WO2009031285A1 - 慣性力センサ - Google Patents
慣性力センサ Download PDFInfo
- Publication number
- WO2009031285A1 WO2009031285A1 PCT/JP2008/002359 JP2008002359W WO2009031285A1 WO 2009031285 A1 WO2009031285 A1 WO 2009031285A1 JP 2008002359 W JP2008002359 W JP 2008002359W WO 2009031285 A1 WO2009031285 A1 WO 2009031285A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- section
- angular velocity
- detecting element
- velocity detecting
- force sensor
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0058—Packages or encapsulation for protecting against damages due to external chemical or mechanical influences, e.g. shocks or vibrations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/003—Details of instruments used for damping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00222—Integrating an electronic processing unit with a micromechanical structure
- B81C1/0023—Packaging together an electronic processing unit die and a micromechanical structure die
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/025—Inertial sensors not provided for in B81B2201/0235 - B81B2201/0242
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Computer Hardware Design (AREA)
- Gyroscopes (AREA)
Abstract
振動型の角速度検出素子(32)と、この角速度検出素子(32)から出力される出力信号を処理するIC(34)と、信号処理用のコンデンサ(36)と、これら角速度検出素子(32)およびIC(34)およびコンデンサ(36)を収納するパッケージ(38)とを備え、この角速度検出素子(32)およびIC(34)は防振部を介してパッケージ(38)に収納されるとともに、この防振部は、角速度検出素子(32)を積層したIC(34)が載置された載置部(40)と、載置部(40)の外方に分離して配置されるとともに配線パターン(42)を介して載置部(40)と接続された外方部(44)とを有するTABテープ(46)からなる慣性力センサを提供する。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200880105337A CN101796374A (zh) | 2007-09-03 | 2008-08-29 | 惯性力传感器 |
US12/673,870 US8646332B2 (en) | 2007-09-03 | 2008-08-29 | Inertia force sensor |
EP08790513A EP2187168A4 (en) | 2007-09-03 | 2008-08-29 | INERTIA FORCE SENSOR |
US14/027,783 US8826734B2 (en) | 2007-09-03 | 2013-09-16 | Inertial force sensor |
US14/459,097 US9778279B2 (en) | 2007-09-03 | 2014-08-13 | Inertial force sensor |
US15/680,604 US20170343572A1 (en) | 2007-09-03 | 2017-08-18 | Inertial force sensor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007227742 | 2007-09-03 | ||
JP2007-227742 | 2007-09-03 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/673,870 A-371-Of-International US8646332B2 (en) | 2007-09-03 | 2008-08-29 | Inertia force sensor |
US14/027,783 Continuation US8826734B2 (en) | 2007-09-03 | 2013-09-16 | Inertial force sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009031285A1 true WO2009031285A1 (ja) | 2009-03-12 |
Family
ID=40428609
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/002359 WO2009031285A1 (ja) | 2007-09-03 | 2008-08-29 | 慣性力センサ |
Country Status (5)
Country | Link |
---|---|
US (4) | US8646332B2 (ja) |
EP (1) | EP2187168A4 (ja) |
JP (2) | JP5434017B2 (ja) |
CN (1) | CN101796374A (ja) |
WO (1) | WO2009031285A1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010112676A1 (en) * | 2009-03-30 | 2010-10-07 | Valtion Teknillinen Tutkimuskeskus | A casing of a sensor measuring oscillations, and a sensor for measuring oscillations |
JP2011179822A (ja) * | 2010-02-26 | 2011-09-15 | Hitachi Automotive Systems Ltd | 物理量センサ |
EP2876411A1 (en) * | 2010-02-18 | 2015-05-27 | Panasonic Corporation | Angular speed sensor and composite sensor for detecting angular speed |
US20150192602A1 (en) * | 2011-09-30 | 2015-07-09 | Panasonic Intellectual Property Management Co., Ltd. | Inertial force sensor |
WO2015190105A1 (ja) * | 2014-06-12 | 2015-12-17 | 株式会社デンソー | 物理量センサ |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009031285A1 (ja) * | 2007-09-03 | 2009-03-12 | Panasonic Corporation | 慣性力センサ |
JP2012063243A (ja) * | 2010-09-16 | 2012-03-29 | Panasonic Corp | 角速度および加速度検出用複合センサ |
JP5810500B2 (ja) * | 2010-09-30 | 2015-11-11 | セイコーエプソン株式会社 | センサーデバイス、モーションセンサー、電子機器 |
US9227835B2 (en) * | 2010-11-23 | 2016-01-05 | Honeywell International Inc. | Vibration isolation interposer die |
JP2013044524A (ja) * | 2011-08-21 | 2013-03-04 | Denso Corp | 角速度センサ装置 |
CN102980584B (zh) | 2011-09-02 | 2017-12-19 | 深圳市大疆创新科技有限公司 | 一种无人飞行器惯性测量模块 |
JP6191151B2 (ja) | 2012-05-29 | 2017-09-06 | 株式会社デンソー | 物理量センサ |
JP6179074B2 (ja) * | 2012-06-13 | 2017-08-16 | セイコーエプソン株式会社 | モジュールおよび電子機器 |
JPWO2014002416A1 (ja) * | 2012-06-25 | 2016-05-30 | パナソニックIpマネジメント株式会社 | 歪センサ |
JP6016228B2 (ja) * | 2012-07-03 | 2016-10-26 | ソニーセミコンダクタソリューションズ株式会社 | センサデバイス |
JP6119518B2 (ja) | 2013-02-12 | 2017-04-26 | ソニー株式会社 | センサ装置、入力装置及び電子機器 |
US10055067B2 (en) | 2013-03-18 | 2018-08-21 | Sony Corporation | Sensor device, input device, and electronic apparatus |
JP6142745B2 (ja) | 2013-09-10 | 2017-06-07 | ソニー株式会社 | センサ装置、入力装置及び電子機器 |
DE102013222966A1 (de) * | 2013-11-12 | 2015-05-28 | Robert Bosch Gmbh | Inertialsensor |
JP2015190859A (ja) | 2014-03-28 | 2015-11-02 | ソニー株式会社 | センサ装置、入力装置及び電子機器 |
JP6409351B2 (ja) * | 2014-06-12 | 2018-10-24 | 株式会社デンソー | 物理量センサ |
JP6256215B2 (ja) * | 2014-06-13 | 2018-01-10 | 株式会社デンソー | 角速度センサ |
DE102014213217A1 (de) * | 2014-07-08 | 2016-01-14 | Continental Teves Ag & Co. Ohg | Körperschallentkopplung an mit Geberfeldern arbeitenden Sensoren |
CN106662446B (zh) | 2014-07-16 | 2019-10-25 | 精工爱普生株式会社 | 传感器单元、电子设备以及移动体 |
JP6464749B2 (ja) * | 2015-01-06 | 2019-02-06 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
JP6372361B2 (ja) * | 2015-01-16 | 2018-08-15 | 株式会社デンソー | 複合センサ |
WO2016161562A1 (en) | 2015-04-07 | 2016-10-13 | SZ DJI Technology Co., Ltd. | System and method for providing a simple and reliable inertia measurement unit (imu) |
JP6572603B2 (ja) | 2015-04-13 | 2019-09-11 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
JP6512006B2 (ja) | 2015-07-14 | 2019-05-15 | 株式会社デンソー | センサ装置 |
JP6641878B2 (ja) | 2015-10-21 | 2020-02-05 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
JP2019128304A (ja) * | 2018-01-26 | 2019-08-01 | セイコーエプソン株式会社 | 物理量センサー、慣性計測ユニット、電子機器、携帯型電子機器、および移動体 |
JP2020139879A (ja) * | 2019-02-28 | 2020-09-03 | セイコーエプソン株式会社 | 慣性センサー、電子機器および移動体 |
JP7331498B2 (ja) * | 2019-06-27 | 2023-08-23 | セイコーエプソン株式会社 | 慣性センサー、電子機器および移動体 |
JP7310598B2 (ja) * | 2019-12-25 | 2023-07-19 | 株式会社デンソー | 電子装置 |
KR20210089292A (ko) * | 2020-01-07 | 2021-07-16 | 삼성전자주식회사 | 음성 인식 시스템 및 이를 이용한 디스플레이 장치 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001004379A (ja) * | 1999-06-23 | 2001-01-12 | Denso Corp | 慣性センサの感度調整方法 |
JP2002071353A (ja) * | 2000-09-01 | 2002-03-08 | Ngk Insulators Ltd | 角速度測定装置 |
WO2003046479A1 (en) | 2001-11-29 | 2003-06-05 | Matsushita Electric Industrial Co., Ltd. | Angular velocity sensor |
JP2004028913A (ja) * | 2002-06-27 | 2004-01-29 | Matsushita Electric Works Ltd | センサ及びその製造方法 |
JP2004271479A (ja) * | 2003-03-12 | 2004-09-30 | Citizen Watch Co Ltd | 角速度センサ |
JP2006194681A (ja) * | 2005-01-12 | 2006-07-27 | Denso Corp | 角速度センサ装置 |
JP2007064753A (ja) * | 2005-08-30 | 2007-03-15 | Denso Corp | 角速度センサの取付構造 |
Family Cites Families (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6007668A (en) * | 1992-08-08 | 1999-12-28 | Shinko Electric Industries Co., Ltd. | Tab tape and method for producing same |
DE69432396T2 (de) * | 1993-12-27 | 2004-03-04 | Hitachi, Ltd. | Beschleunigungsmessaufnehmer |
JPH08316354A (ja) * | 1995-05-12 | 1996-11-29 | Mitsubishi Electric Corp | 半導体式センサ |
US6400044B1 (en) | 1998-11-24 | 2002-06-04 | Continental Teves Ag & Co., Ohg | Protective arrangement for electronic functional units and/or functional groups |
JP4654480B2 (ja) * | 2000-03-17 | 2011-03-23 | パナソニック株式会社 | 角速度センサ |
JP2002005951A (ja) * | 2000-06-26 | 2002-01-09 | Denso Corp | 半導体力学量センサ及びその製造方法 |
JP2002181550A (ja) * | 2000-10-02 | 2002-06-26 | Ngk Insulators Ltd | 角速度測定装置 |
JP4701505B2 (ja) * | 2001-01-29 | 2011-06-15 | パナソニック株式会社 | 慣性トランスデューサ |
JP2003004450A (ja) * | 2001-06-25 | 2003-01-08 | Matsushita Electric Ind Co Ltd | 角速度および加速度検出用複合センサ |
US6880399B1 (en) * | 2001-11-29 | 2005-04-19 | Matsushita Electric Industrial Co., Ltd. | Angular velocity sensor |
JP2003270264A (ja) * | 2002-03-20 | 2003-09-25 | Denso Corp | 半導体式力学量センサ |
JP2004186422A (ja) | 2002-12-03 | 2004-07-02 | Shinko Electric Ind Co Ltd | 電子部品実装構造及びその製造方法 |
JP3986989B2 (ja) * | 2003-03-27 | 2007-10-03 | 松下電器産業株式会社 | 半導体装置 |
US20040226373A1 (en) * | 2003-05-12 | 2004-11-18 | Hitachi Metals, Ltd. | Acceleration sensor device |
JP2005106584A (ja) | 2003-09-30 | 2005-04-21 | Mitsubishi Electric Corp | 加速度センサユニット |
JP2005224824A (ja) * | 2004-02-10 | 2005-08-25 | Fujitsu Media Device Kk | センサステム及びこれを用いたセンサ装置並びにセンサ装置の製造方法 |
JP2005227089A (ja) * | 2004-02-12 | 2005-08-25 | Denso Corp | 力学量センサ装置 |
JP4449504B2 (ja) * | 2004-03-15 | 2010-04-14 | パナソニック株式会社 | 角速度センサ |
JP2005331258A (ja) * | 2004-05-18 | 2005-12-02 | Denso Corp | 振動型角速度センサ |
JP2006017524A (ja) * | 2004-06-30 | 2006-01-19 | Denso Corp | 角速度センサ |
JP4442339B2 (ja) * | 2004-07-08 | 2010-03-31 | 株式会社デンソー | 角速度検出装置 |
US7640807B2 (en) * | 2004-07-21 | 2010-01-05 | Hokuriku Electric Industry Co., Ltd. | Semiconductor Sensor |
JP4206984B2 (ja) * | 2004-07-29 | 2009-01-14 | 株式会社デンソー | 角速度検出装置 |
US7181968B2 (en) * | 2004-08-25 | 2007-02-27 | Autoliv Asp, Inc. | Configurable accelerometer assembly |
JP4831949B2 (ja) | 2004-09-08 | 2011-12-07 | 株式会社デンソー | 物理量センサ装置 |
JP2006220453A (ja) * | 2005-02-08 | 2006-08-24 | Denso Corp | 加速度センサ装置 |
US7845226B2 (en) | 2005-06-09 | 2010-12-07 | Panasonic Corporation | Composite sensor |
JP2007040766A (ja) | 2005-08-01 | 2007-02-15 | Toyota Motor Corp | センサユニット |
US20100328832A1 (en) | 2005-08-04 | 2010-12-30 | Takashi Hasunuma | Electrical Composite Element |
US7571647B2 (en) * | 2005-08-30 | 2009-08-11 | Oki Semiconductor Co., Ltd. | Package structure for an acceleration sensor |
JP4568202B2 (ja) * | 2005-09-29 | 2010-10-27 | Okiセミコンダクタ株式会社 | 半導体装置 |
US7467552B2 (en) * | 2005-11-10 | 2008-12-23 | Honeywell International Inc. | Miniature package for translation of sensor sense axis |
TW200813431A (en) * | 2006-08-09 | 2008-03-16 | Hitachi Metals Ltd | Multi-range three-axis acceleration sensor device |
JP2008101980A (ja) * | 2006-10-18 | 2008-05-01 | Denso Corp | 容量式半導体センサ装置 |
WO2009031285A1 (ja) * | 2007-09-03 | 2009-03-12 | Panasonic Corporation | 慣性力センサ |
JP4752952B2 (ja) * | 2009-06-03 | 2011-08-17 | 株式会社デンソー | 力学量センサ、及び該力学量センサの製造方法 |
-
2008
- 2008-08-29 WO PCT/JP2008/002359 patent/WO2009031285A1/ja active Application Filing
- 2008-08-29 US US12/673,870 patent/US8646332B2/en not_active Expired - Fee Related
- 2008-08-29 EP EP08790513A patent/EP2187168A4/en not_active Withdrawn
- 2008-08-29 CN CN200880105337A patent/CN101796374A/zh active Pending
- 2008-09-03 JP JP2008225523A patent/JP5434017B2/ja not_active Expired - Fee Related
-
2012
- 2012-12-28 JP JP2012287085A patent/JP5617912B2/ja not_active Expired - Fee Related
-
2013
- 2013-09-16 US US14/027,783 patent/US8826734B2/en active Active
-
2014
- 2014-08-13 US US14/459,097 patent/US9778279B2/en not_active Expired - Fee Related
-
2017
- 2017-08-18 US US15/680,604 patent/US20170343572A1/en not_active Abandoned
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001004379A (ja) * | 1999-06-23 | 2001-01-12 | Denso Corp | 慣性センサの感度調整方法 |
JP2002071353A (ja) * | 2000-09-01 | 2002-03-08 | Ngk Insulators Ltd | 角速度測定装置 |
WO2003046479A1 (en) | 2001-11-29 | 2003-06-05 | Matsushita Electric Industrial Co., Ltd. | Angular velocity sensor |
JP2004028913A (ja) * | 2002-06-27 | 2004-01-29 | Matsushita Electric Works Ltd | センサ及びその製造方法 |
JP2004271479A (ja) * | 2003-03-12 | 2004-09-30 | Citizen Watch Co Ltd | 角速度センサ |
JP2006194681A (ja) * | 2005-01-12 | 2006-07-27 | Denso Corp | 角速度センサ装置 |
JP2007064753A (ja) * | 2005-08-30 | 2007-03-15 | Denso Corp | 角速度センサの取付構造 |
Non-Patent Citations (1)
Title |
---|
See also references of EP2187168A4 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010112676A1 (en) * | 2009-03-30 | 2010-10-07 | Valtion Teknillinen Tutkimuskeskus | A casing of a sensor measuring oscillations, and a sensor for measuring oscillations |
EP2876411A1 (en) * | 2010-02-18 | 2015-05-27 | Panasonic Corporation | Angular speed sensor and composite sensor for detecting angular speed |
US9091543B2 (en) | 2010-02-18 | 2015-07-28 | Panasonic Intellectual Property Management Co., Ltd. | Angular speed sensor for detecting angular speed |
US9448068B2 (en) | 2010-02-18 | 2016-09-20 | Panasonic Intellectual Property Management Co., Ltd. | Angular velocity sensor |
JP2011179822A (ja) * | 2010-02-26 | 2011-09-15 | Hitachi Automotive Systems Ltd | 物理量センサ |
US20150192602A1 (en) * | 2011-09-30 | 2015-07-09 | Panasonic Intellectual Property Management Co., Ltd. | Inertial force sensor |
WO2015190105A1 (ja) * | 2014-06-12 | 2015-12-17 | 株式会社デンソー | 物理量センサ |
JP2016001156A (ja) * | 2014-06-12 | 2016-01-07 | 株式会社デンソー | 物理量センサ |
Also Published As
Publication number | Publication date |
---|---|
JP5434017B2 (ja) | 2014-03-05 |
US8646332B2 (en) | 2014-02-11 |
US20170343572A1 (en) | 2017-11-30 |
US20140020466A1 (en) | 2014-01-23 |
US20110036167A1 (en) | 2011-02-17 |
US9778279B2 (en) | 2017-10-03 |
EP2187168A1 (en) | 2010-05-19 |
EP2187168A4 (en) | 2013-04-03 |
US20140352430A1 (en) | 2014-12-04 |
JP2013101132A (ja) | 2013-05-23 |
CN101796374A (zh) | 2010-08-04 |
US8826734B2 (en) | 2014-09-09 |
JP5617912B2 (ja) | 2014-11-05 |
JP2009080107A (ja) | 2009-04-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2009031285A1 (ja) | 慣性力センサ | |
WO2009009803A3 (en) | Integrated motion processing unit (mpu) with mems inertial sensing and embedded digital electronics | |
WO2004080133A3 (en) | Integrated sensor and electronics package | |
WO2009037751A1 (ja) | 複合センサおよび加速度センサ | |
WO2007123933A3 (en) | Vibrating inertial rate sensor utilizing split or skewed operational elements | |
EP1604870A3 (en) | Hybrid impact sensor | |
DE602005013860D1 (de) | Omnidirektionaler Crashsensor | |
WO2007095461A3 (en) | Surface acoustic wave packages and methods of forming same | |
EP1464615A3 (en) | Method for protecting encapsulated sensor structures using stack packaging | |
EP1113272A3 (en) | Acceleration sensor, acceleration sensor device, and method of fabricating an acceleration sensor | |
WO2007024857A3 (en) | Torque sensor packaging systems and methods | |
WO2008007118A3 (en) | Transducer | |
MY153013A (en) | Method for manufacturing a microelectromechanical component, and a microelectromechanical component | |
CA2518764A1 (en) | Dynamical instrument for machining | |
WO2007076276A3 (en) | System and method for providing temperature data from a memory device having a temperature sensor | |
GB0426929D0 (en) | Image sensor module and camera module package including the same | |
WO2010045107A3 (en) | Microphone having multiple transducer elements | |
WO2008124866A8 (en) | Sensing device having capacitive force sensor | |
WO2010048102A3 (en) | Integrated sensor including sensing and processing die mounted on opposite sides of package substrate | |
TW200644417A (en) | Low-voltage MEMS oscillator | |
WO2006085935A3 (en) | Ballistic impact detection system | |
EP1744453A4 (en) | SURFACE ACOUSTIC WAVE DEVICE | |
WO2006089171A3 (en) | Stacked ball grid array package module utilizing one or more interposer layers | |
WO2009047887A1 (ja) | 角速度および加速度検出用複合センサ | |
ATE390326T1 (de) | Einen beschleunigungssensor umfassendes steuergerät |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200880105337.1 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 08790513 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 12673870 Country of ref document: US |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2008790513 Country of ref document: EP |
|
NENP | Non-entry into the national phase |
Ref country code: DE |