salt particles remain in the middle passage. In this way, alcohol, unreacted silver salt fine particles, and composite silver nanoparticles are separated from each other by this apparatus.
- a composite silver nanopaste according to any one of the tenth to thirteenth aspects is prepared, and the paste layer is formed by applying the composite silver nanopaste to a lower body.
- a joining method in which an upper body is arranged on top and the paste layer is silvered by heating to join the lower body and the upper body.
- This embodiment is a method of joining two objects using composite silver nanopaste.
- One object is referred to as a lower body and the other object is referred to as an upper body. Strong bonding can be achieved by silvering.
- the silver film is excellent in electrical conductivity and thermal conductivity and can be fired at a low temperature, it is possible to join low melting point objects.
- a composite silver nanopaste according to any one of the tenth to thirteenth aspects is prepared, and the composite silver nanopaste is applied onto a surface of a substrate in a predetermined pattern to form a paste pattern.
- a pattern forming method of forming and silvering the paste pattern by firing to form a silver pattern For example, when a silver film having a predetermined pattern is formed on a resin substrate having a low melting point, a method for forming a silver film having various patterns on various materials at a low temperature is provided according to the embodiment of the present invention.
- FIG. 1 is an explanatory diagram of a first step of a low-temperature generation reaction of composite silver nanoparticles according to the present invention.
- FIG. 2 is an explanatory diagram of the second step of the low-temperature generation reaction of the composite silver nanoparticles according to the present invention.
- FIG. 3 is a detailed flow diagram illustrating a low temperature generation procedure of composite silver nanoparticles according to the present invention.
- FIG. 4 is a detailed flow diagram of a manufacturing apparatus showing a low temperature generation procedure by the composite silver nanoparticle manufacturing apparatus according to the present invention.
- FIG. 7 is a relationship diagram between the production amount and production temperature of C6AgAL according to the present invention.
- FIG. 8 is a relationship diagram between the substance component (%) of C6AgAL and the production temperature according to the present invention.
- FIG. 14 is a relationship diagram between the absorption intensity of C8AgAL and the generation time according to the present invention.
- FIG. 15 is a graph showing the relationship between the optical density and the photon energy in the surface plasmon transition region indicating the generation of C10AgAL according to the present invention.
- FIG. 16 is a graph showing the relationship between the optical density indicating aldehyde formation and the photon energy in the surface plasmon transition region in C10AgAL production according to the present invention.
- FIG. 17 is a graph showing the relationship between the absorption intensity and production temperature of C10AgAL according to the present invention.
- FIG. 18 is a graph showing the relationship between the absorption intensity and generation time of C10AgAL according to the present invention.
- FIG. 19 is a transmission electron micrograph showing a lattice image of C10AgAL produced at 90 ° C.
- FIG. 20 is a transmission electron micrograph showing a lattice image of C12AgAL produced at 126 ° C.
- FIG. 21 is a particle size distribution diagram of C12AgAL shown in FIG. FIG.
- FIG. 24 is a transmission electron microscope diagram showing a lattice image of C2AgAL according to the present invention.
- FIG. 26 is a transmission electron microscope diagram showing a lattice image of C4AgAL according to the present invention.
- FIG. 27 is a relationship diagram between the production temperature PT and the decomposition temperature T2 of the composite silver nanoparticles CnAgAL (C1 to C12) according to the present invention.
- FIG. 28 is a relationship diagram between the decomposition start temperature T1 and the decomposition temperature T2 of the composite silver nanoparticles CnAgAL (C1 to C12) according to the present invention.
- FIG. 29 is a relationship diagram showing a range T2-60 ⁇ T1 ⁇ T2 of the decomposition start temperature T1 of the composite silver nanoparticles CnAgAL (C1 to C12) according to the present invention.
- FIG. 27 is a relationship diagram between the production temperature PT and the decomposition temperature T2 of the composite silver nanoparticles CnAgAL (C1 to C12) according to the present invention.
- FIG. 28 is a relationship diagram between
- FIG. 30 is a graph showing the relationship between the characteristic temperature (PT, T1, T2, T3) and the C number of the composite silver nanoparticles CnAgAL (C1 to C12) according to the present invention at a heating rate of 1 ° C./min.
- FIG. 37 is a graph showing the relationship between the characteristic temperature (PT, T1, T2, T3) and the C number at a rate of temperature increase of 1 ° C./min for composite silver nanoparticles CnAgAL (C1 to C12) of another example.
- FIG. 38 is a relationship diagram showing a range T2-90 ⁇ T1 ⁇ T2 of the decomposition start temperature T1 of composite silver nanoparticles CnAgAL (C1 to C12) of another example.
- FIG. 51 is a relationship diagram between the characteristic temperatures (T1, T2, T3, Tp1, Tp2, Tp3) of CnAgAL and PCnAgAL obtained in FIGS.
- FIG. 52 is a magnitude relationship diagram of characteristic temperatures (T1, T2, T3, Tp1, Tp2, Tp3) of CnAgAL and PCnAgAL obtained from FIG.
- FIG. 1 is an explanatory diagram of a first step of a low-temperature generation reaction of composite silver nanoparticles according to the present invention.
- the inorganic compound used as a raw material is silver salt (1).
- silver salts inorganic silver salts and organic silver salts can be used.
- Inorganic silver salts include silver carbonate, silver chloride, silver nitrate, silver phosphate, silver sulfate, silver borate, silver fluoride, and organic silver salts.
- fatty acid salts such as silver formate and silver acetate, sulfonates, and silver salts of hydroxy, thiol and enol groups.
- silver salts composed of C, H, O, Ag silver salts composed of C, H, Ag, silver salts composed of H, O, Ag, silver salts composed of C, O, Ag, O
- a silver salt made of Ag is preferable in that it contains no impurities. The reason is that only H 2 O, CO 2 , O 2, and the like are generated by firing even when a silver salt is mixed as an impurity in the generated composite silver nanoparticles.
- silver carbonate Ag 2 CO 3 will be described later as a suitable silver salt, but it goes without saying that other silver salts are similarly used.
- R n in the formula (3) represents a hydrocarbon group of alcohol.
- the carbon number n is limited to 1-12.
- the silver salt fine particles are insoluble in alcohol, but the hydrophilic group OH of the alcohol has a property of easily binding to the surface of the silver salt fine particles.
- the hydrophobic group R n of the alcohol has a high affinity with alcohol solvent. Therefore, as shown in the formula (4), when the silver salt fine particles are dispersed in the alcohol solvent, the alcohol is adsorbed on the surface of the silver salt fine particles and floats in the alcohol solution. When the particle diameter of the silver salt fine particles is small, a stable silver salt fine particle colloid is formed. On the other hand, when the silver salt fine particles have a large particle size, they may precipitate, but if the floating state continues for several tens of minutes, there is no problem, and the reaction may be carried out with gentle stirring.
- FIG. 2 is an explanatory diagram of the second step of the low-temperature generation reaction of the composite silver nanoparticles according to the present invention.
- silver carbonate is described as an example here as a silver salt, but the same applies to other silver salts.
- Silver carbonate on the surface of the silver carbonate fine particles reacts with alcohol to form aldehyde R n-1 CHO simultaneously with silveration, as shown in formula (5).
- aldehyde R n-1 CHO simultaneously with silveration, as shown in formula (5).
- Formula (6) there is also a reaction route in which silver alkoxide AgOR n is immediately generated without forming an aldehyde.
- the aldehyde has a strong reducing action, and as shown in formula (7), silver carbonate is reduced to form carboxylic acid R n-1 COOH simultaneously with silveration.
- the intermediately produced Ag, AgOR n , and R n-1 COOH aggregate with each other by the reactions shown in Formula (8) and Formula (9), and form Ag k + m (OR n ) m , Ag k + m as composite silver nanoparticles.
- (OR n ) m R n-1 COOH is produced.
- These composite silver nanoparticles are illustrated in equations (10) and (11).
- the reaction is a surface reaction of silver carbonate fine particles.
- the reaction continues while gradually penetrating from the surface into the interior, and the silver carbonate fine particles serving as the central nucleus are converted into silver nuclei.
- composite silver nanoparticles represented by formula (10) and formula (11) are produced.
- Formula (10) and Formula (11) show the constitutive formula of the silver coating and the organic coating layer formed around it.
- the organic coating layer may be an alkoxide group OR n or a carboxylic acid R n-1 COOH. Of course, there may be a carboxylic acid group R n-1 COO in which H is eliminated from a carboxylic acid (fatty acid). Accordingly, the organic coating layer also has an alkoxide, an alkoxide group, a carboxylic acid, a carboxylic acid group, or a mixed form thereof.
- FIG. 3 is a detailed flow chart showing a low-temperature generation procedure for composite silver nanoparticles according to the present invention.
- step n 3 the silver salt excess alcohol solution is rotated together with the beads, and the silver salt particles are gradually ground to be ultrafine. The relationship between the bead particle size and the silver salt ultrafine particle size will be described later with reference to Table 2.
- This predetermined temperature corresponds to the generation temperature PT.
- Table 2 is a relationship table between the bead particle size and the silver salt ultrafine particle size including Ag2CO3. The smaller the bead particle size, the smaller the ultrafine particle size, and the smaller the particle size of CnAgAL produced above.
- the particle diameter of the beads is from 1 mm to 0.03 mm, so that the ultrafine particle diameter can be freely controlled in the range of 5000 nm to 10 nm.
- FIG. 4 is a detailed flow chart of a manufacturing apparatus showing a low-temperature generation procedure by the composite silver nanoparticle manufacturing apparatus according to the present invention.
- This flowchart corresponds to each manufacturing stage of the manufacturing apparatus of FIG.
- step s 3 the ultrafine silver salt alcohol solution is supplied to the reactor and heated at a production temperature for a predetermined time (production time) to produce CnAgAL.
- the extracted alcohol solution is immediately cooled and the production reaction is stopped.
- step s 7 CnAgAL particles for each production temperature are subjected to various measurements.
- FIG. 5 is a block diagram of a composite silver nanoparticle production apparatus according to the present invention.
- the function of each partial device of the manufacturing apparatus corresponds to each step shown in FIG.
- the ultrafine refiner 10 includes a raw material mixer 11 and an ultrafine vessel 12. An excessive predetermined amount of alcohol and a predetermined amount of silver salt are put into the raw material mixer 11, and a mixer is provided therein. This refined excess alcohol solution is supplied from the inlet 13 to the ultrafine container 12 in the direction of arrow a.
- the ultrafine container 12 is filled with a large number of beads 17, and a rotating blade 16 is rotated by a rotating shaft 15 inserted in the central tube 14, and the silver salt refined particles are polished by the beads 17. It is crushed and the silver salt refined particles are converted into silver salt ultra refined particles.
- the ultrafine excess alcohol solution is supplied to the reactor 20 in the direction of arrow b.
- the ultrafine excess alcohol solution is supplied from the raw material supply port 21 to the reaction tube 22, heated by the heater 23, and CnAgAL is generated in the generation region 24. Further, the reaction solution is supplied in the direction of the arrow c, and the temperature of the reaction solution is lowered by the cooling region 26 by the cooler 25, and the production reaction is rapidly stopped. The generated alcohol solution is supplied from the generation discharge port 27 to the component purifier 30 in the direction of arrow d.
- the component purifier 30 is a triple tube of an outer tube 31, an intermediate tube 32, and an inner tube 34.
- the intermediate tube 32 rotates in the direction of arrow e
- the inner tube 34 rotates in the direction of arrow f
- the outer tube 31 It is a fixed tube that does not rotate.
- An infinite number of fine holes 35 having such a size that CnAgAL can pass through are formed in the peripheral wall surface of the inner tube 34.
- an infinite number of ultrafine holes 33 that are large enough to allow alcohol molecules to pass through are formed on the peripheral wall surface of the intermediate tube 32.
- An inner passage 36 is opened in the inner tube 34, an intermediate passage 37 is formed in a gap between the inner tube 34 and the middle tube 32, and an outer space is formed in the gap between the inner tube 32 and the outer tube 31.
- a passage 38 is formed.
- the middle passage 36 is supplied with an extraction solvent HE such as hexane for diffusively dispersing CnAgAL.
- the generated alcohol solution delivered from the generation discharge port 27 is supplied to the middle passage 37 in the direction of the arrow d.
- the produced alcohol solution contains the produced composite silver nanoparticles CnAgAL, unreacted silver salt, and alcohol.
- the alcohol molecule having the lightest mass moves to the outer passage 38 through the ultrafine hole 33 by centrifugal force.
- CnAgAL diffuses into the extraction solvent HE in the inner passage 36 through the fine holes 35.
- Unreacted silver salt remains in the middle passage 37.
- the intermediate separator 40 includes an alcohol separation container 42 and a silver salt separation container 41.
- the alcohol flowing out from the outer passage 38 is collected in the alcohol separation container 42, and the unreacted silver salt flowing out from the middle passage 37 is collected in the silver salt separation container 41.
- the extraction solvent containing CnAgAL flowing out from the inner passage 36 is supplied to the powder recovery device 50 in the direction of arrow h.
- the CnAgAL extraction solution is sprayed as a mist 53 from the spray 51 to the dryer 52, the extraction solvent evaporates, and CnAgAL is pulverized.
- the CnAgAL powder is recovered from the hopper 54 to the powder recovery container 56 via the recovery tube 55.
- FIG. 6 is a purification method diagram using a component purifier of the manufacturing apparatus of FIG.
- the generated alcohol solution AS supplied to the middle passage 37 is a mixed solution of silver salt AG, composite silver nanoparticles CA, and alcohol molecules AL.
- the extraction solvent HE is supplied to the inner passage 36.
- the substance in the middle passage 37 discharges the lightest alcohol molecule AL from the ultrafine hole 33 to the outer passage 38 by a strong centrifugal force.
- the composite silver nanoparticles CA penetrate diffusively from the micropores 35 to the extraction solvent HE.
- the extraction solution containing the composite silver nanoparticles CA is discharged from the inner passage 36, the unreacted silver salt AG is discharged from the middle passage 37, and the alcohol AL is discharged from the outer passage 38. In this way, three types of substances are separated and recovered.
- Example 1 C6AgAL
- Table 3 shows the measurement data obtained from experiments for C6AgAL, such as “Production amount of C6AgAL in low temperature production reaction”, “Mass of each substance amount in low temperature production of C6AgAL” and “Relationship between production temperature and characteristic temperature of C6AgAL”.
- Production amount of C6AgAL in the low temperature production reaction As shown in the table, detailed experimental data relating to the production time and production amount of C6AgAL for each production temperature is described.
- the “mass of each substance amount in low-temperature production of C6AgAL” includes the mass of silver carbonate and C6AgAL contained in the product at each production temperature (70 ° C., 80 ° C., 90 ° C., 100 ° C., 111.5 ° C.). The ratio and the mass ratio of the organic component and Ag contained in C6AgAL are described. Here, the total mass of the product or C6AgAL is 1. “Relationship between generation temperature and characteristic temperature of C6AgAL” includes TG decrease start temperature T1 (° C.), DTA peak temperature T2 (° C.), and metallization temperature T3 of C6AgAL generated at each generation temperature PT (° C.). ° C).
- the generation temperature PT can be freely changed, and when the generation temperature PT increases, the decomposition start temperature T1 corresponding to the TG decrease start temperature, the decomposition temperature T2 corresponding to the DTA first peak temperature, the TG decrease end temperature, or the DTA
- the metallization temperature T3 corresponding to the final peak end temperature tends to gradually increase. Therefore, it is possible to produce the composite silver nanoparticles while freely designing the production temperature PT so that the decomposition temperature T2 is 150 ° C. or lower.
- the metallization temperature T3 only rises a few degrees above the decomposition temperature T2.
- the TG curve is a thermogravimetric curve and indicates weight reduction in%, and the TG curve starts to decrease indicates that organic substances are diffused from the organic coating layer. Therefore, the TG decrease start temperature, that is, the decomposition start temperature T1 corresponds to the decomposition start temperature of the organic substance.
- the DTA curve is a differential thermal analysis curve and shows exotherm in ⁇ V. An increase in the DTA curve indicates that heat is generated by the decomposition reaction, and a decrease in the DTA curve indicates cooling. When the DTA curve forms a peak, the decomposition exotherm reaches its maximum at the peak temperature, indicating that the decomposition reaction has reached the peak.
- the decomposition temperature is defined by the DTA first peak temperature.
- the present inventors consider that the final DTA peak in the DTA peak is a binding energy emission peak in which bare silver nuclei are bonded to each other after the organic coating layer is diffused. Therefore, the DTA first peak temperature T2 indicates a decomposition temperature at which the decomposition of the organic matter proceeds at the highest speed. When the organic matter is completely diffused, heat generation stops, the peak rapidly decreases, and the temperature that has completely decreased corresponds to the metallization (silvering) temperature T3.
- the TG curve rapidly decreases at the decomposition temperature T2, and as a result of the total amount of organic matter being diffused, the TG curve converges to a constant value at the metallization temperature T3.
- increasing or decreasing the DTA curve or decreasing the TG curve indicates that another reaction other than the composite silver nanoparticle has occurred and requires separate analysis.
- the DTA first peak appearing in the DTA curve indicates the decomposition diffusion of the organic coating layer in the composite silver nanoparticles.
- FIG. 7 is a relationship diagram between the production amount and production temperature of C6AgAL according to the present invention.
- the vertical axis represents the production amount (g) of C6AgAL
- each temperature production amount (g) shown in Table 3 is a black rhombus
- each temperature production amount (g) per minute is a black circle
- the integral production amount (g) Are plotted with black triangles for each generation temperature PT (° C.).
- C6AgAL was produced even at 100 ° C. or lower, and it was confirmed that the composite silver nanoparticles according to the present invention were produced at a low temperature.
- FIG. 8 is a relationship diagram between the substance component (%) of C6AgAL and the production temperature according to the present invention. That is, FIG. 8 shows the mass ratio (%) of silver carbonate and C6AgAL described in “mass of each substance amount in low temperature production of C6AgAL” in Table 3 with respect to the production temperature PT (° C.), Plotted with black squares, the mass ratio (%) of the organic component amount and Ag amount contained in C6AgAL is plotted with black rhombus and black triangle, respectively, against the production temperature PT (° C.).
- the mass ratio of silver carbonate decreases, the mass ratio of C6AgAL (black squares) increases, and it can be seen that 6AgAL is produced using silver carbonate as a raw material.
- C6AgAL was produced even at a production temperature of 100 ° C. or lower, and it was confirmed that the composite silver nanoparticles according to the present invention were produced at a low temperature using silver carbonate as a raw material.
- generated has a high ratio (black triangle) of Ag amount also in low temperature production
- the arrow PT indicates the generation temperature (° C.)
- T 1 indicates the decomposition start temperature (° C.)
- T 2 indicates the decomposition temperature
- T 3 indicates the metallization temperature (° C.). This is described in “Relationship between C6AgAL Production Temperature and Characteristic Temperature”, and is estimated from the thermal analysis of FIGS. 9 to 13.
- the DTA peak is a single peak, whereas in FIGS. 12 to 13, the DTA peak is a double peak.
- the DTA first peak is a decomposition peak in which decomposition occurs rapidly
- the DTA final peak that is, the DTA second peak
- the DTA first peak and the DTA second peak are also present in FIGS. 9 to 11, but they are close to each other, so that they appear to be only a single peak due to overlap.
- the decomposition temperature T2 and the metallization temperature T3 are all 150 ° C. or less.
- the decomposition start temperature T1 is included within 60 ° C. below the decomposition temperature T2. That is, if C6AgAL obtained at a production temperature of 100 ° C. or lower is used, a suitable alternative solder material that can decompose and metallize organic substances contained at 150 ° C. or lower can be provided.
- T1 105 ° C.
- the TG decrease start temperature T1 is included within 60 ° C. below the DTA peak temperature T2.
- Example 2 C8AgAL
- Table 4 describes the measurement results of plasmon absorption and aldehyde absorption in low-temperature production of C8AgAL. Samples were taken at each temperature while raising the temperature in the reaction tube, and the optical density (OD) of the absorption peak (wavelength: 410 nm) and aldehyde absorption (wavelength: 290 nm) of the nanoparticle plasmon was measured.
- the reaction time is the time required to reach each temperature, and corresponds to the production time of C8AgAL.
- the peak position of the nanoparticle plasmon corresponds to the resonance energy of the surface plasmon in the nanoparticle.
- FIG. 14 is a relationship diagram between the absorption intensity of C8AgAL and the generation time according to the present invention.
- the absorption intensity and reaction temperature (generation temperature) described in Table 4 are plotted against the reaction time
- the absorption intensity of the nanoparticle plasmon is plotted with a black circle
- the aldehyde optical density is plotted with a black rhombus.
- the silver carbonate on the surface of the silver carbonate fine particles reacts with alcohol to produce aldehyde R n-1 CHO simultaneously with silveration, and silver carbonate is reduced by the strong reducing action of the aldehyde.
- the carboxylic acid R n-1 COOH is formed.
- the intermediately produced Ag, AgOR n , and R n-1 COOH aggregate with each other to produce composite silver nanoparticles.
- FIG. 14 it can be seen that in the first 10 minutes, the absorption intensity of the nanoparticle plasmon increases rapidly, and the nanoparticles grow rapidly.
- the optical density of the aldehyde increases slowly.
- the silveration of the silver carbonate by the reaction with the alcohol and the reduction reaction of the produced aldehyde enhance the silveration of the silver carbonate. It can be seen that silver nanoparticles are generated with high efficiency.
- reaction temperature reaction temperature
- this measurement also demonstrates that composite silver nanoparticles are produced with high efficiency at 100 ° C. or less.
- decrease of nanoparticle plasmon absorption intensity is due to the increase of the composite silver nanoparticle produced
- Example 1 also measures the nanoparticle plasmon absorption intensity and the aldehyde optical density, but since the same results as in Example 2 are obtained, description of the measurement results is omitted.
- the thermal analysis regarding Example 2 the result similar to Example 1 was obtained, and the production
- the DTA peak temperature T2 is 150 ° C. or less
- the TG decrease start temperature T1 is also within 60 ° C. below the T2, and the organic coating layer is decomposed and metallized within 150 ° C. Has been confirmed.
- FIG. 15 is a graph showing the relationship between the optical density and the photon energy in the surface plasmon transition region indicating the generation of C10AgAL according to the present invention.
- C10AgAL as in Example 2, optical measurement was performed in the surface plasmon transition region, and as shown in the figure, the increase in the absorption intensity due to the surface plasmon of the nanoparticles as the temperature increased was measured.
- the absorption by the surface plasmon is the maximum in the spectrum having a production time of 17 minutes and a production temperature of 81.9 ° C.
- FIG. 16 is a relationship diagram between optical density and photon energy showing aldehyde formation in a C10AgAL production test according to the present invention.
- Silver carbonate on the surface of the silver carbonate fine particles reacts with alcohol to produce aldehyde simultaneously with silvering, and as the temperature rises and production time increases, the increase in absorption intensity by aldehyde has been measured. That is, it is proved that the aldehyde absorption is maximized and the reduction of silver carbonate by the aldehyde is promoted at an elapsed time of 17 minutes and a production temperature of 81.9 ° C.
- FIG. 17 is a graph showing the relationship between the absorption intensity and the generation temperature of C10AgAL according to the present invention.
- the absorption intensity of the surface plasmon shown in FIGS. 15 and 16 is plotted with black circles, and the aldehyde optical density is plotted with black squares against the generation temperature. It can be seen that before the generation temperature PT reaches 100 ° C., the absorption intensity of the surface plasmon increases rapidly and the aldehyde absorption increases. That is, as described above, silver carbonate is silvered by reaction with alcohol, and silver carbonate is enhanced by reduction reaction with the generated aldehyde, and composite silver nanoparticles are produced at a high efficiency at 100 ° C. or lower. Has been.
- Table 5 is a list of “C10AgAL plasmon absorption generation temperature / time dependency” and “C10AgAL aldehyde absorption temperature / time dependency”. Plasmon absorption and aldehyde absorption were measured while gradually raising the temperature (generation temperature) of the reaction vessel.
- FIG. 18 is a graph showing the relationship between the absorption intensity and the generation time of C10AgAL according to the present invention.
- This figure plots the surface plasmon absorption intensity shown in Table 5 with black circles and the aldehyde optical density with black rhombuses against the generation time. Absorption intensity of surface plasmon and aldehyde absorption increase rapidly, and the generation time is maximized at 17 minutes.
- the silver carbonate is silvered by reaction with alcohol and the generated aldehyde is reduced for a short time. It can be seen that silveration of silver carbonate is performed with high efficiency. It can be seen that when the production temperature PT is 100 ° C. or lower, the production of C10AgAL occurs rapidly within several tens of minutes.
- FIG. 19 is a high-resolution transmission electron microscope view of C10AgAL produced at 90 ° C.
- a magnified view of the transmission electron microscope image clearly shows a lattice image of silver nuclei of the silver nanoparticles, demonstrating extremely high crystallinity. From these lattice images, it was found that the silver nuclei were almost single crystallized. From this high crystallinity, it can be concluded that the composite silver nanoparticles of the present invention have high electrical conductivity and high thermal conductivity.
- FIG. 20 is a transmission electron micrograph of C12AgAL produced at 126 ° C.
- a transmission electron microscope image of C12AgAL is also observed, and in the enlarged view, a lattice image of silver nanoparticles is clearly seen, and it can be seen that it is highly crystallized. From this lattice image, it can be judged that it is almost a single crystal. From this single crystallinity, it can be concluded that the composite silver nanoparticles of the present invention have high electrical conductivity and high thermal conductivity.
- T1AgAL it can be seen that C1AgAL is generated at 100 ° C.
- FIG. 24 is a transmission electron micrograph of C2AgAL produced at 65 ° C.
- a transmission electron microscope image of C2AgAL is also observed, and in the enlarged view, a lattice image of silver nanoparticles is clearly seen, and it can be seen that it is highly crystallized. From this lattice image, it can be judged that it is almost a single crystal.
- the lattice spacing of the lattice image is 0.24 nm.
- FIG. 26 is a transmission electron micrograph of C4AgAL produced at 80 ° C.
- a transmission electron microscope image of C4AgAL is also observed, and in the enlarged view, a lattice image of silver nanoparticles is clearly seen, and it can be seen that it is highly crystallized.
- the lattice spacing of the lattice image is 0.24 nm. Since the lattice spacing d of the (111) plane of the bulk silver crystal coincides with 0.24 nm, it was found that the lattice image represents the (111) plane.
- the upper silver nucleus can be determined to be a single crystal, but the lower silver nucleus can be determined to be a single crystal or a twin crystal. Due to this high degree of crystallinity, it can be concluded that the composite silver nanoparticles of the present invention have high electrical conductivity and high thermal conductivity.
- Table 6 shows specific values of the production temperature PT, the decomposition start temperature T1 (° C.), the decomposition temperature T2 (° C.), and the metallization temperature T3 (° C.) in Examples 1 to 12. Except for C12AgAL, it is clear that the generation temperature PT is 100 ° C. or less, the decomposition temperature T2 and the metallization temperature T3 are 150 ° C. or less, and the decomposition start temperature T1 is within 60 ° C. below the decomposition temperature T2. became.
- the production temperature PT of C12AgAL is 126 ° C., but the decomposition temperature T2 and the metallization temperature T3 are 150 ° C.
- the condition that the decomposition start temperature T1 is within 60 ° C. below the decomposition temperature T2 is also the other CnAgAL It turned out to be the same. Therefore, it was found that the conditions under which the decomposition temperature T2 is 150 ° C. or less and the conditions where the decomposition start temperature T1 is within 60 ° C. below the decomposition temperature T2 are common conditions for CnAgAL of C1 to C12. In the measurement of CnAgAL, the inequality “T2-60 ⁇ T1 ⁇ T2” was obtained.
- Table 7 is a list of relationships between the production temperature PT and the decomposition temperature T2 in the composite silver nanoparticles.
- FIG. 27 illustrates the data in Table 7, where the horizontal axis represents the production temperature PT (° C.) and the vertical axis represents the decomposition temperature T2 (° C.).
- Table 8 is a list of relationships between the decomposition start temperature T1 and the decomposition temperature T2 in the composite silver nanoparticles.
- FIG. 28 illustrates the data of Table 8, where the horizontal axis represents the decomposition start temperature T1 (° C.) and the vertical axis represents the decomposition temperature T2 (° C.). As is apparent from FIG. 28, the decomposition temperature T2 is 150 ° C. or lower, and the decomposition start temperature T1 is 140 ° C. or lower.
- Table 9 is a list of relationships between the decomposition start temperature T1, the decomposition temperature T2, and T2-60 in the composite silver nanoparticles.
- T2-60 is described for the determination of satisfaction in the range of T2-60 ⁇ T1 ⁇ T2. In the above embodiment, it is numerically clear that the above range is satisfied.
- FIG. 29 illustrates the data in Table 9, where the horizontal axis indicates the C number and the vertical axis indicates the characteristic temperature.
- the characteristic temperatures of the present invention are the generation temperature PT, the decomposition start temperature T1, the decomposition temperature T2, and the metallization temperature T3.
- T2-60 is also included as the characteristic temperature.
- the black square is the decomposition temperature T2
- the black triangle is T2-60
- the black circle indicates the decomposition start temperature T2. Since all the black circles exist between the black triangle and the black square, it was proved to the above embodiment that the inequality condition of T2-60 ⁇ T1 ⁇ T2 is satisfied for C1 to C12.
- Table 10 is a list of the production temperature PT, the decomposition start temperature T1 (° C.), the decomposition temperature T2 (° C.), the metallization temperature T3 (° C.), and the boiling point BT of the alcohol corresponding to the C number in Examples 1 to 12.
- FIG. 30 illustrates the data in Table 10, where the horizontal axis indicates the C number of the alcohol-derived organic coating layer, and the vertical axis indicates the characteristic temperature.
- the characteristic temperatures of the present invention are the production temperature PT, the decomposition start temperature T1, the decomposition temperature T2, the metallization temperature T3, and the alcohol boiling point BT.
- FIG. 30 includes all the main conditions of the present invention.
- the conditions of the generation temperature PT ⁇ 100 ° C. are all satisfied except for C12.
- the DTA peak temperature T2 ⁇ 150 ° C. is satisfied for all of C1 to C12.
- the metallization temperature T3 ⁇ 150 ° C. is established for all of C1 to C12.
- T2-60 ⁇ T1 ⁇ 150 ° C. is established for all of C1 to C12.
- the heating temperature is controlled by the boiling point BT of the alcohol.
- the boiling point BT of methanol of C1 is 64.7 ° C.
- the alcohol temperature does not exceed 64.7 ° C.
- the alcohol boiling point BT increases as the C number increases.
- the production temperature can be set higher than the boiling point by pressure boiling.
- the production temperature can be set lower than the boiling point by boiling under reduced pressure.
- Table 11 is a list of lattice images of CnAgAL in C1 to C12 by a high-resolution transmission electron microscope.
- a lattice image of silver nuclei was confirmed, and it was proved that crystallinity was extremely high.
- the present inventors have confirmed the lattice image of silver nuclei with alkoxide-coated silver nanoparticles for the first time, and alkoxide-coated silver having a high degree of crystallinity such as single crystal or twin crystal of silver nuclei. Succeeded in providing nanoparticles. Therefore, it was demonstrated that the electrical conductivity and thermal conductivity of the CnAgAL of the present invention are extremely high.
- Examples 011 to 123 Properties of C1 to C12 composite silver nanopaste
- a composite silver nanopaste was prepared using the composite silver nanoparticles produced according to the present invention.
- the following three types of pastes were prepared from each of C1 to C12 CnAgAL.
- At least one of CnAgAL has the metallization temperature T3 shown in Examples 1 to 12, and the rest of CnAgAL has a metallization temperature T3 that is slightly different from the metallization temperature T3 of the above example. However, all metallization temperatures T3 are selected to be 150 ° C.
- the solvent was selected from methanol, ethanol, butanol, xylene, toluene, hexane.
- the viscosity-imparting agent was selected from turpentine oil, terpineol, terpine derivative (mixture of 1,8-terpine monoacetate and 1,8-terpin diacetate), methylcellulose. Methylcellulose is a powder and is always used in combination with a solvent.
- the particle size of silver particles, the type of solvent, the type of viscosity imparting agent, the mass% of each component, and the paste baking temperature in the atmosphere are as described in Tables 12 and 13. Tables 12 and 13 show the metallization temperature T3 (° C.) and actual air paste firing temperature (° C.) of Cn to C12 CnAgAL.
- the paste firing temperature in the atmosphere is set higher than the metallization temperature T3 of CnAgAL. This is because it is necessary not only to metallize CnAgAL, but also to evaporate the solvent and evaporate or decompose the viscosity-imparting agent. Moreover, although the metallization temperature T3 of CnAgAL is 150 ° C. or less, if it is fired at a temperature higher than the metallization temperature, an excellent metal film can be formed and a silver film with high electrical conductivity can be formed. Therefore, as shown in Tables 12 and 13, the paste firing temperature in the atmosphere was set higher than the metallization temperature T3, and it was confirmed that the silver film characteristics improved as the temperature increased.
- the paste firing temperature in the atmosphere was adjusted to 200 ° C. or lower. Moreover, when a terpine derivative is used as a viscosity imparting agent, the firing temperature is further increased. Furthermore, when methylcellulose was used as a viscosity imparting agent, the firing temperature was set to a higher level of 400 ° C and 450 ° C. As described above, the paste baking temperature in the air depends on the air diffusion temperature of the viscosity imparting agent.
- Example 124 Joining of semiconductor electrode and circuit board
- a bonding test was performed with the semiconductor chip as the upper body and the circuit board as the lower body.
- the electrode end of the semiconductor chip was inserted into the through hole of the circuit board, and the composite silver nanopaste of Example 011 to Example 123 was applied to the contact portion between them to obtain 36 types of paste specimens.
- the said coating part was heated locally with the paste baking temperature of Table 12 and Table 13, and the said coating part was metallized, and joining was completed. After cooling, when the appearance of the joint was inspected with an optical microscope, there were no problems with the 36 types of specimens. An electrical continuity test and an electrical resistance measurement were performed, and it was confirmed that it functions effectively as an alternative solder. From the 36 kinds of joining tests, it was found that the composite silver nanopaste according to the present invention can be used industrially as an alternative solder.
- Example 125 Formation of silver pattern on heat-resistant glass substrate
- the composite silver nanopastes of Examples 011 to 123 were screen-printed on this base to obtain 36 types of test bodies on which a predetermined paste pattern was formed.
- the said test body was heated with the air paste baking temperature of Table 12 and Table 13 with an electric furnace, and the silver pattern was formed from the said paste pattern.
- the surface of the silver pattern was inspected with an optical microscope, there were no problems with 36 types of specimens. From the 36 types of pattern formation tests, it was found that the composite silver nanopaste according to the present invention can be used industrially as a silver pattern forming material.
- FIGS. 31 to 36 are thermal analysis diagrams of another composite silver nanoparticle C1AgAL to C12AgAL at a heating rate of 1 ° C./min.
- Each thermal analysis diagram is composed of a TG curve and a DTA curve.
- the decomposition start temperature T1 is a TG decrease start temperature
- the decomposition temperature T2 is a DTA first peak temperature
- the metallization temperature T3 is a TG decrease end temperature or a DTA final peak end temperature.
- These specific temperatures and generation temperatures PT are listed in Table 14, and the temperatures of T1, T2, and T3 are estimated from the thermal analysis of FIGS. Further, FIG.
- C1AgAL to C3AgAL have a single DTA peak
- C4AgAL to C12AgAL in FIGS. 32 to 36 have a double peak.
- the DTA first peak is a decomposition peak in which decomposition occurs rapidly
- the DTA final peak that is, the DTA second peak
- the DTA first peak and the DTA second peak exist, but they are close to each other, so they only appear to be a single peak due to overlap. I think.
- the mass is reduced due to the decomposition of the organic coating layer.
- the entire amount of the organic coating layer is diffused at the metallization temperature T3 at which the final DTA peak is lowered, and the silver nuclei of the composite silver nanoparticles are bonded to each other to complete silvering.
- Table 15 is a list of relationships between the decomposition start temperature T1, the decomposition temperature T2, and T2-90 in the composite silver nanoparticles of Examples 1001 to 1012. T2-90 is described for the determination of satisfaction in the range of T2-90 ⁇ T1 ⁇ T2. In the above embodiment, it is numerically clear that the above range is satisfied.
- FIG. 38 illustrates the data in Table 15, where the horizontal axis indicates the C number and the vertical axis indicates the characteristic temperature.
- the characteristic temperatures of the present invention are the generation temperature PT, the decomposition start temperature T1, the decomposition temperature T2, and the metallization temperature T3.
- T2-90 is also included as the characteristic temperature.
- the black square is the decomposition temperature T2
- the black triangle is T2-90
- the black circle indicates the decomposition start temperature T2. Since all the black circles exist between the black triangle and the black square, it was proved against the second embodiment that the inequality condition of T2-90 ⁇ T1 ⁇ T2 is satisfied for C1 to C12.
- the differential thermal weight (DTG) estimated from this TG is plotted together with the DTA and TG measurement results.
- the decomposition start temperature T1 is a TG decrease start temperature
- the decomposition temperature T2 is a DTA first peak temperature
- the metallization temperature T3 is a TG decrease end temperature or a DTA final peak end temperature. From the plot of DTG, it can be seen that the decomposition start temperature T1 is a temperature at which a linear TG decrease changes to a curvilinear TG decrease. That is, in the plot of DTG, the TG decrease rate tends to become a substantially constant at a temperature lower than the decomposition start temperature T1, and the TG decrease rate increases rapidly when the decomposition start temperature T1 is exceeded.
- the linear decrease in TG is slight, and is considered to be a component due to evaporation of the residue and the like contained in the composite silver nanoparticle powder serving as a TG sample. Therefore, the TG decrease start temperature estimated from the decomposition start temperature T1 can be referred to as the TG decrease start temperature of pure composite silver nanoparticles, and it is reasonable to estimate the decomposition start temperature T1 from this TG decrease start temperature. It can be said that.
- the DTG plots in FIGS. 39 to 44 have a dip structure that is minimized at or near the positions of the DTA first peak, the DTA second peak, and the final peak, and the TG reduction rate is maximized.
- the TG reduction rate is maximal and the heat dissipation associated with the decomposition of organic matter is maximal at or near each peak temperature of DTA, indicating good agreement.
- the metallization temperature T3 is exceeded, the DTG becomes substantially zero, and it is more clearly shown that the decrease in TG is completed with the metallization of the composite silver nanoparticles.
- the temperature increase rate VT of the composite silver nanoparticles C10AgAL is changed in the range of 1 to 20, and the decomposition start temperature T1, the decomposition temperature T2, and the metal in FIGS.
- the conversion temperature T3 increases as the temperature increase rate VT increases.
- the temperature increase rate VT increases, the time until the predetermined temperature is reached is shortened, and the time integral value of the amount of heat applied to the composite silver nanoparticles is decreased. This is a major factor, and the decomposition start temperature T1, the decomposition temperature T2, and the metallization temperature T3 are increased as the temperature increase rate VT is increased.
- the paste decomposition start temperature Tp1 in FIGS. 45 to 50 indicates the temperature at which the viscosity imparting agent contained in the composite silver nanopaste evaporates and the decrease in TG accompanying the decomposition of the organic coating layer is started.
- the DTG plot becomes substantially zero or a value near zero at the paste decomposition start temperature Tp1, and the second decrease start temperature of DTG is given.
- a DTA peak appears in the DTA curve, and the DTA first peak temperature that appears first is the paste decomposition temperature Tp2 (° C.).
- the steep final peak appearing at the end of the DTA peak is considered to be a binding energy emission peak in which the bare silver nuclei remaining after the organic coating layer is oxidatively decomposed are bonded to each other.
- the point at which this final peak falls and breaks in the horizontal direction is defined as the paste metalization temperature Tp3 (° C.). These paste temperatures satisfy the inequality Tp1 ⁇ Tp2 ⁇ Tp3.
- Table 16 shows the decomposition start temperature T1, decomposition temperature T2, and metallization temperature T3 of the composite silver nanoparticle powder estimated from FIGS. 39 to 50, the decomposition start temperature Tp1, the decomposition temperature Tp2, and the metal of the composite silver paste.
- the characteristic temperature consisting of the conversion temperature Tp3 is described.
- FIG. 51 is a relationship diagram between the characteristic temperature (T1, T2, T3, Tp1, Tp2, Tp3) of CnAgAL and PCnAgAL obtained in FIG. 39 to FIG. As shown in Table 16 and FIG.
- Tp1 when the temperature increase rate VT is changed by a range of 1 to 20 (° C./min), the paste decomposition start temperature Tp1 increases by about 50 ° C., and the paste decomposition temperature Tp2 is about 65
- Tp2 and Tp3 are considered to increase by about 50 ° C, about 65 ° C, and about 80 ° C, respectively.
- these temperature increases depend on the carbon number of the organic coating layer, but also somewhat on the silver nucleus particle size.
- VT temperature increase
- the TG decrease start temperature T1 of the composite silver nanoparticles is in the range of T2-90 ⁇ T1 ⁇ T2.
- Such composite silver nanoparticles can be produced by lowering the production temperature PT to 160 ° C. or less, more preferably 140 ° C. or less, and include a DTA peak temperature T2, a TG decrease start temperature T1, and a production temperature PT. Are linked to each other.
- the metallization temperature T3 is only a few degrees higher than the DTA peak temperature T2, and since the DTA peak temperature T2 is 200 ° C. or less, the metallization temperature T3 is also approximately 200 ° C. or less. Therefore, metallization at about 200 ° C. or less is achieved by producing composite silver nanoparticles at a low temperature. Since the melting point of the conventional Sn—Pb solder is 183 ° C., the composite silver nanoparticles of the present invention can be used as a lead-free alternative solder and can be used as a silver film forming material. Since the generation temperature is 160 ° C. or lower, the cost of the manufacturing apparatus and manufacturing equipment can be greatly reduced.
- the composite silver nanoparticles of the present invention have structures such as electronic materials such as printed wiring and conductive materials, magnetic materials such as magnetic recording media, electromagnetic wave absorbers and electromagnetic wave resonators, far infrared materials and composite film forming materials. It can be applied to various uses such as materials, ceramics and metal materials such as sintering aids and coating materials, and medical materials. Furthermore, according to this invention, the cheap manufacturing method and manufacturing apparatus of composite silver nanoparticle can be provided.
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Abstract
Description
た。この国際公開公報には、金属塩から得られる粒径が1~100nmの金属核の周囲に炭素数4以上のアルコール性水酸基を含む有機化合物からなる被覆層を形成した複合金属ナノ粒子が開示されている。しかも、吸着性を有する官能基を含む有機化合物として、炭素数6以上の高級アルコールが記載されている。
Ag2CO3→Ag2O+CO2 (150℃<T<210℃) (A)
Ag2O→2Ag+1/2O2 (T>400℃) (B)
まず、式(A)の反応が生起するが、式(B)の分解温度は400℃以上であり、200℃以下の金属化を達成できず、融点183℃のSn-Pb半田の代替品としても不適格である。しかも、銀核の結晶性は全く記載されておらず、電気伝導性と熱伝導性の良否の判定は全く不能である。
7.85≦(T+273)(20+logt)×10-3≦7.98 (C)
複合銀ナノ粒子の銀核粒径は1~20nmであり、複合銀ナノ粒子自体の粒径はアルコール有機被覆層の厚み分だけ増大するが、炭素数が1~12に制限されるから、その厚みはそれほど大きくない。炭素数が小さくなるほどその厚みも小さくなり、同時に銀核重量比が増大し、接合強度も強くなる性質を有する。
当初、本発明者は、低温焼成型の複合銀ナノ粒子を研究し、T3≦150℃又はT2≦150℃を満足する複合銀ナノ粒子を開発したが、更に研究を重ねてT3≦200℃の範囲の複合銀ナノ粒子を開発するに到ったものである。従来文献を検討しても、T3≦200℃の複合銀ナノ粒子は存在せず、本発明によりT3≦200℃の複合銀ナノ粒子が初めて実現したものである。
金属化温度T3が200℃以下の複合銀ナノ粒子の開発により、従来のSn-Pb半田の融点183℃に匹敵する高特性の代替半田を提供することに成功したものである。金属化温度T3が200℃以下であるから、製造装置や製造設備のコストも大幅に低減できる。従って、本発明の複合銀ナノ粒子は、プリント配線・導電性材料などの電子材料、磁気記録媒体・電磁波吸収体・電磁波共鳴器などの磁性材料、遠赤外材料・複合皮膜形成材などの構造材料、焼結助剤・コーティング材料などのセラミックス・金属材料、医療材料などの各種用途に適用できる。
本発明者は、2種類のCnAgAL(n=1~12)の熱解析測定を実行し、第1種類ではT2-60≦T1≦T2、第2種類ではT2-90≦T1≦T2を結論として得た。これらを纏めて、本発明では、T2-100≦T1≦T2の不等式が成立することを確認したものである。
本発明の複合銀ナノ粒子は、以下の表記ではCnAgALと書かれる。n=1~12に対応して、C1AgAL、C2AgAL、C3AgAL、C4AgAL、C5AgAL、C6AgAL、C7AgAL、C8AgAL、C9AgAL、C10AgAL、C11AgAL、C12AgALが存在する。その意味は、炭素数n=1~12のアルコールから生成された複合銀ナノ粒子である。従って、C1はメタノール、C2はエタノール、C3はプロパノール、C4はブタノール、C5はペンタノール、C6はヘキサノール、C7はヘプタノール、C8はオクタノール、C9はノナノール、C10はデカノール、C11はウンデカノール、C12はドデカノールを意味している。n=偶数のアルコールは天然植物由来のアルコールであり、他方、n=奇数は化学合成アルコールであるから、n=偶数のアルコールは比較的安価であり、安価な複合銀ナノ粒子を提供できる。また、炭素数nが少なくなるに応じて銀核の重量比が高くなり、銀量の多い複合銀ナノ粒子を提供できる。
前記溶剤は複合銀ナノ粒子からなる粉体を分散させて溶液化する材料であり、例えばアルコール、アセトン、トルエン、キシレン、プロパノール、エーテル、石油エーテル、ベンゼンなどが利用できる。前記粘性付与剤は前記溶液に添加して塗着し易い粘性を付与する材料であり、例えばテレピンオイル、ターピネオール、メチルセルロース、エチルセルロース、ブチラール、各種テルペン誘導体、IBCH(イソボルニルシクロヘキサノール)、グリセリン、C14以上の常温で固形のアルコールなどが利用できる。テルペン誘導体としては1,8-テルピンモノアセテート、1,8-テルピンジアセテートなどがある。IBCHは松脂状、グリセリンはシロップ状、C14以上のアルコールは固液変化する性質を有し、10℃以下では非流動性を有する。前記非流動性粘性付与剤に本発明の複合銀ナノ粒子を混合分散させて非流動性ペーストにすれば、10℃以下の低温では複合銀ナノ粒子が分散状に固定されているから、複合銀ナノ粒子同士の凝集が生起しない。使用する直前に前記非流動性ペーストを加熱すれば流動化してペーストとして塗着可能になり、ペーストとしての機能を発揮できる。また、使用直前に前記非流動性ペーストに溶剤を添加すれば、加熱しなくても流動性ペーストになり、ペーストとしての機能を発揮できることは云うまでもない。
本発明の複合銀ナノ粒子は金属化温度T3が200℃以下であるから、前記溶剤及び/又は粘性付与剤の蒸発温度或いは分解温度は極力低く設定されることが望ましい。従って、ペーストの焼成温度は複合銀ナノ粒子の金属化温度だけでは決まらず、溶剤及び/又は粘性付与剤の蒸発温度や分解温度にも依存する。また、加熱により蒸発・分解気散する必要があり、炭化して残留するものは除かれる。また、使用形態として、溶剤だけ添加したペースト、粘性付与剤だけ添加したペースト、溶剤と粘性付与剤の両者を添加したペーストが利用できる。
本発明の複合銀ナノペーストのペースト分解開始温度Tp1(℃)、ペースト分解温度Tp2(℃)及びペースト金属化温度Tp3(℃)の定義は、前述した本発明の複合銀ナノ粒子における分解開始温度T1(℃)、分解温度T2(℃)及び金属化温度T3(℃)の定義と対応する。ただし、複合銀ナノペーストでは、複合銀ナノ粒子に溶剤及び/又は粘性付与剤が添加されているから、複合銀ナノ粒子が酸化分解される前に、溶剤及び/又は粘性付与剤の脱離や酸化分解が先行する。従って、TG曲線及びDTA曲線に溶剤及び/又は粘性付与剤の曲線が先行し、その後に複合銀ナノ粒子の曲線が後続する。つまり、TG曲線に出現する第1の急激な減少は、その微分曲線であるDTG曲線に最初の深い谷間を形成し、この谷間が復帰してDTG曲線がほぼゼロになった温度がペースト分解開始温度Tp1と判断できる。このTp1はDT曲線の第2の減少開始温度を与える。このペースト分解開始温度Tp1の後に、DTA曲線においてDTAピークが出現し、その最初に出現するDTA第1ピーク温度がペースト分解温度Tp2(℃)である。DTAピークの最後に出現する急峻な最終ピークは、有機被覆層が酸化分解された後に残留する裸の銀核同士が結合する結合エネルギーの放出ピークと考えられる。この最終ピークが落ちて横方向に折れる点がペースト金属化温度Tp3(℃)と定義される。これらのペースト温度は、Tp1≦Tp2≦Tp3の不等式を満足する。
前記昇温速度VTを1~20(℃/min)の範囲だけ変化すると、ペースト分解開始温度Tp1は約50℃ほど増加し、ペースト分解温度Tp2は約65℃ほど増加し、ペースト金属化温度Tp3は約80℃ほど増加する傾向が見られる。従って、複合銀ナノペーストをVT=1(℃/min)で昇温しながらTp1、Tp2、Tp3を測定し、同じ複合銀ナノペーストをVT=20(℃/min)で測定すると、前記Tp1、Tp2、Tp3は夫々約50℃、約65℃、約80℃増加すると考えられる。しかし、これらの温度増加量は有機被覆層の炭素数に依存することは云うまでもなく、銀核粒径にも多少は依存すると考えられる。
T1(VT)≦Tp1(VT)≦T1(VT)+100 (P1)
T2(VT)≦Tp2(VT)≦T2(VT)+70 (P2)
T3(VT)≦Tp3(VT)≦T3(VT)+50 (P3)
本形態は(P3)式を表現したものである。この不等式により、複合銀ナノ粒子の特性温度T1、T2、T3を測定することによって、その複合銀ナノペーストの特性温度のTp1、Tp2、Tp3を推定することが可能になった。
アルコール溶液とは、銀塩とアルコールの混合液であり、アルコール量を増加させて、生成された複合銀ナノ粒子がアルコール中を浮遊する状態にすれば、相互の衝突確率が低減し、複合銀ナノ粒子の会合が阻止できる。また、大量のアルコール分子を前記銀塩微粒子の表面に吸着させ、表面反応を促進させる。アルコールの一般式はRnOH(Rnは炭化水素基)であり、Rnは疎水基で、OHは親水基であるから、考え方を変えればアルコールは界面活性作用を有した界面活性剤である。銀塩の多くはアルコール難溶性であるが、銀塩微粒子表面はアルコールのOH基が結合しやすい性質を有している。従って、銀塩微粒子はアルコールで取り囲まれ、銀塩微粒子の粒径が小さくなると安定な単分散コロイドになると云っても良い。銀塩微粒子の粒径が大きくなると、アルコール中を沈殿する可能性があるが、混合攪拌して一定時間分散状態にある場合には、その間に反応を完了させれば良い。
また、アルコール自体でも還元作用を有するが、アルコールは200℃以下の生成温度でもアルデヒドに容易に変化し、このアルデヒドは強力な還元作用を有する。つまり、前記銀塩微粒子の表面にアルコール及び/又はアルデヒドが作用して次第に銀が析出し、最終的には銀塩微粒子の全領域が還元されて銀核へと転化する。この銀核の周囲に、アルコールに由来するアルコール分子誘導体、アルコール分子残基、又はアルコール分子の一種以上からなる有機被覆層が形成されて複合銀ナノ粒子が生成される。生成温度PTを例えば200℃以下に設定すれば、金属化温度T3の低い複合銀ナノ粒子を生成できる。本発明では、生成温度PTを金属化温度T3(≦200℃)より低く設定して、低温焼成用の複合銀ナノ粒子を生成する。銀核の平均粒径は1~20nmであるが、銀塩微粒子の微細化処理を徹底的に行えば、より小さな粒径の複合銀ナノ粒子を製造することができる。
本発明において使用される銀塩微粒子としては、無機銀塩と有機銀塩が利用でき、無機銀塩には炭酸銀、塩化銀、硝酸銀、リン酸銀、硫酸銀、ほう酸銀、フッ化銀などがあり、また有機銀塩にはギ酸銀、酢酸銀などの脂肪酸塩、スルホ酸塩、ヒドロキシ基・チオール基・エノール基の銀塩などがある。この中でもC、H、OとAgからなる銀塩又はC、OとAgからなる銀塩が好ましい。その理由は、P、S、Nといった原子は半導体やセラミックスに拡散して不純物となり物性を低下させる可能性があるからである。その観点から、炭酸銀(Ag2CO3)が最も好適である。アルコールを溶媒として用いるから、アルコールの還元力により、無機銀塩でも有機銀塩でも比較的低温で本発明の複合銀ナノ粒子が生成できる。無機銀塩はアルコールに難溶性であるが、有機銀塩はアルコールに溶解するものと難溶性のものがある。アルコール溶解性有機銀塩としては例えばアビチエン酸銀など極めて少数であり、無機銀塩と多くの有機銀塩はアルコール難溶性と考えてよい。アルコール溶解性銀塩はアルコールに分子レベルで溶解し、アルコールとの反応性が高められる。他方、アルコール難溶性銀塩は微粒子化してアルコールに混合分散され、その微粒子サイズがナノサイズにまで微細化されると、アルコール溶媒中に安定して分散し、アルコールとの反応性を高めることができる。
本製法では、アルコール質量は、銀塩質量よりもかなり過剰である。例えば、銀塩が炭酸銀の場合を例に取ると、通常の銀アルコキシドの生成は下記の式(D)で与えられる。
Ag2CO3+2RnOH→2RnOAg+CO2+H2O (D)
つまり、炭酸銀:アルコール=1モル:2モルであり、このモル比が化学量論比である。本製法では、アルコールのモル比を前記化学量論比よりかなり大きくして過剰アルコール溶液とする。この過剰度が高まるほど、生成された複合銀ナノ粒子が相互に衝突し難くなり、複合銀ナノ粒子の会合と凝集を阻止することができる。複合銀ナノ粒子が凝集して大きくなると、金属化温度T3が高くなり過ぎ、金属化温度T3を200℃以上にする可能性が有る。本製法では、過剰アルコール溶液にすることによって、初めて金属化温度T3を200以下に低下させることに成功した。
本装置は、銀塩微粒子をアルコール溶媒に混合させてアルコール溶液を調製する原料混合器と、前記アルコール溶液を加熱器により所定温度で所定時間だけ加熱して複合銀ナノ粒子を生成する反応器と、前記反応器から供給されるアルコール溶液を冷却する冷却器から基本的に構成される。この基本構成に、前記冷却器から供給されるアルコール溶液から複合銀ナノ粒子を分離する成分精製器を付設することもできる。前記反応器は、加熱装置と反応容器から構成され、前記加熱装置としては、誘導加熱装置・赤外線加熱装置・プラズマ加熱装置・レーザー加熱装置・超音波加熱装置・又はそれらの組合せ加熱装置が利用できる。本装置としては、連続製造装置でもバッチ式製造装置でもよく、そのため、前記原料混合器と前記反応器と前記冷却器と成分精製器が連続式、一部連続式又はバッチ式に接続される複合銀ナノ粒子の製造装置が提供できる。有する複合銀ナノ粒子の製造装置が提供される。本装置により、複合銀ナノ粒子を高速大量製造することが可能になり、Sn-Pb半田に替わる代替半田の量産装置を提供できる。前記原料混合器の中にビーズを投入して、原料混合器を原料微細化混合器とする場合も本形態に包含される。
11 原料混合器
12 超微細化容器
13 投入口
14 中心管
15 回転軸
16 回転翼
17 ビーズ
20 反応器
21 原料供給口
22 反応管
23 加熱器
24 生成領域
25 冷却器
26 冷却領域
27 生成吐出口
30 成分精製器
31 外管
32 中管
33 超微細孔
34 内管
35 微細孔
36 内通路
37 中通路
38 外通路
40 中間分離器
41 銀塩分離容器
42 アルコール分離容器
50 粉体回収器
51 スプレー
52 乾燥器
53 ミスト
54 ホッパー
55 回収管
56 粉体回収容器
HE 抽出溶媒
式(10)及び式(11)は、銀核とその周囲に形成される有機被覆層の構成式を示す。有機被覆層はアルコキシド基ORnの場合もあれば、カルボン酸Rn-1COOHの場合もある。勿論、カルボン酸(脂肪酸)からHが脱離したカルボン酸基Rn-1COOの場合も有る。従って、有機被覆層は、アルコキシド、アルコキシド基、カルボン酸、カルボン酸基、又はそれらの混合形も存在する。
表3は、C6AgALに関して、実験から得られた測定データ等を「低温生成反応におけるC6AgALの生成量」、「C6AgALの低温生成における各物質量の質量」及び「C6AgALの生成温度と特性温度の関係」として表にまとめたものである。「低温生成反応におけるC6AgALの生成量」には、表に示すように、各生成温度に対するC6AgALの生成時間及び生成量に関する詳細な実験データが記載されている。「C6AgALの低温生成における各物質量の質量」には、前記各生成温度(70℃、80℃、90℃、100℃、111.5℃)において、生成物に含まれる炭酸銀とC6AgALの質量比率とC6AgALに含まれる有機成分とAgの質量比率が記載されている。ここで、生成物又はC6AgALの全質量を1としている。「C6AgALの生成温度と特性温度の関係」には、前記各生成温度PT(℃)で生成されたC6AgALのTG減少開始温度T1(℃)、DTAピーク温度T2(℃)及び金属化温度T3(℃)が記載されている。
図9~図11では、DTAピークが単一ピークであるが、図12~図13では、DTAピークがダブルピークになっている。前述した様に、DTA第1ピークは急速に分解が生起する分解ピークであり、DTA最終ピーク、つまりDTA第2ピークは裸の銀核同士の結合エネルギーピークと考えると理解が容易になる。実際には、図9~図11でも、DTA第1ピークとDTA第2ピークが存在するが、相互に接近しているため、オーバーラップにより単一ピークに見えているだけであると考える。
表4は、C8AgALの低温生成におけるプラズモン吸収とアルデヒド吸収の測定結果を記載したものである。反応管内の温度を上昇させながら各温度でサンプルを採取し、ナノ粒子プラズモンの吸収ピーク(波長:410nm)とアルデヒド吸収(波長:290nm)の光学濃度(O.D.)を測定している。反応時間は、各温度に到達するまでの時間であり、C8AgALの生成時間に相当する。また、ナノ粒子プラズモンのピーク位置は、ナノ粒子における表面プラズモンの共鳴エネルギーに相当する。
図15は、本発明に係るC10AgALの生成を示す光学濃度と表面プラズモン遷移領域の光子エネルギーの関係図である。C10AgALに関しても、実施例2と同様に、表面プラズモン遷移領域における光学測定を行っており、図に示すように、温度の上昇に伴うナノ粒子の表面プラズモンによる吸収強度の増大が測定されている。C10AgALの生成では、生成時間17分、生成温度81.9℃のスペクトルで表面プラズモンによる吸収が最大となっている。
図20は、126℃で生成されたC12AgALの透過電子顕微鏡図である。C12AgALに関しても透過型電子顕微鏡像を観察しており、その拡大図では、明確に銀ナノ粒子の格子像が見られており、高度に結晶化していることが分かる。この格子像から、ほぼ単結晶であると判断できる。この単結晶性により、本発明の複合銀ナノ粒子は高電気伝導性と高熱伝導性を有することが結論できる。
3000個の複合銀ナノ粒子の直径を測定し、平均粒径DをD=3±1(nm)と見積もっている。C12AgALの生成温度は、126℃と100℃を越えているが、D=3±1(nm)と極めて小さな粒径の複合銀ナノ粒子が得られている。
図22は、本発明に係る生成温度PT=59℃のC1AgALの熱解析図(VT=1℃/min)である。実施例1と同様に、TG及びDTAから分解開始温度T1(℃)、分解温度T2(℃)及び金属化温度T3(℃)が、T1=70℃、T2=123℃、T3=141℃と見積もられている。C1AgALにおいても、100℃以下でC1AgALが生成されると共に、150℃以下で有機被膜層等の有機成分が分解され、更に金属化されることが分かる。T2-T1=53(℃)であるから、TG減少開始温度T1はDTAピーク温度T2の下方60℃以内にあることが分かった。前記60℃はこの53℃を含む境界値として設定されたものである。C1AgALのように、炭素数が小さな複合銀ナノ粒子の場合、銀の含有比率が高く、有機成分の少ない代替半田材料やパターン材料の金属素材として用いることができる。
図23は、本発明に係る生成温度PT=65℃のC2AgALの熱解析図(VT=1℃/min)である。図に示すように、炭素数が小さなC2AgALにおいても、TG及びDTAから分解開始温度T1(℃)、分解温度T2(℃)及び金属化温度T3(℃)が測定され、T1=109℃、T2=111℃、T3=115℃と見積もられた。したがって、100℃以下で生成されたC2AgALは、150℃以下でその有機被膜層等の有機成分が分解され、金属化することが実験的に確かめられた。また、T2-T1=2(℃)であるから、TG減少開始温度T1はDTAピーク温度T2の下方60℃以内にあることが分かった。
図25は、本発明に係る生成温度PT=80℃のC4AgALの熱解析図である。C4AgALにおいても、TG及びDTAから分解開始温度T1(℃)、分解温度T2(℃)及び金属化温度T3(℃)が測定され、T1=103℃、T2=120℃、T3=122℃と見積もられた。以上から、100℃以下で生成されたC4AgALは、150℃以下でその有機被膜層等の有機成分が分解され、金属化することが実験的に確かめられている。また、T2-T1=17(℃)であるから、TG減少開始温度T1はDTAピーク温度T2の下方60℃以内にあることも確認された。
生成温度PT=88℃のC3AgALについて熱解析を行なった。TG及びDTAから分解開始温度T1(℃)、分解温度T2(℃)及び金属化温度T3(℃)が測定され、T1=112℃、T2=129℃、T3=132℃が得られた。従って、100℃以下で生成されたC3AgALは、150℃以下でその有機被膜層等の有機成分が分解され、金属化することが実験的に確かめられた。また、T2-T1=17(℃)であるから、TG減少開始温度T1はDTAピーク温度T2の下方60℃以内にあることが分かった。更に、高分解能透過型電子顕微鏡によりC3AgAL粒子の銀核にも格子像が観察された。前述と同様であるから、TG・DTA曲線と電子顕微鏡図は省略する。
生成温度PT=89℃のC5AgALについて熱解析を行なった。TG及びDTAから分解開始温度T1(℃)、分解温度T2(℃)及び金属化温度T3(℃)が測定され、T1=117℃、T2=134℃、T3=138℃が得られた。従って、100℃以下で生成されたC5AgALは、150℃以下でその有機被膜層等の有機成分が分解され、金属化することが実験的に確かめられた。T2-T1=17(℃)であるから、TG減少開始温度T1はDTAピーク温度T2の下方60℃以内にあることが分かった。また、高分解能透過型電子顕微鏡によりC5AgAL粒子の銀核にも格子像が観察された。前述と同様であるから、TG・DTA曲線と電子顕微鏡図は省略する。
生成温度PT=92℃のC7AgALについて熱解析を行なった。TG及びDTAから分解開始温度T1(℃)、分解温度T2(℃)及び金属化温度T3(℃)が測定され、T1=120℃、T2=135℃、T3=141℃が得られた。これから、100℃以下で生成されたC7AgALは、150℃以下でその有機被膜層等の有機成分が分解され、金属化することが実験的に確かめられた。T2-T1=15(℃)であるから、TG減少開始温度T1はDTAピーク温度T2の下方60℃以内にあることが分かった。また、高分解能透過型電子顕微鏡によりC7AgAL粒子の銀核にも格子像が観察された。前述と同様であるから、TG・DTA曲線と電子顕微鏡図は省略する。
生成温度PT=94℃のC9AgALについて熱解析を行なった。TG及びDTAから分解開始温度T1(℃)、分解温度T2(℃)及び金属化温度T3(℃)が測定され、T1=124℃、T2=138℃、T3=144℃が得られた。これから、100℃以下で生成されたC9AgALは、150℃以下でその有機被膜層等の有機成分が分解され、金属化することが実験的に確かめられた。T2-T1=14(℃)であるから、TG減少開始温度T1はDTAピーク温度T2の下方60℃以内にあることが分かった。また、高分解能透過型電子顕微鏡によりC9AgAL粒子の銀核にも格子像が観察された。前述と同様であるから、TG・DTA曲線と電子顕微鏡図は省略する。
生成温度PT=98℃のC11AgALについて熱解析を行なった。TG及びDTAから分解開始温度T1(℃)、分解温度T2(℃)及び金属化温度T3(℃)が測定され、T1=127℃、T2=141℃、T3=148℃が得られた。これから、100℃以下で生成されたC11AgALは、150℃以下でその有機被膜層等の有機成分が分解され、金属化することが実験的に確かめられた。T2-T1=14(℃)であるから、TG減少開始温度T1はDTAピーク温度T2の下方60℃以内にあることが分かった。また、高分解能透過型電子顕微鏡によりC11AgAL粒子の銀核にも格子像が観察された。前述と同様であるから、TG・DTA曲線と電子顕微鏡図は省略する。
次に、本発明により生成された複合銀ナノ粒子を用いて複合銀ナノペーストを作成した。C1~C12のCnAgALの夫々から次の3種類のペーストを作成した。(1)CnAgAL+粘性付与剤、(2)CnAgAL+溶剤+粘性付与剤、(3)CnAgAL+銀粒子+溶剤+粘性付与剤。CnAgALの少なくとも一つは実施例1~12に示された金属化温度T3を有し、CnAgALの残りは金属化温度T3が前記実施例の金属化温度T3とやや異なるものが用いられている。しかし、金属化温度T3は全て150℃以下のものが選択されている。銀粒子の粒径は0.4μmと1.0μmの2種類が使用された。溶剤は、メタノール、エタノール、ブタノール、キシレン、トルエン、ヘキサンから選択された。粘性付与剤は、テレピンオイル、ターピネオール、テルピン誘導体(1,8-テルピンモノアセテートと1,8-テルピンジアセテートの混合物)、メチルセルロースから選択された。メチルセルロースは粉体であり、必ず溶剤と併用される。銀粒子の粒径、溶剤の種類、粘性付与剤の種類、各成分のmass%及び大気中ペースト焼成温度は表12及び表13に記載された通りである。C1~C12のCnAgALの金属化温度T3(℃)と実際の大気中ペースト焼成温度(℃)が表12及び表13に記載されている。
半導体チップを上体とし、回路基板を下体として接合試験を行った。半導体チップの電極端を回路基板のスルーホールに挿入し、両者間の接触部に実施例011~実施例123の複合銀ナノペーストを塗着して、36種のペースト試験体を得た。その後、前記塗着部を表12及び表13に記載のペースト焼成温度で局所的に加熱して、前記塗着部を金属化させ、接合を完了した。冷却した後、光学顕微鏡により、前記接合部の外観を検査したところ、36種の試験体で問題はなかった。電気導通試験と電気抵抗測定を行なったが、代替半田として有効に機能していることが確認された。前記36種類の接合試験から、本発明に係る複合銀ナノペーストは代替半田として工業的に利用できることが分かった。
耐熱ガラス基板を基体とし、この基体上に実施例011~実施例123の複合銀ナノペーストをスクリーン印刷して、所定パターンのペーストパターンを形成した36種類の試験体を得た。その後、前記試験体を電気炉により表12及び表13に記載の大気中ペースト焼成温度で加熱して、前記ペーストパターンから銀パターンを形成した。冷却した後、光学顕微鏡により、前記銀パターンの表面を検査したところ、36種の試験体で問題はなかった。前記36種類のパターン形成試験から、本発明に係る複合銀ナノペーストは銀パターン形成用材料として工業的に利用できることが分かった。
前述したように、第1実施形態のCnAgAL(n=1~12)に対して熱解析を行なって、表10、図29及び図30の特性温度の一覧を得た。この点を更に検討するため、本発明者は別の複合銀ナノ粒子CnAgAL(n=1~12)に対して、第2実施形態として、特性温度の一覧を得る実験を行なった。
Claims (31)
- 銀原子の集合体からなる平均粒径が1~20nmの範囲にある銀核の周囲に、炭素数が1~12のアルコール分子誘導体、アルコール分子残基、又はアルコール分子の一種以上からなる有機被覆層を形成したことを特徴とする複合銀ナノ粒子。
- 前記複合銀ナノ粒子が複数個凝集して凝集体を形成した請求項1に記載の複合銀ナノ粒子。
- 前記有機被覆層がアルコキシド基及び/又はカルボン酸基を少なくとも含有する請求項1又は2に記載の複合銀ナノ粒子。
- 前記複合銀ナノ粒子を昇温速度VT=1℃/minで大気中熱分析した場合に、示差熱分析(DTA)から得られる金属化温度T3(℃)が200℃以下である請求項1、2又は3に記載の複合銀ナノ粒子。
- 前記複合銀ナノ粒子を昇温速度VT=1(℃/min)で大気中熱分析した場合に、熱重量測定(TG)から得られる分解開始温度T1(℃)と示差熱分析(DTA)から得られる分解温度T2(℃)の関係が、T2-100≦T1≦T2である請求項1~4のいずれかに記載の複合銀ナノ粒子。
- 前記複合銀ナノ粒子を生成する生成温度PT(℃)が前記金属化温度T3(℃)より小さい請求項4又は5に記載の複合銀ナノ粒子。
- 前記複合銀ナノ粒子を高分解能透過型電子顕微鏡で観察した場合に、前記銀核に格子像が観察される請求項1~6のいずれかに記載の複合銀ナノ粒子。
- 前記分解開始温度T1(℃)、前記分解温度T2(℃)及び前記金属化温度T3(℃)が前記昇温速度VTの増加に従って増加する請求項4~7のいずれかに記載の複合銀ナノ粒子。
- 銀塩と炭素数1~12のアルコールを出発原料とする請求項1~8のいずれかに記載の複合銀ナノ粒子。
- 請求項1~9のいずれかに記載の複合銀ナノ粒子を少なくとも含有し、溶剤及び/又は粘性付与剤を添加したことを特徴とする複合銀ナノペースト。
- 銀微粒子を配合した請求項10に記載の複合銀ナノペースト。
- 前記複合銀ナノペーストを昇温速度VT(℃/min)で大気中熱分析した場合に、熱重量測定(TG)及び示差熱分析(DTA)から得られるペースト分解開始温度Tp1(℃)、ペースト分解温度Tp2(℃)及びペースト金属化温度Tp3(℃)が前記昇温速度VTの増加に従って増加する請求項10又は11に記載の複合銀ナノペースト。
- 前記複合銀ナノ粒子及び前記複合銀ナノペーストを昇温速度VT=1~20(℃/min)で大気中熱分析した場合に、夫々の金属化温度をT3(℃)及びTp3(℃)としたとき、T3≦Tp3≦T3+50が成立する請求項10、11又は12に記載の複合銀ナノペースト。
- 銀塩微粒子を炭素数1~12のアルコール溶媒中に混合してアルコール溶液を調製し、前記アルコール溶液を反応室中で所定の生成温度PTで所定の生成時間だけ加熱して、前記アルコール溶媒により前記銀塩微粒子を還元して平均粒径が1~20nmの銀核を形成し、この銀核の周囲に前記アルコール溶媒のアルコール分子誘導体、アルコール分子残基、又はアルコール分子の一種以上からなる有機被覆層を形成することを特徴とする複合銀ナノ粒子の製法。
- 前記銀塩微粒子が前記アルコール溶媒に分散又は溶解している請求項14に記載の複合銀ナノ粒子の製法。
- 前記アルコール溶液は、前記アルコール溶媒が前記銀塩微粒子のモル数よりも過剰に添加された過剰アルコール溶液である請求項14又は15に記載の複合銀ナノ粒子の製法。
- 前記複合銀ナノ粒子を昇温速度VT=1(℃/min)で大気中熱分析したとき、示差熱分析(DTA)から得られる金属化温度T3(℃)が200℃以下である請求項14、15又は16に記載の複合銀ナノ粒子の製法。
- 前記生成温度PT(℃)が前記金属化温度T3(℃)より小さい請求項17に記載の複合銀ナノ粒子の製法。
- 前記複合銀ナノ粒子の前記生成時間は60分以内である請求項14~18のいずれかに記載の複合銀ナノ粒子の製法。
- 前記生成時間後に前記アルコール溶液を冷却して生成反応を停止させる請求項14~19のいずれかに記載の複合銀ナノ粒子の製法。
- 前記銀塩微粒子は粒径が10nm~1000nmの範囲になるまで微細化処理される請求項14~20のいずれかに記載の複合銀ナノ粒子の製法。
- 前記過剰アルコール溶液における前記アルコール溶媒の銀塩微粒子に対するモル比は5~100の範囲に調整される請求項16~21のいずれかに記載の複合銀ナノ粒子の製法。
- 前記複合銀ナノ粒子が生成された前記アルコール溶液から前記複合銀ナノ粒子を分離する請求項14~22のいずれかに記載の複合銀ナノ粒子の製法。
- 銀塩微粒子をアルコール溶媒に混合してアルコール溶液を調製する原料混合器と、前記アルコール溶液を加熱器により所定温度で所定時間だけ加熱して複合銀ナノ粒子を生成する反応器と、前記反応器から供給される前記アルコール溶液を冷却する冷却器とを有し、前記冷却器から供給されるアルコール溶液から複合銀ナノ粒子を分離する成分精製器を付設することができ、前記原料混合器と前記反応器と前記冷却器と成分精製器が連続式、一部連続式又はバッチ式に接続されることを特徴とする複合銀ナノ粒子の製造装置。
- 前記原料混合器に投入される銀塩微粒子は事前に微細化処理されている請求項24に記載の複合銀ナノ粒子の製造装置。
- 前記原料混合器から供給されるアルコール溶液中の銀塩微粒子を微細化する微細化器と、前記微細化器により形成された微細化アルコール溶液を前記反応器に供給する請求項24に記載の複合銀ナノ粒子の製造装置。
- 前記成分精製器から供給される前記複合銀ナノ粒子を含有する精製液を処理して、前記複合銀ナノ粒子をアルコール湿式状態又は粉体として回収する請求項24~26のいずれかに記載の複合銀ナノ粒子の製造装置。
- 前記成分精製器は遠心限外濾過装置から構成され、微細孔を介して前記複合銀ナノ粒子を抽出溶媒中に拡散させて前記精製液を形成する請求項24~27のいずれかに記載の複合銀ナノ粒子の製造装置。
- 前記限外濾過装置は内管、中管、外管の三重管からなり、前記内管及び中管を同軸回転させ、前記複合銀ナノ粒子を生成した過剰アルコール溶液は前記内管と中管の間の中通路に供給され、前記微細孔は前記内管の表面に形成され、前記内管内部の内通路に前記抽出溶媒を供給し、前記複合銀ナノ粒子は前記中通路から前記微細孔を介して前記抽出溶媒中に選択的に拡散される請求項28に記載の複合銀ナノ粒子の製造装置。
- 請求項10~13のいずれかに記載の複合銀ナノペーストを用意し、前記複合銀ナノペーストを下体に塗着してペースト層を形成し、前記ペースト層上に上体を配置し、加熱により前記ペースト層を銀化して前記下体と前記上体を接合することを特徴とする接合方法。
- 請求項10~13のいずれかに記載の複合銀ナノペーストを用意し、前記複合銀ナノペーストを基体の面上に所定パターンに塗着してペーストパターンを形成し、加熱により前記ペーストパターンを銀化して銀パターンを形成することを特徴とするパターン形成方法。
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PCT/JP2008/054971 WO2009116136A1 (ja) | 2008-03-18 | 2008-03-18 | 複合銀ナノペースト、その製法及びナノペースト接合方法 |
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US13/707,298 Division US8459529B2 (en) | 2008-01-17 | 2012-12-06 | Production method of composite silver nanoparticle |
US13/707,384 Division US8906317B2 (en) | 2008-01-17 | 2012-12-06 | Production apparatus of composite silver nanoparticle |
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CN101990474A (zh) | 2011-03-23 |
JPWO2009090846A1 (ja) | 2011-05-26 |
US8906317B2 (en) | 2014-12-09 |
WO2009090767A1 (ja) | 2009-07-23 |
US20130098205A1 (en) | 2013-04-25 |
EP2298471A1 (en) | 2011-03-23 |
US8348134B2 (en) | 2013-01-08 |
EP2298471A4 (en) | 2013-07-24 |
KR20100113566A (ko) | 2010-10-21 |
CN101990474B (zh) | 2013-09-04 |
WO2009090748A1 (ja) | 2009-07-23 |
US8459529B2 (en) | 2013-06-11 |
KR101222304B1 (ko) | 2013-01-15 |
US20110042447A1 (en) | 2011-02-24 |
US20130164187A1 (en) | 2013-06-27 |
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JP4680313B2 (ja) | 2011-05-11 |
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